ATE328381T1 - Diffusionsgekühltes lasersystem - Google Patents
Diffusionsgekühltes lasersystemInfo
- Publication number
- ATE328381T1 ATE328381T1 AT04705013T AT04705013T ATE328381T1 AT E328381 T1 ATE328381 T1 AT E328381T1 AT 04705013 T AT04705013 T AT 04705013T AT 04705013 T AT04705013 T AT 04705013T AT E328381 T1 ATE328381 T1 AT E328381T1
- Authority
- AT
- Austria
- Prior art keywords
- inter
- dimension
- electrode gap
- laser system
- cooled laser
- Prior art date
Links
- 238000009792 diffusion process Methods 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/038—Electrodes, e.g. special shape, configuration or composition
- H01S3/0385—Shape
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Lasers (AREA)
- Laser Surgery Devices (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US10/350,366 US6879616B2 (en) | 2003-01-24 | 2003-01-24 | Diffusion-cooled laser system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ATE328381T1 true ATE328381T1 (de) | 2006-06-15 |
Family
ID=32735540
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AT04705013T ATE328381T1 (de) | 2003-01-24 | 2004-01-24 | Diffusionsgekühltes lasersystem |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US6879616B2 (de) |
| EP (1) | EP1586142B1 (de) |
| AT (1) | ATE328381T1 (de) |
| DE (1) | DE602004001040T2 (de) |
| WO (1) | WO2004066461A1 (de) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7778303B2 (en) * | 2007-11-02 | 2010-08-17 | Trumpf, Inc. | Laser having distributed inductances |
| US9209595B2 (en) | 2014-01-31 | 2015-12-08 | Asml Netherlands B.V. | Catalytic conversion of an optical amplifier gas medium |
| CN111788747B (zh) * | 2018-01-29 | 2024-02-27 | Idea机器显影设计及生产有限公司 | 紧凑型同轴激光器 |
| US10644474B2 (en) * | 2018-03-07 | 2020-05-05 | Coherent, Inc. | Conductively-cooled slab laser |
Family Cites Families (35)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3044023C2 (de) | 1980-11-22 | 1984-11-22 | Eltro GmbH, Gesellschaft für Strahlungstechnik, 6900 Heidelberg | Transversal angeregter Gaslaser-Oszillator oder -Verstärker |
| US4359777A (en) * | 1981-01-22 | 1982-11-16 | The United States Of America As Represented By The Secretary Of The Army | High efficiency transversely excited electrodeless gas lasers |
| JPS5815286A (ja) | 1981-07-21 | 1983-01-28 | Mitsubishi Electric Corp | 無声放電レ−ザ用電極 |
| US4500996A (en) * | 1982-03-31 | 1985-02-19 | Coherent, Inc. | High power fundamental mode laser |
| DE3912568A1 (de) | 1989-04-17 | 1990-10-18 | Siemens Ag | Gas-laser, insbesondere co(pfeil abwaerts)2(pfeil abwaerts)-laser |
| DE4042532C2 (de) * | 1990-08-22 | 1994-12-15 | Deutsche Forsch Luft Raumfahrt | Hochfrequenzangeregter Hochleistungslaser |
| US5164952A (en) * | 1990-09-26 | 1992-11-17 | Siemens Aktiengesellschaft | Electrically pumped gas laser suitable for high input power |
| US5231644A (en) * | 1990-09-26 | 1993-07-27 | Siemens Aktiengesellschaft | Slab or stripline gas laser |
| US5197079A (en) * | 1990-09-26 | 1993-03-23 | Siemens Aktiengesellschaft | High-power stripline laser |
| US5131003A (en) * | 1990-10-12 | 1992-07-14 | Coherent, Inc. | RF excited CO2 slab waveguide laser |
| US5140606A (en) * | 1990-10-12 | 1992-08-18 | Coherent, Inc. | RF excited CO2 slab waveguide laser |
| US5335242A (en) * | 1990-10-12 | 1994-08-02 | Coherent, Inc. | Resonator for CO2 slab waveguide laser |
