ATE374952T1 - Memsstromsensor mit magnetisch-zu-mechanischer umwandlung und bezugsbestandteilen - Google Patents

Memsstromsensor mit magnetisch-zu-mechanischer umwandlung und bezugsbestandteilen

Info

Publication number
ATE374952T1
ATE374952T1 AT05253492T AT05253492T ATE374952T1 AT E374952 T1 ATE374952 T1 AT E374952T1 AT 05253492 T AT05253492 T AT 05253492T AT 05253492 T AT05253492 T AT 05253492T AT E374952 T1 ATE374952 T1 AT E374952T1
Authority
AT
Austria
Prior art keywords
magnetic field
mems
current
conductor
sensing
Prior art date
Application number
AT05253492T
Other languages
English (en)
Inventor
Ertugrul Berkcan
Christopher James Kapusta
Glenn Scott Claydon
Anis Zribi
Laura Jean Meyer
Wei-Cheng Tian
Original Assignee
Gen Electric
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Gen Electric filed Critical Gen Electric
Application granted granted Critical
Publication of ATE374952T1 publication Critical patent/ATE374952T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/028—Electrodynamic magnetometers
    • G01R33/0283—Electrodynamic magnetometers in which a current or voltage is generated due to relative movement of conductor and magnetic field
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R15/00—Details of measuring arrangements of the types provided for in groups G01R17/00 - G01R29/00, G01R33/00 - G01R33/26 or G01R35/00
    • G01R15/14—Adaptations providing voltage or current isolation, e.g. for high-voltage or high-current networks
    • G01R15/146—Measuring arrangements for current not covered by other subgroups of G01R15/14, e.g. using current dividers, shunts, or measuring a voltage drop
    • G01R15/148—Measuring arrangements for current not covered by other subgroups of G01R15/14, e.g. using current dividers, shunts, or measuring a voltage drop involving the measuring of a magnetic field or electric field
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/028—Electrodynamic magnetometers
    • G01R33/0286—Electrodynamic magnetometers comprising microelectromechanical systems [MEMS]

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Micromachines (AREA)
  • Measuring Magnetic Variables (AREA)
  • Measuring Instrument Details And Bridges, And Automatic Balancing Devices (AREA)
  • Measuring Fluid Pressure (AREA)
AT05253492T 2004-06-07 2005-06-07 Memsstromsensor mit magnetisch-zu-mechanischer umwandlung und bezugsbestandteilen ATE374952T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US10/863,442 US7112951B2 (en) 2004-06-07 2004-06-07 MEMS based current sensor using magnetic-to-mechanical conversion and reference components

Publications (1)

Publication Number Publication Date
ATE374952T1 true ATE374952T1 (de) 2007-10-15

Family

ID=34941597

Family Applications (1)

Application Number Title Priority Date Filing Date
AT05253492T ATE374952T1 (de) 2004-06-07 2005-06-07 Memsstromsensor mit magnetisch-zu-mechanischer umwandlung und bezugsbestandteilen

Country Status (4)

Country Link
US (5) US7112951B2 (de)
EP (1) EP1610142B1 (de)
AT (1) ATE374952T1 (de)
DE (1) DE602005002683T2 (de)

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Also Published As

Publication number Publication date
DE602005002683D1 (de) 2007-11-15
US7112951B2 (en) 2006-09-26
US20070052410A1 (en) 2007-03-08
EP1610142A1 (de) 2005-12-28
US7495430B2 (en) 2009-02-24
US20070040547A1 (en) 2007-02-22
US20080070338A1 (en) 2008-03-20
EP1610142B1 (de) 2007-10-03
US20050270013A1 (en) 2005-12-08
DE602005002683T2 (de) 2008-07-17
US20050270014A1 (en) 2005-12-08
US7315161B2 (en) 2008-01-01
US7901970B2 (en) 2011-03-08
US7466121B2 (en) 2008-12-16

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