AT293814B - Anordnung zur Vakuumbedampfung - Google Patents

Anordnung zur Vakuumbedampfung

Info

Publication number
AT293814B
AT293814B AT66670A AT66670A AT293814B AT 293814 B AT293814 B AT 293814B AT 66670 A AT66670 A AT 66670A AT 66670 A AT66670 A AT 66670A AT 293814 B AT293814 B AT 293814B
Authority
AT
Austria
Prior art keywords
arrangement
vacuum evaporation
evaporation
vacuum
Prior art date
Application number
AT66670A
Other languages
English (en)
Original Assignee
Balzers Patent Beteilig Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Balzers Patent Beteilig Ag filed Critical Balzers Patent Beteilig Ag
Application granted granted Critical
Publication of AT293814B publication Critical patent/AT293814B/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Drying Of Solid Materials (AREA)
  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
  • Apparatus For Disinfection Or Sterilisation (AREA)
  • Physical Vapour Deposition (AREA)
  • Particle Accelerators (AREA)
  • Welding Or Cutting Using Electron Beams (AREA)
AT66670A 1969-02-06 1970-01-26 Anordnung zur Vakuumbedampfung AT293814B (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH196069A CH508738A (de) 1969-02-06 1969-02-06 Anordnung zur Vakuumbedampfung

Publications (1)

Publication Number Publication Date
AT293814B true AT293814B (de) 1971-10-25

Family

ID=4222620

Family Applications (1)

Application Number Title Priority Date Filing Date
AT66670A AT293814B (de) 1969-02-06 1970-01-26 Anordnung zur Vakuumbedampfung

Country Status (6)

Country Link
AT (1) AT293814B (de)
CH (1) CH508738A (de)
DE (1) DE2002727C3 (de)
FR (1) FR2032698A5 (de)
GB (1) GB1280973A (de)
NL (1) NL6905262A (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102010021547A1 (de) * 2010-05-20 2011-11-24 Konstantinos Fostiropoulos Verfahren und Vorrichtung zur Beschichtung von Substraten im Vakuumdepositionsverfahren

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102013206598B4 (de) 2013-04-12 2019-06-27 VON ARDENNE Asset GmbH & Co. KG Vakuumbeschichtungsanlage

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102010021547A1 (de) * 2010-05-20 2011-11-24 Konstantinos Fostiropoulos Verfahren und Vorrichtung zur Beschichtung von Substraten im Vakuumdepositionsverfahren

Also Published As

Publication number Publication date
NL6905262A (de) 1970-08-10
FR2032698A5 (de) 1970-11-27
DE2002727B2 (de) 1973-01-11
DE2002727A1 (de) 1970-10-15
DE2002727C3 (de) 1975-11-20
GB1280973A (en) 1972-07-12
CH508738A (de) 1971-06-15

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Legal Events

Date Code Title Description
ELJ Ceased due to non-payment of the annual fee