JPH1040815A - Inspection instrument for stripe pattern - Google Patents

Abstract

PROBLEM TO BE SOLVED: To inspect an exact BM stripe pattern by examining not only an average width and pitch of a BM stripe (RGB stripe) but also variations in its size and pitch. SOLUTION: A standard stripe pattern panel, integrated into an inspection system of a stripe pattern inspection instrument, is regularly checked to automatically diagnose the inspection system precision of an inspection instrument. Moreover, information obtained by managing the trend in inspection values of an actually inspected stripe pattern can be fed back to an exposure board 20 on which a BM stripe pattern is formed. A stripe pattern is inspected by automatically controlling the X and Y coordinate axis directions of a modulated light 6 for the exposure board 20 and/or the illuminance of an exposure light source 4.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a stripe pattern inspection apparatus for inspecting the pattern width and pitch of an RGB stripe (hereinafter referred to as a BM stripe) which is an opening of a black matrix film in forming a fluorescent screen of a color cathode ray tube. The present invention relates to a stripe pattern inspection apparatus with an automatic diagnosis function, which is suitable as an in-line inspection apparatus in a step of exposing a panel of a color cathode ray tube having a high definition.

[0002]

2. Description of the Related Art In general, in a shadow mask type color cathode ray tube, a black matrix film (hereinafter referred to as a BM film) made of a light-absorbing substance layer is formed on the inner surface of the panel so as to face a shadow mask disposed inside the panel. Are formed, and a stripe-shaped phosphor film that emits light of each color of red, green, and blue is formed on the BM stripe. Such a phosphor film is formed by a precision photographic exposure method using a photosensitive substance, and is exposed through a resist applied to the inner surface of the panel using an exposure table.

FIG. 7 is a diagram showing the configuration of a general color cathode ray tube exposure table. As shown in FIG. 7, the exposure table for a color cathode ray tube includes a table 3 for positioning and mounting a panel 1 and a shadow mask 2, an exposure light source 4 disposed below the table 3, a table 3 and a light source. A BM film having a BM stripe is formed on the entire inner surface of the panel.

However, in a large or short color cathode ray tube having a large deflection amount, the degree of convergence of the electron beam is slightly different depending on the deflection amount. However, there is a problem that the light emission luminance becomes uneven, and it is necessary to control the BM stripe area ratio between the central part and the peripheral part of the panel to an optimum value.

[0005] The same type of inspection device is a dot type, but as a hole diameter inspection device utilizing the amount of transmitted light,
A hole diameter inspection apparatus as disclosed in JP-A-63-138628 is used. FIG. 8 is a configuration diagram of the hole diameter inspection apparatus. As shown in FIG. 8, this hole diameter inspection apparatus uses a panel from a light source (not shown) disposed in the table 13 at a predetermined area of a central portion 1 a and a peripheral portion 1 b of the panel 1 placed on the table 13. Only the amount of light transmitted through the BM hole formed on the inner surface of No. 1 is inspected by the illuminance sensor 8 having the external light shielding plate 7, and the area of the BM hole is obtained from the amount of transmitted light.

[0006]

However, the BM hole diameters of the central portion 1a and the peripheral portion 1b of the panel are different depending on the application state of the BM film depending on the dot distribution of the shadow mask, for example, the light emitting state of a mercury lamp as a light source. To be
The method of obtaining the area of a BM hole from the amount of transmitted light described above cannot accurately inspect each BM hole diameter, and has a problem that it cannot be applied to the inspection of a BM hole diameter corresponding to high definition.

[0007] This problem is also the same with the stripe type, in which the width of the stripe with high definition and fine pitch can be inspected by means other than the method using the amount of transmitted light, and R, G, There is an urgent need to develop a stripe pattern inspection apparatus that is optimal for inspecting a slot type stripe pattern that can also inspect grouping in which the pitch between specific colors is biased in B. In the inspection of the BM stripe pattern of the panel, the inspection accuracy of the inspection system is regularly calibrated by an operator. Further, an operator manually corrects and adjusts the exposure table for forming the BM stripe pattern.

[0008]

SUMMARY OF THE INVENTION The present invention relates to a stripe pattern inspection apparatus for inspecting an RGB stripe pattern of a black matrix film formed on the inner surface of a face panel of a color cathode ray tube. A horizontal moving mechanism for holding and moving the rotating mechanism, a turning mechanism for rotating the horizontal moving mechanism,
Provided is a stripe pattern inspection apparatus including an image processing unit for processing and inspecting an individual stripe pattern from an enlarged image captured by a CCD camera, and a transmission light source.

Further, the image processing unit converts the enlarged image into RGB3 images.
Provided is a stripe pattern inspection apparatus that samples a plurality of stripes of the same color among colors and inspects individual stripe widths.

Further, the image processing unit converts the enlarged image into an RG image.
Provided is a stripe pattern inspection apparatus for sampling a plurality of points of a stripe of B3 color as one set and inspecting a stripe pitch between the colors.

Further, the present invention provides a stripe pattern inspection apparatus for inspecting a stripe pattern at a plurality of central portions and peripheral portions of a panel surface.

Further, the present invention provides a stripe pattern inspection apparatus in which an image processing section performs a trend management process on stripe pattern inspection data.

Further, a stripe pattern inspection apparatus includes:
A stripe pattern inspection apparatus having a self-diagnosis processing function for automatically diagnosing the inspection system accuracy of the inspection apparatus by inspecting a standard BM stripe pattern by additionally connecting a control unit to an exposure table is provided.

Further, there is provided a stripe pattern inspection apparatus in which a standard BM stripe pattern is built in an inspection system of the stripe pattern inspection apparatus.

Also, the present invention provides a stripe pattern inspection apparatus for controlling the setting conditions of an exposure table for forming a BM stripe based on data information managed by the image processing unit.

The setting conditions for controlling the exposure table include a light control filter moving mechanism for setting the X and Y coordinates of the light control filter and / or a stripe pattern inspection mechanism for setting the illuminance of the exposure light source. Provide equipment.

Further, the present invention provides a stripe pattern inspection apparatus which issues an alarm when the self-diagnosis processing unit detects an abnormality and automatically stops the stripe pattern inspection apparatus.

[0018]

Embodiments of the present invention will be described with reference to the drawings. The same parts as those in the conventional example are denoted by the same reference numerals, and description thereof will be omitted. The stripe pattern inspection apparatus according to the first embodiment will be described. FIG.
1 is a configuration diagram of a stripe pattern inspection apparatus according to a first embodiment of the present invention. As shown in FIG. 1, a table 3 on which the panel 1 is positioned and placed, a transmission light source 14 disposed below the table 3, and an automatic BM stripe pattern for inspecting the central portion 1a and the peripheral portion 1b of the panel 1. The three CCD cameras 9a, 9b and 9c with focus functions are held at predetermined positions of the horizontal movement mechanism 10, respectively.

The horizontal moving mechanism 10 includes a turning mechanism 11
And the CCD cameras 9a, 9b, 9c can be moved to specified positions. And each C
The image processing unit 12 processes an enlarged image captured by the CD cameras 9a, 9b, and 9c to inspect individual BM stripe patterns. The image processing unit 12 includes a measurement condition setting unit 12a that controls the horizontal movement mechanism unit 10 and the turning mechanism unit 11.

FIG. 2 is a perspective view showing inspection points of the BM stripe pattern of the panel. As shown in FIG. 2, the panel 1 mounted at a predetermined position on the table 3 has three CCD cameras 9a, 9b,
9c, and thereafter, the CCD cameras 9a, 9b, 9c are moved in the direction of the arrow shown in FIG. 1 by controlling the turning mechanism 11 and the horizontal moving mechanism 10 by the measurement condition setting unit 12a. The stripe patterns at the inspection points 1d to 1i of the part are photographed.

Here, the details of the inspection method will be described. As the inspection method 1, the image processing unit 12 samples a plurality of designated points of the same color stripe among the three colors of RGB from the enlarged image, and inspects individual stripe widths. Also,
As the inspection method 2, the image processing unit 12 performs RG conversion from the enlarged image.
In some cases, a plurality of points are sampled as a set of B3 color stripes, and the BM stripe pitch between the colors is inspected (grouping inspection).

