GB1183751A - Charged Particle Generator with Electromagnetic Current Control. - Google Patents

Charged Particle Generator with Electromagnetic Current Control.

Info

Publication number
GB1183751A
GB1183751A GB01461/67A GB1146167A GB1183751A GB 1183751 A GB1183751 A GB 1183751A GB 01461/67 A GB01461/67 A GB 01461/67A GB 1146167 A GB1146167 A GB 1146167A GB 1183751 A GB1183751 A GB 1183751A
Authority
GB
United Kingdom
Prior art keywords
coil
magnetic
march
workpiece
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB01461/67A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Raytheon Technologies Corp
Original Assignee
United Aircraft Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by United Aircraft Corp filed Critical United Aircraft Corp
Publication of GB1183751A publication Critical patent/GB1183751A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/13—Solid thermionic cathodes
    • H01J1/135—Circuit arrangements therefor, e.g. for temperature control
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/077—Electron guns using discharge in gases or vapours as electron sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/24—Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Plasma Technology (AREA)

Abstract

1,183,751. Electron and ion beam apparatus. UNITED AIRCRAFT CORP. 10 March, 1967 [30 March, 1966], No. 11461/67. Heading H1D. [Also in Division G3] In an electron or ion beam apparatus for treating a workpiece, e.g. for welding purposes, in which the beam is derived from a glow discharge apertured hollow electrode, the beam current is controlled by a magnetic coil acting on the glow discharge and is automatically maintained constant by means of a feedback circuit in which the current is compared with a reference value and a derived error signal is applied to the coil (Fig. 3, not shown, see Division G3). As shown, a hollow cathode 10 with a narrow aperture 12 has an insulator shield 20 and is surrounded by a magnetic control coil 24. A shield 28 which may also be of insulating material protects the coil 24 from the heat generated at the workpiece 32. The hollow electrode comprises a cylinder of non- magnetic material and the magnetic field of the control coil is parallel to the axis of the electrode.
GB01461/67A 1966-03-30 1967-03-10 Charged Particle Generator with Electromagnetic Current Control. Expired GB1183751A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US538862A US3377506A (en) 1966-03-30 1966-03-30 Electromagnetic current control for a hollow cathode

Publications (1)

Publication Number Publication Date
GB1183751A true GB1183751A (en) 1970-03-11

Family

ID=24148737

Family Applications (1)

Application Number Title Priority Date Filing Date
GB01461/67A Expired GB1183751A (en) 1966-03-30 1967-03-10 Charged Particle Generator with Electromagnetic Current Control.

Country Status (3)

Country Link
US (1) US3377506A (en)
DE (1) DE1614917A1 (en)
GB (1) GB1183751A (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1287262A (en) * 1968-09-05 1972-08-31 Atomic Energy Authority Uk Improvements in or relating to non-thermionic glow discharge devices
DE221138C (en) * 1971-04-30
US3936756A (en) * 1971-04-30 1976-02-03 Nihon Denshi Kabushiki Kaisha Field emission electron gun having automatic current control
US3798488A (en) * 1971-07-28 1974-03-19 N Pleshivtsev Plasma source of charged particles
JPS5288900A (en) * 1976-01-19 1977-07-25 Matsushita Electric Ind Co Ltd Ion beam machine tool
DE3038644C2 (en) * 1980-10-13 1984-03-15 Vsesojuznyj elektrotechničeskij institut imeni V.I. Lenina, Moskva Control method for a gas discharge electron gun
CH696179A5 (en) * 2000-06-08 2007-01-31 Satis Vacuum Ind Vertriebs Ag Plasma evaporation source for a vacuum coating arrangement for applying coating layers on optical substrates.

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1954025A (en) * 1929-01-22 1934-04-10 American Telephone & Telegraph Electrooptical system
US2945160A (en) * 1957-07-29 1960-07-12 Phillips Petroleum Co Emission regulator
US2940010A (en) * 1959-05-18 1960-06-07 Gen Precision Inc Automatic control circuit
US3152238A (en) * 1962-05-11 1964-10-06 United Aircraft Corp Electron beam centering apparatus
US3243570A (en) * 1963-04-30 1966-03-29 Gen Electric Automatic gas pressure control for electron beam apparatus
US3320475A (en) * 1963-04-30 1967-05-16 Gen Electric Nonthermionic hollow cathode electron beam apparatus

Also Published As

Publication number Publication date
DE1614917A1 (en) 1970-12-23
US3377506A (en) 1968-04-09

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PLNP Patent lapsed through nonpayment of renewal fees