AT247096B - Gefäß als Behälter für Aluminium für ein Verfahren zum Vakuumaufdampfen - Google Patents

Gefäß als Behälter für Aluminium für ein Verfahren zum Vakuumaufdampfen

Info

Publication number
AT247096B
AT247096B AT568461A AT568461A AT247096B AT 247096 B AT247096 B AT 247096B AT 568461 A AT568461 A AT 568461A AT 568461 A AT568461 A AT 568461A AT 247096 B AT247096 B AT 247096B
Authority
AT
Austria
Prior art keywords
vessel
aluminum
container
vacuum evaporation
evaporation
Prior art date
Application number
AT568461A
Other languages
English (en)
Original Assignee
Union Carbide Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Union Carbide Corp filed Critical Union Carbide Corp
Application granted granted Critical
Publication of AT247096B publication Critical patent/AT247096B/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/243—Crucibles for source material
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
    • C04B35/583—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on boron nitride
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/26—Vacuum evaporation by resistance or inductive heating of the source

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Ceramic Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Structural Engineering (AREA)
  • Physical Vapour Deposition (AREA)
  • Ceramic Products (AREA)
AT568461A 1960-07-25 1961-07-24 Gefäß als Behälter für Aluminium für ein Verfahren zum Vakuumaufdampfen AT247096B (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US45069A US3181968A (en) 1960-07-25 1960-07-25 Methods for metal vaporization

Publications (1)

Publication Number Publication Date
AT247096B true AT247096B (de) 1966-05-25

Family

ID=21935836

Family Applications (1)

Application Number Title Priority Date Filing Date
AT568461A AT247096B (de) 1960-07-25 1961-07-24 Gefäß als Behälter für Aluminium für ein Verfahren zum Vakuumaufdampfen

Country Status (3)

Country Link
US (1) US3181968A (de)
AT (1) AT247096B (de)
GB (1) GB943698A (de)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3323488A (en) * 1962-12-21 1967-06-06 Nat Res Corp Vapor coating apparatus employing crucible scraping means
US3544486A (en) * 1968-05-23 1970-12-01 Sylvania Electric Prod Refractory bodies containing aluminum nitride,boron nitride and titanium boride
US3673118A (en) * 1970-07-01 1972-06-27 Union Carbide Corp Composite article containing high purity hot pressed boron nitride
US3582611A (en) * 1969-11-24 1971-06-01 Sylvania Electric Prod Apparatus and method of metal evaporation including an evaporation boat having lower electrical resistivity ends than the center thereof
US3730507A (en) * 1971-01-18 1973-05-01 Union Carbide Corp Boron nitride base evaporation vessel having a surface coating of titanium-silicon thereon
US3803707A (en) * 1972-03-21 1974-04-16 Gte Sylvania Inc Method of making an improved refractory boat for metal vaporization
US4199480A (en) * 1978-05-25 1980-04-22 Gte Sylvania Incorporated Electrically conductive boat for vacuum evaporation of metals
US4373952A (en) * 1981-10-19 1983-02-15 Gte Products Corporation Intermetallic composite
US4430184A (en) 1983-05-09 1984-02-07 Vac-Tec Systems, Inc. Evaporation arc stabilization
US4528939A (en) * 1984-06-25 1985-07-16 The United States Of America As Represented By The United States Department Of Energy Electrically conductive containment vessel for molten aluminum
US4847031A (en) * 1987-12-16 1989-07-11 Gte Products Corporation Evaporating boats containing titanium diboride
DE3935163C1 (en) * 1989-10-21 1990-10-11 Sintec Keramik Gmbh, 8959 Buching, De Polycrystalline material for resistance heat evapn. boats - comprises hot pressed electroconductive mixt. based on boron nitride
DE4138481A1 (de) * 1991-11-22 1993-05-27 Kempten Elektroschmelz Gmbh Wiederaufarbeitung von gebrauchten verdampferschiffchen
US5604164A (en) * 1995-09-06 1997-02-18 Advanced Ceramics Corporation Refractory boat and method of manufacture
DE19546872C1 (de) * 1995-12-15 1997-04-10 Sintec Keramik Gmbh Keramische anisotrope Verdampfer für die Flashmetallisierung
UA56228C2 (uk) * 1999-11-01 2003-05-15 Міжнародний Центр Електронно-Променевих Технологій Інституту Електрозварювання Ім. Е.О.Патона Нану Композиційний зливок для одержання шляхом випаровування функціонально градієнтного покриття із зовнішнім керамічним шаром на металевій підкладці (варіанти)
DE602004028857D1 (de) * 2003-11-20 2010-10-07 Denki Kagaku Kogyo Kk Metallverdampfungsheizelement und metallverdampfungsverfahren
CN1894171B (zh) * 2003-12-11 2011-02-02 电气化学工业株式会社 陶瓷烧结体、陶瓷烧结体的制造方法及金属气相淀积用发热体
DE102005030862B4 (de) * 2005-07-01 2009-12-24 Sintec Keramik Gmbh Erstbenetzungshilfsmaterial für einen Verdampferkörper, seine Verwendung zum Herrichten der Verdampferfläche eines Verdampferkörpers und ein elektrisch beheizbarer keramischer Verdampferkörper
US10184168B2 (en) 2015-01-20 2019-01-22 Kennametal Inc. IMC evaporator boat-thermal insulation cartridge assembly
US20160208373A1 (en) 2015-01-20 2016-07-21 Kennametal Inc. Imc evaporator boat assembly
DE102019110950A1 (de) 2019-04-29 2020-10-29 Kennametal Inc. Hartmetallzusammensetzungen und deren Anwendungen

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19878C (de) * C. BOLLE in Berlin Kannenverschlufs
US1991204A (en) * 1930-01-17 1935-02-12 William W Varney Resistor
DE882171C (de) * 1942-01-31 1953-07-06 Bosch Gmbh Robert Verfahren zur thermischen Verdampfung von Stoffen
US2872327A (en) * 1954-10-25 1959-02-03 Carborundum Co Refractory bodies containing boron nitride and a boride, and the manufacture thereof
US2984807A (en) * 1960-03-23 1961-05-16 Borolite Corp Corrosion-resistant high-temperature bodies for metal vaporizing heaters and other applications

Also Published As

Publication number Publication date
GB943698A (en) 1963-12-04
US3181968A (en) 1965-05-04

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