JPS5787054A - Charged particle irradiation system - Google Patents

Charged particle irradiation system

Info

Publication number
JPS5787054A
JPS5787054A JP16194280A JP16194280A JPS5787054A JP S5787054 A JPS5787054 A JP S5787054A JP 16194280 A JP16194280 A JP 16194280A JP 16194280 A JP16194280 A JP 16194280A JP S5787054 A JPS5787054 A JP S5787054A
Authority
JP
Japan
Prior art keywords
charged particle
particle beam
current
electrode pair
irradiation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16194280A
Other languages
Japanese (ja)
Other versions
JPH0131659B2 (en
Inventor
Fumihiko Nakajima
Toshio Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP16194280A priority Critical patent/JPS5787054A/en
Publication of JPS5787054A publication Critical patent/JPS5787054A/en
Publication of JPH0131659B2 publication Critical patent/JPH0131659B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measurement Of Radiation (AREA)
  • Electron Sources, Ion Sources (AREA)

Abstract

PURPOSE:To detect the current of a charged particle beam with high accuracy and control accurate irradiation by arranging an electrode pair so that the charged particle beam can be inserted between the charged particle source and an irradiated body and changing irradiation depending upon the induced current from the electrode pair. CONSTITUTION:The charged particle beam accelerated by an accelerated power supply 12 from a charged particle source 11, for example, an electron beam 13 permits an irradiation path to be deflected right and left by a double deflection type magnet 14 which shifts the flight direction of the particle beam and be reciprocated between electrodes 15. After the induced current detected by this electrode pair 15 is voltage-converted by a current voltage converter 16, it is converted into by a rectification circuit 17. On the other hand, a particle beam 13 which is incident on a driving chamber 18 is prevented from being entered into the driving chamber by making a metallic shutter 19 which can be varied into the horizontal and vertical status stand vertically irrespective of the first irradiated body. As a result, the current of the charged particle beam can be detected with high accuracy and accurate irradiation be controlled.
JP16194280A 1980-11-19 1980-11-19 Charged particle irradiation system Granted JPS5787054A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16194280A JPS5787054A (en) 1980-11-19 1980-11-19 Charged particle irradiation system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16194280A JPS5787054A (en) 1980-11-19 1980-11-19 Charged particle irradiation system

Publications (2)

Publication Number Publication Date
JPS5787054A true JPS5787054A (en) 1982-05-31
JPH0131659B2 JPH0131659B2 (en) 1989-06-27

Family

ID=15744963

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16194280A Granted JPS5787054A (en) 1980-11-19 1980-11-19 Charged particle irradiation system

Country Status (1)

Country Link
JP (1) JPS5787054A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59109061U (en) * 1983-01-12 1984-07-23 日立精工株式会社 Electron beam welding equipment
JP2012146424A (en) * 2011-01-08 2012-08-02 Nissin Ion Equipment Co Ltd Ion source

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59109061U (en) * 1983-01-12 1984-07-23 日立精工株式会社 Electron beam welding equipment
JP2012146424A (en) * 2011-01-08 2012-08-02 Nissin Ion Equipment Co Ltd Ion source

Also Published As

Publication number Publication date
JPH0131659B2 (en) 1989-06-27

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