AT261928B - Mikroskop-Immersionsobjektiv - Google Patents

Mikroskop-Immersionsobjektiv

Info

Publication number
AT261928B
AT261928B AT1061266A AT1061266A AT261928B AT 261928 B AT261928 B AT 261928B AT 1061266 A AT1061266 A AT 1061266A AT 1061266 A AT1061266 A AT 1061266A AT 261928 B AT261928 B AT 261928B
Authority
AT
Austria
Prior art keywords
immersion objective
microscope immersion
microscope
objective
immersion
Prior art date
Application number
AT1061266A
Other languages
English (en)
Inventor
Walter Klein
Original Assignee
Leitz Ernst Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leitz Ernst Gmbh filed Critical Leitz Ernst Gmbh
Application granted granted Critical
Publication of AT261928B publication Critical patent/AT261928B/de

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/02—Objectives

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Lenses (AREA)
AT1061266A 1965-11-26 1966-11-16 Mikroskop-Immersionsobjektiv AT261928B (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DEL0052236 1965-11-26

Publications (1)

Publication Number Publication Date
AT261928B true AT261928B (de) 1968-05-27

Family

ID=7274569

Family Applications (1)

Application Number Title Priority Date Filing Date
AT1061266A AT261928B (de) 1965-11-26 1966-11-16 Mikroskop-Immersionsobjektiv

Country Status (5)

Country Link
US (1) US3524694A (de)
AT (1) AT261928B (de)
CH (1) CH450754A (de)
DE (1) DE1472167A1 (de)
GB (1) GB1130200A (de)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3659923A (en) * 1971-03-17 1972-05-02 American Optical Corp Six component 100x microscope objective
JPS60203910A (ja) * 1984-03-28 1985-10-15 Olympus Optical Co Ltd 高倍率の内視鏡用対物レンズ
US5004307A (en) * 1990-04-12 1991-04-02 The Board Of Trustees Of The Leland Stanford Junior University Near field and solid immersion optical microscope
JPH09281399A (ja) * 1996-04-15 1997-10-31 Nikon Corp 落射蛍光用対物レンズ系および該対物レンズ系を備えた落射蛍光顕微鏡
US6621275B2 (en) 2001-11-28 2003-09-16 Optonics Inc. Time resolved non-invasive diagnostics system
US6594086B1 (en) * 2002-01-16 2003-07-15 Optonics, Inc. (A Credence Company) Bi-convex solid immersion lens
US6828811B2 (en) * 2002-04-10 2004-12-07 Credence Systems Corporation Optics landing system and method therefor
US7123035B2 (en) 2002-04-10 2006-10-17 Credence Systems Corporation Optics landing system and method therefor
RU2225022C1 (ru) * 2002-08-28 2004-02-27 Фролов Дмитрий Николаевич Планапохроматический микрообъектив с увеличенным рабочим расстоянием
DE10253679A1 (de) * 2002-11-18 2004-06-03 Infineon Technologies Ag Optische Einrichtung zur Verwendung bei einem Lithographie-Verfahren, insbesondere zur Herstellung eines Halbleiter-Bauelements, sowie optisches Lithographieverfahren
US7012537B2 (en) * 2004-02-10 2006-03-14 Credence Systems Corporation Apparatus and method for determining voltage using optical observation
US7327452B2 (en) * 2004-08-09 2008-02-05 Credence Systems Corporation Light beam apparatus and method for orthogonal alignment of specimen
US7480051B2 (en) * 2005-02-10 2009-01-20 Dcg Systems, Inc. Apparatus and method for hard-docking a tester to a tiltable imager
US7314767B2 (en) * 2005-05-27 2008-01-01 Credence Systems Corporation Method for local wafer thinning and reinforcement
US7450245B2 (en) 2005-06-29 2008-11-11 Dcg Systems, Inc. Method and apparatus for measuring high-bandwidth electrical signals using modulation in an optical probing system
US7616312B2 (en) * 2005-06-29 2009-11-10 Dcg Systems, Inc. Apparatus and method for probing integrated circuits using laser illumination
US7659981B2 (en) * 2005-08-26 2010-02-09 Dcg Systems, Inc. Apparatus and method for probing integrated circuits using polarization difference probing
US7733100B2 (en) 2005-08-26 2010-06-08 Dcg Systems, Inc. System and method for modulation mapping
JP4731262B2 (ja) * 2005-09-22 2011-07-20 ルネサスエレクトロニクス株式会社 不揮発性半導体記憶装置および、不揮発性半導体記憶装置の製造方法
SG10201506637YA (en) * 2009-05-01 2015-10-29 Dcg Systems Inc Systems and method for laser voltage imaging state mapping
KR102352024B1 (ko) 2014-03-11 2022-01-14 디씨지 시스템스 인코포레이티드 Sil 팁을 플로팅하는 것을 자체 정정

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1186234B (de) * 1962-10-03 1965-01-28 Leitz Ernst Gmbh Mikroskopobjektiv mit geebnetem Bildfeld
US3405993A (en) * 1965-06-02 1968-10-15 Bausch & Lomb High magnification semi-apochromatic microscope objective of the fluorite type

Also Published As

Publication number Publication date
GB1130200A (en) 1968-10-09
US3524694A (en) 1970-08-18
CH450754A (de) 1968-01-31
DE1472167A1 (de) 1969-01-09

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