AT522524A3 - Replikationsvorrichtung und Verfahren zum Abbilden einer Struktur auf einem Substrat - Google Patents
Replikationsvorrichtung und Verfahren zum Abbilden einer Struktur auf einem Substrat Download PDFInfo
- Publication number
- AT522524A3 AT522524A3 ATA50366/2020A AT503662020A AT522524A3 AT 522524 A3 AT522524 A3 AT 522524A3 AT 503662020 A AT503662020 A AT 503662020A AT 522524 A3 AT522524 A3 AT 522524A3
- Authority
- AT
- Austria
- Prior art keywords
- assemblies
- substrate
- imaging
- replication device
- chuck
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/707—Chucks, e.g. chucking or un-chucking operations or structural details
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
- B29C59/02—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
- B29C59/02—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing
- B29C59/022—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing characterised by the disposition or the configuration, e.g. dimensions, of the embossments or the shaping tools therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/2002—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image
- G03F7/2012—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image using liquid photohardening compositions, e.g. for the production of reliefs such as flexographic plates or stamps
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70716—Stages
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70775—Position control, e.g. interferometers or encoders for determining the stage position
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
- G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
- G03F9/7003—Alignment type or strategy, e.g. leveling, global alignment
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
- G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
- G03F9/7003—Alignment type or strategy, e.g. leveling, global alignment
- G03F9/7042—Alignment for lithographic apparatus using patterning methods other than those involving the exposure to radiation, e.g. by stamping or imprinting
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
- B29C59/02—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing
- B29C59/022—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing characterised by the disposition or the configuration, e.g. dimensions, of the embossments or the shaping tools therefor
- B29C2059/023—Microembossing
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Nanotechnology (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Crystallography & Structural Chemistry (AREA)
- Shaping Of Tube Ends By Bending Or Straightening (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Abstract
Eine Replikationsvorrichtung (10) zur Herstellung von nano- und/oder mikrostrukturierten Bauteilen hat zwei zueinander bewegbaren Baugruppen (12, 14), wobei eine erste Baugruppe (12) einen Chuck (18) zur Aufnahme eines Substrats (16) und eine zweite Baugruppe (14) eine Aufnahme (20) für eine Prägestruktur (22) aufweist, wobei die Baugruppen (12, 14) relativ zueinander zwischen einer Prägeposition und einer Beladeposition bewegbar sind, und wobei an einer der beiden Baugruppen (12, 14) mindestens eine Dichtlippe (34, 38) angeordnet ist, die der anderen der beiden Baugruppen (12, 14) zugewandt ist und die die andere der beiden Baugruppen (12, 14) in der Prägeposition berührt und den Chuck (18) und/oder die Aufnahme (20) radial umgibt, wobei durch die Dichtlippe (34, 38) in der Prägeposition eine abgedichtete Überdruckkammer (36) zwischen den beiden Baugruppen (12, 14) begrenzt ist. Des Weiteren wird ein Verfahren zum Abbilden einer Struktur auf einem Substrat (16) angegeben.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
NL2023022A NL2023022B1 (en) | 2019-04-29 | 2019-04-29 | Replication device and method for reproducing a structure on a substrate |
Publications (3)
Publication Number | Publication Date |
---|---|
AT522524A2 AT522524A2 (de) | 2020-11-15 |
