ATE132617T1 - Mikromanipulator - Google Patents

Mikromanipulator

Info

Publication number
ATE132617T1
ATE132617T1 AT92105405T AT92105405T ATE132617T1 AT E132617 T1 ATE132617 T1 AT E132617T1 AT 92105405 T AT92105405 T AT 92105405T AT 92105405 T AT92105405 T AT 92105405T AT E132617 T1 ATE132617 T1 AT E132617T1
Authority
AT
Austria
Prior art keywords
substrate
micromanipulator
firmly connected
parallel
intensity
Prior art date
Application number
AT92105405T
Other languages
German (de)
English (en)
Inventor
Peter Dr Bley
Juergen Dr Mohr
Original Assignee
Karlsruhe Forschzent
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Karlsruhe Forschzent filed Critical Karlsruhe Forschzent
Application granted granted Critical
Publication of ATE132617T1 publication Critical patent/ATE132617T1/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/28—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with deflection of beams of light, e.g. for direct optical indication
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/3512—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
    • G02B6/3544—2D constellations, i.e. with switching elements and switched beams located in a plane
    • G02B6/3548—1xN switch, i.e. one input and a selectable single output of N possible outputs
    • G02B6/3552—1x1 switch, e.g. on/off switch
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
    • G02B6/3576—Temperature or heat actuation
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3594—Characterised by additional functional means, e.g. means for variably attenuating or branching or means for switching differently polarized beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/202—Movement
    • H01J2237/20271—Temperature responsive devices

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Micromachines (AREA)
  • Manipulator (AREA)
AT92105405T 1991-05-31 1992-03-28 Mikromanipulator ATE132617T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE4117892A DE4117892C1 (OSRAM) 1991-05-31 1991-05-31

Publications (1)

Publication Number Publication Date
ATE132617T1 true ATE132617T1 (de) 1996-01-15

Family

ID=6432908

Family Applications (1)

Application Number Title Priority Date Filing Date
AT92105405T ATE132617T1 (de) 1991-05-31 1992-03-28 Mikromanipulator

Country Status (3)

Country Link
EP (1) EP0519167B1 (OSRAM)
AT (1) ATE132617T1 (OSRAM)
DE (2) DE4117892C1 (OSRAM)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109366459B (zh) * 2018-09-30 2021-08-03 重庆大学 利用光纤布拉格光栅测量夹持力和夹爪位移的微夹钳

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3720248A1 (de) * 1987-06-19 1989-01-05 Schenck Ag Carl Verfahren und anordnung zur messung von verformungen an proben oder pruefkoerpern in pruefmaschinen
DE3809597A1 (de) * 1988-03-22 1989-10-05 Fraunhofer Ges Forschung Mikromechanisches stellelement
DE3841557A1 (de) * 1988-12-09 1990-06-13 Fraunhofer Ges Forschung Mikromechanischer manipulator

Also Published As

Publication number Publication date
DE4117892C1 (OSRAM) 1992-11-26
EP0519167A3 (en) 1993-06-30
EP0519167A2 (de) 1992-12-23
DE59204881D1 (de) 1996-02-15
EP0519167B1 (de) 1996-01-03

Similar Documents

Publication Publication Date Title
DE68903785D1 (de) Biosensoren.
DE3688373D1 (de) Temperaturmessung.
DE68919901D1 (de) Optisches Profilmessgerät.
GB8801807D0 (en) Biological sensors
DE69322273D1 (de) Temperaturmessprobe mit kurzer antwortzeit
DE68920338D1 (de) Optischer Lichtmessfühler zum Erfassen der Einfallsrichtung.
DE3575200D1 (de) Optisch-elektronisches messverfahren, eine dafuer erforderliche einrichtung und deren verwendung.
ATE138816T1 (de) Vorrichtung zum applizieren mit licht
KR900702391A (ko) 광학장치
SE8705189D0 (sv) Robotized handling device and sheet metal bending system featuring the same
KR840002113A (ko) 비임분사용 프리즘 및 그 제조방법 그리고 이프리즘을 갖춘광학판독 및/또는 기록장치
FR2666892B1 (fr) Capteur optique de temperature.
FR2346681A1 (fr) Dispositif de controle optique du profil d'un objet, utilisant un faisceau laser plan
SE8601261D0 (sv) Lengdmetningsdon
DE68917225D1 (de) Fingerspitzenfühler für Pulswelle.
ATE22426T1 (de) Positioniervorrichtung fuer das palettieren von stueckguetern.
ATE132617T1 (de) Mikromanipulator
NL7811878A (nl) Optisch meetstelsel met halfgeleider laser.
GB1515089A (en) Device for measuring temperature
DE69110230D1 (de) Gerät zur messung der lichtwellenlänge durch hochauflösenden nachweis von interferenz streifen.
DE69000564D1 (de) Optisches system zum messen von linear- oder winkelaenderungen.
ATE342774T1 (de) Ventileinheit für eine elektrostatische beschichtungsanlage
DE69328081D1 (de) Präzisionsverstärker mit sehr hoher Geschwindigkeit
IT1231293B (it) Telecoordinometro.
CH535114A (fr) Procédé de fabrication d'un élément présentant au moins une surface optique

Legal Events

Date Code Title Description
REN Ceased due to non-payment of the annual fee