AT261712B - Verfahren zur Herstellung einer optischen Maske - Google Patents

Verfahren zur Herstellung einer optischen Maske

Info

Publication number
AT261712B
AT261712B AT42465A AT42465A AT261712B AT 261712 B AT261712 B AT 261712B AT 42465 A AT42465 A AT 42465A AT 42465 A AT42465 A AT 42465A AT 261712 B AT261712 B AT 261712B
Authority
AT
Austria
Prior art keywords
making
optical mask
mask
optical
Prior art date
Application number
AT42465A
Other languages
German (de)
English (en)
Original Assignee
Philips Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Nv filed Critical Philips Nv
Application granted granted Critical
Publication of AT261712B publication Critical patent/AT261712B/de

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/54—Absorbers, e.g. of opaque materials
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/042—Coating on selected surface areas, e.g. using masks using masks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00—Etching metallic material by chemical means
    • C23F1/02—Local etching

Landscapes

  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • General Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Surface Treatment Of Glass (AREA)
AT42465A 1964-01-23 1965-01-20 Verfahren zur Herstellung einer optischen Maske AT261712B (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB297364A GB1057105A (en) 1964-01-23 1964-01-23 An optical mask

Publications (1)

Publication Number Publication Date
AT261712B true AT261712B (de) 1968-05-10

Family

ID=9749528

Family Applications (1)

Application Number Title Priority Date Filing Date
AT42465A AT261712B (de) 1964-01-23 1965-01-20 Verfahren zur Herstellung einer optischen Maske

Country Status (9)

Country Link
JP (1) JPS5021227B1 (ja)
AT (1) AT261712B (ja)
BE (1) BE658730A (ja)
CH (1) CH464693A (ja)
DE (1) DE1521902A1 (ja)
FR (1) FR1421953A (ja)
GB (1) GB1057105A (ja)
NL (1) NL142998B (ja)
SE (1) SE336957B (ja)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3215410A1 (de) * 1982-04-24 1983-10-27 Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt Verfahren zum herstellen von oeffnungen mit hilfe einer maske in einer auf einer unterlage befindlichen schicht
GB2132789A (en) * 1982-11-24 1984-07-11 Western Electric Co Method of pattern generation

Also Published As

Publication number Publication date
SE336957B (ja) 1971-07-19
DE1521902A1 (de) 1969-05-29
NL142998B (nl) 1974-08-15
CH464693A (de) 1968-10-31
NL6500630A (ja) 1965-07-26
JPS5021227B1 (ja) 1975-07-21
BE658730A (ja) 1965-07-22
FR1421953A (fr) 1965-12-17
GB1057105A (en) 1967-02-01

Similar Documents

Publication Publication Date Title
AT247778B (de) Verfahren zur Herstellung von Mörteln
CH475997A (de) Verfahren zur Herstellung einer antibiotisch wirksamen Substanz
CH457376A (de) Verfahren zur Herstellung einer Elektrode
CH440091A (de) Verfahren zur Herstellung von Plaster
CH410819A (de) Verfahren zur Herstellung eines Schraubenziehers
CH434570A (de) Verfahren zur Herstellung von Rubradirin
AT255858B (de) Verfahren zur Herstellung eines Lötflußmittels
CH511573A (de) Verfahren zur Herstellung einer Strumpfhose
AT266313B (de) Verfahren zur Herstellung einer antikoagulierend wirkenden Substanz
AT248539B (de) Verfahren zur Herstellung einer Glühbirne
AT247251B (de) Verfahren zur Herstellung von Erdwällen
CH427131A (de) Verfahren zur Herstellung einer Spinndüse
CH489537A (de) Verfahren zur Herstellung von Urikase
CH456551A (de) Verfahren zur Herstellung einer hydrophoben nassgefällten Kieselsäure
AT261712B (de) Verfahren zur Herstellung einer optischen Maske
CH429520A (de) Verfahren zur Herstellung einer graphischen Mehrfarbenreproduktion
AT263205B (de) Verfahren zur Herstellung einer langwirkenden Antimalariazusammensetzung
CH494984A (de) Verfahren zur Herstellung einer Ätzreserve
CH500756A (de) Verfahren zur Herstellung einer Emulsion
AT249117B (de) Verfahren zur Herstellung von Wellenleitern
CH451165A (de) Verfahren zur Herstellung eines Farbkupplers
CH415252A (de) Verfahren zur Herstellung von Butzen
CH464357A (de) Verfahren zur Herstellung eines Elektrets
CH471836A (de) Verfahren zur Herstellung einer Organozinnverbindung
CH489481A (de) Verfahren zur Herstellung von Steroiden