ATE368863T1 - Mikroelektromechanisches system - Google Patents
Mikroelektromechanisches systemInfo
- Publication number
- ATE368863T1 ATE368863T1 AT04100839T AT04100839T ATE368863T1 AT E368863 T1 ATE368863 T1 AT E368863T1 AT 04100839 T AT04100839 T AT 04100839T AT 04100839 T AT04100839 T AT 04100839T AT E368863 T1 ATE368863 T1 AT E368863T1
- Authority
- AT
- Austria
- Prior art keywords
- bases
- active part
- microelectromechanical system
- accelerometer
- support
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/0802—Details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
- G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
- G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Pressure Sensors (AREA)
- Micromachines (AREA)
- Gyroscopes (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP04100839A EP1571454B1 (de) | 2004-03-02 | 2004-03-02 | Mikroelektromechanisches System |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE368863T1 true ATE368863T1 (de) | 2007-08-15 |
Family
ID=34746077
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT04100839T ATE368863T1 (de) | 2004-03-02 | 2004-03-02 | Mikroelektromechanisches system |
Country Status (4)
Country | Link |
---|---|
US (1) | US7170140B2 (de) |
EP (1) | EP1571454B1 (de) |
AT (1) | ATE368863T1 (de) |
DE (1) | DE602004007877T2 (de) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7785098B1 (en) | 2001-06-05 | 2010-08-31 | Mikro Systems, Inc. | Systems for large area micro mechanical systems |
US7141812B2 (en) | 2002-06-05 | 2006-11-28 | Mikro Systems, Inc. | Devices, methods, and systems involving castings |
WO2002098624A1 (en) * | 2001-06-05 | 2002-12-12 | Mikro Systems Inc. | Methods for manufacturing three-dimensional devices and devices created thereby |
WO2007061756A2 (en) | 2005-11-22 | 2007-05-31 | Kionix, Inc. | A tri-axis accelerometer |
CN102654409A (zh) * | 2006-04-28 | 2012-09-05 | 松下电器产业株式会社 | 电容式传感器 |
US20080116584A1 (en) * | 2006-11-21 | 2008-05-22 | Arkalgud Sitaram | Self-aligned through vias for chip stacking |
JP4924238B2 (ja) * | 2007-06-26 | 2012-04-25 | 大日本印刷株式会社 | 角速度センサの製造方法 |
EP2362822A2 (de) * | 2008-09-26 | 2011-09-07 | Mikro Systems Inc. | Systeme, vorrichtungen und/oder verfahren zur herstellung von gussteilen |
CN103596874A (zh) | 2011-06-28 | 2014-02-19 | 惠普发展公司,有限责任合伙企业 | 平面外移动限制结构 |
US8813824B2 (en) | 2011-12-06 | 2014-08-26 | Mikro Systems, Inc. | Systems, devices, and/or methods for producing holes |
US8803262B2 (en) | 2012-01-17 | 2014-08-12 | Rosemount Aerospace Inc. | Die attach stress isolation |
TWI486590B (zh) * | 2013-06-06 | 2015-06-01 | 昇佳電子股份有限公司 | 微感測器 |
DE102016219807A1 (de) | 2016-10-12 | 2018-04-12 | Robert Bosch Gmbh | Mikromechanischer Sensor |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0679033B2 (ja) * | 1987-12-21 | 1994-10-05 | 日産自動車株式会社 | 半導体加速度センサ |
JP3555214B2 (ja) * | 1994-03-15 | 2004-08-18 | 株式会社デンソー | 半導体加速度センサ |
US5777226A (en) * | 1994-03-28 | 1998-07-07 | I/O Sensors, Inc. | Sensor structure with L-shaped spring legs |
US5948981A (en) * | 1996-05-21 | 1999-09-07 | Alliedsignal Inc. | Vibrating beam accelerometer |
US6105428A (en) * | 1998-12-10 | 2000-08-22 | Motorola, Inc. | Sensor and method of use |
EP1423714B1 (de) * | 2001-09-04 | 2006-07-19 | Tokyo Electron Limited | Mikrostruktur mit beweglicher masse |
-
2004
- 2004-03-02 DE DE602004007877T patent/DE602004007877T2/de not_active Expired - Lifetime
- 2004-03-02 AT AT04100839T patent/ATE368863T1/de not_active IP Right Cessation
- 2004-03-02 EP EP04100839A patent/EP1571454B1/de not_active Expired - Lifetime
-
2005
- 2005-03-02 US US11/070,786 patent/US7170140B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
DE602004007877D1 (de) | 2007-09-13 |
EP1571454A1 (de) | 2005-09-07 |
US7170140B2 (en) | 2007-01-30 |
US20050194652A1 (en) | 2005-09-08 |
DE602004007877T2 (de) | 2008-04-24 |
EP1571454B1 (de) | 2007-08-01 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |