AT323500B - Aufhängevorrichtung für werkstücke bei der behandlung in einer elektrischen glimmentladung - Google Patents

Aufhängevorrichtung für werkstücke bei der behandlung in einer elektrischen glimmentladung

Info

Publication number
AT323500B
AT323500B AT738973A AT738973A AT323500B AT 323500 B AT323500 B AT 323500B AT 738973 A AT738973 A AT 738973A AT 738973 A AT738973 A AT 738973A AT 323500 B AT323500 B AT 323500B
Authority
AT
Austria
Prior art keywords
glime
discharge
electric
during treatment
hanging device
Prior art date
Application number
AT738973A
Other languages
German (de)
English (en)
Inventor
Horst Rordorf
Original Assignee
Berghaus Elektrophysik Anst
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Berghaus Elektrophysik Anst filed Critical Berghaus Elektrophysik Anst
Application granted granted Critical
Publication of AT323500B publication Critical patent/AT323500B/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/36—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T403/00—Joints and connections
    • Y10T403/32—Articulated members
    • Y10T403/32008—Plural distinct articulation axes
    • Y10T403/32041—Universal
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T403/00—Joints and connections
    • Y10T403/32—Articulated members
    • Y10T403/32606—Pivoted
    • Y10T403/32631—Universal ball and socket
    • Y10T403/32786—Divided socket-type coupling

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
  • Furnace Details (AREA)
  • Discharge Heating (AREA)
  • Automatic Assembly (AREA)
AT738973A 1972-08-25 1973-08-24 Aufhängevorrichtung für werkstücke bei der behandlung in einer elektrischen glimmentladung AT323500B (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH1259472A CH542024A (de) 1972-08-25 1972-08-25 Aufhängevorrichtung für Werkstücke bei ihrer Behandlung mittels einer elektrischen Glimmentladung

Publications (1)

Publication Number Publication Date
AT323500B true AT323500B (de) 1975-07-10

Family

ID=4384529

Family Applications (1)

Application Number Title Priority Date Filing Date
AT738973A AT323500B (de) 1972-08-25 1973-08-24 Aufhängevorrichtung für werkstücke bei der behandlung in einer elektrischen glimmentladung

Country Status (18)

Country Link
US (1) US3865451A (xx)
JP (1) JPS517624B2 (xx)
AT (1) AT323500B (xx)
BE (1) BE804018A (xx)
CA (1) CA1010405A (xx)
CH (1) CH542024A (xx)
CS (1) CS172873B2 (xx)
DD (1) DD110520A5 (xx)
DE (1) DE2339711C2 (xx)
ES (1) ES418155A1 (xx)
FR (1) FR2196956B1 (xx)
GB (1) GB1435546A (xx)
HU (1) HU169517B (xx)
IT (1) IT998416B (xx)
LU (1) LU68292A1 (xx)
NL (1) NL7311678A (xx)
PL (1) PL92566B1 (xx)
SE (1) SE384043B (xx)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2619814C2 (de) * 1976-05-05 1978-02-16 Ionit Anstalt Bernhard Berghaus, Vaduz Gestell und Rezipient zum Tragen zu behandelnder Werkstücke
DE3101351C2 (de) * 1981-01-17 1982-10-14 Klöckner Ionon GmbH, 5090 Leverkusen Vorrichtung zum Härten von metallischen Werkstücken mit einer evakuierbaren Kammer
JPS58213868A (ja) * 1982-06-04 1983-12-12 Toyota Central Res & Dev Lab Inc アルミニウムまたはアルミニウム合金のイオン窒化方法およびその装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR545514A (fr) * 1921-10-20 1922-10-13 Prise de courant électrique à rotule
US2576563A (en) * 1950-05-09 1951-11-27 Kirby A Blewett Swivel joint
US3187079A (en) * 1962-11-08 1965-06-01 Crucible Steel Co America Electrode clamp

Also Published As

Publication number Publication date
JPS517624B2 (xx) 1976-03-09
PL92566B1 (xx) 1977-04-30
GB1435546A (en) 1976-05-12
JPS5018327A (xx) 1975-02-26
IT998416B (it) 1976-01-20
DD110520A5 (xx) 1974-12-20
DE2339711A1 (de) 1974-03-07
NL7311678A (xx) 1974-02-27
US3865451A (en) 1975-02-11
BE804018A (fr) 1973-12-17
FR2196956A1 (xx) 1974-03-22
CH542024A (de) 1973-09-30
LU68292A1 (xx) 1973-10-24
SE384043B (sv) 1976-04-12
CA1010405A (en) 1977-05-17
ES418155A1 (es) 1976-03-16
DE2339711C2 (de) 1982-03-11
CS172873B2 (xx) 1977-01-28
FR2196956B1 (xx) 1976-06-18
HU169517B (xx) 1976-12-28

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Legal Events

Date Code Title Description
ELJ Ceased due to non-payment of the annual fee