ATE331424T1 - Verfahren zur strahlungserzeugung - Google Patents

Verfahren zur strahlungserzeugung

Info

Publication number
ATE331424T1
ATE331424T1 AT02076898T AT02076898T ATE331424T1 AT E331424 T1 ATE331424 T1 AT E331424T1 AT 02076898 T AT02076898 T AT 02076898T AT 02076898 T AT02076898 T AT 02076898T AT E331424 T1 ATE331424 T1 AT E331424T1
Authority
AT
Austria
Prior art keywords
target
plasma
directing
predetermined period
radiating
Prior art date
Application number
AT02076898T
Other languages
German (de)
English (en)
Inventor
Magnus Berglund
Bjoern Hansson
Oscar Hemberg
Hans Hertz
Lars Rymell
Original Assignee
Jettec Ab
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jettec Ab filed Critical Jettec Ab
Application granted granted Critical
Publication of ATE331424T1 publication Critical patent/ATE331424T1/de

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05G—X-RAY TECHNIQUE
    • H05G1/00—X-ray apparatus involving X-ray tubes; Circuits therefor
    • H05G1/08—Electrical details
    • H05G1/10—Power supply arrangements for feeding the X-ray tube
    • H05G1/20—Power supply arrangements for feeding the X-ray tube with high-frequency ac; with pulse trains
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05G—X-RAY TECHNIQUE
    • H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
    • H05G2/001—X-ray radiation generated from plasma
    • H05G2/003—X-ray radiation generated from plasma being produced from a liquid or gas
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05G—X-RAY TECHNIQUE
    • H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
    • H05G2/001—X-ray radiation generated from plasma
    • H05G2/008—X-ray radiation generated from plasma involving a beam of energy, e.g. laser or electron beam in the process of exciting the plasma

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • X-Ray Techniques (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Radiation-Therapy Devices (AREA)
AT02076898T 2002-05-13 2002-05-13 Verfahren zur strahlungserzeugung ATE331424T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP02076898A EP1365635B1 (en) 2002-05-13 2002-05-13 Method for producing radiation

Publications (1)

Publication Number Publication Date
ATE331424T1 true ATE331424T1 (de) 2006-07-15

Family

ID=29286188

Family Applications (1)

Application Number Title Priority Date Filing Date
AT02076898T ATE331424T1 (de) 2002-05-13 2002-05-13 Verfahren zur strahlungserzeugung

Country Status (5)

Country Link
EP (1) EP1365635B1 (ko)
KR (1) KR20050005478A (ko)
AT (1) ATE331424T1 (ko)
DE (1) DE60212581T2 (ko)
TW (1) TW569652B (ko)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102004005242B4 (de) 2004-01-30 2006-04-20 Xtreme Technologies Gmbh Verfahren und Vorrichtung zur plasmabasierten Erzeugung intensiver kurzwelliger Strahlung
EP1730764A4 (en) * 2004-03-17 2010-08-18 Cymer Inc LPP EUV LIGHT SOURCE
DE102005014433B3 (de) * 2005-03-24 2006-10-05 Xtreme Technologies Gmbh Verfahren und Anordnung zur effizienten Erzeugung von kurzwelliger Strahlung auf Basis eines lasererzeugten Plasmas

Also Published As

Publication number Publication date
EP1365635B1 (en) 2006-06-21
KR20050005478A (ko) 2005-01-13
DE60212581D1 (de) 2006-08-03
TW569652B (en) 2004-01-01
DE60212581T2 (de) 2007-07-05
EP1365635A1 (en) 2003-11-26

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Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties