ATE2811T1 - Plasmagenerator. - Google Patents

Plasmagenerator.

Info

Publication number
ATE2811T1
ATE2811T1 AT80400993T AT80400993T ATE2811T1 AT E2811 T1 ATE2811 T1 AT E2811T1 AT 80400993 T AT80400993 T AT 80400993T AT 80400993 T AT80400993 T AT 80400993T AT E2811 T1 ATE2811 T1 AT E2811T1
Authority
AT
Austria
Prior art keywords
inductive coil
anode
generator
circuit
plasma generator
Prior art date
Application number
AT80400993T
Other languages
English (en)
Inventor
Rene Durr
Original Assignee
Instruments S.A.
Rene Durr
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Instruments S.A., Rene Durr filed Critical Instruments S.A.
Application granted granted Critical
Publication of ATE2811T1 publication Critical patent/ATE2811T1/de

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03B—GENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUENCY-CHANGING, BY CIRCUITS EMPLOYING ACTIVE ELEMENTS WHICH OPERATE IN A NON-SWITCHING MANNER; GENERATION OF NOISE BY SUCH CIRCUITS
    • H03B5/00—Generation of oscillations using amplifier with regenerative feedback from output to input
    • H03B5/18—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element comprising distributed inductance and capacitance
    • H03B5/1817—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element comprising distributed inductance and capacitance the frequency-determining element being a cavity resonator
    • H03B5/1835—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element comprising distributed inductance and capacitance the frequency-determining element being a cavity resonator the active element in the amplifier being a vacuum tube
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Electromagnetism (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Plasma Technology (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Transition And Organic Metals Composition Catalysts For Addition Polymerization (AREA)
  • Electron Sources, Ion Sources (AREA)
AT80400993T 1979-07-04 1980-07-01 Plasmagenerator. ATE2811T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR7917359A FR2460589A1 (fr) 1979-07-04 1979-07-04 Generateur de plasma
EP80400993A EP0022404B1 (de) 1979-07-04 1980-07-01 Plasmagenerator

Publications (1)

Publication Number Publication Date
ATE2811T1 true ATE2811T1 (de) 1983-04-15

Family

ID=9227498

Family Applications (1)

Application Number Title Priority Date Filing Date
AT80400993T ATE2811T1 (de) 1979-07-04 1980-07-01 Plasmagenerator.

Country Status (6)

Country Link
US (1) US4337415A (de)
EP (1) EP0022404B1 (de)
JP (1) JPS5635400A (de)
AT (1) ATE2811T1 (de)
DE (1) DE3062341D1 (de)
FR (1) FR2460589A1 (de)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB9226335D0 (en) * 1992-12-17 1993-02-10 Fisons Plc Inductively coupled plasma spectrometers and radio-frequency power supply therefor
US5383019A (en) * 1990-03-23 1995-01-17 Fisons Plc Inductively coupled plasma spectrometers and radio-frequency power supply therefor
NL9000809A (nl) * 1990-04-06 1991-11-01 Philips Nv Plasmagenerator.
FR2683422B1 (fr) * 1991-10-31 1994-01-21 Rc Durr Sa Generateur haute frequence pour torche a plasma.
AU2003195A (en) * 1994-06-21 1996-01-04 Boc Group, Inc., The Improved power distribution for multiple electrode plasma systems using quarter wavelength transmission lines
WO2001005020A1 (en) 1999-07-13 2001-01-18 Tokyo Electron Limited Radio frequency power source for generating an inductively coupled plasma
US6305316B1 (en) * 2000-07-20 2001-10-23 Axcelis Technologies, Inc. Integrated power oscillator RF source of plasma immersion ion implantation system
US7459899B2 (en) 2005-11-21 2008-12-02 Thermo Fisher Scientific Inc. Inductively-coupled RF power source
US9591738B2 (en) * 2008-04-03 2017-03-07 Novellus Systems, Inc. Plasma generator systems and methods of forming plasma
US8575843B2 (en) 2008-05-30 2013-11-05 Colorado State University Research Foundation System, method and apparatus for generating plasma
US8994270B2 (en) 2008-05-30 2015-03-31 Colorado State University Research Foundation System and methods for plasma application
EP2297377B1 (de) 2008-05-30 2017-12-27 Colorado State University Research Foundation Auf plasma basierende chemikalienquellenvorrichtung und verfahren zu ihrer verwendung
US8222822B2 (en) 2009-10-27 2012-07-17 Tyco Healthcare Group Lp Inductively-coupled plasma device
AU2010349784B2 (en) 2010-03-31 2015-01-15 Colorado State University Research Foundation Liquid-gas interface plasma device
CA2794902A1 (en) 2010-03-31 2011-10-06 Colorado State University Research Foundation Liquid-gas interface plasma device
US9532826B2 (en) 2013-03-06 2017-01-03 Covidien Lp System and method for sinus surgery
US9555145B2 (en) 2013-03-13 2017-01-31 Covidien Lp System and method for biofilm remediation

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3467471A (en) * 1963-10-21 1969-09-16 Albright & Wilson Mfg Ltd Plasma light source for spectroscopic investigation
DE1514322C3 (de) * 1965-11-12 1974-06-06 Philips Patentverwaltung Gmbh, 2000 Hamburg Schaltungsanordnung zum Zünden und Betrieb eines Hochfrequenz-Induktions-Plasmabrenners
US3958883A (en) * 1974-07-10 1976-05-25 Baird-Atomic, Inc. Radio frequency induced plasma excitation of optical emission spectroscopic samples

Also Published As

Publication number Publication date
JPS5635400A (en) 1981-04-08
JPH0160920B2 (de) 1989-12-26
FR2460589B1 (de) 1982-09-03
US4337415A (en) 1982-06-29
DE3062341D1 (en) 1983-04-21
FR2460589A1 (fr) 1981-01-23
EP0022404A1 (de) 1981-01-14
EP0022404B1 (de) 1983-03-16

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Legal Events

Date Code Title Description
UEP Publication of translation of european patent specification
REN Ceased due to non-payment of the annual fee