ATA725175A - Anordnung zur bedampfung aus einer thermischen dampfquelle - Google Patents

Anordnung zur bedampfung aus einer thermischen dampfquelle

Info

Publication number
ATA725175A
ATA725175A AT725175A AT725175A ATA725175A AT A725175 A ATA725175 A AT A725175A AT 725175 A AT725175 A AT 725175A AT 725175 A AT725175 A AT 725175A AT A725175 A ATA725175 A AT A725175A
Authority
AT
Austria
Prior art keywords
steaming
arrangement
steam source
thermal steam
thermal
Prior art date
Application number
AT725175A
Other languages
English (en)
Other versions
AT338886B (de
Original Assignee
Horn Herwig Dr
Aldrian Adolf Ing
Golob Peter Dr
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Horn Herwig Dr, Aldrian Adolf Ing, Golob Peter Dr filed Critical Horn Herwig Dr
Priority to AT725175A priority Critical patent/AT338886B/de
Publication of ATA725175A publication Critical patent/ATA725175A/de
Application granted granted Critical
Publication of AT338886B publication Critical patent/AT338886B/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
AT725175A 1975-09-22 1975-09-22 Anordnung zur bedampfung aus einer thermischen dampfquelle AT338886B (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AT725175A AT338886B (de) 1975-09-22 1975-09-22 Anordnung zur bedampfung aus einer thermischen dampfquelle

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
AT725175A AT338886B (de) 1975-09-22 1975-09-22 Anordnung zur bedampfung aus einer thermischen dampfquelle

Publications (2)

Publication Number Publication Date
ATA725175A true ATA725175A (de) 1977-01-15
AT338886B AT338886B (de) 1977-09-26

Family

ID=3594170

Family Applications (1)

Application Number Title Priority Date Filing Date
AT725175A AT338886B (de) 1975-09-22 1975-09-22 Anordnung zur bedampfung aus einer thermischen dampfquelle

Country Status (1)

Country Link
AT (1) AT338886B (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2455634A1 (fr) * 1979-05-04 1980-11-28 Bois Daniel Procede et dispositif de depot par evaporation sous vide utilisant un faisceau d'electrons moule et un ecran
DE102010021547A1 (de) * 2010-05-20 2011-11-24 Konstantinos Fostiropoulos Verfahren und Vorrichtung zur Beschichtung von Substraten im Vakuumdepositionsverfahren

Also Published As

Publication number Publication date
AT338886B (de) 1977-09-26

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