AT307508B - Vorrichtung zur Herstellung homogener und planparalleler epitaktischer Aufwachsschichten aus A<III>B<V>-Verbindungen durch Schmelzepitaxie - Google Patents
Vorrichtung zur Herstellung homogener und planparalleler epitaktischer Aufwachsschichten aus A<III>B<V>-Verbindungen durch SchmelzepitaxieInfo
- Publication number
- AT307508B AT307508B AT644070A AT644070A AT307508B AT 307508 B AT307508 B AT 307508B AT 644070 A AT644070 A AT 644070A AT 644070 A AT644070 A AT 644070A AT 307508 B AT307508 B AT 307508B
- Authority
- AT
- Austria
- Prior art keywords
- homogeneous
- iii
- compounds
- plane
- production
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B19/00—Liquid-phase epitaxial-layer growth
- C30B19/08—Heating of the reaction chamber or the substrate
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B19/00—Liquid-phase epitaxial-layer growth
- C30B19/06—Reaction chambers; Boats for supporting the melt; Substrate holders
- C30B19/061—Tipping system, e.g. by rotation
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10S117/90—Apparatus characterized by composition or treatment thereof, e.g. surface finish, surface coating
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S148/00—Metal treatment
- Y10S148/056—Gallium arsenide
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE1936443A DE1936443C3 (de) | 1969-07-17 | 1969-07-17 | Vorrichtung zum Aufwachsen homogen dotierter, planparalleler epitaktischer ScNchten aus halbleitenden Verbindungen durch Schmelzepitaxie |
Publications (1)
Publication Number | Publication Date |
---|---|
AT307508B true AT307508B (de) | 1973-05-25 |
Family
ID=5740132
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT644070A AT307508B (de) | 1969-07-17 | 1970-07-15 | Vorrichtung zur Herstellung homogener und planparalleler epitaktischer Aufwachsschichten aus A<III>B<V>-Verbindungen durch Schmelzepitaxie |
Country Status (10)
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5213510B2 (US07351834-20080401-C00131.png) * | 1973-02-26 | 1977-04-14 | ||
US3898051A (en) * | 1973-12-28 | 1975-08-05 | Crystal Syst | Crystal growing |
US4359012A (en) * | 1978-01-19 | 1982-11-16 | Handotai Kenkyu Shinkokai | Apparatus for producing a semiconductor device utlizing successive liquid growth |
US4238252A (en) * | 1979-07-11 | 1980-12-09 | Hughes Aircraft Company | Process for growing indium phosphide of controlled purity |
US4401487A (en) * | 1980-11-14 | 1983-08-30 | Hughes Aircraft Company | Liquid phase epitaxy of mercury cadmium telluride layer |
US5011564A (en) * | 1986-05-28 | 1991-04-30 | Massachusetts Institute Of Technology | Epitaxial growth |
US4764350A (en) * | 1986-10-08 | 1988-08-16 | The United States Of America As Represented By The Secretary Of The Air Force | Method and apparatus for synthesizing a single crystal of indium phosphide |
JPH031359A (ja) * | 1989-01-31 | 1991-01-08 | Victor Co Of Japan Ltd | 磁気記録装置 |
-
1969
- 1969-07-17 DE DE1936443A patent/DE1936443C3/de not_active Expired
-
1970
- 1970-05-22 NL NL7007455A patent/NL7007455A/xx unknown
- 1970-07-13 US US00054280A patent/US3762943A/en not_active Expired - Lifetime
- 1970-07-14 CH CH1063270A patent/CH512261A/de not_active IP Right Cessation
- 1970-07-15 AT AT644070A patent/AT307508B/de not_active IP Right Cessation
- 1970-07-16 CA CA088,356,A patent/CA950334A/en not_active Expired
- 1970-07-16 FR FR7026218A patent/FR2051808B1/fr not_active Expired
- 1970-07-16 GB GB1290400D patent/GB1290400A/en not_active Expired
- 1970-07-17 JP JP45062161A patent/JPS508911B1/ja active Pending
- 1970-07-17 SE SE09915/70A patent/SE351569B/xx unknown
Also Published As
Publication number | Publication date |
---|---|
CA950334A (en) | 1974-07-02 |
JPS508911B1 (US07351834-20080401-C00131.png) | 1975-04-08 |
DE1936443C3 (de) | 1975-03-06 |
FR2051808B1 (US07351834-20080401-C00131.png) | 1974-05-03 |
GB1290400A (US07351834-20080401-C00131.png) | 1972-09-27 |
DE1936443A1 (de) | 1971-01-28 |
NL7007455A (US07351834-20080401-C00131.png) | 1971-01-19 |
US3762943A (en) | 1973-10-02 |
SE351569B (US07351834-20080401-C00131.png) | 1972-12-04 |
FR2051808A1 (US07351834-20080401-C00131.png) | 1971-04-09 |
CH512261A (de) | 1971-09-15 |
DE1936443B2 (de) | 1974-07-11 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
ELJ | Ceased due to non-payment of the annual fee |