ATE355609T1 - Monolitisches miniaturisiertes massenspektrometer - Google Patents

Monolitisches miniaturisiertes massenspektrometer

Info

Publication number
ATE355609T1
ATE355609T1 AT03766340T AT03766340T ATE355609T1 AT E355609 T1 ATE355609 T1 AT E355609T1 AT 03766340 T AT03766340 T AT 03766340T AT 03766340 T AT03766340 T AT 03766340T AT E355609 T1 ATE355609 T1 AT E355609T1
Authority
AT
Austria
Prior art keywords
silicon layers
mass spectrometer
bsoi
wafers
monolitic
Prior art date
Application number
AT03766340T
Other languages
English (en)
Inventor
Richard Syms
Original Assignee
Microsaic Systems Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Microsaic Systems Ltd filed Critical Microsaic Systems Ltd
Application granted granted Critical
Publication of ATE355609T1 publication Critical patent/ATE355609T1/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes
    • H01J49/34—Dynamic spectrometers
    • H01J49/42—Stability-of-path spectrometers, e.g. monopole, quadrupole, multipole, farvitrons
    • H01J49/4205—Device types
    • H01J49/421—Mass filters, i.e. deviating unwanted ions without trapping
    • H01J49/4215—Quadrupole mass filters
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/0013—Miniaturised spectrometers, e.g. having smaller than usual scale, integrated conventional components
    • H01J49/0018—Microminiaturised spectrometers, e.g. chip-integrated devices, Micro-Electro-Mechanical Systems [MEMS]

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)
AT03766340T 2002-08-01 2003-07-29 Monolitisches miniaturisiertes massenspektrometer ATE355609T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB0217815A GB2391694B (en) 2002-08-01 2002-08-01 Monolithic micro-engineered mass spectrometer

Publications (1)

Publication Number Publication Date
ATE355609T1 true ATE355609T1 (de) 2006-03-15

Family

ID=9941510

Family Applications (1)

Application Number Title Priority Date Filing Date
AT03766340T ATE355609T1 (de) 2002-08-01 2003-07-29 Monolitisches miniaturisiertes massenspektrometer

Country Status (8)

Country Link
US (1) US7208729B2 (de)
EP (1) EP1540697B1 (de)
JP (1) JP4324554B2 (de)
AT (1) ATE355609T1 (de)
AU (1) AU2003251660A1 (de)
DE (1) DE60312180T2 (de)
GB (1) GB2391694B (de)
WO (1) WO2004013890A2 (de)

