1231365 玖、發明說明： 【發明所屬之技術領域】 本發明係一種使用㈣象儀肖雷射二極體之三維㈣位移 量測系統，特別指一種使用四象儀作為光學量測感測器，以建 構出一套能夠量測工具機多自由度的系統的量測系統。 【先前技術】 在現今高科技的時代，為了要再有所突破，已漸漸走入了 -個目前最炙手可熱的-個領域—微/奈米的領域，而大多的 工業製造也要求短、小、輕、薄，且精密度要高，所以工具機 各方面的誤差量測也顯得特別重要。 現以NC工具機而言，以定位誤差、動態誤差以及體積誤 差最為受大家所關心’而以目前的精密量測儀器的架構大多複 :且量測範圍有限。例如雷射干涉儀做定點誤差檢测來說，只 線運動量量出各點定位，除非使用反射鏡或 ^路徑單—直線的限制。而若是以雙球桿或雷射球桿做量 ::广均需製作一實體球桿，價格昂貴，且前者只能做循 圓運動，量測半徑固定，是一 — 右疋以複雜度很高的， 並聯式機構發展出三維雷射量測’ 加許多。 丹乐、、死上的不確定度會增 總而言之，量測工 性除了利用光-… 度來說，量測的穩定 量測工其餘的都有待評估，而要同時方便地 /、千台-維、二維甚至是三維是相當不容易，量具的 1231365 擺设更疋一大問題。有鑑於此 前瞻性的一個感測器—四象儀 束後處理成兩個軸向的誤差訊 多自由度的系統。 ’本系統使用了光學量測中極具 ，也就是一種可感測一條雷射光 號，建構出一套能夠量測工具機 四象儀為二維度的位置感測器（P〇sitimi Sensitive1231365 发明 Description of the invention: [Technical field to which the invention belongs] The present invention relates to a three-dimensional chirped displacement measurement system using a raphe camera Xiao laser diode, and particularly to a four-camera as an optical measurement sensor. In order to construct a measuring system capable of measuring a machine tool's multiple degrees of freedom. [Previous technology] In today's high-tech era, in order to make breakthroughs, it has gradually entered into the field of the most popular-the field-micro / nano, and most industrial manufacturing also requires short, small , Light, thin, and high precision, so the error measurement of machine tools in all aspects also seems particularly important. As far as NC machine tools are concerned, the positioning error, dynamic error and volume error are of most concern to everyone ', and the current precision measurement instrument architectures are mostly complex: and the measurement range is limited. For example, for laser interferometers to perform fixed-point error detection, only the amount of linear movement is used to measure the location of each point, unless the use of a mirror or a single-line limit is used. And if you use a double or laser club to measure the amount :: Guangjun needs to make a solid club, which is expensive, and the former can only perform circular movements, and the measurement radius is fixed. It is one—the right is very complicated. High, parallel-type mechanisms have developed three-dimensional laser measurements' plus many more. Dan Le, and the uncertainty on death will increase. In short, in addition to the use of light -... degree, the measurement stability of the rest of the measurement needs to be evaluated, and at the same time, conveniently, thousands of units- Dimensional, two-dimensional and even three-dimensional are not easy. The 1231365 display of measuring tools is a big problem. In view of this, a forward-looking sensor, a four-imager beam, is post-processed into a system with multiple axial errors and multiple degrees of freedom. ’This system uses optical measurement, which is a type of laser light that can sense a laser beam, and constructs a set of position sensors capable of measuring machine tools. The four-dimensional image sensor is a two-dimensional position sensor (P0sitimi Sensitive).
