ATE29622T1 - VIBRATION DAMPING DEVICE. - Google Patents

VIBRATION DAMPING DEVICE.

Info

Publication number
ATE29622T1
ATE29622T1 AT82111621T AT82111621T ATE29622T1 AT E29622 T1 ATE29622 T1 AT E29622T1 AT 82111621 T AT82111621 T AT 82111621T AT 82111621 T AT82111621 T AT 82111621T AT E29622 T1 ATE29622 T1 AT E29622T1
Authority
AT
Austria
Prior art keywords
expander module
isolators
expander
bellows
module
Prior art date
Application number
AT82111621T
Other languages
German (de)
Inventor
Guy S Venuti
Original Assignee
Vacuum Technology Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vacuum Technology Inc filed Critical Vacuum Technology Inc
Application granted granted Critical
Publication of ATE29622T1 publication Critical patent/ATE29622T1/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
    • F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
    • F16F15/04—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using elastic means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/023—Means for mechanically adjusting components not otherwise provided for
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Aviation & Aerospace Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Buildings Adapted To Withstand Abnormal External Influences (AREA)
  • Golf Clubs (AREA)
  • Vibration Dampers (AREA)
  • Vibration Prevention Devices (AREA)
  • Containers, Films, And Cooling For Superconductive Devices (AREA)

Abstract

A cryogenic vacuum pump has an expander module (12) suspended from the vacuum chamber of an electron microscope by a metal bellows (32) which dampens the vibrations transmitted to the electron microscope from the expander module. A weight (44) mounted on the expander module and disposed around the bellows counters the lifting force of the atmospheric pressure acting on the expander module and protects the bellows. The expander module is maintained in a centered position by vibration damping isolators (50) disposed symtrically around the expander module and which are attached to a support (10) extending down from the vacuum housing. In one embodiment the isolators are bar magnets which repel magnetic ring attached to the expander module. In another embodiment the isolators are ladders in which the rungs are wire cables tensioned between a side members attached respectively to the expander module and to the support. The compressor (16) of the cryogenic vacuum pump is a separate unit having a high pressure feed line (14) and a low pressure return line (16) which are connected to the inlet and outlet of the expander module by helical flexible hoses having freely suspended turns which damp the vibrations transmitted by the hoses.
AT82111621T 1982-12-14 1982-12-14 VIBRATION DAMPING DEVICE. ATE29622T1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP82111621A EP0111032B1 (en) 1982-12-14 1982-12-14 Vibration damping arrangement

Publications (1)

Publication Number Publication Date
ATE29622T1 true ATE29622T1 (en) 1987-09-15

Family

ID=8189403

Family Applications (1)

Application Number Title Priority Date Filing Date
AT82111621T ATE29622T1 (en) 1982-12-14 1982-12-14 VIBRATION DAMPING DEVICE.

Country Status (3)

Country Link
EP (1) EP0111032B1 (en)
AT (1) ATE29622T1 (en)
DE (1) DE3277262D1 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6467276B2 (en) 2000-02-17 2002-10-22 Lg Electronics Inc. Pulse tube refrigerator
DE102007022121A1 (en) * 2007-05-11 2008-11-13 Oerlikon Leybold Vacuum Gmbh Arrangement for vacuum pump and vacuum receiver, includes relative movement between vacuum pump and vacuum receiver, where vacuum pump is arranged vertically below vacuum receiver
CN107863218B (en) * 2017-11-09 2024-03-26 西安聚能超导磁体科技有限公司 Device and method for effectively reducing vibration of refrigerator
CN108479878A (en) * 2018-02-23 2018-09-04 中国工程物理研究院激光聚变研究中心 A kind of low vibration low temperature test device

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3371895A (en) * 1965-12-27 1968-03-05 Aeroflex Lab Inc Vibration-damping and loadsupporting apparatus
US3423614A (en) * 1966-12-09 1969-01-21 Gen Electric Inside-out motion damper
US3514600A (en) * 1967-11-20 1970-05-26 Parke Davis & Co Flexible conduit means for connecting an electron microscope to a vacuum pump
JPS595179B2 (en) * 1979-05-18 1984-02-03 富士通株式会社 Vibration isolation structure for vacuum equipment

Also Published As

Publication number Publication date
EP0111032A1 (en) 1984-06-20
DE3277262D1 (en) 1987-10-15
EP0111032B1 (en) 1987-09-09

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Legal Events

Date Code Title Description
UEP Publication of translation of european patent specification
REN Ceased due to non-payment of the annual fee