ATE159678T1 - Aufhängungseinrichtung für linearmotor - Google Patents

Aufhängungseinrichtung für linearmotor

Info

Publication number
ATE159678T1
ATE159678T1 AT93420308T AT93420308T ATE159678T1 AT E159678 T1 ATE159678 T1 AT E159678T1 AT 93420308 T AT93420308 T AT 93420308T AT 93420308 T AT93420308 T AT 93420308T AT E159678 T1 ATE159678 T1 AT E159678T1
Authority
AT
Austria
Prior art keywords
linear motor
mounting
modular
platen
compliant
Prior art date
Application number
AT93420308T
Other languages
English (en)
Inventor
Brian D Hoffman
Steven H Pollack
Peter Smit
John Woolley
Original Assignee
Megamation Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Megamation Inc filed Critical Megamation Inc
Application granted granted Critical
Publication of ATE159678T1 publication Critical patent/ATE159678T1/de

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
    • H02K41/031—Synchronous motors; Motors moving step by step; Reluctance motors of the permanent magnet type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J17/00—Joints
    • B25J17/02—Wrist joints
    • B25J17/0208—Compliance devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/10—Program-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/12—Program-controlled manipulators characterised by positioning means for manipulator elements electric
    • B25J9/123—Linear actuators
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K2201/00—Specific aspects not provided for in the other groups of this subclass relating to the magnetic circuits
    • H02K2201/18—Machines moving with multiple degrees of freedom

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Electromagnetism (AREA)
  • Power Engineering (AREA)
  • Linear Motors (AREA)
  • Manipulator (AREA)
  • Vehicle Body Suspensions (AREA)
  • Reciprocating, Oscillating Or Vibrating Motors (AREA)
AT93420308T 1993-02-04 1993-07-29 Aufhängungseinrichtung für linearmotor ATE159678T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/013,295 US5352946A (en) 1993-02-04 1993-02-04 Linear motor suspension system

Publications (1)

Publication Number Publication Date
ATE159678T1 true ATE159678T1 (de) 1997-11-15

Family

ID=21759226

Family Applications (1)

Application Number Title Priority Date Filing Date
AT93420308T ATE159678T1 (de) 1993-02-04 1993-07-29 Aufhängungseinrichtung für linearmotor

Country Status (5)

Country Link
US (1) US5352946A (de)
EP (1) EP0609633B1 (de)
JP (1) JPH06245478A (de)
AT (1) ATE159678T1 (de)
DE (1) DE69314930D1 (de)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5703420A (en) * 1994-10-11 1997-12-30 Canon Kabushiki Kaisha Moving magnet type multi-phase linear motor with vibration suppression and coil cooling means
WO1999048192A1 (en) * 1998-03-19 1999-09-23 Nikon Corporation Flat motor, stage, exposure apparatus and method of producing the same, and device and method for manufacturing the same
US6097114A (en) * 1998-08-17 2000-08-01 Nikon Corporation Compact planar motor having multiple degrees of freedom
US6147421A (en) * 1998-11-16 2000-11-14 Nikon Corporation Platform positionable in at least three degrees of freedom by interaction with coils
US6208045B1 (en) 1998-11-16 2001-03-27 Nikon Corporation Electric motors and positioning devices having moving magnet arrays and six degrees of freedom
DE19942083C2 (de) * 1999-09-03 2003-12-24 Heinz Peter Brandstetter Werkzeug-, Handhabung- oder Messmaschine
MY144519A (en) * 2000-03-01 2011-09-30 Intest Corp Vertical counter balanced test head manipulator
US6445093B1 (en) 2000-06-26 2002-09-03 Nikon Corporation Planar motor with linear coil arrays
US6452292B1 (en) 2000-06-26 2002-09-17 Nikon Corporation Planar motor with linear coil arrays
US6770987B1 (en) * 2000-07-25 2004-08-03 Nikon Corporation Brushless electric motors with reduced stray AC magnetic fields
US6545375B2 (en) 2001-02-20 2003-04-08 Ralph L. Hollis, Jr. Field-joinable platen tiles for planar motors
US20040155534A1 (en) * 2003-02-07 2004-08-12 Engwall Mats Anders Structure integrating gas support bearing and a planar electromagnetic drive and levitation system
CN100521468C (zh) * 2004-08-20 2009-07-29 清华大学 永磁同步平面电动机
US8035325B2 (en) * 2006-08-21 2011-10-11 Seiko Epson Corporation Single-phase brushless motor
CN108422408A (zh) * 2018-05-23 2018-08-21 苏州赛亚智能技术有限公司 一种用于机器人的移动底座

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4823062A (en) * 1987-07-23 1989-04-18 Megamation, Incorporated Method and apparatus for precision control of linear motors and the like employing a closed loop technique
US4949923A (en) * 1989-07-18 1990-08-21 Maytag Corporation Self-leveling assembly for an appliance
US5126648A (en) * 1990-03-22 1992-06-30 Megamation Incorporated High resolution piggyback linear motor design for placement systems and the like
JP4088378B2 (ja) * 1998-09-08 2008-05-21 トヨタ自動車株式会社 発電機および蓄電器を備えた車両の制御装置

Also Published As

Publication number Publication date
EP0609633A1 (de) 1994-08-10
US5352946A (en) 1994-10-04
EP0609633B1 (de) 1997-10-29
JPH06245478A (ja) 1994-09-02
DE69314930D1 (de) 1997-12-04

Similar Documents

Publication Publication Date Title
DE69314930D1 (de) Aufhängungseinrichtung für Linearmotor
JP3832891B2 (ja) リニア電磁アクチュエータを用いたｘｙテーブル
JP4886355B2 (ja) 可動マグネット型リニアモータを内蔵したスライド装置
US5357158A (en) Direct current linear motor and a direct drive unit on which it is equipped
CN103592824A (zh) 一种二自由度高精度大行程气浮工件台
JPH07163128A (ja) ２以上の可動テーブルを有する直流リニアモータ
US12068655B2 (en) Displacement device based on hall-effect sensors and planar motors
US8881626B2 (en) Lathe for machining curved surfaces
CN119079864B (zh) 一种精密升降平台
US6150740A (en) Linear motion carriage system and method with bearings preloaded by inclined linear motor with high attractive force
US9346143B2 (en) Lathe for machining curved surfaces
US6661125B2 (en) Linear motor
US20250015696A1 (en) Linear motor module
US11097387B2 (en) Machining center
US5648690A (en) Motor system generating orthogonal movement in a single plane
WO2002091436A1 (en) Apparatus for the measurement or machining of an object, provided with a displacement stage with wedge-shaped guides
CN117253842B (zh) 一种微动台及移位装置
US6628435B1 (en) Contact-less ballistic scanning method
DE59409168D1 (de) Bodenfräsmaschine
JP3208259B2 (ja) リニア直流モータ
JPH09261943A (ja) リニアモータ駆動装置
ES8705277A1 (es) Unidad de tres ejes de mando digital principalmente para maquina de transferencia y taller flexible.
JPS60223119A (ja) ２軸方向非接触駆動形精密移動台
CN222932261U (zh) 定位机构及加工设备
CN210476863U (zh) 一种高精度定位平台