SG11201407406RA - Ceiling storage device capable of wafer purging - Google Patents

Ceiling storage device capable of wafer purging

Info

Publication number
SG11201407406RA
SG11201407406RA SG11201407406RA SG11201407406RA SG11201407406RA SG 11201407406R A SG11201407406R A SG 11201407406RA SG 11201407406R A SG11201407406R A SG 11201407406RA SG 11201407406R A SG11201407406R A SG 11201407406RA SG 11201407406R A SG11201407406R A SG 11201407406RA
Authority
SG
Singapore
Prior art keywords
storage device
device capable
ceiling storage
wafer purging
purging
Prior art date
Application number
SG11201407406RA
Inventor
Jae Won Jang
Ho Geun Lee
Jun Pil Yun
Jung Young Lee
Sung Goo Choi
Original Assignee
Daifuku Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daifuku Kk filed Critical Daifuku Kk
Publication of SG11201407406RA publication Critical patent/SG11201407406RA/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67389—Closed carriers characterised by atmosphere control
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67733—Overhead conveying
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67769—Storage means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67775—Docking arrangements

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Filling Or Discharging Of Gas Storage Vessels (AREA)
SG11201407406RA 2012-10-31 2013-10-07 Ceiling storage device capable of wafer purging SG11201407406RA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020120122129A KR101418812B1 (en) 2012-10-31 2012-10-31 Apparatus for stocking and purging wafer at ceiling
PCT/KR2013/008923 WO2014069804A1 (en) 2012-10-31 2013-10-07 Ceiling storage device capable of wafer purging

Publications (1)

Publication Number Publication Date
SG11201407406RA true SG11201407406RA (en) 2015-03-30

Family

ID=50627655

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11201407406RA SG11201407406RA (en) 2012-10-31 2013-10-07 Ceiling storage device capable of wafer purging

Country Status (7)

Country Link
US (1) US9412631B2 (en)
JP (1) JP6075461B2 (en)
KR (1) KR101418812B1 (en)
CN (1) CN104246970B (en)
SG (1) SG11201407406RA (en)
TW (1) TWI568508B (en)
WO (1) WO2014069804A1 (en)

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* Cited by examiner, † Cited by third party
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JP6217854B2 (en) * 2014-06-16 2017-10-25 村田機械株式会社 Purge stocker and purge method
JP6241693B2 (en) * 2014-09-25 2017-12-06 村田機械株式会社 Purge apparatus and purge method
JP6311579B2 (en) * 2014-11-12 2018-04-18 株式会社ダイフク Goods transport equipment
KR102072621B1 (en) * 2015-08-25 2020-02-03 무라다기카이가부시끼가이샤 Purge device, purge stocker, and purge method
DE102016205597B4 (en) * 2016-04-05 2022-06-23 Fabmatics Gmbh Purge measurement system for FOUPs
CN109314075B (en) 2016-06-08 2023-02-21 村田机械株式会社 Container storage device and container storage method
US11631603B2 (en) 2018-07-20 2023-04-18 Murata Machinery, Ltd. Storage shelf, and method for installing storage shelf
US10964570B2 (en) 2018-12-03 2021-03-30 Samsung Electronics Co., Ltd. Semiconductor wafer storage system and method of supplying fluid for semiconductor wafer storage
KR102195523B1 (en) * 2019-10-10 2020-12-28 주식회사 아셀 In-line function testing method of STB
WO2021090542A1 (en) * 2019-11-05 2021-05-14 村田機械株式会社 Transport vehicle system
KR20220103789A (en) 2020-03-05 2022-07-22 무라다기카이가부시끼가이샤 storage shelf
KR102318029B1 (en) * 2020-06-29 2021-10-27 주식회사 아셀 Gas supply apparatus including flow test means
CN116529180A (en) * 2020-11-12 2023-08-01 村田机械株式会社 Pipe support
KR20230142623A (en) 2021-02-24 2023-10-11 무라다기카이가부시끼가이샤 purge device
KR20220127629A (en) 2021-03-11 2022-09-20 세메스 주식회사 Material storage apparatus and logistics management equipment including the same
WO2022219949A1 (en) * 2021-04-14 2022-10-20 村田機械株式会社 Storage rack

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JP2003092345A (en) * 2001-07-13 2003-03-28 Semiconductor Leading Edge Technologies Inc Substrate container, substrate transport system, storage device and gas substituting method
FR2844258B1 (en) * 2002-09-06 2005-06-03 Recif Sa SYSTEM FOR TRANSPORTING AND STORING SEMICONDUCTOR PLATE CONTAINERS, AND TRANSFER MECHANISM
US20040237244A1 (en) * 2003-05-26 2004-12-02 Tdk Corporation Purge system for product container and interface seal used in the system
JP3983254B2 (en) * 2005-06-24 2007-09-26 Ｔｄｋ株式会社 Purge system for product container and stand provided for the purge system
JP2008024429A (en) * 2006-07-20 2008-02-07 Toshiba Corp Manufacturing method for electronic device
JP4842771B2 (en) * 2006-11-15 2011-12-21 東京エレクトロン株式会社 Processing system, processing method, and recording medium
JP4670808B2 (en) * 2006-12-22 2011-04-13 ムラテックオートメーション株式会社 Container transport system and measuring container
JP4688824B2 (en) * 2007-01-12 2011-05-25 村田機械株式会社 Overhead traveling vehicle system and method for carrying in / out of processing device around overhead traveling vehicle system
JP4389181B2 (en) * 2007-03-07 2009-12-24 株式会社ダイフク Article processing equipment
JP5276338B2 (en) * 2008-02-27 2013-08-28 東レエンジニアリング株式会社 Coating device
JP5062485B2 (en) * 2008-04-09 2012-10-31 株式会社ダイフク Goods transport equipment
JP2010272828A (en) * 2009-05-25 2010-12-02 Hitachi Plant Technologies Ltd Storage room of liquid crystal substrate
JP2011187539A (en) * 2010-03-05 2011-09-22 Sinfonia Technology Co Ltd Gas charging apparatus, gas discharging apparatus, gas charging method, and gas discharging method
JP5477651B2 (en) * 2010-08-04 2014-04-23 株式会社ダイフク Goods transport equipment
JP5440871B2 (en) * 2010-08-20 2014-03-12 株式会社ダイフク Container storage equipment
KR101147192B1 (en) * 2011-11-11 2012-05-25 주식회사 엘에스테크 Apparatus for purge native oxide of wafer
JP5716968B2 (en) * 2012-01-04 2015-05-13 株式会社ダイフク Goods storage facility
JP5700255B2 (en) * 2012-03-27 2015-04-15 株式会社ダイフク Goods storage equipment and goods transportation equipment
JP6021046B2 (en) * 2012-08-21 2016-11-02 村田機械株式会社 Stocker with purge function and stocker unit
JP5884779B2 (en) * 2013-06-26 2016-03-15 株式会社ダイフク Goods storage facility
JP5888287B2 (en) * 2013-06-26 2016-03-16 株式会社ダイフク Processing equipment

Also Published As

Publication number Publication date
TW201416142A (en) 2014-05-01
TWI568508B (en) 2017-02-01
JP6075461B2 (en) 2017-02-08
US9412631B2 (en) 2016-08-09
JP2015533026A (en) 2015-11-16
CN104246970A (en) 2014-12-24
WO2014069804A1 (en) 2014-05-08
US20150235884A1 (en) 2015-08-20
KR101418812B1 (en) 2014-07-16
KR20140055393A (en) 2014-05-09
CN104246970B (en) 2017-06-13

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