ATE342245T1 - Umweltsperrschicht für substrate auf der basis von silizium - Google Patents

Umweltsperrschicht für substrate auf der basis von silizium

Info

Publication number
ATE342245T1
ATE342245T1 AT04252991T AT04252991T ATE342245T1 AT E342245 T1 ATE342245 T1 AT E342245T1 AT 04252991 T AT04252991 T AT 04252991T AT 04252991 T AT04252991 T AT 04252991T AT E342245 T1 ATE342245 T1 AT E342245T1
Authority
AT
Austria
Prior art keywords
silicon
refractory metal
oxygen gettering
oxygen
layer
Prior art date
Application number
AT04252991T
Other languages
English (en)
Inventor
Ellen Y Sun
Gary D Lindsey
John E Holowczak
Neil R Baldwin
Harry E Eaton
Original Assignee
United Technologies Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by United Technologies Corp filed Critical United Technologies Corp
Application granted granted Critical
Publication of ATE342245T1 publication Critical patent/ATE342245T1/de

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/009After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone characterised by the material treated
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/45Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
    • C04B41/52Multiple coating or impregnating multiple coating or impregnating with the same composition or with compositions only differing in the concentration of the constituents, is classified as single coating or impregnation
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/80After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
    • C04B41/81Coating or impregnation
    • C04B41/89Coating or impregnation for obtaining at least two superposed coatings having different compositions
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • C23C28/042Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material including a refractory ceramic layer, e.g. refractory metal oxides, ZrO2, rare earth oxides
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/32Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer
    • C23C28/324Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer with at least one metal matrix material layer comprising a mixture of at least two metals or metal phases or a metal-matrix material with hard embedded particles, e.g. WC-Me
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/34Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/34Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
    • C23C28/341Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates with at least one carbide layer
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/34Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
    • C23C28/345Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates with at least one oxide layer
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/34Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
    • C23C28/345Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates with at least one oxide layer
    • C23C28/3455Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates with at least one oxide layer with a refractory ceramic layer, e.g. refractory metal oxide, ZrO2, rare earth oxides or a thermal barrier system comprising at least one refractory oxide layer
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01DNON-POSITIVE DISPLACEMENT MACHINES OR ENGINES, e.g. STEAM TURBINES
    • F01D5/00Blades; Blade-carrying members; Heating, heat-insulating, cooling or antivibration means on the blades or the members
    • F01D5/12Blades
    • F01D5/28Selecting particular materials; Particular measures relating thereto; Measures against erosion or corrosion
    • F01D5/288Protective coatings for blades

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Inorganic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Ceramic Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Structural Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Laminated Bodies (AREA)
  • Coating By Spraying Or Casting (AREA)
  • Turbine Rotor Nozzle Sealing (AREA)
AT04252991T 2003-05-22 2004-05-21 Umweltsperrschicht für substrate auf der basis von silizium ATE342245T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US10/444,008 US7063894B2 (en) 2003-05-22 2003-05-22 Environmental barrier coating for silicon based substrates

Publications (1)

Publication Number Publication Date
ATE342245T1 true ATE342245T1 (de) 2006-11-15

Family

ID=33098021

Family Applications (1)

Application Number Title Priority Date Filing Date
AT04252991T ATE342245T1 (de) 2003-05-22 2004-05-21 Umweltsperrschicht für substrate auf der basis von silizium

Country Status (5)

Country Link
US (1) US7063894B2 (de)
EP (1) EP1479657B1 (de)
JP (1) JP2004345945A (de)
AT (1) ATE342245T1 (de)
DE (1) DE602004002721T2 (de)

