ATE136376T1 - Lichtundurchlässiger maskenfilm - Google Patents

Lichtundurchlässiger maskenfilm

Info

Publication number
ATE136376T1
ATE136376T1 AT89307287T AT89307287T ATE136376T1 AT E136376 T1 ATE136376 T1 AT E136376T1 AT 89307287 T AT89307287 T AT 89307287T AT 89307287 T AT89307287 T AT 89307287T AT E136376 T1 ATE136376 T1 AT E136376T1
Authority
AT
Austria
Prior art keywords
lightsafe
perfaceable
light
mask film
substrate
Prior art date
Application number
AT89307287T
Other languages
English (en)
Inventor
Hiroshi Maruyama
Naohiko Kiryu
Etsuko Minezaki
Susumu Tagashira
Hisashi Shimokawahara
Original Assignee
Somar Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP18246488A external-priority patent/JPH0715577B2/ja
Application filed by Somar Corp filed Critical Somar Corp
Application granted granted Critical
Publication of ATE136376T1 publication Critical patent/ATE136376T1/de

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/38—Masks having auxiliary features, e.g. special coatings or marks for alignment or testing; Preparation thereof
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/68—Preparation processes not covered by groups G03F1/20 - G03F1/50
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/14—Layer or component removable to expose adhesive
    • Y10T428/1467—Coloring agent
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/29—Coated or structually defined flake, particle, cell, strand, strand portion, rod, filament, macroscopic fiber or mass thereof
    • Y10T428/2913—Rod, strand, filament or fiber
    • Y10T428/298—Physical dimension
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/31504—Composite [nonstructural laminate]
    • Y10T428/31971—Of carbohydrate

Landscapes

  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Adhesive Tapes (AREA)
  • Adhesives Or Adhesive Processes (AREA)
  • Laminated Bodies (AREA)
  • Detergent Compositions (AREA)
  • Pharmaceuticals Containing Other Organic And Inorganic Compounds (AREA)
  • Bidet-Like Cleaning Device And Other Flush Toilet Accessories (AREA)
  • Glass Compositions (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Non-Silver Salt Photosensitive Materials And Non-Silver Salt Photography (AREA)
  • Non-Portable Lighting Devices Or Systems Thereof (AREA)
  • Preparation Of Compounds By Using Micro-Organisms (AREA)
  • Luminescent Compositions (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
  • Organic Insulating Materials (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
AT89307287T 1988-07-20 1989-07-19 Lichtundurchlässiger maskenfilm ATE136376T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP18246488A JPH0715577B2 (ja) 1988-07-20 1988-07-20 遮光性マスキングフイルム
JP2191189 1989-01-31

Publications (1)

Publication Number Publication Date
ATE136376T1 true ATE136376T1 (de) 1996-04-15

Family

ID=26359050

Family Applications (1)

Application Number Title Priority Date Filing Date
AT89307287T ATE136376T1 (de) 1988-07-20 1989-07-19 Lichtundurchlässiger maskenfilm

Country Status (11)

Country Link
US (1) US5009944A (de)
EP (1) EP0352079B1 (de)
KR (1) KR910003053A (de)
AT (1) ATE136376T1 (de)
AU (1) AU606810B2 (de)
CA (1) CA1325927C (de)
DE (1) DE68926134T2 (de)
DK (1) DK359989A (de)
FI (1) FI893483L (de)
NO (1) NO177510C (de)
NZ (1) NZ230012A (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5368962A (en) * 1988-11-10 1994-11-29 Somar Corporation Masking film
DE4315136A1 (de) * 1993-05-07 1994-11-17 Voralp Ets Vorrichtung für die Maskierung von zu bearbeitenden Substraten
NL9400424A (nl) * 1994-03-17 1995-11-01 Jei Lee Corp Werkwijze en inrichting voor het vervaardigen van vellen voor het inpakken van producten.
US5707704A (en) * 1994-12-27 1998-01-13 Kimoto Co., Ltd. Masking films
CN101688094A (zh) * 2007-05-17 2010-03-31 约翰逊迪瓦西公司 表面涂层系统以及方法
WO2012162640A2 (en) 2011-05-25 2012-11-29 Diversey, Inc. Surface coating system and method of using surface coating system

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2372679A (en) * 1939-03-06 1945-04-03 Harry M Magid Coated sheet product
US3051670A (en) * 1959-11-13 1962-08-28 American Viscose Corp Coating composition comprising cellulose derivative and a crystalline polymer
US3352728A (en) * 1963-12-13 1967-11-14 Keuffel & Esser Co Material and method for making stencil masters
US3892900A (en) * 1972-11-02 1975-07-01 Daicel Ltd Masking films
JPS61166549A (ja) * 1985-01-18 1986-07-28 Somar Corp 遮光性マスキングフイルム
GB8800377D0 (en) * 1988-01-08 1988-02-10 Autotype Int Ltd Masking films

Also Published As

Publication number Publication date
FI893483A7 (fi) 1990-01-21
CA1325927C (en) 1994-01-11
NO177510C (no) 1995-10-04
KR910003053A (ko) 1991-02-26
NO892975L (no) 1990-01-22
US5009944A (en) 1991-04-23
DK359989A (da) 1990-01-21
NO177510B (no) 1995-06-19
AU3881389A (en) 1990-01-25
NO892975D0 (no) 1989-07-20
EP0352079A3 (de) 1991-06-12
DE68926134D1 (de) 1996-05-09
EP0352079B1 (de) 1996-04-03
DE68926134T2 (de) 1996-08-29
NZ230012A (en) 1991-04-26
DK359989D0 (da) 1989-07-20
EP0352079A2 (de) 1990-01-24
FI893483A0 (fi) 1989-07-19
FI893483L (fi) 1990-01-21
AU606810B2 (en) 1991-02-14

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Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties