AT504288A5 - Prüfkopf mit vertikalen prüfnadeln für integrierte halbleitergeräte - Google Patents

Prüfkopf mit vertikalen prüfnadeln für integrierte halbleitergeräte Download PDF

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Publication number
AT504288A5
AT504288A5 AT0953005A AT95302005A AT504288A5 AT 504288 A5 AT504288 A5 AT 504288A5 AT 0953005 A AT0953005 A AT 0953005A AT 95302005 A AT95302005 A AT 95302005A AT 504288 A5 AT504288 A5 AT 504288A5
Authority
AT
Austria
Prior art keywords
test head
integrated semiconductor
semiconductor equipment
vertical tips
tips
Prior art date
Application number
AT0953005A
Other languages
English (en)
Other versions
AT504288A1 (de
AT504288B1 (de
Inventor
Giuseppe Crippa
Stefano Felici
Original Assignee
Technoprobe Spa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Technoprobe Spa filed Critical Technoprobe Spa
Publication of AT504288A1 publication Critical patent/AT504288A1/de
Publication of AT504288A5 publication Critical patent/AT504288A5/de
Application granted granted Critical
Publication of AT504288B1 publication Critical patent/AT504288B1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06733—Geometry aspects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07357—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with flexible bodies, e.g. buckling beams

Landscapes

  • Physics & Mathematics (AREA)
  • Geometry (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
AT0953005A 2005-04-12 2005-04-12 Prüfkopf mit vertikalen prüfnadeln für integrierte halbleitergeräte AT504288B1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/IT2005/000204 WO2006109328A1 (en) 2005-04-12 2005-04-12 Contact probe for a testing head having vertical probes for semiconductor integreted electronic devices

Publications (3)

Publication Number Publication Date
AT504288A1 AT504288A1 (de) 2008-04-15
AT504288A5 true AT504288A5 (de) 2010-03-15
AT504288B1 AT504288B1 (de) 2010-04-15

Family

ID=35478598

Family Applications (1)

Application Number Title Priority Date Filing Date
AT0953005A AT504288B1 (de) 2005-04-12 2005-04-12 Prüfkopf mit vertikalen prüfnadeln für integrierte halbleitergeräte

Country Status (5)

Country Link
JP (1) JP2008536141A (de)
CN (1) CN101160531A (de)
AT (1) AT504288B1 (de)
CZ (1) CZ2007783A3 (de)
WO (1) WO2006109328A1 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009025164A (ja) * 2007-07-19 2009-02-05 Tokugen:Kk 検査治具とその製造方法
JP2018063233A (ja) * 2016-10-13 2018-04-19 松翰有限公司 プローブとそのプローブカードのプローブヘッド構造
JP7032167B2 (ja) * 2018-02-09 2022-03-08 日置電機株式会社 プローブピン、プローブユニットおよび検査装置
JP7254450B2 (ja) * 2018-05-16 2023-04-10 日本電産リード株式会社 プローブ、検査治具、検査装置、及びプローブの製造方法

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4027935A (en) * 1976-06-21 1977-06-07 International Business Machines Corporation Contact for an electrical contactor assembly
CH661129A5 (de) * 1982-10-21 1987-06-30 Feinmetall Gmbh Kontaktiervorrichtung.
KR100212169B1 (ko) * 1996-02-13 1999-08-02 오쿠보 마사오 프로브, 프로브의 제조, 그리고 프로브를 사용한 수직동작형 프로브 카드 어셈블리
JPH11125646A (ja) * 1997-10-21 1999-05-11 Mitsubishi Electric Corp 垂直針型プローブカード、その製造方法およびその不良プローブ針の交換方法
JPH11125645A (ja) * 1997-10-21 1999-05-11 Mitsubishi Electric Corp 垂直針型プローブカードおよびその製造方法
US6411112B1 (en) * 1998-02-19 2002-06-25 International Business Machines Corporation Off-axis contact tip and dense packing design for a fine pitch probe
FR2802346B1 (fr) * 1999-12-13 2002-02-08 Upsys Probe Technology Sas Connecteur de test de haute densite d'interconnexion destine notamment a la verification de circuits integres
JP3486841B2 (ja) * 2000-08-09 2004-01-13 日本電子材料株式会社 垂直型プローブカード
JP2002231399A (ja) * 2001-02-02 2002-08-16 Fujitsu Ltd 半導体装置試験用コンタクタ及びその製造方法
US6507207B2 (en) * 2001-02-20 2003-01-14 Vinh T. Nguyen Contact probe pin for wafer probing apparatus
JP2005055343A (ja) * 2003-08-06 2005-03-03 Tokyo Cathode Laboratory Co Ltd フラットパネルディスプレイ検査用プローブ装置

Also Published As

Publication number Publication date
JP2008536141A (ja) 2008-09-04
WO2006109328A1 (en) 2006-10-19
AT504288A1 (de) 2008-04-15
AT504288B1 (de) 2010-04-15
CZ2007783A3 (cs) 2008-04-02
CN101160531A (zh) 2008-04-09

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Legal Events

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ELJ Ceased due to non-payment of the annual fee
MM01 Lapse because of not paying annual fees

Effective date: 20110412