ATE309025T1 - Verfahren zur herstellung vertikaler hohlnadeln aus einem halbleitersubstrat - Google Patents

Verfahren zur herstellung vertikaler hohlnadeln aus einem halbleitersubstrat

Info

Publication number
ATE309025T1
ATE309025T1 AT01900817T AT01900817T ATE309025T1 AT E309025 T1 ATE309025 T1 AT E309025T1 AT 01900817 T AT01900817 T AT 01900817T AT 01900817 T AT01900817 T AT 01900817T AT E309025 T1 ATE309025 T1 AT E309025T1
Authority
AT
Austria
Prior art keywords
semiconductor substrate
channel
vertical hollow
hollow needles
axial surface
Prior art date
Application number
AT01900817T
Other languages
English (en)
Inventor
Dorian Liepmann
Boris Stoeber
Original Assignee
Univ California
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Univ California filed Critical Univ California
Application granted granted Critical
Publication of ATE309025T1 publication Critical patent/ATE309025T1/de

Links

Classifications

    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
    • A61M5/00—Devices for bringing media into the body in a subcutaneous, intra-vascular or intramuscular way; Accessories therefor, e.g. filling or cleaning devices, arm-rests
    • A61M5/178—Syringes
    • A61M5/31—Details
    • A61M5/32—Needles; Details of needles pertaining to their connection with syringe or hub; Accessories for bringing the needle into, or holding the needle on, the body; Devices for protection of needles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B1/00—Devices without movable or flexible elements, e.g. microcapillary devices
    • B81B1/006—Microdevices formed as a single homogeneous piece, i.e. wherein the mechanical function is obtained by the use of the device, e.g. cutters

Landscapes

  • Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Animal Behavior & Ethology (AREA)
  • General Health & Medical Sciences (AREA)
  • Vascular Medicine (AREA)
  • Anesthesiology (AREA)
  • Biomedical Technology (AREA)
  • Heart & Thoracic Surgery (AREA)
  • Hematology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Public Health (AREA)
  • Veterinary Medicine (AREA)
  • Infusion, Injection, And Reservoir Apparatuses (AREA)
  • Micromachines (AREA)
  • Cold Cathode And The Manufacture (AREA)
  • Photovoltaic Devices (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
AT01900817T 2000-01-06 2001-01-02 Verfahren zur herstellung vertikaler hohlnadeln aus einem halbleitersubstrat ATE309025T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/478,913 US6406638B1 (en) 2000-01-06 2000-01-06 Method of forming vertical, hollow needles within a semiconductor substrate, and needles formed thereby
PCT/US2001/000040 WO2001049362A1 (en) 2000-01-06 2001-01-02 Method of forming vertical, hollow needles within a semiconductor substrate

Publications (1)

Publication Number Publication Date
ATE309025T1 true ATE309025T1 (de) 2005-11-15

Family

ID=23901885

Family Applications (1)

Application Number Title Priority Date Filing Date
AT01900817T ATE309025T1 (de) 2000-01-06 2001-01-02 Verfahren zur herstellung vertikaler hohlnadeln aus einem halbleitersubstrat

Country Status (9)

Country Link
US (1) US6406638B1 (de)
EP (1) EP1244495B1 (de)
JP (1) JP2003519014A (de)
AT (1) ATE309025T1 (de)
AU (1) AU2623501A (de)
BR (1) BR0107455A (de)
DE (1) DE60114764T2 (de)
MX (1) MXPA02006661A (de)
WO (1) WO2001049362A1 (de)

