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Priority claimed from JP18786981Aexternal-prioritypatent/JPS5891536A/ja
Priority claimed from JP5003582Aexternal-prioritypatent/JPS58169370A/ja
Application filed by Hitachi LtdfiledCriticalHitachi Ltd
Priority claimed from EP82110907Aexternal-prioritypatent/EP0080212B1/de
Application grantedgrantedCritical
Publication of ATE36917T1publicationCriticalpatent/ATE36917T1/de