Families Citing this family (46)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20060014029A1 (en) * 2004-07-15 2006-01-19 General Electric Company Article including environmental barrier coating system, and method for making
US20060110609A1 (en) * 2004-11-19 2006-05-25 Eaton Harry E Protective coatings
US20060154093A1 (en) * 2005-01-13 2006-07-13 General Electric Company Multilayered environmental barrier coating and related articles and methods
US20060211241A1 (en) * 2005-03-21 2006-09-21 Christine Govern Protective layer for barrier coating for silicon-containing substrate and process for preparing same
US7374818B2 (en) 2005-05-23 2008-05-20 United Technologies Corporation Coating system for silicon based substrates
WO2007098152A2 (en) * 2006-02-20 2007-08-30 Lee Kang N Article including enviromental barrier coating system
US7763356B2 (en) * 2006-03-13 2010-07-27 United Technologies Corporation Bond coating and thermal barrier compositions, processes for applying both, and their coated articles
US7951459B2 (en) * 2006-11-21 2011-05-31 United Technologies Corporation Oxidation resistant coatings, processes for coating articles, and their coated articles
US20100021716A1 (en) * 2007-06-19 2010-01-28 Strock Christopher W Thermal barrier system and bonding method
US7967570B2 (en) * 2007-07-27 2011-06-28 United Technologies Corporation Low transient thermal stress turbine engine components
US20090184280A1 (en) * 2008-01-18 2009-07-23 Rolls-Royce Corp. Low Thermal Conductivity, CMAS-Resistant Thermal Barrier Coatings
US20090186237A1 (en) * 2008-01-18 2009-07-23 Rolls-Royce Corp. CMAS-Resistant Thermal Barrier Coatings
US8043684B2 (en) * 2008-02-14 2011-10-25 United Technologies Corporation Low transient and steady state thermal stress disk shaped components
CA2739008C (en) * 2008-09-30 2015-04-07 Rolls-Royce Corporation Coating including a rare earth silicate-based layer including a second phase
US8470460B2 (en) * 2008-11-25 2013-06-25 Rolls-Royce Corporation Multilayer thermal barrier coatings
US8124252B2 (en) * 2008-11-25 2012-02-28 Rolls-Royce Corporation Abradable layer including a rare earth silicate
US20110033630A1 (en) * 2009-08-05 2011-02-10 Rolls-Royce Corporation Techniques for depositing coating on ceramic substrate
US20110203281A1 (en) * 2010-02-25 2011-08-25 General Electric Company Article for high temperature service
EP2596068B1 (de) 2010-07-23 2015-09-02 Rolls-Royce Corporation Wärmedämmbeschichtungen mit c-mas-resistenten wärmedämmbeschichtungsschichten
US20140261080A1 (en) 2010-08-27 2014-09-18 Rolls-Royce Corporation Rare earth silicate environmental barrier coatings
US8748964B2 (en) 2010-10-22 2014-06-10 Micron Technology, Inc. Gettering agents in memory charge storage structures
WO2013188516A1 (en) * 2012-06-12 2013-12-19 Directed Vapor Technologies International, Inc. Self-healing environmental barrier coating
US20140037969A1 (en) * 2012-08-03 2014-02-06 General Electric Company Hybrid Air Plasma Spray and Slurry Method of Environmental Barrier Deposition
US20160153288A1 (en) * 2013-03-15 2016-06-02 General Electric Company Recession resistant ceramic matrix composites and environmental barrier coatings
US10808954B2 (en) * 2014-02-01 2020-10-20 Lennard A. Gumaer Vehicle exhaust removal system for buildings and method of control
US9395301B2 (en) * 2014-10-02 2016-07-19 General Electric Company Methods for monitoring environmental barrier coatings
US10329205B2 (en) 2014-11-24 2019-06-25 Rolls-Royce Corporation Bond layer for silicon-containing substrates
US10329926B2 (en) * 2016-05-09 2019-06-25 United Technologies Corporation Molybdenum-silicon-boron with noble metal barrier layer
FR3051187B1 (fr) 2016-05-11 2018-06-01 Safran Ceramics Piece en materiau composite
US10308818B2 (en) 2016-05-19 2019-06-04 United Technologies Corporation Article having coating with glass, oxygen scavenger, and metal
EP3351522B1 (de) 2017-01-18 2020-04-22 Rolls-Royce Corporation Haftschicht für keramik oder verbundwerkstoff mit keramischer matrix
US20180222807A1 (en) * 2017-02-03 2018-08-09 Rolls-Royce Corporation Increasing the density of a bond coat
US11066339B2 (en) * 2017-06-08 2021-07-20 General Electric Company Article for high temperature service
US20190017177A1 (en) 2017-07-17 2019-01-17 Rolls-Royce Corporation Thermal barrier coatings for components in high-temperature mechanical systems
US11655543B2 (en) 2017-08-08 2023-05-23 Rolls-Royce Corporation CMAS-resistant barrier coatings
US10696601B2 (en) 2017-08-29 2020-06-30 General Electric Company Compositions for erosion and molten dust resistant environmental barrier coatings
US10822285B2 (en) 2017-08-29 2020-11-03 General Electric Company Compositions for erosion and molten dust resistant environmental barrier coatings
US10851656B2 (en) 2017-09-27 2020-12-01 Rolls-Royce Corporation Multilayer environmental barrier coating
FR3072091B1 (fr) 2017-10-05 2020-10-02 Safran Piece protegee par une barriere environnementale
US11668198B2 (en) 2018-08-03 2023-06-06 Raytheon Technologies Corporation Fiber-reinforced self-healing environmental barrier coating
US11505506B2 (en) 2018-08-16 2022-11-22 Raytheon Technologies Corporation Self-healing environmental barrier coating
US11535571B2 (en) 2018-08-16 2022-12-27 Raytheon Technologies Corporation Environmental barrier coating for enhanced resistance to attack by molten silicate deposits
US10934220B2 (en) 2018-08-16 2021-03-02 Raytheon Technologies Corporation Chemical and topological surface modification to enhance coating adhesion and compatibility
US10927046B2 (en) * 2018-12-21 2021-02-23 General Electric Company EBC with mullite bondcoat having a non-oxide silicon ceramic
US11851380B2 (en) 2021-05-26 2023-12-26 General Electric Company Slurry processing for deposition of rare earth hafnium tantalate based barrier coatings
CN114164386B (zh) * 2021-10-20 2023-06-30 昆明理工大学 一种低空飞行器表面的复合梯度涂层及其制备方法

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5985470A (en) * 1998-03-16 1999-11-16 General Electric Company Thermal/environmental barrier coating system for silicon-based materials
US6299988B1 (en) 1998-04-27 2001-10-09 General Electric Company Ceramic with preferential oxygen reactive layer
US6485848B1 (en) * 1998-04-27 2002-11-26 General Electric Company Coated article and method of making
US6296942B1 (en) 1999-04-15 2001-10-02 General Electric Company Silicon based substrate with calcium aluminosilicate environmental/thermal barrier layer
US6410148B1 (en) 1999-04-15 2002-06-25 General Electric Co. Silicon based substrate with environmental/ thermal barrier layer
US6296941B1 (en) 1999-04-15 2001-10-02 General Electric Company Silicon based substrate with yttrium silicate environmental/thermal barrier layer
US6254935B1 (en) 1999-04-15 2001-07-03 United Technologies Corporation Method for applying a barrier layer to a silicon based substrate
US6352790B1 (en) 2000-06-29 2002-03-05 United Technologies Corporation Substrate containing silicon and a barrier layer which functions as a protective/thermal barrier coating
US6645649B2 (en) * 2000-10-31 2003-11-11 Kyocera Corporation Surface-coated sintered body of silicon nitride
US6617037B2 (en) * 2001-12-19 2003-09-09 United Technologies Corporation Silicon based substrate with a CTE compatible layer on the substrate
US6617036B2 (en) * 2001-12-19 2003-09-09 United Technologies Corporation Barrier layer for silicon containing substrate
US6759151B1 (en) * 2002-05-22 2004-07-06 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Multilayer article characterized by low coefficient of thermal expansion outer layer

Also Published As

Publication number Publication date
DE602004002721T2 (de) 2007-08-16
EP1479657B1 (de) 2006-10-11
US20050003212A1 (en) 2005-01-06
EP1479657A1 (de) 2004-11-24
JP2004345945A (ja) 2004-12-09
DE602004002721D1 (de) 2006-11-23
US7063894B2 (en) 2006-06-20

Similar Documents

Publication Publication Date Title
ATE342245T1 (de) Umweltsperrschicht für substrate auf der basis von silizium
EP2259288A3 (de) Verfahren zur Herstellung von einer Oxydschicht auf einem Siliziumkarbidschicht mittels N2O
BR0109387A (pt) Ferramentas abrasivas com liga vitrificada
TW200631942A (en) The oxime ester compounds and the initiator of the photo-polymerization comprising the same
DE602005003866D1 (de) Gegenstand umfassend ein Silizium enthaltendes Substrat und eine Hafniumoxid enthaltende Sperrschicht an der Oberfläche
ES2096619T3 (es) Recubrimientos para substratos y dispositivos electronicos.
TW200613512A (en) Luminescent silicon oxide flakes
FR2798654B1 (fr) Composition de barriere thermique de faible conductivite thermique, piece mecanique en superalliage protegee par un revetement de ceramique ayant une telle composition, et methode de realisation du revetement de ceramique
AR022498A1 (es) Metodo para mejorar la resistencia a la corrosion de sustratos de metales utilizando mezclas de aminosilanos y de silanos multi-sililfuncionales;composiciones que incluyen dichas mezclas de aminosilanos y de silanos multi-sililfuncionales y uso de soluciones que comprenden dichas mezclas para mejora
DE602005022168D1 (de) Poliermittel und polierverfahren
TW200716688A (en) Inorganic substrate with a thin silica type glass layer, method of manufacturing the aforementioned substrate, coating agent, and a semiconductor device
IL156551A0 (en) Composition comprising an oxidizing and complexing compound
WO2001048076A3 (en) A method to fabricate thin insulating films
DE60215322D1 (de) Korrosions- und wärmeschutzschicht für keramische bauteile
DE60214897D1 (de) Korrosionsschutz für glaswaren
WO2005096747A3 (en) Highly selective silicon oxide etching compositions
TW200713453A (en) Methods of fabricating oxide layers on silicon carbide layers utilizing atomic oxygen
EP1553408A4 (de) Fluoreszenzsonde
EP1431290A4 (de) Neue stickstoffhaltige verbindung und deren verwendung
EP1323691A3 (de) Siliziumhaltiges Substrat mit Wärmedämmschicht
ATE376050T1 (de) Halbleiterreinigungslösung
WO2006095663A3 (en) Method for producing high purity silicon
ATE272727T1 (de) Maske zum thermischen diffusionsbeschichten
DE50300758D1 (de) Hochtemperatur-schutzschicht
ATE287455T1 (de) Herstellung einer ferrolegierung

Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties