JPS55159612A - Elastic surface wave element - Google Patents

Elastic surface wave element

Info

Publication number
JPS55159612A
JPS55159612A JP6677079A JP6677079A JPS55159612A JP S55159612 A JPS55159612 A JP S55159612A JP 6677079 A JP6677079 A JP 6677079A JP 6677079 A JP6677079 A JP 6677079A JP S55159612 A JPS55159612 A JP S55159612A
Authority
JP
Japan
Prior art keywords
film
film thickness
substrate
elastic surface
temperature characteristics
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6677079A
Other languages
Japanese (ja)
Other versions
JPS5930332B2 (en
Inventor
Yasuo Ehata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP6677079A priority Critical patent/JPS5930332B2/en
Publication of JPS55159612A publication Critical patent/JPS55159612A/en
Publication of JPS5930332B2 publication Critical patent/JPS5930332B2/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02543—Characteristics of substrate, e.g. cutting angles
    • H03H9/02559—Characteristics of substrate, e.g. cutting angles of lithium niobate or lithium-tantalate substrates

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)

Abstract

PURPOSE:To enable to obtain very slight delay time versus temperature characteristics with very thin film thickness of oxide film and a large coupling coefficient, by forming the electrode toward specific angle on X-cut LiTaO3 substrate. CONSTITUTION:On an LiTaO3 substrate 11, an input interdigital electrode 12 and an output interdigital electrode 13 are formed toward about 112 deg. from the Y axis for the propagation of elastic surface waves. Further, on the substrate 11 including the electrodes 12 and 13, an si oxideized film 14 is coated with the film thickness of 1/20-1/6 of the elastic surfade wave length propagated. As a result, since excellent delay time versus temperature characteristics and coupling coefficient can be obtained with very thin film thickness of oxidized film, the film can be formed in a very short time.
JP6677079A 1979-05-31 1979-05-31 surface acoustic wave device Expired JPS5930332B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6677079A JPS5930332B2 (en) 1979-05-31 1979-05-31 surface acoustic wave device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6677079A JPS5930332B2 (en) 1979-05-31 1979-05-31 surface acoustic wave device

Publications (2)

Publication Number Publication Date
JPS55159612A true JPS55159612A (en) 1980-12-11
JPS5930332B2 JPS5930332B2 (en) 1984-07-26

Family

ID=13325434

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6677079A Expired JPS5930332B2 (en) 1979-05-31 1979-05-31 surface acoustic wave device

Country Status (1)

Country Link
JP (1) JPS5930332B2 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60244108A (en) * 1984-05-18 1985-12-04 Alps Electric Co Ltd Surface acoustic wave element
US4978879A (en) * 1988-07-27 1990-12-18 Fujitsu Limited Acoustic surface wave element
JP2006513649A (en) * 2003-01-23 2006-04-20 エプコス　アクチエンゲゼルシャフト SAW device having improved temperature characteristics
US7589452B2 (en) * 2004-09-17 2009-09-15 Epcos Ag SAW-component having a reduced temperature path and method for the production thereof

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59185029U (en) * 1983-05-24 1984-12-08 エスアールエンジニアリング株式会社 Clamp device moving device
JPH0421613Y2 (en) * 1989-05-12 1992-05-18

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60244108A (en) * 1984-05-18 1985-12-04 Alps Electric Co Ltd Surface acoustic wave element
US4978879A (en) * 1988-07-27 1990-12-18 Fujitsu Limited Acoustic surface wave element
JP2006513649A (en) * 2003-01-23 2006-04-20 エプコス　アクチエンゲゼルシャフト SAW device having improved temperature characteristics
US7589452B2 (en) * 2004-09-17 2009-09-15 Epcos Ag SAW-component having a reduced temperature path and method for the production thereof

Also Published As

Publication number Publication date
JPS5930332B2 (en) 1984-07-26

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