ATE374937T1 - Kragträgersensor sowohl mit longitudinal- als auchtransversal-piezoresistenzkoeffizienten - Google Patents

Kragträgersensor sowohl mit longitudinal- als auchtransversal-piezoresistenzkoeffizienten

Info

Publication number
ATE374937T1
ATE374937T1 AT03779768T AT03779768T ATE374937T1 AT E374937 T1 ATE374937 T1 AT E374937T1 AT 03779768 T AT03779768 T AT 03779768T AT 03779768 T AT03779768 T AT 03779768T AT E374937 T1 ATE374937 T1 AT E374937T1
Authority
AT
Austria
Prior art keywords
sup
sub
piezoresistive
longitudinal
coefficients
Prior art date
Application number
AT03779768T
Other languages
English (en)
Inventor
Jacob Thaysen
Original Assignee
Nanonord As
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nanonord As filed Critical Nanonord As
Application granted granted Critical
Publication of ATE374937T1 publication Critical patent/ATE374937T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02—Analysing fluids
    • G01N29/036—Analysing fluids by measuring frequency or resonance of acoustic waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/025—Change of phase or condition
    • G01N2291/0256—Adsorption, desorption, surface mass change, e.g. on biosensors

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Pressure Sensors (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Measuring Fluid Pressure (AREA)
  • Measuring Instrument Details And Bridges, And Automatic Balancing Devices (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
AT03779768T 2002-12-27 2003-12-20 Kragträgersensor sowohl mit longitudinal- als auchtransversal-piezoresistenzkoeffizienten ATE374937T1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DKPA200202016 2002-12-27
DKPA200300068 2003-01-21
US44467603P 2003-02-04 2003-02-04

Publications (1)

Publication Number Publication Date
ATE374937T1 true ATE374937T1 (de) 2007-10-15

Family

ID=32685695

Family Applications (1)

Application Number Title Priority Date Filing Date
AT03779768T ATE374937T1 (de) 2002-12-27 2003-12-20 Kragträgersensor sowohl mit longitudinal- als auchtransversal-piezoresistenzkoeffizienten

Country Status (7)

Country Link
US (1) US7284452B2 (de)
EP (1) EP1588153B1 (de)
JP (1) JP2006512589A (de)
AT (1) ATE374937T1 (de)
AU (1) AU2003287928A1 (de)
DE (1) DE60316729T2 (de)
WO (1) WO2004059306A1 (de)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7260980B2 (en) 2003-03-11 2007-08-28 Adams Jesse D Liquid cell and passivated probe for atomic force microscopy and chemical sensing
US20060257286A1 (en) 2003-10-17 2006-11-16 Adams Jesse D Self-sensing array of microcantilevers for chemical detection
GB0328054D0 (en) 2003-12-04 2004-01-07 Council Cent Lab Res Councils Fluid probe
US7207206B2 (en) 2004-02-19 2007-04-24 Ut-Battelle, Llc Chemically-functionalized microcantilevers for detection of chemical, biological and explosive material
US20060057026A1 (en) 2004-09-14 2006-03-16 Boiadjiev Vassil I Gold thiolate and photochemically functionalized microcantilevers using molecular recognition agents
US7694346B2 (en) 2004-10-01 2010-04-06 Board Of Regents Of The Nevada System Of Higher Education On Behalf Of The University Of Nevada Cantilevered probe detector with piezoelectric element
GB2432907A (en) * 2005-12-05 2007-06-06 Univ Basel Device for detecting the characteristics of organic molecules
GB0605273D0 (en) 2006-03-16 2006-04-26 Council Cent Lab Res Councils Fluid robe
US7709264B2 (en) * 2006-09-21 2010-05-04 Philip Morris Usa Inc. Handheld microcantilever-based sensor for detecting tobacco-specific nitrosamines
GB0716202D0 (en) 2007-08-11 2007-09-26 Microvisk Ltd Improved fluid probe
WO2009143373A1 (en) 2008-05-21 2009-11-26 Triton Systems, Inc. Detection of peroxide radicals and reaction initiators
CN102112848B (zh) * 2008-08-01 2016-08-10 Nxp股份有限公司 通过ic中感应的应力感测环境参数
US9506822B2 (en) * 2012-04-17 2016-11-29 National Institute For Materials Science Double-side-coated surface stress sensor
CN103017946B (zh) * 2012-12-05 2014-09-24 北京大学 一种mems压阻式多轴力传感器及其制备方法
WO2015111581A1 (ja) 2014-01-24 2015-07-30 国立大学法人 東京大学 センサ
FR3110284B1 (fr) * 2020-05-14 2023-01-13 Commissariat Energie Atomique Dispositif de détection utilisant une transduction piézorésistive

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4311980A (en) 1978-10-12 1982-01-19 Fabrica Italiana Magneti Marelli, S.P.A. Device for pressure measurement using a resistor strain gauge
JPH05196458A (ja) * 1991-01-04 1993-08-06 Univ Leland Stanford Jr 原子力顕微鏡用ピエゾ抵抗性片持ばり構造体
US5275055A (en) 1992-08-31 1994-01-04 Honeywell Inc. Resonant gauge with microbeam driven in constant electric field
JP3399660B2 (ja) * 1994-10-06 2003-04-21 株式会社東海理化電機製作所 表面型の加速度センサの製造方法
US5563341A (en) * 1995-06-07 1996-10-08 Fenner; Ralph L. Vapor pressure sensor and method
GB9801286D0 (en) 1998-01-21 1998-03-18 Univ Cambridge Tech Sensor
GB9819319D0 (en) 1998-09-05 1998-10-28 Aea Technology Plc Assay of chemical binding
DE60023917T2 (de) 1999-05-03 2006-07-27 Nanonord A/S Sensor für ein mikrofluidisches bearbeitungssystem
WO2003044530A1 (en) 2001-11-19 2003-05-30 Cantion A/S Sensor system with a reference surface mimicking the detection surface but with low ligand binding capacity
WO2003062135A1 (en) 2002-01-24 2003-07-31 Cantion A/S A sensor
AU2003206679A1 (en) 2002-02-08 2003-09-02 Cantion A/S Scion.Dtu A sensor comprising mechanical amplification of surface stress sensitive cantilever
WO2003071258A1 (en) 2002-02-22 2003-08-28 Cantion A/S Sensor comprising an array of piezoresistors
SE0201705D0 (sv) 2002-06-05 2002-06-05 Sp Sveriges Provnings Och Fors Improved analysis
AU2003232165A1 (en) * 2002-06-07 2003-12-22 Cantion A/S A cantilever sensor with a current shield and a method for its production

Also Published As

Publication number Publication date
US7284452B2 (en) 2007-10-23
EP1588153A1 (de) 2005-10-26
US20060060003A1 (en) 2006-03-23
WO2004059306A8 (en) 2005-07-07
JP2006512589A (ja) 2006-04-13
AU2003287928A1 (en) 2004-07-22
DE60316729D1 (de) 2007-11-15
EP1588153B1 (de) 2007-10-03
WO2004059306A1 (en) 2004-07-15
DE60316729T2 (de) 2008-07-24

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