Detect。小又稱之為四象限光感測器，為_種二維的位置靈 敏感測器，其外形有圓形或方形，感測面内部佈滿了光二極體 感、J器並且區分成四個&限，冑它接收到雷射量測光束，其 光束偏移時’光感測器各象限輸出端會輸出不同的電壓。光束 能里越多的象限將輸出越高的電壓，運用此特性可量測出光束 與感測器之間極小的相對縱向和橫向的位移量，當一雷射光垂 直照射在四象限光感測器上，此雷射光束與感測器具有橫向或 縱向偏移時，若將四個象限的輸出電壓作放大、相加與相減運 算，即可找出橫向或縱向偏移量與經過運算之電壓的特性曲 線0 若以數學方程式表示，假設光感測器之各象限的輸出電壓 分別為VI、V2、V3及V4。若將光感測器固定，讓雷射光束沿 感測面之縱軸和橫軸分別移動Ay和Δζ時，Ay和與各象 限的輸出電壓的關係如下： + F2 + κ3 + ν4 1 1231365 λΊ+3)-%+Κ)』 (Vl+v2 + v3 + v4) 2 其中κι，Κ2為比例常數。由於隨著量測距離的不同會造 成光束能量的變動，因此以上式子中分母為四個象限之輸出電 壓的總合，此運算之目的再減少此種現象的影響。四象限光减 測器訊號可由電腦擷取再以軟體進行運算處理之，可分析出兩 個軸向的誤差訊號，也就是說—個雷射四象儀可 轴向的誤差，然後在製作出一爽治具，以便於多組四二 充分應用於工具機平台多自由度之量測。 【發明目的】 本舍月之目的即在提供_種使用四象儀及雷射二極體與 爽治具做配合，建構出-套可量測的卫具機平台；其以四象儀 的多寡來決定工具機可量測之自由度(-個四象儀可量兩個自 由度）’&雷射二極體發出雷射光打人置於平台上夾持塊的四 象儀，之後直接由四象儀内作處理，因卫具機誤差使得雷射波 長的差異，四象儀便能分析這些差異，一個軸向的雷射光打入 四象儀内’可仔到另外兩軸向的誤差訊號，亦及如果兩個雷射 光從X和y方向射入’兩個四象儀便可得到丫、Ζ訊號和 的訊號’再傳輸到電腦用軟體或程式處理，即可得到平台進f 量測運動時誤差數據，並谁_ I進一步整合為整體誤差進行的動態言 差診斷。 【發明内容】 8 1231365 本發明係使用四象儀及雷射二極體與夾治 可量測多自由度工具機平台多方面誤差的一種系統，其= 光路係由雷射二極體打出一可見光至四象儀上，該兩組雷射二 極體且用-組雙W之二極體炎治具夾持，量測時可以利用主 軸夾持住，二極體爽治具製成雙!^型是為了使兩組雷射二極體 以及主軸在爽持時能夠相互垂纟，盡量避免不必要的擺設誤 差，而四象儀擺設在-長方體型的夾治具上，必匕爽治具也鎖在 工具機平台之上，當工具機平台作動時，此夾治具也隨之作 動，如此一來，位於此夾治具上的四象儀接收到雷射光束因平 台運動所造成的偏移量，造成四象儀内構造中四個象限中各個 電壓比值有所變化，利用此電壓變化，應用電腦數據擷取以及 位移和電壓的校正線性關係方程式，進一步量測出此平台的誤 差。 一個軸向的雷射光束打入一組四象儀能夠量到兩個軸向 之誤差，因為四象儀的感測面内部佈滿了光二極體感測器，並 且區分成四個象限，當它接收到雷射量測光束，其光束偏移 時’光感測器各象限輸出端會輸出不同的電壓。光束能量越多 的象限將輸出越高的電壓，運用此特性可量測出光束與感測器 之間極小的相對縱向和橫向的位移量，當一雷射光垂直照射在 四象限光感測器上，此雷射光束與感測器具有橫向或縱向偏移 時’若將四個象限的輸出電壓作放大、相加與相減運算，即可 1231365 找出k向或縱向偏移量，舉例來說，雷射光束光路循著x轴Detect. Xiao is also called a four-quadrant light sensor, which is a two-dimensional position-sensitive sensor. Its shape is round or square. The sensing surface is covered with photodiodes, J devices, and divided into four. Each & limit, when it receives the laser measurement beam, when the beam is shifted, the output ends of the quadrants of the light sensor will output different voltages. The more quadrants in the beam energy, the higher the voltage will be output. This feature can be used to measure the minimum relative longitudinal and lateral displacement between the beam and the sensor. When the laser beam and the sensor have a horizontal or vertical offset, if the output voltages of the four quadrants are amplified, added, and subtracted, the horizontal or vertical offset and the calculated operation can be found. If the voltage characteristic curve 0 is expressed by a mathematical equation, it is assumed that the output voltages of the quadrants of the light sensor are VI, V2, V3, and V4, respectively. If the light sensor is fixed and the laser beam is moved along the vertical and horizontal axes of the sensing surface by Ay and Δζ, the relationship between Ay and the output voltage of each quadrant is as follows: + F2 + κ3 + ν4 1 1231365 λΊ +3)-% + Κ) ″ (Vl + v2 + v3 + v4) 2 where κι and κ2 are proportional constants. Since the energy of the beam varies with the measurement distance, the denominator in the above formula is the sum of the output voltages of the four quadrants. The purpose of this operation is to reduce the effect of this phenomenon. The signal of the four-quadrant optical subtractor can be captured by a computer and then processed by software. The two-axis error signal can be analyzed. That is to say, a laser four-imager can have an axial error. A cool fixture, so that multiple groups of four or two can be fully applied to the multi-degree-of-freedom measurement of the machine tool platform. [Objective of the Invention] The purpose of this month is to provide _ a kind of measurable health machine platform using four-image instrument and laser diode to cooperate with cool fixtures; To determine the degree of freedom that a machine can measure (a four-imager can measure two degrees of freedom) '& laser diode emits laser light to hit a four-imager placed on a clamping block on the platform, and then directly It is processed in the four-image instrument. Due to the difference in laser wavelength caused by the error of the machine, the four-image instrument can analyze these differences. The laser light from one axis can enter the four-image instrument. The error signal, and if two laser beams enter X and y directions, 'two four imagers can get the signals of Y, Z, and Z', and then they are transmitted to the computer for processing by software or program, and the platform can be obtained. Measure error data during exercise, and who_I is further integrated as dynamic error diagnosis for overall error. [Summary of the Invention] 8 1231365 The present invention is a system that uses a four-camera instrument, a laser diode, and clamps to measure various errors in a multi-degree-of-freedom machine tool platform. Visible light to the quadrant, the two sets of laser diodes are held by -groups of dual W diode inflammation fixtures, which can be held by the main shaft during measurement, and the diode cool fixtures are made double! The ^ type is to enable the two sets of laser diodes and the main shaft to hang against each other when they are held, to avoid unnecessary display errors, and the four-image device is placed on the -rectangular shape fixture, which must be cool. It is also locked on the machine tool platform. When the machine tool platform is actuated, the gripper is also activated. As a result, the four-image instrument on the gripper receives the laser beam caused by the movement of the platform. The offset caused the voltage ratios of the four quadrants in the structure of the four imager to change. Using this voltage change, the computer data acquisition and the linear relationship equation of displacement and voltage correction were used to further measure the error of this platform. . An axial laser beam entering a group of four imagers can measure the error of two axes, because the sensing surface of the four imagers is covered with photodiode sensors and is divided into four quadrants. When it receives the laser measurement beam, when its beam shifts, the output terminals of the quadrants of the light sensor will output different voltages. The quadrant with more beam energy will output a higher voltage. This feature can be used to measure the minimum relative longitudinal and lateral displacement between the beam and the sensor. When a laser beam is irradiated vertically on a four-quadrant light sensor When the laser beam and the sensor have a horizontal or vertical offset, 'if the output voltages of the four quadrants are amplified, added, and subtracted, you can find the k or vertical offset in 1231365, for example The laser beam follows the x-axis
I 、入四象儀，量測系統將兩組四象儀及其夾治塊置放在工具 機平台上，將兩組雷射光源與兩個四象儀分別架設在平台相對 “ Y — z座私軸之位置上。在χ座標軸方向雷射二極體將 光源入射至塊規標準面上四象儀的一固定位置，當平台沿X方 向移動時雷射二極體與四象儀固定不動，雷射光會因平台移動 :偏擺而改變波長，因而使得雷射光入射至四象儀的位置改 艾而由四象儀輸出之電壓變化可獲得雷射光改變量。所以雷 光束光路循著X軸方向的量測，再經由卫具機平台的運動， 四象儀可謂γ軸向和z軸向位置誤差量（相對縱向和橫向的 位移里），而本架構選用了兩組雷射二極體及兩個四象儀，經 過評估能夠至少可量測到工具機平台的四個自由度。 【實施方式】 請參閱圖一所示 本發明所稱使用四象儀與雷射二極體之 二維振動位移量測系統 一組雷射二極體a 2、第 射二極體夾治具c 1、四 ’主要包括有第一組雷射二極體al、第 一組四象儀bl、第二組四象儀b2、雷 象儀夾治具c2，以及工具機床台d。 由該圖得知，雷射二極體al c 1夾持後，變為相互垂直的擺設 象儀bl、b2，其中四象儀bi、 床台d上，可隨著工具機床台 a2經由雷射二極體夾治具 再各自發射雷射光束打至四 b2被C2夹持著且固定在工具機 d的平面運動或循執運動，而四 1231365 利用二:接收到雷射二極體a1，雷射光束並 二：夾治具C2隨著工具機床“的作動，進一步去量 一^ 具機床台d的幾個自由度誤差。如圖所示，當第 =射—極體al打出雷射光沿著χ軸向至第—組四象儀Η 、’藉由工具機床台d的循軌運動或兩軸向同動，第…象 ㈣可量測得y、z兩個軸向的誤差訊號，同理 射二極-打出雷射光沿著〜向至第二組四象二二 =具機床台d的循軌運動或兩軸向同動，第二組四象儀μ 可置測得X、z兩個軸向的誤差訊號，若整合四象儀bi、的 兩個重複的Z誤差訊號，可以量得z軸向的誤差，使得本架構 最J可ΐ測得二個自由度。 【特點及功效】 藉由前述所稱使用四象儀與雷射二極體之三維振動位移 里則系、、先本系統使用了光學篁測中極具前瞻性的一個感測器 一一四象儀，也就是一種可感測一條雷射光束後處理成兩個軸向鲁 的誤差訊號，實現了建構出一套能夠量測工具機多自由度的系 統。 上列詳細說明係針對本發明之一可行實施例之具體說 明’惟該實施例並非用以限制本發明之專利範圍，凡未脫離本 發明技藝精神所為之等效實施或變更，均應包含於本案之專利 範圍中。 1231365 【圖式簡單說明】 明參閱以下有關本發明一較佳實施例之詳細說明及其附 圖，將可進一步瞭解本發明之技術内容及其目的功效；有關該 實施例之附圖為： 圖一為本發明之立體結構示意圖。 【主要部分代表符號】 al第一組雷射二極體 a2第二組雷射二極體 b 1第一組四象儀 b2第二組四象儀 cl雷射二極體夾治具 c2四象儀夾治具 d 工具機床台I. Into the four-image instrument, the measurement system places two sets of four-image instrument and its clamping block on the platform of the machine, and sets two sets of laser light sources and two four-image instrument on the platform. The position of the private axis. The laser diode in the direction of the χ-axis axis incidents the light source to a fixed position of the four imager on the standard surface of the block gauge. When the platform moves in the X direction, the laser diode and the four imager are fixed. Without moving, the laser light will change its wavelength due to the movement of the platform: deflection, so that the position of the laser light incident on the four imager will be changed, and the voltage change output by the four imager will obtain the amount of laser light change. So the light path of the laser beam follows The measurement in the X-axis direction, and then through the movement of the platform of the health machine, the four-image device can be described as the position error of the γ-axis and the z-axis (relative to the longitudinal and lateral displacements). The polar body and the two quadrants can be measured to measure at least four degrees of freedom of the machine tool platform. [Embodiment] Please refer to FIG. 1 for the use of the quadrant and the laser diode according to the present invention. Two-dimensional vibration displacement measurement system Body a 2, the first diode clamping fixture c 1, four 'mainly includes a first group of laser diodes al, a first group of four imagers bl, a second group of four imagers b2, a laser imager clip The fixture c2 and the tool machine table d. According to the figure, the laser diode al c 1 is clamped and becomes a mutually perpendicular display imager bl, b2, of which the four imager bi, the bed d , As the machine tool table a2 passes the laser diode fixture and then emits laser beams to four b2, which is held by C2 and fixed on the plane of the machine tool d or follow the motion, and four 1231365 uses Second: the laser diode a1 is received, and the laser beam is merged. Second: The clamping tool C2 follows the action of the tool machine and further measures several degrees of freedom error of the machine tool table d. As shown in the figure, when the laser beam emitted by the first-pole body al is emitted along the χ-axis to the fourth group of four imagers Η, 'by the orbital movement of the tool machine table d or the two-axis simultaneous movement, the first ... Xiangyan can measure the error signals in the two axes of y and z, and the same way shoots the two poles-emits laser light along ~ to the second group of four elephants and two = tracking movement with machine table d or two axes In the same direction, the second group of four imagers μ can be set to measure the error signals in the two axes of X and z. If the two repeated Z error signals of the four imager bi and the two are integrated, the error in the z axis can be measured , So that the framework can measure two degrees of freedom. [Features and effects] By using the three-dimensional vibration displacement of the four-camera and laser diode mentioned above, this system uses a forward-looking sensor in optical measurement. Imager, which is a kind of error signal that can sense a laser beam and then process it into two axial rudders, has realized the construction of a system capable of measuring multiple degrees of freedom of machine tools. The above detailed description is a specific description of one of the feasible embodiments of the present invention, but this embodiment is not intended to limit the scope of the patent of the present invention. Any equivalent implementation or change that does not depart from the technical spirit of the present invention should be included in Within the scope of the patent in this case. 1231365 [Brief description of the drawings] By referring to the following detailed description of a preferred embodiment of the present invention and the accompanying drawings, the technical content of the present invention and its purpose and effect can be further understood; One is a schematic diagram of the three-dimensional structure of the present invention. [Representative symbols of main parts] al The first group of laser diodes a2 The second group of laser diodes b 1 The first group of four imagers b2 The second group of four imagers cl laser diode clamp c2 Imager fixture d tool machine table
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