Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from EP99870077Aexternal-prioritypatent/EP1020543A1/de
Application filed by Imec Interuniversity MicroelecfiledCriticalImec Interuniversity Microelec
Application grantedgrantedCritical
Publication of ATE276382T1publicationCriticalpatent/ATE276382T1/de