AT522524A3 true AT522524A3 (de) | 2021-05-15 |
AT522524B1 AT522524B1 (de) | 2022-04-15 |
Family
ID=67660427
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
ATA50366/2020A AT522524B1 (de) | 2019-04-29 | 2020-04-29 | Replikationsvorrichtung und Verfahren zum Abbilden einer Struktur auf einem Substrat |
Country Status (9)
Country | Link |
---|---|
US (1) | US20200341372A1 (de) |
JP (1) | JP2020184628A (de) |
KR (1) | KR20200126931A (de) |
CN (1) | CN111856875A (de) |
AT (1) | AT522524B1 (de) |
DE (1) | DE102020111711A1 (de) |
NL (1) | NL2023022B1 (de) |
SG (1) | SG10202003961YA (de) |
TW (1) | TW202046023A (de) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN117761967A (zh) * | 2024-01-23 | 2024-03-26 | 璞璘科技(杭州)有限公司 | 一种纳米压印平压设备 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20050145119A1 (en) * | 2000-07-18 | 2005-07-07 | Hua Tan | Apparatus for fluid pressure imprint lithography |
KR20080046476A (ko) * | 2006-11-22 | 2008-05-27 | 주식회사 에이디피엔지니어링 | 미세패턴 형성장치 및 이를 이용한 미세패턴 형성방법 |
US20080213418A1 (en) * | 2000-07-18 | 2008-09-04 | Hua Tan | Align-transfer-imprint system for imprint lithogrphy |
KR20100022820A (ko) * | 2008-08-20 | 2010-03-03 | 주식회사 에이디피엔지니어링 | 밀폐 챔버용 실링장치 및 이를 구비한 밀폐 챔버 조립체와 임프린트용 챔버 조립체, 그리고 이를 이용한 임프린트 방법 |
WO2015070054A1 (en) * | 2013-11-08 | 2015-05-14 | Canon Nanotechnologies, Inc. | Low contact imprint lithography template chuck system for improved overlay correction |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006245072A (ja) * | 2005-02-28 | 2006-09-14 | Canon Inc | パターン転写用モールドおよび転写装置 |
KR101371093B1 (ko) * | 2006-11-03 | 2014-03-10 | 엘아이지에이디피 주식회사 | 미세패턴 형성장치 및 이를 이용한 미세패턴 형성방법 |
JP4578517B2 (ja) * | 2007-12-26 | 2010-11-10 | Scivax株式会社 | インプリント装置およびインプリント方法 |
DE102010007970A1 (de) * | 2010-02-15 | 2011-08-18 | Suss MicroTec Lithography GmbH, 85748 | Verfahren und Vorrichtung zum aktiven Keilfehlerausgleich zwischen zwei im wesentlichen zueinander parallel positionierbaren Gegenständen |
WO2014145360A1 (en) * | 2013-03-15 | 2014-09-18 | Nanonex Corporation | Imprint lithography system and method for manufacturing |
NL2017773B1 (en) * | 2016-11-11 | 2018-05-24 | Suss Microtec Lithography Gmbh | Positioning device |
-
2019
- 2019-04-29 NL NL2023022A patent/NL2023022B1/en active
-
2020
- 2020-04-29 SG SG10202003961YA patent/SG10202003961YA/en unknown
- 2020-04-29 KR KR1020200052245A patent/KR20200126931A/ko active Search and Examination
- 2020-04-29 CN CN202010356080.XA patent/CN111856875A/zh active Pending
- 2020-04-29 AT ATA50366/2020A patent/AT522524B1/de active
- 2020-04-29 US US16/862,179 patent/US20200341372A1/en active Pending
- 2020-04-29 DE DE102020111711.6A patent/DE102020111711A1/de active Pending
- 2020-04-29 TW TW109114330A patent/TW202046023A/zh unknown
- 2020-04-30 JP JP2020080291A patent/JP2020184628A/ja active Pending
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20050145119A1 (en) * | 2000-07-18 | 2005-07-07 | Hua Tan | Apparatus for fluid pressure imprint lithography |
US20080213418A1 (en) * | 2000-07-18 | 2008-09-04 | Hua Tan | Align-transfer-imprint system for imprint lithogrphy |
KR20080046476A (ko) * | 2006-11-22 | 2008-05-27 | 주식회사 에이디피엔지니어링 | 미세패턴 형성장치 및 이를 이용한 미세패턴 형성방법 |
KR20100022820A (ko) * | 2008-08-20 | 2010-03-03 | 주식회사 에이디피엔지니어링 | 밀폐 챔버용 실링장치 및 이를 구비한 밀폐 챔버 조립체와 임프린트용 챔버 조립체, 그리고 이를 이용한 임프린트 방법 |
WO2015070054A1 (en) * | 2013-11-08 | 2015-05-14 | Canon Nanotechnologies, Inc. | Low contact imprint lithography template chuck system for improved overlay correction |
Also Published As
Publication number | Publication date |
---|---|
TW202046023A (zh) | 2020-12-16 |
SG10202003961YA (en) | 2020-11-27 |
KR20200126931A (ko) | 2020-11-09 |
JP2020184628A (ja) | 2020-11-12 |
DE102020111711A1 (de) | 2020-10-29 |
US20200341372A1 (en) | 2020-10-29 |
CN111856875A (zh) | 2020-10-30 |
AT522524B1 (de) | 2022-04-15 |
NL2023022B1 (en) | 2020-11-05 |
AT522524A2 (de) | 2020-11-15 |
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