ATE222863T1 - Verfahren zur verklebung einer optischen membranaddeckung für rahmen - Google Patents

Verfahren zur verklebung einer optischen membranaddeckung für rahmen

Info

Publication number
ATE222863T1
ATE222863T1 AT95933195T AT95933195T ATE222863T1 AT E222863 T1 ATE222863 T1 AT E222863T1 AT 95933195 T AT95933195 T AT 95933195T AT 95933195 T AT95933195 T AT 95933195T AT E222863 T1 ATE222863 T1 AT E222863T1
Authority
AT
Austria
Prior art keywords
component
resin
initiator
frames
bonding
Prior art date
Application number
AT95933195T
Other languages
English (en)
Inventor
Ching-Bore Wang
Ysung-Tsai Yen
Original Assignee
Micro Lithography Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Micro Lithography Inc filed Critical Micro Lithography Inc
Application granted granted Critical
Publication of ATE222863T1 publication Critical patent/ATE222863T1/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J5/00—Manufacture of articles or shaped materials containing macromolecular substances
    • C08J5/12—Bonding of a preformed macromolecular material to the same or other solid material such as metal, glass, leather, e.g. using adhesives
    • C08J5/124—Bonding of a preformed macromolecular material to the same or other solid material such as metal, glass, leather, e.g. using adhesives using adhesives based on a macromolecular component
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/62—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof
    • G03F1/64—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof characterised by the frames, e.g. structure or material, including bonding means therefor
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J2327/00—Characterised by the use of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Derivatives of such polymers
    • C08J2327/02—Characterised by the use of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Derivatives of such polymers not modified by chemical after-treatment
    • C08J2327/12—Characterised by the use of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Derivatives of such polymers not modified by chemical after-treatment containing fluorine atoms

Landscapes

  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Organic Chemistry (AREA)
  • Adhesives Or Adhesive Processes (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Closing Of Containers (AREA)
AT95933195T 1994-09-22 1995-09-22 Verfahren zur verklebung einer optischen membranaddeckung für rahmen ATE222863T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US31053594A 1994-09-22 1994-09-22
PCT/US1995/012079 WO1996009183A1 (en) 1994-09-22 1995-09-22 Optical pellicle membrane to frame adhesion method

Publications (1)

Publication Number Publication Date
ATE222863T1 true ATE222863T1 (de) 2002-09-15

Family

ID=23202949

Family Applications (1)

Application Number Title Priority Date Filing Date
AT95933195T ATE222863T1 (de) 1994-09-22 1995-09-22 Verfahren zur verklebung einer optischen membranaddeckung für rahmen

Country Status (6)

Country Link
EP (1) EP0778804B1 (de)
JP (1) JP3405732B2 (de)
AT (1) ATE222863T1 (de)
AU (1) AU3595295A (de)
DE (1) DE69527969D1 (de)
WO (1) WO1996009183A1 (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7060774B2 (en) * 2002-02-28 2006-06-13 Merck Patent Gesellschaft Prepolymer material, polymer material, imprinting process and their use
KR20110003576A (ko) 2008-05-06 2011-01-12 휴렛-팩커드 디벨롭먼트 컴퍼니, 엘.피. 얇은 펠리클 빔 스플리터의 제조
KR101990345B1 (ko) * 2009-10-02 2019-06-18 신에쓰 가가꾸 고교 가부시끼가이샤 펠리클의 제조 방법

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4985473A (en) * 1980-05-20 1991-01-15 Minnesota Mining And Manufacturing Company Compositions for providing abherent coatings
US5168001A (en) * 1991-05-20 1992-12-01 E. I. Du Pont De Nemours And Company Perfluoropolymer coated pellicle

Also Published As

Publication number Publication date
WO1996009183A1 (en) 1996-03-28
EP0778804B1 (de) 2002-08-28
DE69527969D1 (de) 2002-10-02
EP0778804A4 (de) 1998-01-07
EP0778804A1 (de) 1997-06-18
AU3595295A (en) 1996-04-09
JP3405732B2 (ja) 2003-05-12
JPH10509989A (ja) 1998-09-29

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Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties