KR102195523B1 - In-line function testing method of STB - Google Patents

Abstract

The present invention relates to a method for testing an in-line function of an STB capable of reducing the entire working time by reducing moving time of STBs while reducing the fatigue of an operator by reducing moving distances of STBs by reducing a distance for each process by having function inspection processes of STBs in line, and preventing the entanglement of cables while preventing that cables are connected to STBs other than designated STBs when connecting STBs to cables since communication cables and air supply cables required during function inspection processes are installed downward at regular intervals on a frame located above an operator.

Description

In-line function testing method of STB

The present invention relates to an STB inline function test method, and in detail, by inline the function test process of the STB to shorten the working time, the cables required for the function test work are located at the top of each test area, so that the STBs and cables It relates to an STB inline function test method that can prevent them from getting tangled together.

The FOUP (Front Opening Unified Pod) is a special plastic case designed to safely store and transport the wafer by protecting the wafer from external impact and contamination, as it is for loading wafers inside.

In the FOUP process, fume (gas fine particles) may remain inside during the process of semiconductor processing, and the surface of the wafer is contaminated and damaged due to the residual fume.

Therefore, in order to prevent the surface damage and contamination of the wafer by the fume, the FOUP needs to circulate a purge gas such as N2 or clean dry air to remove the fume formed therein.

This process is carried out by a purge gas circulation device formed in a side track buffer (STB) that provides a storage space for FOUP.

At this time, the wafers inside the FOUP are damaged when the supply pressure of the purge gas supplied from the purge gas circulation device of the STB is higher than the appropriate pressure, and the fume cannot be sufficiently removed when the supply pressure is lower than the appropriate pressure. do.

In addition, if the wafers inside the FOUP contain particulate impurities (hereinafter referred to as'particles') in the purge gas supplied from the STB's purge gas circulation device, particles may adhere to the wafer surface and cause wafer defects. I can.

In order to solve this problem, after the manufacture of STBs is completed, the workers perform functional tests such as purge gas supply and discharge pressure of the purge gas circulation device, whether or not particles are included, and the wafers stored inside the FOUP by the purge gas circulation device are Prevent damage.

However, in the conventional STB functional test, since the inspection process is not inlined, the moving distance of the workers increases due to the lengthening of the moving line, which increases the fatigue level and increases the overall working time.

In addition, the conventional STB function test is performed by cables in the process of moving STBs because there is no separate device for arranging communication cables and air supply cables required during the function test process. It is obstructed, and the working time increases as the STBs and cables become entangled.

In addition, in the conventional STB function test, since the end positions of the cables change during the process of connecting and disconnecting cables, the problem of being connected to an STB other than the designated STB occurs frequently, which causes errors in the function test results. do.

The present invention is to solve such a problem, and the problem of the present invention is to reduce the distance between each process by inline the function inspection process of STBs, thereby reducing the moving distance of the STBs, thereby reducing the operator's fatigue It is to provide an STB inline function test method that can shorten the working time.

In addition, another problem of the present invention is that communication cables and air supply cables required during the function test process are installed downward at regular intervals on a frame located above the operator, so that when connecting cables to the STBs, they are connected to other STBs other than the designated STB. The present invention relates to an STB in-line function test method capable of preventing the cables from being entangled with each other.

In addition, another problem of the present invention relates to an STB in-line function test method capable of reducing the time consumed in the flow measurement process by automatically seating the flow measurement device used in the flow measurement process of the purge module on the purge module.

The solution means of the present invention for solving the above problems include a main frame, a purge module installed under the main frame to circulate purge gas into the FOUP, a supply pipe supplying purge gas to the purge module, and the purge module. An STB in-line function test method for checking an STB comprising a discharge pipe for discharging a purge gas from the STB, comprising: a function test step of checking the function of the STB; A leak inspection step of inspecting whether or not the purge gas leaks; A particle inspection step of inspecting whether or not particles of the purge gas supplied into the FOUP through the purge module are included, and the inspection steps are sequentially arranged in first, second, and third inspection zones arranged on a straight line, respectively. It proceeds to.

In addition, in the present invention, the purge module may include a flat base plate; A plurality of guide pins installed on the upper surface of the base plate; An injection nozzle connected to the supply pipe and injecting a purge gas into the FOUP; A discharge nozzle connected to the discharge pipe and discharging the purge gas in the FOUP; It is desirable to include a sensor to detect FOUP.

In addition, in the present invention, each of the first, second, and third inspection zones is provided with inspection auxiliary devices, and the inspection auxiliary devices are installed perpendicular to the ground, and the height is greater than the height of the operator and the STB. Support frames; An upper frame connected to upper ends of the support frames; Horizontal frames and vertical frames installed inside the upper frame; A plurality of fixing means installed on the frames; It includes cables that are installed on the frames by the fixing means, and the cables are preferably installed so that their ends are positioned at regular intervals by the fixing means and face down.

In addition, in the present invention, the function test step includes an exhaust amount measuring step of measuring an exhaust amount of a purge gas; Flow measurement step of measuring the flow rate of the purge gas through the flow measurement device; It is preferable to include a sensor inspection step of inspecting the sensor.

In addition, in the present invention, valves capable of opening and closing the pipes are respectively installed on the supply pipe and the discharge pipe, and the leak inspection step includes a tube installation step of installing a tube having both ends coupled to the injection nozzle and the discharge nozzle; A purge gas supply step of supplying a purge gas into the tube; A pressure measuring step of measuring the pressure in the tube for a preset time while shutting off supply and discharge of purge gas by closing valves of the supply pipe and the discharge pipe; It is preferable to include a purge gas discharge step of discharging the purge gas in the tube by opening the valves.

In addition, in the present invention, the particle inspection step includes an impurity removing step of supplying a purge gas to remove impurities in the injection nozzle, the discharge nozzle, the supply pipe, and the discharge pipe; It is preferable to include a particle measuring step of measuring particles in the purge gas supplied from the injection nozzle through a particle measuring device.

According to the present invention having the above problems and solutions, by reducing the distance between each process by inline the function inspection process of STBs, the distance that the workers move the STBs is reduced, thereby reducing the operator's fatigue and working time, thereby improving inspection efficiency. You can increase it.

In addition, according to the present invention, communication cables and air supply cables necessary during the function test process are installed at regular intervals on the upper part of the operator by the test auxiliary device, so that when connecting cables to STBs, it is prevented from being connected to STBs other than the designated STB At the same time, it is possible to prevent the cables from being entangled with each other, thereby preventing an increase in the working time and the occurrence of errors in the inspection results due to the cables.

In addition, according to the present invention, the flow measurement device used in the flow measurement process is guided by the guide pins installed in the purge module, and the nozzles of the purge module and the gas inlet of the flow measurement device are configured to be in close contact with each other. It is possible to reduce the time required to set the flow measurement device to the purge module.

1 is an exemplary diagram of an STB, which is an inspection object of the present invention.
2 is a perspective view of the purge module of FIG. 1.
3 is a flow chart showing step by step the STB inline function test method of the present invention.
4 is an exemplary diagram for explaining a process in which the STB inline function test method of the present invention is performed.
5 is a perspective view of the inspection auxiliary device of FIG. 4.
6 is a flowchart of the function test step of FIG. 3.
7 is a perspective view of a flow measurement device used in the flow measurement step of FIG. 6.
8 is a front view of FIG. 7.
9 is a cross-sectional view of a gas inlet of FIG. 7.
10 is a flow chart of the leak inspection step of FIG. 3.
11 is a flowchart of a particle inspection step of FIG. 3.

Hereinafter, an embodiment of the present invention will be described with reference to the accompanying drawings.

1 is an exemplary view of an STB, which is an inspection target of the present invention, and FIG. 2 is a perspective view of the purge module of FIG. 1.

As shown in FIG. 1, the STB 5 includes a main frame 51 having a hexahedral frame shape, purge modules 52 installed under the main frame 51, and a purge module 52 to purge gas. It consists of a supply pipe 53 for supplying and a discharge pipe 54 for discharging the purge gas.

At this time, the Side Track Buffer (STB) 5 is an equipment that provides a storage space for a front opening unified pod (FOUP), a case for storing wafers.

The main frame 51 is formed in a hexahedral frame shape, and a purge module 52, a supply pipe 53, a discharge pipe 54, and other accessories are installed.

Further, the main frame 51 is additionally installed with auxiliary frames 511 to improve durability and install accessories.

In addition, fixing parts 512 for fixing to an installation place such as a ceiling are installed on the upper part of the main frame 51.

As shown in FIG. 2, the purge module 52 is installed under the main frame 51, is formed in a flat plate shape, and the base plate 521 on which the FOUP is seated on the upper surface, and the FOUP is the base plate 521 Guide pins 522 for guiding to be seated in the correct position of the base plate 521, an injection nozzle 523 for injecting purge gas to the FOUP seated on the base plate 521, and a discharge nozzle 524 for discharging the purge gas in the FOUP. And, when the FOUP is seated on the top of the base plate 521, a load sensor 525 that detects whether the FOUP is seated, and a tag sensor (not shown) that recognizes information on a tag installed on the lower surface of the FOUP.

The base plate 521 is formed in a flat plate shape and is installed under the main frame 51.

In this case, the base plate 521 may be formed with a plurality of coupling holes and bent portions for coupling with the main frame 51.

A plurality of guide pins 522 are installed on the upper surface of the base plate 521, and the FOUP is seated in the correct position when the FOUP is seated on the upper surface of the base plate 521 so that the injection nozzle 523 and the discharge nozzle 524 Make sure to connect exactly with the nozzle connections of this FOUP.

The injection nozzle 523 receives the purge gas from the supply pipe 53 and injects the purge gas into the FOUP.

The discharge nozzle 524 discharges the purge gas inside the FOUP through the discharge pipe 54.

The load sensor 525 is a sensor that detects that the FOUP is seated on the upper surface of the base plate 521.

When the FOUP is seated on the top of the base plate 521, the purge module 52 checks whether the FOUP is seated and information of the seated FOUP by the load sensor 525 and the tag sensor, and the nozzle 523, By purging the FOUP through 524, it is possible to remove the fume, which is the fine particles of the process gas formed inside the FOUP.

In addition, valves 531 and 541 are formed in the supply pipe 53 and the discharge pipe 54 to prevent supply or discharge of the purge gas by closing the pipe.

3 is a flow chart showing step-by-step a STB inline function test method of the present invention, and FIG. 4 is an exemplary view for explaining a process in which the STB inline function test method of the present invention proceeds.

The STB in-line function test method 10 includes a function test step (S1) of checking the function of the purge module 52, a leak test step (S2) of checking whether a leak occurs during the purge process, and the injection nozzle 523. It consists of a particle inspection step (S3) for inspecting whether the discharged purge gas contains particles.

In addition, each inspection step (S1), (S2), (S3) is inlined, as shown in Fig. 4, the first, second, and third inspection areas in which the inspection process of the STBs 5 are arranged on a straight line. It proceeds sequentially in (A1), (A2), and (A3).

At this time, a plurality of STBs (5) are transported in one set by the transport means (8).

In addition, each inspection area (A1), (A2), (A3) is equipped with inspection equipment (not shown) required for each inspection process and a purge gas supply device, and inspection equipment and a purge gas supply device are provided. The work is performed by connecting the STBs (5) through a cable.

At this time, the cables connected to the STBs 5 are located close to the ground.

Due to this, the workers can increase the connection time of the cables as the cables are stepped on by the transport means (8) on which the STBs (5) are loaded in the process of moving the STBs (5) or become entangled with the STBs (5) or cables. Problems arise.

In addition, when the workers complete the transport process and connect the cables with the STBs 5, the cables are connected to a STB other than the STB in the designated location, resulting in a problem that a proper inspection result cannot be obtained.

In order to solve this problem, the present invention provides inspection aids 6, which are installed in frames with cables located above the operator, so that the ends face downward, and the ends of the cables are spaced apart at regular intervals. By installing in the inspection areas (A1), (A2), (A3), the cables can be arranged smoothly and the connection time can be reduced.

That is, the operator can not only prevent the cables from getting tangled through the inspection auxiliary device 6, but also reduce the time spent in the process of positioning the STBs 5 and connecting cables as the ends of the cables are located at regular intervals. Is done.

5 is a perspective view of the inspection auxiliary device of FIG. 4.

The inspection auxiliary device 6 includes support frames 61 installed perpendicular to the ground, a square frame-shaped upper frame 62 connected to the upper end of the support frames 61, and the longitudinal direction of the upper frame 62 It is installed at the connection of the horizontal frames 63 installed horizontally, the vertical frames 64 connected vertically with the horizontal frames 63, and the frames 61, 62, 63, 64 Reinforcing bars (65) to be, the fixing means (66) installed on the frames (61), (62), (63), (64), and the cable (67) guided by the fixing means (66) Consists of

The support frame 61 is installed vertically on the ground, and the height is larger than the operator's height and STB(5), so that the operator and the STB(5) are framed (61), (62), (63), (64) Make it possible to move within the field.

The upper frame 62 is formed in a rectangular frame shape, and upper ends of the support frames 61 are connected to the lower surface.

The horizontal frames 63 are connected in the longitudinal direction of the upper frame 62 inside the upper frame 62.

The vertical frames 64 are installed vertically with the horizontal frames 63 inside the upper frame 62.

The reinforcing bars 65 have both ends connected to the frames 61, 62, 63, and 64 to improve the durability of the frames 61, 62, 63, and 64. .

The fixing means 66 are installed on the frames 61, 62, 63, and 64, and serve to fix the cables 67 and guide them to an appropriate position.

The cable 67 is made of a communication cable of the inspection equipment or a purge gas supply cable of a purge gas supply device, and the frames 61, 62, 63, and 64 by a fixing means 66 Are combined.

At this time, the cables 67 are installed so that the ends are positioned at regular intervals by the fixing means 66, and the ends are installed toward the bottom.

This test auxiliary device 6 is because the cables 67 are located at the top rather than the ground by the frames 61, 62, 63, 64, STBs 5 or 67 By solving the problem of being tangled or stepped on, the time consumed when arranging and connecting the cables 67 is shortened.

In addition, since the end of the cables 67 are located at the designated position, the connection time of the cables 67 is reduced, and the test result is prevented from occurring by connecting to a STB other than the designated STB. You can do it.

6 is a flowchart of the function test step of FIG. 3.

In the function test step (S1), after placing the STBs 5 into the first test area A1, a function test preparation step (S11) of connecting the cable 67 and the exhaust bellows to the STBs 5 and exhaust Through the displacement measurement step (S12) of measuring the displacement of the purge gas discharged through the bellows, the differential pressure measurement step (S13) of measuring the differential pressure between the exhaust bellows and the purge gas supply cable, and a flow measurement device (7) to be described later. A flow rate measurement step (S14) of measuring the flow rate of the purge gas supplied from the nozzles 523 and the tag sensor and the load sensor 525 installed in the purge modules 52 of the STBs 5 are checked for operation. After the tag sensor and load sensor inspection step (S15), the cable 67 connected to the STBs 5 and the exhaust bellows are released, the STB goes to the second inspection area (A2) to proceed with the leak inspection step (S2). (5) Consists of a second inspection area transfer step (S16) of transferring them.

The functional test preparation step S11 is a step of placing the STBs 5 into the first inspection area A1 through the transport means 8 and connecting the cable 67 and the exhaust bellows to the STBs 5.

At this time, the cables 67 connected to the STBs 5 are a communication cable and a purge gas supply cable.

In the displacement measurement step (S12), it is confirmed that there is no abnormality in the discharge nozzle 524 and the discharge pipe 54 from which the purge gas is discharged by measuring the discharge amount of the purge gas discharged through the exhaust bellows.

The differential pressure measurement step (S13) is the pressure difference between the purge gas supplied into the FOUP through the injection nozzle 523 and the supply pipe 53 and the purge gas discharged to the outside of the FOUP through the discharge nozzle 524 and the discharge pipe 54. It is checked whether the difference between the supply pressure and the discharge pressure of the purge gas through the nozzles 523 and 524 is maintained at an appropriate differential pressure.

At this time, the operator may determine that a problem has occurred in at least one of the nozzles 523 and 524, the supply pipe 53, and the discharge pipe 54 through which the purge gas is supplied or discharged if the measured differential pressure falls outside the appropriate range. have.

The flow measurement step (S14) measures the flow rate of the purge gas supplied into the FOUP through the flow measurement device 7 so that the purge gas flows smoothly into the FOUP through the supply pipe 53 and the injection nozzle 523. You can check if it works.

In the tag sensor and load sensor inspection step (S15), it is checked whether the tag sensor installed in the purge modules 52 recognizes the tag and whether the FOUP is seated through the load sensor 525.

In the second inspection area transfer step (S16), after releasing the cable 67 and the exhaust bellows connected to the STBs 5, the STB 5 is transferred to the second inspection area A2 to proceed with the leak inspection step (S2). ).

7 is a perspective view of a flow measurement device used in the flow measurement step of FIG. 6, and FIG. 8 is a front view of FIG. 7.

The flow measurement device 7 is a device for measuring the flow rate of the purge gas injected through the injection nozzle 523 installed on the base plate 521 of the purge module 52 shown in FIG. 71), pin guide portions 72 installed on the bottom of the base 71, gas inlet portions 73 installed to penetrate the base 71, gas inlet portions 73, and gas respectively It is connected by the inlet pipe 742 and consists of a flow rate measuring unit 74 that measures the flow rate of the purge gas introduced through the gas inlet.

The base 71 is a rectangular flat plate 711 having a rectangular flat shape, and a square pillar protruding at a position corresponding to the nozzles 523 and 524 of the purge module 52 on the upper surface of the horizontal plate 711 It consists of shaped blocks 712.

In addition, installation holes 713 penetrating the horizontal plate 711 and the blocks 712 are formed in the center of the blocks 712.

The pin guide portions 72 are installed at positions corresponding to the guide pins 522 of the purge module 52, and the guide portion body 721 in the shape of a square column and the inner side of the lower surface of the guide portion body 721 It consists of a guide groove 722 formed in a conical shape.

When the flow measurement device 7 is mounted on the upper portion of the purge module 52, the pin guide portions 72 configured as described above are pin guides of the flow measurement device 7 with the pins 522 of the purge module 52 In contact with the guide groove 722 of the parts 72, the flow measurement device 7 is seated so that the guide pins 522 are located in the center of the guide groove 722 by a load.

The flow measurement unit 74 includes flow measurement devices 741 installed on the upper portion of the horizontal plate 711, and gas inlet pipes 742 connecting the flow measurement devices 741 and the gas inlet 73, respectively. The flow rate meter 741 measures the flow rate of the purge gas introduced through the gas inlet pipes 742 connected to the gas inlet portions 73. At this time, since the technology and process of measuring the flow rate in the flow rate measurement unit 74 are commonly used, a detailed description will be omitted.

9 is a cross-sectional view of a gas inlet of FIG. 7.

As shown in FIG. 9, the gas inlet 73 has a hollow cylinder-shaped body 731 having a gas moving hole 732 formed therein but having a screw thread formed on the upper outer circumferential surface, and a lower end of the body 731. Flange 733 extending outward, a spring 734 installed on the outside of the body 731 between the horizontal plate 711 and the flange 733, and a flange 733 formed of a hollow disc made of an elastic material It consists of an elastic member 735 coupled to the bottom surface of the, and an elastic force adjustment nut 736 that is fastened to the upper thread of the body 731.

The body 731 is inserted into the installation hole 713 so as to be movable in the vertical direction.

In addition, the body 731 is formed to be longer than the sum of the thicknesses of the horizontal plate 711 and the block 712 so that the upper and lower regions are installed to protrude upward and downward from the horizontal plate 711 and the block 712.

In addition, a flange 733 extending outward is formed on the lower outer circumferential surface of the body 731, and an elastic force adjusting nut 736 is fastened to the upper thread of the body 731. That is, the lower moving range of the body 731 is limited by the elastic force adjusting nut 736, and the upper moving range is limited by the flange 733.

In addition, a spring 734 is installed outside the body 731 between the upper end of the flange 733 and the lower end of the horizontal plate 711, and accordingly, when the body 731 is pressed upward, the spring 734 is compressed. The body 731 generates a force to move downward by the restoring force.

The elastic force adjustment nut 736 is formed with an outer diameter larger than that of the installation hole 713 and is fastened to the upper thread of the body 731.

At this time, the gas inlet portion 73 is a horizontal plate as the elastic force adjustment nut 736 is fastened, the distance between the lower end of the horizontal plate 711 and the upper end of the flange 733 decreases, and the tightening of the elastic force adjustment nut 736 is released. The distance between the lower end of 711 and the upper end of the flange 733 increases. Accordingly, the compression state of the spring 734, that is, the elastic force can be adjusted by adjusting the fastening position of the elastic force adjusting nut 736.

The flow measurement device 7 configured as described above is automatically seated in the correct position of the purge module 52 by the guide pins 522, thereby reducing the time consumed in the flow rate measurement step S14.

10 is a flow chart of the leak inspection step of FIG. 3.

The leak test step (S2) proceeds in the second test area (A2), and after transporting the STBs 5 to a designated location, a leak test preparation step (S21) connecting the cables 67 and both ends are sprayed. The tube installation step (S22) of installing the tube to be coupled to the nozzle 523 and the discharge nozzle 524, the purge gas supply step (S23) of supplying the purge gas into the tube, and the valves 531 and 541 A pressure measuring step (S24) of measuring the pressure in the tube for a certain period of time while shutting off the supply and discharge of the purge gas, and purge gas that discharges the purge gas in the tube by opening the valves 531 and 541 The discharge step (S25), and after separating the tubes and cables 67 from the STBs (5), the third transporting the STBs (5) to the third inspection area (A3) to proceed with the particle inspection step (S3). It consists of the inspection area transfer step (S26).

In the leak test preparation step (S21), the STB (5), which has completed the functional test step (S1) through the transport means (8), is placed into the second inspection area (A2), and the cables 67 are placed in the STBs (5). This is the step of connecting.

At this time, the cable connected to the STBs 5 is a purge gas supply cable.

The tube installation step (S22) is a step of installing tubes having both ends coupled to the injection nozzle 523 and the discharge nozzle 524 before starting the leak test.

At this time, both ends of the tube are formed in the same shape as the nozzle connection parts formed on the FOUP seated on the purge module 52, so that the same result as when the actual FOUP is connected is produced.

The purge gas supply step (S23) is a step of supplying a purge gas to the inside of a tube in which both ends of the nozzles 523 and 524 are coupled.

In the pressure measurement step (S24), the supply pipe 53 and the discharge pipe 54 are closed by the valves 531 and 541 to block supply and discharge of the purge gas, and the pressure is measured for a certain period of time. Make sure it changes.

At this time, since the supply pipe 53 and the discharge pipe 54 are closed by the valves 531 and 541, supply and discharge of the purge gas are blocked in the STBs 5, if the pressure value decreases, the internal purging It can be seen that gas is leaking to the outside.

In addition, since both ends of the tube are formed in the same shape as the nozzle connections formed on the FOUP seated on the purge module 52, if the pressure inside the tube decreases, the nozzle connections and the nozzles 523, 524 of the FOUP Even when combined, it can be seen that the purge gas inside the FOUP leaks to the outside.

The purge gas discharge step (S25) is a step of discharging the purge gas in the tube by opening the valves 531 and 541 after completing the purge gas leak test.

In the third inspection area transfer step (S26), the STBs 5 are transferred to the third inspection area (A3) in order to proceed with the particle inspection step (S3) after separating the tubes and cables 67 installed in the STB (5). This is the step.

11 is a flowchart of a particle inspection step of FIG. 3.

The particle inspection step (S3) is performed in the third inspection area (A3), and the particle inspection preparation step (S31) connecting the cables 67 to the STBs 5 and the nozzle 523 by supplying a purge gas, An impurity removal step (S32) of removing impurities in the 524 and the supply pipe 53 and the discharge pipe 54, and a particle measurement step of measuring particles in the purge gas supplied from the injection nozzle 523 through the particle measuring device (S33) and after releasing the cables 67 connected to the STBs 5, a finishing step (S34) of transferring the STBs 5 to the storage location is performed.

In the particle inspection preparation step (S31), the STBs 5, which have completed the leak inspection step (S2) through the transport means (8), are placed into the third inspection area (A3), and the cables 67 are placed in the STBs (5). This is the step of connecting.

At this time, the cables connected to the STBs 5 are the purge gas supply cable and the communication cable.

Impurity removal step (S32) Before performing the particle inspection, an error occurs during the particle inspection process by supplying a purge gas to remove impurities in the nozzles 523 and 524, the supply pipe 53, and the discharge pipe 54. Prevent it.

The particle measurement step (S33) is a step of measuring particles in the purge gas supplied from the injection nozzle 523 through the particle measurement device, and by determining the presence or absence of particles in the purge gas supplied through the injection nozzle 523, the supply pipe 53 ) Or the problem inside the injection nozzle 523 can be checked.

The finishing step (S34) is a step of releasing the cables 67 connected to the STBs 5 and then transferring the STBs 5 to the outside of the third inspection area A3.

The STB in-line function test method 10 configured as described above is sequentially performed in the test zones (A1), (A2) and (A3) in which each test step (S1), (S2), (S3) is formed in a straight line. As a result, the movement line is reduced, and the time spent on inspection is reduced.

In addition, the STB in-line function test method (10) reduces the time consumed by arranging and connecting the cables 67 by installing the test auxiliary device 6 in each test area (A1), (A2), and (A3). As a result, the time spent on the overall inspection is reduced.

S1: Functional test step
S2: Leak test step
S3: Particle inspection step
5: STB 6: inspection auxiliary device
7: flow measurement device 8: transportation means
51: main frame 52: purge module
53: supply pipe 54: discharge pipe
61: support frame 62: upper frame
63: horizontal frame 64: vertical frame
65: reinforcing bar 66: fixing means
67: cable

Claims (6)

STB is inspected including a main frame, a purge module installed under the main frame to circulate purge gas into the FOUP, a supply pipe supplying purge gas to the purge module, and a discharge pipe discharging purge gas from the purge module In the STB inline function test method:
A function test step of checking the function of the STB;
A leak inspection step of inspecting whether or not the purge gas leaks;
A particle inspection step of inspecting whether or not particles of the purge gas supplied into the FOUP through the purge module are included,
Wherein the inspection steps are sequentially performed within first, second, and third inspection areas arranged on a straight line, respectively. The method of claim 1, wherein the purge module
A flat base plate;
A plurality of guide pins installed on the upper surface of the base plate;
An injection nozzle connected to the supply pipe and injecting a purge gas into the FOUP;
A discharge nozzle connected to the discharge pipe and discharging the purge gas in the FOUP;
STB in-line function test method comprising a sensor for detecting FOUP. The method of claim 2, wherein each of the first, second, and third inspection zones are provided with inspection auxiliary devices,
The inspection auxiliary device
A plurality of support frames installed perpendicular to the ground and having a height greater than the height of the operator and the STB;
An upper frame connected to upper ends of the support frames;
Horizontal frames and vertical frames installed inside the upper frame;
A plurality of fixing means installed on the frames;
Including cables installed on the frames by the fixing means,
The cables are
The STB in-line function test method, characterized in that the ends are positioned at regular intervals by the fixing means and are installed to face downwards. The method of claim 3, wherein the function test step
An exhaust amount measuring step of measuring an exhaust amount of a purge gas;
Flow measurement step of measuring the flow rate of the purge gas through the flow measurement device;
STB in-line functional inspection method comprising a sensor inspection step of inspecting the sensor. The method of claim 4, wherein the supply pipe and the discharge pipe
Valves capable of opening and closing the tubes are respectively installed,
The leak test step
A tube installation step of installing a tube having both ends coupled to the injection nozzle and the discharge nozzle;
A purge gas supply step of supplying a purge gas into the tube;
A pressure measuring step of measuring the pressure in the tube for a predetermined time while shutting off supply and discharge of purge gas by closing valves of the supply pipe and the discharge pipe;
And a purge gas discharging step of discharging the purge gas in the tube by opening the valves. The method of claim 5, wherein the particle inspection step
An impurity removing step of supplying a purge gas to remove impurities in the injection nozzle, the discharge nozzle, the supply pipe, and the discharge pipe;
And a particle measurement step of measuring particles in the purge gas supplied from the injection nozzle through a particle measurement device.

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