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US20090007436A1 (en) * 2003-03-10 2009-01-08 Daskal Vadim M Silicon blades for surgical and non-surgical use
US20050155955A1 (en) * 2003-03-10 2005-07-21 Daskal Vadim M. Method for reducing glare and creating matte finish of controlled density on a silicon surface
US7415299B2 (en) * 2003-04-18 2008-08-19 The Regents Of The University Of California Monitoring method and/or apparatus
US7785485B2 (en) * 2003-09-17 2010-08-31 Becton, Dickinson And Company System and method for creating linear and non-linear trenches in silicon and other crystalline materials with a router
US7753888B2 (en) * 2003-11-21 2010-07-13 The Regents Of The University Of California Method and/or apparatus for puncturing a surface for extraction, in situ analysis, and/or substance delivery using microneedles
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US7396484B2 (en) * 2004-04-30 2008-07-08 Becton, Dickinson And Company Methods of fabricating complex blade geometries from silicon wafers and strengthening blade geometries
US20060030811A1 (en) * 2004-08-03 2006-02-09 Wong Patrick S Method and device for enhancing transdermal agent flux
US7560036B2 (en) * 2004-08-05 2009-07-14 Apogee Technology, Inc. System and method for drug delivery and microfluidic applications using microneedles
US7627938B2 (en) * 2004-10-15 2009-12-08 Board Of Regents, The Univeristy Of Texas System Tapered hollow metallic microneedle array assembly and method of making and using the same
WO2006054280A2 (en) * 2004-11-18 2006-05-26 Nanopass Technologies Ltd. System and method for delivering fluid into flexible biological barrier
EP1671585A1 (de) * 2004-12-17 2006-06-21 F. Hoffmann-La Roche Ag Verfahren zur Herstellung eines Stechelements
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US20070073212A1 (en) * 2005-09-28 2007-03-29 Takehiko Matsumura Iontophoresis apparatus and method to deliver active agents to biological interfaces
US7415858B2 (en) 2006-02-21 2008-08-26 Tyco Healthcare Group Lp Grindless surgical needle manufacture
US20090131778A1 (en) * 2006-03-28 2009-05-21 Jina Arvind N Devices, systems, methods and tools for continuous glucose monitoring
US20080154107A1 (en) * 2006-12-20 2008-06-26 Jina Arvind N Device, systems, methods and tools for continuous glucose monitoring
US20100049021A1 (en) * 2006-03-28 2010-02-25 Jina Arvind N Devices, systems, methods and tools for continuous analyte monitoring
TWI300055B (en) * 2006-05-26 2008-08-21 Nat Univ Tsing Hua Method of manufacturing hollow micro-needle structures
EP2036586B1 (de) 2006-07-04 2015-09-09 Toppan Printing Co., Ltd. Verfahren zur herstellung einer mikronadel
US20080138581A1 (en) * 2006-07-17 2008-06-12 Rajmohan Bhandari Masking high-aspect aspect ratio structures
US8865288B2 (en) * 2006-07-17 2014-10-21 University Of Utah Research Foundation Micro-needle arrays having non-planar tips and methods of manufacture thereof
US20080058726A1 (en) * 2006-08-30 2008-03-06 Arvind Jina Methods and Apparatus Incorporating a Surface Penetration Device
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US20080312518A1 (en) * 2007-06-14 2008-12-18 Arkal Medical, Inc On-demand analyte monitor and method of use
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US8828520B2 (en) * 2008-07-01 2014-09-09 Alcatel Lucent Micro-posts having improved uniformity and a method of manufacture thereof
DE102008052749B4 (de) * 2008-10-22 2012-01-12 Hahn-Schickard-Gesellschaft für angewandte Forschung e.V. Nadel, Nadelanordnung, Spritzgussform und Verfahren zum Herstellen
US8639312B2 (en) * 2008-12-10 2014-01-28 University Of Utah Research Foundation System and method for electrically shielding a microelectrode array in a physiological pathway from electrical noise
US9526885B1 (en) * 2009-07-29 2016-12-27 University Of South Florida Microneedles with sharpened tips and corresponding method of fabrication
WO2011015650A2 (en) * 2009-08-06 2011-02-10 University College Cork, National University Of Ireland, Cork Method of producing microneedles
JP6327852B2 (ja) 2010-05-04 2018-05-23 コリウム インターナショナル， インコーポレイテッド 微小突起アレイを使用した副甲状腺ホルモンの経皮送達のための方法及びデバイス
US20120172692A1 (en) 2011-01-05 2012-07-05 Janet Tamada Sensing Fluid Concentration for Continuous Glucose Monitoring
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AU2013364053B2 (en) 2012-12-21 2018-08-30 Corium Pharma Solutions, Inc. Microarray for delivery of therapeutic agent and methods of use
RU2674083C2 (ru) 2013-03-12 2018-12-04 Кориум Интернэшнл, Инк. Аппликаторы с микровыступами
US10384046B2 (en) 2013-03-15 2019-08-20 Corium, Inc. Microarray for delivery of therapeutic agent and methods of use
WO2014150293A1 (en) 2013-03-15 2014-09-25 Corium International, Inc. Microarray with polymer-free microstructures, methods of making, and methods of use
CA2903459C (en) 2013-03-15 2024-02-20 Corium International, Inc. Multiple impact microprojection applicators and methods of use
ES2761580T3 (es) 2013-03-15 2020-05-20 Corium Inc Micromatrices para suministro de agente terapéutico, métodos de uso y métodos de fabricación
CN105217565B (zh) * 2014-06-09 2017-01-11 中国科学院苏州纳米技术与纳米仿生研究所 一种单晶硅空心微针结构的制作方法
EP3188714A1 (de) 2014-09-04 2017-07-12 Corium International, Inc. Mikrostrukturanordnung, verfahren zur herstellung und verfahren zur verwendung
US10857093B2 (en) 2015-06-29 2020-12-08 Corium, Inc. Microarray for delivery of therapeutic agent, methods of use, and methods of making
FR3046682B1 (fr) * 2016-01-12 2018-02-16 Commissariat A L'energie Atomique Et Aux Energies Alternatives Procede de fabrication d'un ecran muni de microstructures retroreflechissantes
JP2017176652A (ja) 2016-03-31 2017-10-05 花王株式会社 微細中空突起具
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US6312612B1 (en) 1999-06-09 2001-11-06 The Procter & Gamble Company Apparatus and method for manufacturing an intracutaneous microneedle array

Also Published As

Publication number Publication date
AU2623501A (en) 2001-07-16
MXPA02006661A (es) 2003-03-10
DE60114764T2 (de) 2006-07-13
EP1244495A1 (de) 2002-10-02
DE60114764D1 (de) 2005-12-15
EP1244495B1 (de) 2005-11-09
BR0107455A (pt) 2002-09-03
WO2001049362A8 (en) 2002-10-24
JP2003519014A (ja) 2003-06-17
US6406638B1 (en) 2002-06-18
WO2001049362A1 (en) 2001-07-12

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