Families Citing this family (35)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA2540584C (en) * 2003-10-08 2012-04-03 Varian Australia Pty Ltd Electrode for mass spectrometry
FI119747B (fi) * 2003-11-14 2009-02-27 Licentia Oy Menetelmä ja laitteisto näytteiden tutkimiseksi massaspektrometrisesti
US6967326B2 (en) * 2004-02-27 2005-11-22 Lucent Technologies Inc. Mass spectrometers on wafer-substrates
GB2422951B (en) 2005-02-07 2010-07-28 Microsaic Systems Ltd Integrated analytical device
US7411187B2 (en) * 2005-05-23 2008-08-12 The Regents Of The University Of Michigan Ion trap in a semiconductor chip
EP1746631B1 (de) * 2005-07-20 2013-06-19 Microsaic Systems PLC Mikromechanisches Nano-Elektrodensystem
US7402799B2 (en) * 2005-10-28 2008-07-22 Northrop Grumman Corporation MEMS mass spectrometer
US20070131860A1 (en) * 2005-12-12 2007-06-14 Freeouf John L Quadrupole mass spectrometry chemical sensor technology
US7435953B2 (en) * 2006-02-28 2008-10-14 Interface Studies Inc. Quadrupole mass filter length selection
GB2435712B (en) 2006-03-02 2008-05-28 Microsaic Ltd Personalised mass spectrometer
DE102006011037B4 (de) * 2006-03-08 2008-03-06 Chromtech Gesellschaft für analytische Meßtechnik mbH Kollisionskammer eines Massenspektrometers zur Massenanalyse von Ionen
US7960692B2 (en) * 2006-05-24 2011-06-14 Stc.Unm Ion focusing and detection in a miniature linear ion trap for mass spectrometry
GB0618926D0 (en) 2006-09-26 2006-11-08 Owlstone Ltd Ion filter
GB2445016B (en) * 2006-12-19 2012-03-07 Microsaic Systems Plc Microengineered ionisation device
GB2446184B (en) * 2007-01-31 2011-07-27 Microsaic Systems Ltd High performance micro-fabricated quadrupole lens
US8389950B2 (en) * 2007-01-31 2013-03-05 Microsaic Systems Plc High performance micro-fabricated quadrupole lens
EP1959476A1 (de) * 2007-02-19 2008-08-20 Technische Universität Hamburg-Harburg Massenspektrometer
US7922920B2 (en) * 2007-02-27 2011-04-12 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Systems, methods, and apparatus of a low conductance silicon micro-leak for mass spectrometer inlet
US7767959B1 (en) * 2007-05-21 2010-08-03 Northrop Grumman Corporation Miniature mass spectrometer for the analysis of chemical and biological solid samples
US7935924B2 (en) * 2007-07-06 2011-05-03 Massachusetts Institute Of Technology Batch fabricated rectangular rod, planar MEMS quadrupole with ion optics
WO2009009471A2 (en) * 2007-07-06 2009-01-15 Massachusetts Institute Of Technology Performance enhancement through use of higher stability regions and signal processing in on-ideal quadrupole mass filters
GB2451239B (en) 2007-07-23 2009-07-08 Microsaic Systems Ltd Microengineered electrode assembly
US9588081B2 (en) 2007-09-25 2017-03-07 Ownstone Medical Limited Interdigitated electrode configuration for ion filter
GB2454241B (en) * 2007-11-02 2009-12-23 Microsaic Systems Ltd A mounting arrangement
GB2454508B (en) * 2007-11-09 2010-04-28 Microsaic Systems Ltd Electrode structures
DE102008011972B4 (de) * 2008-02-29 2010-05-12 Bayer Technology Services Gmbh Vorrichtung zur selbstjustierenden Montage und Halterung von Mikrokanalplatten in Mikrosystemen
WO2009157187A1 (ja) 2008-06-23 2009-12-30 Murthy Prakash Sreedhar 化学物質に関連した情報を取り扱うためのシステム
GB0816258D0 (en) * 2008-09-05 2008-10-15 Ulive Entpr Ltd Process
GB2466350B (en) 2009-11-30 2011-06-08 Microsaic Systems Ltd Mass spectrometer system
FR2971360B1 (fr) * 2011-02-07 2014-05-16 Commissariat Energie Atomique Micro-reflectron pour spectrometre de masse a temps de vol
US8618473B2 (en) 2011-07-14 2013-12-31 Bruker Daltonics, Inc. Mass spectrometer with precisely aligned ion optic assemblies
WO2014149846A2 (en) 2013-03-15 2014-09-25 1St Detect Corporation A mass spectrometer system having an external detector
US9418827B2 (en) * 2013-07-23 2016-08-16 Hamilton Sundstrand Corporation Methods of ion source fabrication
US9786613B2 (en) 2014-08-07 2017-10-10 Qualcomm Incorporated EMI shield for high frequency layer transferred devices
US20200058646A1 (en) * 2018-08-14 2020-02-20 Intel Corporation Structures and methods for large integrated circuit dies

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5401962A (en) 1993-06-14 1995-03-28 Ferran Scientific Residual gas sensor utilizing a miniature quadrupole array
US5536939A (en) * 1993-09-22 1996-07-16 Northrop Grumman Corporation Miniaturized mass filter
US5386115A (en) * 1993-09-22 1995-01-31 Westinghouse Electric Corporation Solid state micro-machined mass spectrograph universal gas detection sensor
US6442831B1 (en) * 1993-11-16 2002-09-03 Formfactor, Inc. Method for shaping spring elements
GB9506972D0 (en) * 1995-04-04 1995-05-24 Univ Liverpool Improvements in and relating to quadrupole mass
US5596193A (en) 1995-10-11 1997-01-21 California Institute Of Technology Miniature quadrupole mass spectrometer array
DE69715190T2 (de) 1996-06-06 2003-04-30 Mds Inc Multipolmassenspektrometer mit axialem ausstoss
US5852294A (en) * 1996-07-03 1998-12-22 Analytica Of Branford, Inc. Multiple rod construction for ion guides and mass spectrometers
FR2762713A1 (fr) * 1997-04-25 1998-10-30 Commissariat Energie Atomique Microdispositif pour generer un champ multipolaire, en particulier pour filtrer ou devier ou focaliser des particules chargees
WO1998056023A2 (en) * 1997-06-03 1998-12-10 California Institute Of Technology Miniature micromachined quadrupole mass spectrometer array and method of making the same

Also Published As

Publication number Publication date
US20060071161A1 (en) 2006-04-06
DE60312180D1 (de) 2007-04-12
WO2004013890A2 (en) 2004-02-12
EP1540697A2 (de) 2005-06-15
AU2003251660A8 (en) 2004-02-23
JP2006501603A (ja) 2006-01-12
GB2391694B (en) 2006-03-01
US7208729B2 (en) 2007-04-24
DE60312180T2 (de) 2007-11-08
JP4324554B2 (ja) 2009-09-02
EP1540697B1 (de) 2007-02-28
WO2004013890A3 (en) 2004-04-15
GB0217815D0 (en) 2002-09-11
AU2003251660A1 (en) 2004-02-23
GB2391694A (en) 2004-02-11

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