| EP0520249B1 (de) * | 1991-06-27 | 1996-02-28 | CARL ZEISS JENA GmbH | Hochfrequenzangeregter Laser für hohe Eingangsleistungen, insbesondere CO2-Bandleiterlaser |
| EP0523674A1 (de) * | 1991-07-18 | 1993-01-20 | Siemens Aktiengesellschaft | Slab- oder Bandleiterlaser für hohe Laserleistungen |
| US5255283A (en) * | 1992-06-30 | 1993-10-19 | Universite Laval | Process for making a custom phase-conjugated circular mirror to be used in a laser resonator that will suit specifications of a user and a custom phase-conjugated circular mirror made according to the process |
| EP0585482B1 (de) * | 1992-08-31 | 1996-01-10 | CARL ZEISS JENA GmbH | Bandleiterlaser mit Verbundelektroden |
| JP3316698B2 (ja) * | 1992-10-21 | 2002-08-19 | 三菱電機株式会社 | レーザ装置 |
| JPH06152011A (ja) | 1992-11-06 | 1994-05-31 | Nissin Electric Co Ltd | 放電励起型エキシマレーザ装置 |
| DE9217640U1 (de) * | 1992-12-23 | 1994-09-29 | Rofin-Sinar Laser Gmbh, 22113 Hamburg | Slab- oder Bandleiterlaser |
| US5353297A (en) * | 1993-07-12 | 1994-10-04 | Coherent, Inc. | Gas slab laser with folded resonator structure |
| US5412681A (en) * | 1994-03-30 | 1995-05-02 | Carl Zeiss, Inc. | Slab-waveguide CO2 laser |
| US5748663A (en) * | 1994-06-08 | 1998-05-05 | Qsource, Inc. | Retangular discharge gas laser |
| JP2714357B2 (ja) | 1994-09-12 | 1998-02-16 | 株式会社東芝 | エキシマレーザ発振装置 |
| US5684822A (en) * | 1994-11-17 | 1997-11-04 | Cymer, Inc. | Laser system with anamorphic confocal unstable resonator |
| US5661746A (en) * | 1995-10-17 | 1997-08-26 | Universal Laser Syatems, Inc. | Free-space gas slab laser |
| ATE226766T1 (de) | 1995-11-27 | 2002-11-15 | Qsource Inc | Gaslaser mit rechteckigem entladungsraum |
| US5822354A (en) * | 1996-04-22 | 1998-10-13 | Synrad, Inc. | Variable-aperture cavity laser |
| US5881087A (en) * | 1997-04-30 | 1999-03-09 | Universal Laser Systems, Inc. | Gas laser tube design |
| US5892782A (en) * | 1997-09-16 | 1999-04-06 | Synrad, Inc. | Laser with split-wave hybrid resonator |
| DE19747060A1 (de) * | 1997-10-24 | 1999-05-06 | Trumpf Lasertechnik Gmbh | Laserresonator mit konischem Spiegel |
| US5953360A (en) * | 1997-10-24 | 1999-09-14 | Synrad, Inc. | All metal electrode sealed gas laser |
| RU2232454C2 (ru) * | 1999-03-19 | 2004-07-10 | Государственное предприятие Научно-исследовательский институт лазерной физики | Лазерное устройство |
| US6198759B1 (en) * | 1999-12-27 | 2001-03-06 | Synrad, Inc. | Laser system and method for beam enhancement |
| US20010033588A1 (en) * | 1999-12-27 | 2001-10-25 | Broderick Jeffery A. | Laser system and method for beam enhancement |
| US6560263B1 (en) * | 2000-06-09 | 2003-05-06 | Cymer, Inc. | Discharge laser having electrodes with sputter cavities and discharge peaks |
-
2003
- 2003-01-24 US US10/350,366 patent/US6879616B2/en not_active Expired - Lifetime
-
2004
- 2004-01-24 EP EP04705013A patent/EP1586142B1/de not_active Expired - Lifetime
- 2004-01-24 AT AT04705013T patent/ATE328381T1/de not_active IP Right Cessation
- 2004-01-24 WO PCT/EP2004/000606 patent/WO2004066461A1/en not_active Ceased
- 2004-01-24 DE DE602004001040T patent/DE602004001040T2/de not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| EP1586142A1 (de) | 2005-10-19 |
| EP1586142B1 (de) | 2006-05-31 |
| US6879616B2 (en) | 2005-04-12 |
| WO2004066461A1 (en) | 2004-08-05 |
| DE602004001040D1 (de) | 2006-07-06 |
| US20040146081A1 (en) | 2004-07-29 |
| DE602004001040T2 (de) | 2006-10-26 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |