WO2016166810A1 - Imaging module - Google Patents

Imaging module Download PDF

Info

Publication number
WO2016166810A1
WO2016166810A1 PCT/JP2015/061429 JP2015061429W WO2016166810A1 WO 2016166810 A1 WO2016166810 A1 WO 2016166810A1 JP 2015061429 W JP2015061429 W JP 2015061429W WO 2016166810 A1 WO2016166810 A1 WO 2016166810A1
Authority
WO
WIPO (PCT)
Prior art keywords
imaging module
wiring board
angle
imaging
light receiving
Prior art date
Application number
PCT/JP2015/061429
Other languages
French (fr)
Japanese (ja)
Inventor
和也 前江田
Original Assignee
オリンパス株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by オリンパス株式会社 filed Critical オリンパス株式会社
Priority to PCT/JP2015/061429 priority Critical patent/WO2016166810A1/en
Priority to JP2017512490A priority patent/JP6542876B2/en
Publication of WO2016166810A1 publication Critical patent/WO2016166810A1/en

Links

Images

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00Cameras or camera modules comprising electronic image sensors; Control thereof

Definitions

  • an imaging element in which a plurality of electrode pads are arranged in a row on an inclined surface which is inclined at an acute angle with respect to a light receiving surface, and a plurality of electrode pads joined in each of the plurality of electrode pads
  • the present invention relates to an imaging module including a wiring board in which first bonding electrodes are arranged in a row at an end.
  • the imaging module manufactured by the wafer level CSP technology is small, for example, it greatly contributes to the diameter reduction of the endoscope.
  • a plurality of light receiving units and a plurality of external electrodes connected to the respective light receiving units are formed on the light receiving surface of the semiconductor wafer.
  • a glass wafer is bonded to the light receiving surface of the semiconductor wafer to produce a bonded wafer.
  • Through-wires are formed which reach from the light-receiving surface of the bonded wafer to the opposing surface.
  • the light receiving surface of the imaging device of the imaging module obtained by cutting the bonded wafer is covered with a cover glass. Since the light receiving unit is connected to the electrode on the opposite surface through the through wiring, it can transmit and receive an electrical signal.
  • an imaging module 101 shown in FIG. 1 is disclosed.
  • the imaging module 101 arranges a plurality of wires in one through trench 110T instead of the plurality of through wires.
  • the imaging module 101 includes an imaging element 110 to which a cover glass 130 is bonded by an adhesive layer 120, a wiring board 140, and a signal cable 150.
  • a plurality of electrode pads 113 connected to the external electrode 113L of the light receiving surface 110SA are arranged in a row on the inclined wall surface (inclined surface) 110SS of the through trench 110T.
  • the inclined surface 110SS is inclined with respect to the light receiving surface 10SA of the imaging element 110 at a first inclination angle ⁇ 1 which is an acute angle.
  • Each of the plurality of electrode pads 113 is bonded to the plurality of bonding electrodes 141 arranged in a row at the end of the main surface 140SA of the wiring board 140 via the bumps 144. That is, in the wiring board 140, the main surface 140SA is inclined with respect to the facing surface 110SB of the imaging element 110.
  • the signal cable 150 is joined to the other end of the wiring board 140.
  • the imaging module 101 Since the imaging module 101 is fixed between the imaging element 110 and the wiring board 140 only at the bonding portion of the bump 144, the mechanical strength is not high. For this reason, the imaging module 101 may be easily damaged when handled, and the yield may not be high.
  • An object of the present invention is to provide an imaging module with high yield.
  • the light receiving surface on which the light receiving portion is formed, the facing surface facing the light receiving surface, and the light receiving surface are inclined at a first acute angle.
  • An imaging element having a sloped surface, and a plurality of electrode pads arranged in a row on the sloped surface, and a transparent member adhered through an adhesive layer to cover the light receiving surface of the imaging element
  • Each of the plurality of electrode pads of the imaging device and the plurality of bonding electrodes to which each of the plurality of electrode pads of the imaging device are arranged are arranged in parallel in parallel to the side portion of the main surface.
  • An imaging module including a wiring board having an electronic component mounted on the main surface, wherein the wiring board is in contact with the facing surface of the image pickup element, and a tip end of the main surface of the wiring board Defining the first angle with the opposite surface of the image sensor It is, further comprising a holding member.
  • an imaging module with high yield can be provided.
  • an imaging module 1 according to a first embodiment of the present invention will be described with reference to the drawings.
  • the drawings are schematic, and the relationship between the thickness and width of each member, the ratio of the thickness of each member, the number of electrode pads, the arrangement pits, etc. are different from the actual ones.
  • parts having different dimensional relationships and proportions are included among the drawings.
  • some configurations, for example, a silicon oxide layer on the surface of a silicon substrate, wiring, and the like are not shown.
  • the imaging module 1 includes an imaging element 10 made of a silicon substrate, a cover glass 30 which is a transparent member, a wiring board 40, and a signal cable 50.
  • the imaging device 10 has substantially the same configuration as the imaging device 110 of the conventional imaging module 101 described above.
  • the entire light receiving surface 10SA of the imaging element 10 is covered with a cover glass 30 via an adhesive layer 20.
  • a notch 10T On the side of the facing surface 10SB of the image pickup device 10, there is a notch 10T whose wall surface is the inclined surface 10SS which is inclined at the first angle ⁇ 1 with respect to the light receiving surface 10SA.
  • the first angle ⁇ 1 is an acute angle.
  • the through trench formed by the etching process from the facing surface 10SB side of the bonded wafer becomes the notch 10T by cutting the bonded wafer.
  • the back surface of the external electrode 12 of the imaging element 10 is exposed at the bottom surface of the notch 10T.
  • a plurality of electrode pads 13 electrically connected to each other through the external electrodes 12 and the solder bumps 44 are arranged in a row on the inclined surface 10SS. For this reason, the electrode pad 13 is electrically connected to the light receiving unit 11.
  • the extended portion of the wiring 13 ⁇ / b> L may be the electrode pad 13.
  • a plurality of bonding electrodes 41 are arranged in a row at the end of the main surface 40SA of the flat flexible wiring board 40, and a bonding electrode 42 is arranged in a row at the other end.
  • the bonding electrode 41 is bonded to the electrode pad 13 via the solder bump 44.
  • the bonding electrode 42 is bonded to the conducting wire 51 of the signal cable 50.
  • the bonding electrode 41 and the bonding electrode 42 are electrically connected via the electronic component 69 mounted on the main surface 40SA or a wire (not shown).
  • the joining location of the 1st joining electrode 42 and the electrode pad 13 may be sealed by sealing resin.
  • sealing resin it may not be easy to ensure sufficient mechanical strength with a sealing resin that fixes only the bonding points.
  • the distal end portion of the main surface 40SA of the wiring board 40 and the opposing surface 10SB of the imaging element 10 are defined at a first angle ⁇ 1 while in contact with the opposing surface 10SB of the imaging element 10
  • the holding member 70 is provided.
  • the holding member 70 has a rectangular central plate 70L, and angle defining portions 70W1 and 70W2 disposed upright on both sides of the central plate 70L.
  • the angle defining units 70W1 and 70W2 are triangles in plan view in which an angle formed by the first side L1 and the second side L2 is a first angle ⁇ 1.
  • the holding member 70 has the two angle defining portions 70W1 and 70W2 at the ends of both long sides, but may have only one of them. Further, hereinafter, each of the two angle defining portions 70W1 and 70W2 is referred to as an angle defining portion 70W.
  • the central plate 70 ⁇ / b> L of the holding member 70 is bonded to the facing surface 10 ⁇ / b> SB of the imaging device 10.
  • the first side L1 of the angle defining portion 70W abuts on the main surface 40SA of the wiring board 40 and is bonded with an adhesive (not shown).
  • the angle defining portion 70W is disposed on the outer peripheral portion of the central plate 70L. Therefore, even if the angle defining portion 70W is present, the electronic component 69 can be mounted on the main surface 40SA of the wiring board 40. That is, although the imaging module 1 includes the angle defining unit 70W as a holding member, the angle defining unit 70W and the electronic component 69 overlap when viewed from the side.
  • a resin member 65 is injected between the holding member 70 and the wiring board 40 and hardened. That is, the relative position of the wiring board 40 and the imaging device 10 is fixed by the resin member 65.
  • the resin member 65 is, for example, a thermosetting epoxy resin which is liquid in an uncured state.
  • the surface of the electronic component 69 mounted on the wiring board 40 is covered with the resin member 65 and protected.
  • the angle defining portion 70W illustrated in FIG. 4A is strictly trapezoidal. However, if the angle between the first side L1 and the second side L2 is the first angle ⁇ 1, the angle defining portion 70W may be substantially triangular.
  • the central plate 70L and the angle defining portion 70W may be manufactured as an integral body, or the angle defining portion 70W may be bonded to the central plate 70L. Further, the central plate 70L and the angle defining portion 70W of the holding member 70 made of metal, resin, or ceramic may be made of different materials.
  • the holding member 70 can stably define the relative angle between the imaging device 10 and the wiring board 40. Further, if the length of the second side L2 is 80% or less of the length of the imaging device 10, the signal cable 50 connected to the wiring board 40 can be placed in the projection plane of the imaging device 10 as described later. It can be arranged.
  • the imaging module 1 the imaging element 10 and the wiring board 40 are held by the holding member 70 with the relative angle defined at the first angle ⁇ 1. For this reason, the imaging module 1 has high mechanical strength between the imaging element 10 and the wiring board 40, is less likely to be damaged by handling, and has a sufficiently high final yield.
  • the wiring portion 40L of the wiring board 40 is flexible, even if the length of the wiring board 40 is long, the whole can be disposed within the projection plane of the imaging device 10 by being curved and deformed.
  • the imaging module 1 has a small diameter because the wiring board 40 and the signal cable 50 do not protrude outside the outer shape of the imaging device 10.
  • an imaging module 1B according to a modification of the second embodiment will be described.
  • the imaging module 1B is similar to the imaging module 1 and has the same effect, the same code
  • the wiring board 40B has a function of a holding unit. That is, in the wiring board 40B, angle defining portions 40W1 and 40W2 upright with respect to the main surface 40SA are extended at the long side of the rectangular wiring portion 40L.
  • a wiring layer is disposed on a base at least the surface of which is nonconductive.
  • the angle defining portion 40W is preferably made of the same material as that of the base, particularly, a high thermal conductivity material having a thermal conductivity of 10 W / (mK) or more.
  • the substrate may be coated with a non-conductive material such as copper (398 W / (mK)) or aluminum (236 W / (mK)), alumina (20 W / (mK)), carbonized Ceramics such as silicon (200 W / (mK)), silicon nitride (27 W / (mK)) and aluminum nitride (170 W / (mK)) may be used.
  • a non-conductive material such as copper (398 W / (mK)) or aluminum (236 W / (mK)), alumina (20 W / (mK)), carbonized Ceramics such as silicon (200 W / (mK)), silicon nitride (27 W / (mK)) and aluminum nitride (170 W / (mK) may be used.
  • the imaging module 1 ⁇ / b> B is easy to manufacture because the process of bonding the holding portion to the wiring board is unnecessary. Further, the imaging module 1B in which a part of the base made of the high thermal conductivity material is bonded to the imaging device 10 can efficiently transfer the heat generated by the imaging device 10, so it has high reliability.
  • an imaging module 1C of a modification of the second embodiment will be described.
  • the imaging module 1C is similar to the imaging module 1B and has the same effect, the same code
  • the holding member 40W is an angle defining member of a triangle in plan view, in which the angle formed by the first side L1 and the second side L2 is a first angle ⁇ 1.
  • the wiring board 40C is a flexible wiring board having, for example, a polyimide as a base.
  • the base of the wiring portion 40L and the holding member 40W may be a non-flexible substrate made of glass epoxy resin or the like, but a portion to be bent for bending to be described later, that is, the wiring portion 40L and the holding member 40W Only the border area with must be flexible.
  • the wiring board 40C be a flexible substrate.
  • Electronic components 69 such as chip capacitors and chip inductors are mounted on the main surface 40SA of the wiring portion 40L. Note that the electronic component may be mounted also on the main surface 40SB facing the main surface 40SA.
  • the holding members 40W1 and 40W2 are bent so as to stand upright on the main surface 40SA of the wiring board 40C.
  • the width of the wiring board 40 may be equal to or less than the width of the imaging device 10, including the bent holding member 40W.
  • the holding members 40W1 and 40W2 are preferably fixed in an upright state by the curable resin 45.
  • an ultraviolet curable resin is used as the curable resin 45.
  • the imaging module 1C is three-dimensionally formed by bending the extended portion of the general flat wiring board 40C, and therefore is easier to manufacture than the imaging module 1B.
  • an imaging module 1D according to a modification of the third embodiment will be described.
  • the imaging module 1B is similar to the imaging module 1 and has the same effect, the same code
  • the image pickup device 10D of the image pickup module 1D As shown in FIG. 7, in the image pickup device 10D of the image pickup module 1D, as in the case of the image pickup device 110 of the conventional image pickup module 101 described above, through trenches 10TA having inclined surfaces 10SS and 10ST are formed. There is. That is, the cutting position of the bonded wafer is different from that of the imaging device 10. However, the basic configuration of the imaging device 10D is the same as that of the imaging device 10.
  • the bonding electrodes provided in a row on the end face are the flying leads 41A.
  • the flying leads 41A (referred to as outer leads in the lead frame) are made of conductor wiring from which the insulating base of the wiring board 40A is selectively removed.
  • the flying leads 41A can be easily bent, and the solder bumps 44 can be directly heated without passing through the base of the wiring board 40D.
  • the imaging module 1D is easier to manufacture than the imaging module 1 and the like.
  • the electronic components 69A and 69B mounted on the main surface 40SA of the wiring board 40D form a first angle ⁇ 1 between the tip of the main surface 40SA of the wiring board 40D and the opposing surface 10SB of the imaging element 10D.
  • the function of the holding member defined in That is, the electronic components 69A and 69B are in contact with the facing surface 10SB of the imaging element 10D.
  • at least one electronic component may be in contact with the facing surface 10SB, but when the plurality of electronic components 69A and 69B are in contact, angle definition is easier.
  • the main surface 40SA of the wiring board 40D and the opposing surface 10SB of the imaging device 10D have a first angle ⁇ 1 when the corners thereof abut on the opposing surface 10SB of the imaging device 10D.
  • the placement position is determined in consideration of the height.
  • the imaging module 1D is easy to manufacture because it does not require a dedicated holding member for angle definition.
  • the resin member 65 is injected into the space between the imaging element 10D and the wiring board 40D and is cured.
  • the electronic component 69C is also mounted on the main surface 40SB of the wiring board 40D.
  • the electronic components 69A and 69B define angles, the imaging element 10D and the wiring board 40D are not fixed.
  • the relative positions of the imaging element 10D and the wiring board 40D are fixed by the resin member 65.
  • the imaging module 1D fixed by the resin member 65 has a mechanical strength higher than that of the imaging module 1 and the like.
  • an imaging module 1E according to a modification of the fourth embodiment will be described.
  • the imaging module 1E is similar to the imaging module 1 etc. and has the same effect, the same code
  • a block 70E having an inclined surface inclined at a first inclination angle ⁇ 1 with respect to the bottom surface corresponds to the main surface 40SA of the wiring board 40E and the imaging device 10D. It is a holding
  • FIG. The bottom surface 70SB of the block 70E is bonded to the wiring board 40E and the imaging device 10D by an adhesive (not shown).
  • the block 70E is preferably made of a high thermal conductivity material having a thermal conductivity of 10 W / (mK) or more in order to efficiently transfer the heat generated by the imaging device 10D.
  • a concave portion 70H in accordance with the size of the electronic component 69A is formed on the inclined surface 70SA. Therefore, the electronic component 69A can be disposed on the main surface 40SA of the wiring board 40E. Electronic parts 69B and 69C are also mounted on the main surface 40SB of the wiring board 40E.
  • the imaging module 1E includes the block 70E as a holding member, the holding member and the electronic component overlap when viewed from the side.
  • imaging module 10 imaging element 20: adhesive layer 30: cover glass 40: wiring board 40L: wiring portion 40W: angle defining portion (holding member) 41: bonding electrode 41A: flying lead 42: bonding electrode 44: solder bump 45: hardening resin 65: resin member 69: electronic component 70: holding member 70E: block 70H: recess 70L: central plate 70W: angle defining portion

Abstract

An imaging module 1 is equipped with an imaging element 10 in which a plurality of electrode pads 13 are arranged in a row on an inclined surface 10SS inclined at an acute first angle θ1 relative to a light receiving surface 10SA, a cover glass 30 which is adhered via an adhesive layer 20 in a manner covering the light receiving surface 10SA, each of the aforementioned plurality of electrode pads 13, and a wiring board 40 in which a plurality of junction electrodes 41 to which each of the pads are connected are arranged in a parallel row on a side section of a main surface 40SA and in which an electronic component 69 is mounted upon the aforementioned main surface 40SA, and is further equipped with a holding member 70 which comes into contact with an opposing surface 10SB of the aforementioned imaging element 10 and regulates the front end of the main surface 40SA of the wiring board 40 and the opposing surface 10SB of the imaging element 10 to the aforementioned first angle θ1.

Description

撮像モジュールImaging module
 本発明は、受光面に対して鋭角に傾斜している傾斜面に複数の電極パッドが列設されている撮像素子と、前記撮像素子の前記複数の電極パッドのそれぞれと接合されている複数の第1の接合電極が端部に列設されている配線板と、を具備する撮像モジュールに関する。 According to the present invention, an imaging element in which a plurality of electrode pads are arranged in a row on an inclined surface which is inclined at an acute angle with respect to a light receiving surface, and a plurality of electrode pads joined in each of the plurality of electrode pads The present invention relates to an imaging module including a wiring board in which first bonding electrodes are arranged in a row at an end.
 ウエハレベルCSP技術により作製される撮像モジュールは小型であるため、例えば、内視鏡の細径化に大きく寄与している。 Since the imaging module manufactured by the wafer level CSP technology is small, for example, it greatly contributes to the diameter reduction of the endoscope.
 ウエハレベルCSP型の撮像モジュールの製造方法では、最初に、半導体ウエハに、複数の受光部と、それぞれの受光部と接続された複数の外部電極が受光面に形成される。半導体ウエハの受光面にガラスウエハが接着されて接合ウエハが作製される。接合ウエハの受光面から対向する対向面に到達する貫通配線が形成される。 In the wafer level CSP type imaging module manufacturing method, first, a plurality of light receiving units and a plurality of external electrodes connected to the respective light receiving units are formed on the light receiving surface of the semiconductor wafer. A glass wafer is bonded to the light receiving surface of the semiconductor wafer to produce a bonded wafer. Through-wires are formed which reach from the light-receiving surface of the bonded wafer to the opposing surface.
 接合ウエハの切断により得られた撮像モジュールの撮像素子の受光面はカバーガラスで覆われている。受光部は貫通配線を介して対向面の電極と接続されているため、電気信号を送受信できる。 The light receiving surface of the imaging device of the imaging module obtained by cutting the bonded wafer is covered with a cover glass. Since the light receiving unit is connected to the electrode on the opposite surface through the through wiring, it can transmit and receive an electrical signal.
 日本国特開2014-75764号公報には、図1に示す撮像モジュール101が開示されている。撮像モジュール101は、複数の貫通配線に替えて、1つの貫通トレンチ110Tに複数の配線を配置している。 In Japanese Patent Application Laid-Open No. 2014-75764, an imaging module 101 shown in FIG. 1 is disclosed. The imaging module 101 arranges a plurality of wires in one through trench 110T instead of the plurality of through wires.
 撮像モジュール101は、カバーガラス130が接着層120により接着されている撮像素子110と、配線板140と、信号ケーブル150と、を有する。撮像素子110は貫通トレンチ110Tの傾斜している壁面(傾斜面)110SSに、それぞれが受光面110SAの外部電極113Lと接続されている複数の電極パッド113が列設されている。なお、傾斜面110SSは撮像素子110の受光面10SAに対して鋭角の第1の傾斜角度θ1で傾斜している。 The imaging module 101 includes an imaging element 110 to which a cover glass 130 is bonded by an adhesive layer 120, a wiring board 140, and a signal cable 150. In the imaging element 110, a plurality of electrode pads 113 connected to the external electrode 113L of the light receiving surface 110SA are arranged in a row on the inclined wall surface (inclined surface) 110SS of the through trench 110T. The inclined surface 110SS is inclined with respect to the light receiving surface 10SA of the imaging element 110 at a first inclination angle θ1 which is an acute angle.
 複数の電極パッド113のそれぞれは、バンプ144を介して配線板140の主面140SAの端部に列設された複数の接合電極141と接合されている。すなわち、配線板140は主面140SAが、撮像素子110の対向面110SBに対して傾斜している。そして、配線板140のもう一方の端部には信号ケーブル150が接合されている。 Each of the plurality of electrode pads 113 is bonded to the plurality of bonding electrodes 141 arranged in a row at the end of the main surface 140SA of the wiring board 140 via the bumps 144. That is, in the wiring board 140, the main surface 140SA is inclined with respect to the facing surface 110SB of the imaging element 110. The signal cable 150 is joined to the other end of the wiring board 140.
 撮像モジュール101は、撮像素子110と配線板140との間は、バンプ144の接合部だけで固定されているため、機械的強度が高くはない。このため撮像モジュール101は、取り扱うときに破損しやすく、歩留まりが高くはないおそれがあった、 Since the imaging module 101 is fixed between the imaging element 110 and the wiring board 140 only at the bonding portion of the bump 144, the mechanical strength is not high. For this reason, the imaging module 101 may be easily damaged when handled, and the yield may not be high.
特開2014-075764号公報Unexamined-Japanese-Patent No. 2014-075764
 本発明は、歩留まりの高い撮像モジュールを提供することを目的とする。 An object of the present invention is to provide an imaging module with high yield.
 本発明の実施形態の撮像モジュールは、受光部が形成されている受光面と、前記受光面と対向している対向面と、前記受光面に対して鋭角の第1の角度で傾斜している傾斜面と、を有し、前記傾斜面に複数の電極パッドが列設されている撮像素子と、前記撮像素子の前記受光面を覆うように接着層を介して接着されている透明部材と前記撮像素子の前記対向面側に配置されている、前記撮像素子の前記複数の電極パッドのそれぞれと、それぞれが接合されている複数の接合電極が主面の側辺部に平行に列設されており、前記主面に電子部品が表面実装されている、配線板と、を具備する撮像モジュールであって、前記撮像素子の前記対向面と当接し、前記配線板の前記主面の先端部と前記撮像素子の前記対向面とを前記第1の角度に規定している、保持部材をさらに具備する。 In the imaging module according to the embodiment of the present invention, the light receiving surface on which the light receiving portion is formed, the facing surface facing the light receiving surface, and the light receiving surface are inclined at a first acute angle. An imaging element having a sloped surface, and a plurality of electrode pads arranged in a row on the sloped surface, and a transparent member adhered through an adhesive layer to cover the light receiving surface of the imaging element Each of the plurality of electrode pads of the imaging device and the plurality of bonding electrodes to which each of the plurality of electrode pads of the imaging device are arranged are arranged in parallel in parallel to the side portion of the main surface. An imaging module including a wiring board having an electronic component mounted on the main surface, wherein the wiring board is in contact with the facing surface of the image pickup element, and a tip end of the main surface of the wiring board Defining the first angle with the opposite surface of the image sensor It is, further comprising a holding member.
 本発明によれば、歩留まりの高い撮像モジュールを提供できる。 According to the present invention, an imaging module with high yield can be provided.
従来の撮像モジュールの斜視図である。It is a perspective view of the conventional imaging module. 第1実施形態の撮像モジュールの断面図である。It is a sectional view of an imaging module of a 1st embodiment. 第1実施形態の撮像モジュールの斜視図である。It is a perspective view of an imaging module of a 1st embodiment. 第1実施形態の撮像モジュールの保持部材の斜視図である。It is a perspective view of the holding member of the imaging module of 1st Embodiment. 第1実施形態の撮像モジュールの別の保持部材の斜視図である。It is a perspective view of another holding member of an imaging module of a 1st embodiment. 第2実施形態の撮像モジュールの斜視図である。It is a perspective view of an imaging module of a 2nd embodiment. 第2実施形態の変形例の撮像モジュールの斜視図である。It is a perspective view of an imaging module of a modification of a 2nd embodiment. 第2実施形態の撮像モジュールの配線板の製造方法を説明するための斜視図である。It is a perspective view for demonstrating the manufacturing method of the wiring board of the imaging module of 2nd Embodiment. 第2実施形態の撮像モジュールの配線板の製造方法を説明するための断面図である。It is sectional drawing for demonstrating the manufacturing method of the wiring board of the imaging module of 2nd Embodiment. 第3実施形態の撮像モジュールの断面図である。It is sectional drawing of the imaging module of 3rd Embodiment. 第4実施形態の撮像モジュールの断面図である。It is sectional drawing of the imaging module of 4th Embodiment. 第4実施形態の撮像モジュールの保持部材の斜視図である。It is a perspective view of the holding member of the imaging module of 4th Embodiment.
<第1実施形態>
 以下、図面を参照して本発明の第1実施形態の撮像モジュール1を説明する。尚、図面は模式的なものであり、各部材の厚みと幅との関係、それぞれの部材の厚みの比率、電極パッドの数、配列ピットなどは現実のものとは異なる。また、図面の相互間においても互いの寸法の関係や比率が異なる部分が含まれている。さらに、一部の構成、例えば、シリコン基板の表面の酸化シリコン層および配線等は図示を省略している。
First Embodiment
Hereinafter, an imaging module 1 according to a first embodiment of the present invention will be described with reference to the drawings. The drawings are schematic, and the relationship between the thickness and width of each member, the ratio of the thickness of each member, the number of electrode pads, the arrangement pits, etc. are different from the actual ones. In addition, parts having different dimensional relationships and proportions are included among the drawings. Furthermore, some configurations, for example, a silicon oxide layer on the surface of a silicon substrate, wiring, and the like are not shown.
 図2および図3に示すように、撮像モジュール1は、シリコン基板からなる撮像素子10と、透明部材であるカバーガラス30と、配線板40と、信号ケーブル50と、を具備する。 As shown in FIGS. 2 and 3, the imaging module 1 includes an imaging element 10 made of a silicon substrate, a cover glass 30 which is a transparent member, a wiring board 40, and a signal cable 50.
 撮像素子10は、すでに説明した従来の撮像モジュール101の撮像素子110と略同じ構成である。撮像素子10の受光面10SAの全面は接着層20を介してカバーガラス30に覆われている。 The imaging device 10 has substantially the same configuration as the imaging device 110 of the conventional imaging module 101 described above. The entire light receiving surface 10SA of the imaging element 10 is covered with a cover glass 30 via an adhesive layer 20.
 撮像素子10の対向面10SB側には、受光面10SAに対して第1の角度θ1に傾斜している傾斜面10SSを壁面とする切り欠き10Tがある。第1の角度θ1は鋭角である。後述するように、接合ウエハの対向面10SB側からのエッチング処理により形成された貫通トレンチが、接合ウエハの切断により、切り欠き10Tとなる。 On the side of the facing surface 10SB of the image pickup device 10, there is a notch 10T whose wall surface is the inclined surface 10SS which is inclined at the first angle θ1 with respect to the light receiving surface 10SA. The first angle θ1 is an acute angle. As described later, the through trench formed by the etching process from the facing surface 10SB side of the bonded wafer becomes the notch 10T by cutting the bonded wafer.
 切り欠き10Tの底面には撮像素子10の外部電極12の裏面が露出している。そして、傾斜面10SSには、それぞれが外部電極12と半田バンプ44を介して電気的に接続された複数の電極パッド13が列設されている。このため、電極パッド13は、受光部11と電気的に接続されている。なお、配線13Lの延設部が電極パッド13であってもよい。 The back surface of the external electrode 12 of the imaging element 10 is exposed at the bottom surface of the notch 10T. A plurality of electrode pads 13 electrically connected to each other through the external electrodes 12 and the solder bumps 44 are arranged in a row on the inclined surface 10SS. For this reason, the electrode pad 13 is electrically connected to the light receiving unit 11. The extended portion of the wiring 13 </ b> L may be the electrode pad 13.
 一方、平板状の可撓性の配線板40の主面40SAの端部には複数の接合電極41が列設されており、もう1方の端部に接合電極42が列設されている。接合電極41は半田バンプ44を介して電極パッド13と接合されている。一方、接合電極42は信号ケーブル50の導線51と接合されている。接合電極41と接合電極42とは、主面40SAに実装された電子部品69または配線(不図示)を介して電気的に接続されている。 On the other hand, a plurality of bonding electrodes 41 are arranged in a row at the end of the main surface 40SA of the flat flexible wiring board 40, and a bonding electrode 42 is arranged in a row at the other end. The bonding electrode 41 is bonded to the electrode pad 13 via the solder bump 44. On the other hand, the bonding electrode 42 is bonded to the conducting wire 51 of the signal cable 50. The bonding electrode 41 and the bonding electrode 42 are electrically connected via the electronic component 69 mounted on the main surface 40SA or a wire (not shown).
 なお、接合信頼性を高めるため、第1の接合電極42と電極パッド13との接合箇所は封止樹脂で封止されていてもよい。ただし、接合箇所だけを固定している封止樹脂では機械的強度は十分に担保することは容易ではないことがある。 In addition, in order to improve joining reliability, the joining location of the 1st joining electrode 42 and the electrode pad 13 may be sealed by sealing resin. However, it may not be easy to ensure sufficient mechanical strength with a sealing resin that fixes only the bonding points.
 これに対して、撮像モジュール1では、撮像素子10の対向面10SBと当接し、配線板40の主面40SAの先端部と撮像素子10の対向面10SBとを第1の角度θ1に規定している保持部材70を具備する。 On the other hand, in the imaging module 1, the distal end portion of the main surface 40SA of the wiring board 40 and the opposing surface 10SB of the imaging element 10 are defined at a first angle θ1 while in contact with the opposing surface 10SB of the imaging element 10 The holding member 70 is provided.
 図4Aに示すように、保持部材70は、矩形の中央板70Lと、中央板70Lの両側辺に直立するように配設された角度規定部70W1、70W2と、を有する。角度規定部70W1、70W2は、第1の辺L1と第2の辺L2とがなす角度が第1の角度θ1の平面視三角形である。 As shown in FIG. 4A, the holding member 70 has a rectangular central plate 70L, and angle defining portions 70W1 and 70W2 disposed upright on both sides of the central plate 70L. The angle defining units 70W1 and 70W2 are triangles in plan view in which an angle formed by the first side L1 and the second side L2 is a first angle θ1.
 保持部材70は、2つの角度規定部70W1、70W2を両方の長辺の端部に有するが、どちらか1方だけを有していてもよい。また、以下、2つの角度規定部70W1、70W2の、それぞれを角度規定部70Wという。 The holding member 70 has the two angle defining portions 70W1 and 70W2 at the ends of both long sides, but may have only one of them. Further, hereinafter, each of the two angle defining portions 70W1 and 70W2 is referred to as an angle defining portion 70W.
 保持部材70の中央板70Lは、撮像素子10の対向面10SBに接着されている。角度規定部70Wの第1の辺L1は配線板40の主面40SAと当接し図示しない接着剤で接着されている。 The central plate 70 </ b> L of the holding member 70 is bonded to the facing surface 10 </ b> SB of the imaging device 10. The first side L1 of the angle defining portion 70W abuts on the main surface 40SA of the wiring board 40 and is bonded with an adhesive (not shown).
 角度規定部70Wは、中央板70Lの外周部に配設されている。このため、角度規定部70Wがあっても、配線板40の主面40SAに電子部品69を実装することができる。すなわち、撮像モジュール1は、保持部材として角度規定部70Wを有するが、側面から透明視したとき、角度規定部70Wと電子部品69とがオーバーラップしている。 The angle defining portion 70W is disposed on the outer peripheral portion of the central plate 70L. Therefore, even if the angle defining portion 70W is present, the electronic component 69 can be mounted on the main surface 40SA of the wiring board 40. That is, although the imaging module 1 includes the angle defining unit 70W as a holding member, the angle defining unit 70W and the electronic component 69 overlap when viewed from the side.
 保持部材70と配線板40との間には樹脂部材65が注入され硬化処理されている。すなわち、配線板40と撮像素子10とは、樹脂部材65によって相対位置が固定されている。樹脂部材65は、例えば、未硬化状態では液体の熱硬化型のエポキシ樹脂である。 A resin member 65 is injected between the holding member 70 and the wiring board 40 and hardened. That is, the relative position of the wiring board 40 and the imaging device 10 is fixed by the resin member 65. The resin member 65 is, for example, a thermosetting epoxy resin which is liquid in an uncured state.
 配線板40に実装された電子部品69の表面は、樹脂部材65に覆われ、保護されている。 The surface of the electronic component 69 mounted on the wiring board 40 is covered with the resin member 65 and protected.
 なお、図4Aに示す角度規定部70Wは、図4Bに示す撮像モジュール1Aの保持部材70Aの角度規定部と異なり、厳密には台形である。しかし、第1の辺L1と第2の辺L2とがなす角度が第1の角度θ1であれば、角度規定部70Wは略三角形でよい。 Unlike the angle defining portion of the holding member 70A of the imaging module 1A illustrated in FIG. 4B, the angle defining portion 70W illustrated in FIG. 4A is strictly trapezoidal. However, if the angle between the first side L1 and the second side L2 is the first angle θ1, the angle defining portion 70W may be substantially triangular.
 中央板70Lと角度規定部70Wとは一体物として作製されていてもよいし、中央板70Lに角度規定部70Wが接着されていてもよい。また、金属、樹脂、またはセラミックからなる保持部材70の中央板70Lと角度規定部70Wとは別の材料で構成されていてもよい。 The central plate 70L and the angle defining portion 70W may be manufactured as an integral body, or the angle defining portion 70W may be bonded to the central plate 70L. Further, the central plate 70L and the angle defining portion 70W of the holding member 70 made of metal, resin, or ceramic may be made of different materials.
 保持部材70は、第2の辺L2の長さが、撮像素子10の長さの20%以上であれば、撮像素子10と配線板40との相対角度を安定して規定できる。また、第2の辺L2の長さが、撮像素子10の長さの80%以下であれば、後述するように、配線板40に接続された信号ケーブル50を撮像素子10の投影面内に配置できる。 If the length of the second side L2 is 20% or more of the length of the imaging device 10, the holding member 70 can stably define the relative angle between the imaging device 10 and the wiring board 40. Further, if the length of the second side L2 is 80% or less of the length of the imaging device 10, the signal cable 50 connected to the wiring board 40 can be placed in the projection plane of the imaging device 10 as described later. It can be arranged.
 撮像モジュール1は、撮像素子10と配線板40とが保持部材70により相対角度が第1の角度θ1に規定されて保持されている。このため、撮像モジュール1は撮像素子10と配線板40との間の機械的強度が高く、取り扱いにより破損するおそれが小さく、最終歩留まりも十分に高い。 In the imaging module 1, the imaging element 10 and the wiring board 40 are held by the holding member 70 with the relative angle defined at the first angle θ1. For this reason, the imaging module 1 has high mechanical strength between the imaging element 10 and the wiring board 40, is less likely to be damaged by handling, and has a sufficiently high final yield.
 なお、撮像モジュール1では、撮像素子10よりも後方側(カバーガラスと反対側)に位置する配線板40および信号ケーブル50は、撮像素子10を厚み方向から平面視すると、撮像素子10に重なる領域、すなわち撮像素子10の投影面内に全体が位置している。特に、配線板40の配線部40Lが可撓性の場合には、配線板40の長さが長くても湾曲変形することにより撮像素子10の投影面内に全体を配置することができる。撮像モジュール1は、配線板40および信号ケーブル50が撮像素子10の外形よりも外側にはみ出していないため、細径である。 In the imaging module 1, the wiring board 40 and the signal cable 50 located on the rear side (opposite side of the cover glass) of the imaging device 10 overlap the imaging device 10 when the imaging device 10 is viewed in plan from the thickness direction. That is, the whole is located in the projection plane of the imaging device 10. In particular, in the case where the wiring portion 40L of the wiring board 40 is flexible, even if the length of the wiring board 40 is long, the whole can be disposed within the projection plane of the imaging device 10 by being curved and deformed. The imaging module 1 has a small diameter because the wiring board 40 and the signal cable 50 do not protrude outside the outer shape of the imaging device 10.
<第2実施形態>
 次に第2実施形態の変形例の撮像モジュール1Bについて説明する。なお、撮像モジュール1Bは、撮像モジュール1と類似し、同じ効果を有するため、同じ機能の構成要素には同じ符号を付し説明は省略する。
Second Embodiment
Next, an imaging module 1B according to a modification of the second embodiment will be described. In addition, since the imaging module 1B is similar to the imaging module 1 and has the same effect, the same code | symbol is attached | subjected to the component of the same function, and description is abbreviate | omitted.
 図5に示すように、撮像モジュール1Bでは、配線板40Bが保持部の機能を有する。すなわち、配線板40Bは、矩形の配線部40Lの長辺に、主面40SAに対して直立した角度規定部40W1、40W2が延設されている。 As shown in FIG. 5, in the imaging module 1B, the wiring board 40B has a function of a holding unit. That is, in the wiring board 40B, angle defining portions 40W1 and 40W2 upright with respect to the main surface 40SA are extended at the long side of the rectangular wiring portion 40L.
 配線板40Bには、少なくとも表面が非導電性の基体に配線層が配設されている。なお、角度規定部40Wは前記基体と同じ材料、特に、熱伝導率が、10W/(mK)以上の高熱伝導率材料からなることが好ましい。 In the wiring board 40B, a wiring layer is disposed on a base at least the surface of which is nonconductive. The angle defining portion 40W is preferably made of the same material as that of the base, particularly, a high thermal conductivity material having a thermal conductivity of 10 W / (mK) or more.
 例えば、基体は、銅(398W/(mK))、アルミニウム(236W/(mK))等の金属の表面が非導電性材料でおおわれていてもよいし、アルミナ(20W/(mK))、炭化ケイ素(200W/(mK))、窒化ケイ素(27W/(mK))、窒化アルミニウム(170W/(mK))等のセラミックスでもよい。 For example, the substrate may be coated with a non-conductive material such as copper (398 W / (mK)) or aluminum (236 W / (mK)), alumina (20 W / (mK)), carbonized Ceramics such as silicon (200 W / (mK)), silicon nitride (27 W / (mK)) and aluminum nitride (170 W / (mK)) may be used.
 撮像モジュール1Bは、保持部を配線板に接着する工程が不要であるため、製造が容易である。また、高熱伝導率材料からなる基体の一部が撮像素子10と接着されている撮像モジュール1Bは、撮像素子10が発生する熱を効率的に伝熱できるため、信頼性が高い。 The imaging module 1 </ b> B is easy to manufacture because the process of bonding the holding portion to the wiring board is unnecessary. Further, the imaging module 1B in which a part of the base made of the high thermal conductivity material is bonded to the imaging device 10 can efficiently transfer the heat generated by the imaging device 10, so it has high reliability.
<第2実施形態の変形例>
 次に第2実施形態の変形例の撮像モジュール1Cについて説明する。なお、撮像モジュール1Cは、撮像モジュール1Bと類似し、同じ効果を有するため、同じ機能の構成要素には同じ符号を付し説明は省略する。
Modification of Second Embodiment
Next, an imaging module 1C of a modification of the second embodiment will be described. In addition, since the imaging module 1C is similar to the imaging module 1B and has the same effect, the same code | symbol is attached | subjected to the component of the same function, and description is abbreviate | omitted.
 図6Aに示すように、撮像モジュール1Cの配線板40Cは、矩形の配線部40Lの長辺から延設された、主面40SAに対して直立している延設部が、保持部材40W1、40W2である。保持部材40Wは、第1の辺L1と第2の辺L2とがなす角度が第1の角度θ1の平面視三角形の角度規定部材である。 As shown in FIG. 6A, in the wiring board 40C of the imaging module 1C, extending portions extending from the long side of the rectangular wiring portion 40L, which are erected with respect to the main surface 40SA, are holding members 40W1 and 40W2. It is. The holding member 40W is an angle defining member of a triangle in plan view, in which the angle formed by the first side L1 and the second side L2 is a first angle θ1.
 配線板40Cは、例えばポリイミドを基体とするフレキシブル配線板である。配線部40L、保持部材40Wの基体としては、ガラスエポキシ樹脂等からなる非可撓性基板であってもよいが、後述する折り曲げのために、折り曲げられる部分、すなわち、配線部40Lと保持部材40Wとの境界領域だけは可撓性でなければならない。 The wiring board 40C is a flexible wiring board having, for example, a polyimide as a base. The base of the wiring portion 40L and the holding member 40W may be a non-flexible substrate made of glass epoxy resin or the like, but a portion to be bent for bending to be described later, that is, the wiring portion 40L and the holding member 40W Only the border area with must be flexible.
 なお、配線板40Cは、撮像素子10の投影面内に収容するためには、可撓性基板であることが好ましい。配線部40Lの主面40SAにはチップコンデンサ、チップインダクタ等の電子部品69が実装される。なお、主面40SAと対向する主面40SBにも電子部品が実装されていてもよい。 In order to accommodate the wiring board 40C in the projection plane of the imaging device 10, it is preferable that the wiring board 40C be a flexible substrate. Electronic components 69 such as chip capacitors and chip inductors are mounted on the main surface 40SA of the wiring portion 40L. Note that the electronic component may be mounted also on the main surface 40SB facing the main surface 40SA.
 図6Bおよび図6Cに示すように、保持部材40W1、40W2が配線板40Cの主面40SAに対して直立するように折り曲げられる。平板状の配線板40は折り曲げられると、3次元の立体となる。配線板40の幅は、折り曲げられた保持部材40Wを含めて、撮像素子10の幅以下であればよい。 As shown in FIGS. 6B and 6C, the holding members 40W1 and 40W2 are bent so as to stand upright on the main surface 40SA of the wiring board 40C. When the flat wiring board 40 is bent, it becomes a three-dimensional solid. The width of the wiring board 40 may be equal to or less than the width of the imaging device 10, including the bent holding member 40W.
 図6Cに示すように、保持部材40W1、40W2は、硬化性樹脂45により直立状態で固定されることが好ましい。なお、硬化性樹脂45としては例えば紫外線硬化型樹脂を用いる。 As shown in FIG. 6C, the holding members 40W1 and 40W2 are preferably fixed in an upright state by the curable resin 45. For example, an ultraviolet curable resin is used as the curable resin 45.
 撮像モジュール1Cは、一般的な平板状の配線板40Cの延設部を折り曲げることにより、立体化しているため、撮像モジュール1Bよりも製造が容易である。 The imaging module 1C is three-dimensionally formed by bending the extended portion of the general flat wiring board 40C, and therefore is easier to manufacture than the imaging module 1B.
<第3実施形態>
 次に第3実施形態の変形例の撮像モジュール1Dについて説明する。なお、撮像モジュール1Bは、撮像モジュール1と類似し、同じ効果を有するため、同じ機能の構成要素には同じ符号を付し説明は省略する。
Third Embodiment
Next, an imaging module 1D according to a modification of the third embodiment will be described. In addition, since the imaging module 1B is similar to the imaging module 1 and has the same effect, the same code | symbol is attached | subjected to the component of the same function, and description is abbreviate | omitted.
 図7に示すように、撮像モジュール1Dの撮像素子10Dには、すでに説明した従来の撮像モジュール101の撮像素子110と同じように、両壁面が傾斜面10SS、10STの貫通トレンチ10TAが形成されている。すなわち、撮像素子10とは接合ウエハの切断位置が異なる。しかし、撮像素子10Dの基本的構成は撮像素子10と同じである。 As shown in FIG. 7, in the image pickup device 10D of the image pickup module 1D, as in the case of the image pickup device 110 of the conventional image pickup module 101 described above, through trenches 10TA having inclined surfaces 10SS and 10ST are formed. There is. That is, the cutting position of the bonded wafer is different from that of the imaging device 10. However, the basic configuration of the imaging device 10D is the same as that of the imaging device 10.
 また、撮像モジュール1Dの配線板40Dは、端面に列設されている接合電極がフライングリード41Aである。フライングリード41A(リードフレームではアウターリードとよばれている)は、配線板40Aの絶縁性基体が選択的に除去された導体配線からなる。 Further, in the wiring board 40D of the imaging module 1D, the bonding electrodes provided in a row on the end face are the flying leads 41A. The flying leads 41A (referred to as outer leads in the lead frame) are made of conductor wiring from which the insulating base of the wiring board 40A is selectively removed.
 フライングリード41Aは、容易に折り曲げることができるとともに、半田バンプ44を配線板40Dの基体を介さないで直接加熱することができる。 The flying leads 41A can be easily bent, and the solder bumps 44 can be directly heated without passing through the base of the wiring board 40D.
 このため、撮像モジュール1Dは、撮像モジュール1等よりも製造が容易である。 Therefore, the imaging module 1D is easier to manufacture than the imaging module 1 and the like.
 さらに、撮像モジュール1Dでは、配線板40Dの主面40SAに実装された電子部品69Aおよび69Bが、配線板40Dの主面40SAの先端部と撮像素子10Dの対向面10SBとを第1の角度θ1に規定する保持部材の機能を有する。すなわち、電子部品69Aおよび69Bが、撮像素子10Dの対向面10SBと当接している。なお、少なくとも1つの電子部品が対向面10SBと当接していればよいが、複数の電子部品69Aおよび69Bが当接していると、より角度規定が容易である。 Furthermore, in the imaging module 1D, the electronic components 69A and 69B mounted on the main surface 40SA of the wiring board 40D form a first angle θ1 between the tip of the main surface 40SA of the wiring board 40D and the opposing surface 10SB of the imaging element 10D. Have the function of the holding member defined in That is, the electronic components 69A and 69B are in contact with the facing surface 10SB of the imaging element 10D. In addition, at least one electronic component may be in contact with the facing surface 10SB, but when the plurality of electronic components 69A and 69B are in contact, angle definition is easier.
 電子部品69Aおよび69Bは、その角部が撮像素子10Dの対向面10SBと当接したときに、配線板40Dの主面40SAと撮像素子10Dの対向面10SBとが第1の角度θ1になるように、高さを考慮して、配設位置が決められている。 In the electronic components 69A and 69B, the main surface 40SA of the wiring board 40D and the opposing surface 10SB of the imaging device 10D have a first angle θ1 when the corners thereof abut on the opposing surface 10SB of the imaging device 10D. The placement position is determined in consideration of the height.
 撮像モジュール1Dは、角度規定のため専用の保持部材が不要であるため、製造が容易である。 The imaging module 1D is easy to manufacture because it does not require a dedicated holding member for angle definition.
 なお、撮像モジュール1Dでは、撮像素子10Dと配線板40Dとの間の空間に樹脂部材65が注入され、硬化処理されている。また、配線板40Dの主面40SBにも電子部品69Cが実装されている。 In the imaging module 1D, the resin member 65 is injected into the space between the imaging element 10D and the wiring board 40D and is cured. The electronic component 69C is also mounted on the main surface 40SB of the wiring board 40D.
 電子部品69A、69Bは角度を規定しているが、撮像素子10Dと配線板40Dとを固定していない。撮像素子10Dと配線板40Dとは、樹脂部材65により相対位置が固定されている。 Although the electronic components 69A and 69B define angles, the imaging element 10D and the wiring board 40D are not fixed. The relative positions of the imaging element 10D and the wiring board 40D are fixed by the resin member 65.
 樹脂部材65により固定されている撮像モジュール1Dは、撮像モジュール1等よりも更に機械的強度が高い。 The imaging module 1D fixed by the resin member 65 has a mechanical strength higher than that of the imaging module 1 and the like.
<第4実施形態>
 次に第4実施形態の変形例の撮像モジュール1Eについて説明する。なお、撮像モジュール1Eは、撮像モジュール1等と類似し、同じ効果を有するため、同じ機能の構成要素には同じ符号を付し説明は省略する。
Fourth Embodiment
Next, an imaging module 1E according to a modification of the fourth embodiment will be described. In addition, since the imaging module 1E is similar to the imaging module 1 etc. and has the same effect, the same code | symbol is attached | subjected to the component of the same function, and description is abbreviate | omitted.
 図8および図9に示すように、撮像モジュール1Eは、底面に対して第1の傾斜角度θ1で傾斜している傾斜面を有するブロック70Eが、配線板40Eの主面40SAと撮像素子10Dの対向面10SBとが第1の角度θ1になるように規定している保持部である。ブロック70Eの底面70SBは、図示しない接着剤により配線板40Eおよび撮像素子10Dと接着されている。 As shown in FIGS. 8 and 9, in the imaging module 1E, a block 70E having an inclined surface inclined at a first inclination angle θ1 with respect to the bottom surface corresponds to the main surface 40SA of the wiring board 40E and the imaging device 10D. It is a holding | maintenance part which is prescribed | regulated so that opposing surface 10SB may become 1st angle (theta) 1. FIG. The bottom surface 70SB of the block 70E is bonded to the wiring board 40E and the imaging device 10D by an adhesive (not shown).
 ブロック70Eは、撮像素子10Dが発生した熱を効率的に伝熱するために、熱伝導率が、10W/(mK)以上の高熱伝導率材料からなることが好ましい。 The block 70E is preferably made of a high thermal conductivity material having a thermal conductivity of 10 W / (mK) or more in order to efficiently transfer the heat generated by the imaging device 10D.
 なお、ブロック70Eには、電子部品69Aの大きさに合わせた凹部70Hが傾斜面70SAに形成されている。このため、配線板40Eの主面40SAに電子部品69Aを配設できる。なお、配線板40Eの主面40SBにも電子部品69B、69Cが実装されている。 In the block 70E, a concave portion 70H in accordance with the size of the electronic component 69A is formed on the inclined surface 70SA. Therefore, the electronic component 69A can be disposed on the main surface 40SA of the wiring board 40E. Electronic parts 69B and 69C are also mounted on the main surface 40SB of the wiring board 40E.
 すなわち、撮像モジュール1Eは、保持部材としてブロック70Eを有するが、側面から透明視したとき、保持部材と電子部品とがオーバーラップしている。 That is, although the imaging module 1E includes the block 70E as a holding member, the holding member and the electronic component overlap when viewed from the side.
 本発明は上述した実施形態、または変形例等に限定されるものではなく、本発明の要旨を変えない範囲において、種々の変更、改変、組み合わせ等ができる。 The present invention is not limited to the above-described embodiment, modifications, and the like, and various changes, modifications, combinations, and the like can be made without departing from the scope of the present invention.
1、1A~1E…撮像モジュール
10…撮像素子
20…接着層
30…カバーガラス
40…配線板
40L…配線部
40W…角度規定部(保持部材)
41…接合電極
41A…フライングリード
42…接合電極
44…半田バンプ
45…硬化性樹脂
65…樹脂部材
69…電子部品
70…保持部材
70E…ブロック
70H…凹部
70L…中央板
70W…角度規定部
1, 1A to 1E: imaging module 10: imaging element 20: adhesive layer 30: cover glass 40: wiring board 40L: wiring portion 40W: angle defining portion (holding member)
41: bonding electrode 41A: flying lead 42: bonding electrode 44: solder bump 45: hardening resin 65: resin member 69: electronic component 70: holding member 70E: block 70H: recess 70L: central plate 70W: angle defining portion

Claims (10)

  1.  受光部が形成されている受光面と、前記受光面と対向している対向面と、前記受光面に対して鋭角の第1の角度で傾斜している傾斜面と、を有し、前記傾斜面に複数の電極パッドが列設されている撮像素子と、
     前記撮像素子の前記受光面を覆うように接着層を介して接着されている透明部材と
     前記撮像素子の前記対向面側に配置されている、前記撮像素子の前記複数の電極パッドのそれぞれと、それぞれが接合されている複数の接合電極が主面の側辺部に平行に列設されており、前記主面に電子部品が表面実装されている、配線板と、を具備する撮像モジュールであって、
     前記撮像素子の前記対向面と当接し、前記配線板の前記主面の先端部と前記撮像素子の前記対向面とを前記第1の角度に規定している、保持部材をさらに具備することを特徴とする撮像モジュール。
    The light receiving surface includes a light receiving surface on which a light receiving portion is formed, an opposing surface facing the light receiving surface, and an inclined surface which is inclined at a first acute angle with respect to the light receiving surface. An imaging element in which a plurality of electrode pads are arranged in a row on the surface;
    A transparent member adhered via an adhesive layer so as to cover the light receiving surface of the imaging device; and each of the plurality of electrode pads of the imaging device disposed on the opposite surface side of the imaging device; An imaging module comprising: a wiring board in which a plurality of bonding electrodes to which each is bonded are arranged in parallel in a side edge portion of a main surface, and an electronic component is surface-mounted on the main surface. ,
    It further comprises a holding member in contact with the opposite surface of the image sensor, and defining the tip of the main surface of the wiring board and the opposite surface of the image sensor at the first angle. An imaging module characterized by
  2.  側面から透明視したとき、前記保持部材と前記電子部品とがオーバーラップしていることを特徴とする請求項1に記載の撮像モジュール。 The imaging module according to claim 1, wherein the holding member and the electronic component overlap when viewed from the side.
  3.  前記保持部材が、第1の辺と第2の辺とがなす角度が前記第1の角度の三角形の角度規定部を含むことを特徴とする請求項2に記載の撮像モジュール。 The imaging module according to claim 2, wherein the holding member includes an angle defining portion of a triangle of the first angle formed by the first side and the second side.
  4.  前記保持部材が、矩形の中央板と、前記中央板に対して直立している前記角度規定部と、を有することを特徴とする請求項3に記載の撮像モジュール。 The imaging module according to claim 3, wherein the holding member includes a rectangular central plate and the angle defining portion which is upright with respect to the central plate.
  5.  前記角度規定部が、前記主面に対して直立している前記配線板の延設部であることを特徴とする請求項3に記載の撮像モジュール。 The imaging module according to claim 3, wherein the angle defining portion is an extended portion of the wiring board which is upright with respect to the main surface.
  6.  前記延設部が、熱伝導率が、10W/(mK)以上の前記配線板の基材からなることを特徴とする請求項5に記載の撮像モジュール。 The imaging module according to claim 5, wherein the extending portion is made of a base material of the wiring board having a thermal conductivity of 10 W / (mK) or more.
  7.  前記延設部が前記配線板から折り曲げられていることを特徴とする請求項5に記載の撮像モジュール。 The imaging module according to claim 5, wherein the extended portion is bent from the wiring board.
  8.  前記角度規定部が、前記配線板に表面実装されている前記電子部品であることを特徴とする請求項3に記載の撮像モジュール。 The imaging module according to claim 3, wherein the angle defining unit is the electronic component surface-mounted on the wiring board.
  9.  前記角度規定部が、底面に対して前記第1の傾斜角度で傾斜している傾斜面を有するブロックであり、
     前記ブロックに前記電子部品の少なくとも一部が挿入されている孔があることを特徴とする請求項3に記載の撮像モジュール。
    The angle defining portion is a block having an inclined surface which is inclined at the first inclination angle with respect to the bottom surface,
    The imaging module according to claim 3, wherein the block includes a hole into which at least a part of the electronic component is inserted.
  10.  前記電子部品の表面の少なくとも一部が、前記撮像素子と前記配線板との間に配設された樹脂部材に覆われていることを特徴とする請求項1から請求項9のいずれか1項に記載の撮像モジュール。 10. At least one part of the surface of the said electronic component is covered by the resin member arrange | positioned between the said image pick-up element and the said wiring board, The any one of the Claims 1-9 characterized by the above-mentioned. The imaging module described in.
PCT/JP2015/061429 2015-04-14 2015-04-14 Imaging module WO2016166810A1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
PCT/JP2015/061429 WO2016166810A1 (en) 2015-04-14 2015-04-14 Imaging module
JP2017512490A JP6542876B2 (en) 2015-04-14 2015-04-14 Imaging module

