ATE154978T1 - Verfahren zur feststellung von fremdkörpergehalt in gasen - Google Patents
Verfahren zur feststellung von fremdkörpergehalt in gasenInfo
- Publication number
- ATE154978T1 ATE154978T1 AT91917494T AT91917494T ATE154978T1 AT E154978 T1 ATE154978 T1 AT E154978T1 AT 91917494 T AT91917494 T AT 91917494T AT 91917494 T AT91917494 T AT 91917494T AT E154978 T1 ATE154978 T1 AT E154978T1
- Authority
- AT
- Austria
- Prior art keywords
- gas
- channel
- ions
- different
- gases
- Prior art date
Links
- 239000007789 gas Substances 0.000 title abstract 5
- 238000000034 method Methods 0.000 title abstract 5
- 150000002500 ions Chemical class 0.000 abstract 5
- 239000000126 substance Substances 0.000 abstract 3
- 238000001228 spectrum Methods 0.000 abstract 2
- 238000001514 detection method Methods 0.000 abstract 1
- 230000005684 electric field Effects 0.000 abstract 1
- 239000012535 impurity Substances 0.000 abstract 1
- 238000000926 separation method Methods 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/62—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating the ionisation of gases, e.g. aerosols; by investigating electric discharges, e.g. emission of cathode
- G01N27/64—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating the ionisation of gases, e.g. aerosols; by investigating electric discharges, e.g. emission of cathode using wave or particle radiation to ionise a gas, e.g. in an ionisation chamber
- G01N27/66—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating the ionisation of gases, e.g. aerosols; by investigating electric discharges, e.g. emission of cathode using wave or particle radiation to ionise a gas, e.g. in an ionisation chamber and measuring current or voltage
Landscapes
- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Electrochemistry (AREA)
- Physics & Mathematics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Toxicology (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
- Solid-Sorbent Or Filter-Aiding Compositions (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FI904997A FI87954C (fi) | 1990-10-11 | 1990-10-11 | Menetelmä kaasun vierasainepitoisuuksien määrittämiseksi |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE154978T1 true ATE154978T1 (de) | 1997-07-15 |
Family
ID=8531217
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT91917494T ATE154978T1 (de) | 1990-10-11 | 1991-10-10 | Verfahren zur feststellung von fremdkörpergehalt in gasen |
Country Status (9)
Country | Link |
---|---|
US (1) | US5543331A (de) |
EP (1) | EP0552206B1 (de) |
JP (1) | JPH06507472A (de) |
AT (1) | ATE154978T1 (de) |
AU (1) | AU8643791A (de) |
CA (1) | CA2093657A1 (de) |
DE (1) | DE69126711D1 (de) |
FI (1) | FI87954C (de) |
WO (1) | WO1992007255A1 (de) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0687359A1 (de) * | 1993-03-05 | 1995-12-20 | The Secretary Of State For Defence In Her Britannic Majesty's Government Of The United Kingdom Of Great Britain And | Gasdetector |
FI99165C (fi) * | 1994-12-15 | 1997-10-10 | Environics Oy | Menetelmä analyyttien mittaamiseksi ioniliikkuvuusspektrometrialla |
US6815671B2 (en) * | 2000-06-09 | 2004-11-09 | The University Of Delaware | System and method for chemical analysis using laser ablation |
US6606899B1 (en) * | 2000-07-07 | 2003-08-19 | Air Products And Chemicals, Inc. | Total impurity monitor for gases |
FI118277B (fi) | 2002-03-25 | 2007-09-14 | Environics Oy | Kennorakenne, laite ja menetelmä |
US9390898B1 (en) | 2013-08-30 | 2016-07-12 | Leidos, Inc. | System and method for fusing chemical detectors |
CN108008054B (zh) * | 2013-10-28 | 2019-09-27 | 同方威视技术股份有限公司 | 离子迁移谱仪系统 |
CN109841471B (zh) * | 2017-11-24 | 2021-12-17 | 北京北方华创微电子装备有限公司 | 分离正负离子的装置、成膜设备及腔室清洗方法 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2422264A (en) * | 1945-05-08 | 1947-06-17 | Robert V Seaman | Differential ionic analyzer |
CA1146632A (en) * | 1979-10-01 | 1983-05-17 | John F. Wroten, Jr. | Apparatus for simultaneous detection of positive and negative ions in ion mobility spectrometry |
US4445038A (en) * | 1979-10-01 | 1984-04-24 | The Bendix Corporation | Apparatus for simultaneous detection of positive and negative ions in ion mobility spectrometry |
FI75055C (fi) * | 1986-06-03 | 1988-04-11 | Puumalaisen Tutkimuslaitos Oy | Foerfarande foer observerande av ingredienshalter av gas. |
GB2228139B (en) * | 1989-02-09 | 1993-11-17 | Graseby Ionics Ltd | Ion mobility detector |
-
1990
- 1990-10-11 FI FI904997A patent/FI87954C/fi active IP Right Grant
-
1991
- 1991-10-10 WO PCT/FI1991/000312 patent/WO1992007255A1/en active IP Right Grant
- 1991-10-10 EP EP91917494A patent/EP0552206B1/de not_active Expired - Lifetime
- 1991-10-10 AT AT91917494T patent/ATE154978T1/de active
- 1991-10-10 AU AU86437/91A patent/AU8643791A/en not_active Abandoned
- 1991-10-10 CA CA002093657A patent/CA2093657A1/en not_active Abandoned
- 1991-10-10 JP JP3516103A patent/JPH06507472A/ja active Pending
- 1991-10-10 DE DE69126711T patent/DE69126711D1/de not_active Expired - Lifetime
-
1994
- 1994-11-16 US US08/342,007 patent/US5543331A/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
AU8643791A (en) | 1992-05-20 |
CA2093657A1 (en) | 1992-04-12 |
FI87954C (fi) | 1999-03-23 |
JPH06507472A (ja) | 1994-08-25 |
FI904997A (fi) | 1992-04-12 |
EP0552206B1 (de) | 1997-07-02 |
EP0552206A1 (de) | 1993-07-28 |
DE69126711D1 (de) | 1997-08-07 |
US5543331A (en) | 1996-08-06 |
FI904997A0 (fi) | 1990-10-11 |
WO1992007255A1 (en) | 1992-04-30 |
FI87954B (fi) | 1992-11-30 |
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