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2015/061429 WO2016166810A1 (en) 2015-04-14 2015-04-14 Imaging module

Publications (1)

Publication Number Publication Date
WO2016166810A1 true WO2016166810A1 (en) 2016-10-20

Family

ID=57126391

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2015/061429 WO2016166810A1 (en) 2015-04-14 2015-04-14 Imaging module

Country Status (2)

Country Link
JP (1) JP6542876B2 (en)
WO (1) WO2016166810A1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109716523A (en) * 2016-10-27 2019-05-03 奥林巴斯株式会社 The manufacturing method of camera assembly, endoscope and camera assembly

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1033470A (en) * 1996-07-18 1998-02-10 Olympus Optical Co Ltd Image capturing device
JP2009176815A (en) * 2008-01-22 2009-08-06 Olympus Corp Mounting structure
JP2011217887A (en) * 2010-04-07 2011-11-04 Olympus Corp Image pickup apparatus, endoscope and manufacturing method for image pickup apparatus
JP2014075764A (en) * 2012-10-05 2014-04-24 Olympus Corp Imaging apparatus and endoscope equipped with the same

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1033470A (en) * 1996-07-18 1998-02-10 Olympus Optical Co Ltd Image capturing device
JP2009176815A (en) * 2008-01-22 2009-08-06 Olympus Corp Mounting structure
JP2011217887A (en) * 2010-04-07 2011-11-04 Olympus Corp Image pickup apparatus, endoscope and manufacturing method for image pickup apparatus
JP2014075764A (en) * 2012-10-05 2014-04-24 Olympus Corp Imaging apparatus and endoscope equipped with the same

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109716523A (en) * 2016-10-27 2019-05-03 奥林巴斯株式会社 The manufacturing method of camera assembly, endoscope and camera assembly
CN109716523B (en) * 2016-10-27 2023-10-10 奥林巴斯株式会社 Image pickup module, endoscope, and method for manufacturing image pickup module

Also Published As

Publication number Publication date
JPWO2016166810A1 (en) 2018-02-15
JP6542876B2 (en) 2019-07-10

Similar Documents

Publication Publication Date Title
JP5675151B2 (en) Imaging device, electronic endoscope, and manufacturing method of imaging device
TWI739662B (en) Semiconductor device having conductive wire with increased attachment angle and method
US8698887B2 (en) Image pickup apparatus, endoscope and manufacturing method for image pickup apparatus
JP6000859B2 (en) Semiconductor device manufacturing method, semiconductor device, and endoscope
JP5452282B2 (en) Solid-state imaging device
JP6021618B2 (en) Imaging apparatus, endoscope, and manufacturing method of imaging apparatus
JP2003133518A (en) Semiconductor module
US10334143B2 (en) Image pickup apparatus having wiring board with alternately arranged flying leads
JP6124505B2 (en) Imaging module
US10381393B2 (en) Image pickup apparatus and method for manufacturing image pickup apparatus
JP2013123628A (en) Imaging unit for endoscope
WO2008072551A1 (en) Ic chip-mounted package and image display device using the same
JP6535087B2 (en) Imaging module and manufacturing method of imaging module
JP6542876B2 (en) Imaging module
US10321814B2 (en) Image pickup apparatus and endoscope
JP2008103725A (en) Flexible film, semiconductor package using the flexible film and method for manufacturing the semiconductor package
JP6605632B2 (en) Imaging apparatus and endoscope
JP2008078164A (en) Semiconductor device, and manufacturing method thereof
JP6184106B2 (en) Hollow package for solid-state imaging device, solid-state imaging device, and solid-state imaging device
WO2016166889A1 (en) Imaging device
JP2016119379A (en) Semiconductor device and electronic device
JP2005159235A (en) Semiconductor device, its manufacturing method, wiring board, electronic module, and electronic equipment
JP2015204446A (en) Semiconductor module, bonding jig, and manufacturing method of semiconductor module
JP2004319579A (en) Semiconductor device

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 15889148

Country of ref document: EP

Kind code of ref document: A1

ENP Entry into the national phase

Ref document number: 2017512490

Country of ref document: JP

Kind code of ref document: A

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 15889148

Country of ref document: EP

Kind code of ref document: A1