The phenomenon of grouping will be supplementarily described with reference to the schematic explanatory diagram of FIG. Usually R,
The three colors G and B have a specified stripe pitch. Here, in order to simplify the explanation, as shown in FIG.
Assumes that a normal non-defective product has Prg = Pgb = Pbr = a. However, due to the accuracy of various conditions such as the setting of the exposure light source and the correction lens in the exposure process, as shown in FIG. 3B, Prg = Pgb = Pbr may not always be satisfied, and a deviation may occur in each stripe pitch. Come.

It is assumed that, of the stripe pitches Prg, Pgb, Pbr, for example, a small dimension α is shifted to the + side between R and G (Prg). However, since the horizontal pitch PH = 3a is constant, if one stripe pitch collapses, the other pitch also collapses. In this case, Prg = a + α, Pgb = a−α, Pbr = a , And the gap between P and G (Pgb) becomes narrow, and so-called grouping occurs. As described above, when the stripe pitch between the colors is different from the specified value, the color shift becomes more conspicuous in image quality.
Therefore, this grouping inspection has become indispensable from the viewpoint of improving the efficiency and accuracy of the inspection.

As shown in the photograph of FIG. 4, these captured images are image-processed by the image processing unit 12, for example, to sharpen the outline, and then sample the same color stripe width to obtain the equivalent average width. Compute as required. This makes it possible to increase the processing speed and to inspect an accurate BM stripe width. In addition, since the horizontal movement mechanism 10 and the CCD cameras 9a to 9c are provided with an automatic focusing mechanism, a BM stripe image at a predetermined position can be clearly captured even if the size of the panel 1 changes, and the multi-tube type can be obtained. Of the panel 1 can be inspected. In the same manner, the grouping is performed while calculating the BM stripe pitch between the RGB colors.

FIG. 5 is a block diagram of an image processing unit with a data processing function according to the present invention. As shown in FIG. 5, an image processing unit 16 with a data processing function is provided in the above-described image processing unit 12 to improve the data processing function by forming a database 15 so that inspection data of a BM stripe pattern can be stored and retrieved. By doing this, the measured value transition of the stripe pattern, extraction of defective panels,
Since process management data such as an error history search of an inspection device error and a bar code search can be immediately extracted, management of the device and management of manufacturing quality are facilitated.

Further, embodiments of the present invention will be described below. FIG. 6 is a configuration diagram of a stripe pattern inspection apparatus according to the second embodiment of the present invention. The feature of this stripe pattern inspection apparatus is that the stripe pattern inspection apparatus according to the first embodiment has a self-diagnosis function and is improved in function, for example, by feeding back the inspection and accumulation database 15 to the exposure table 20. . As shown in FIG. 6, this is a stripe pattern inspection apparatus in which the control unit 30 can centrally manage the stripe pattern inspection apparatus of FIG. 1, the image processing unit 16 with a data processing function, and the exposure table 20 in cooperation with each other. .

According to the present invention, the function of automatically inspecting the inspection system accuracy of the stripe pattern inspection apparatus is provided by periodically inspecting the panel having the standard stripe pattern provided in the inspection system of the stripe pattern inspection apparatus. I'm making it. Further, in the image processing unit 16 with the data processing function, the dimming filter 6 of the exposure table 20 for forming the BM stripe pattern is moved in the X and Y coordinate axis directions by the information obtained by managing the inspection values actually inspected by the trend management. (Or) The illuminance of the light source 4 is automatically controlled, and the quality can be improved so as to have a desired BM stripe width. In addition, the inspection value of the BM stripe pitch, which is performed for the inspection of the grouping, is similarly trend managed, and the moving set distance of the exposure light source 4 during the RGB exposure is automatically controlled.

As described above, a total of 5 to 9 BM stripes 1a at the central portion of the panel 1 and the BM stripes 1b to 1i at the peripheral portions of the panel 1 serving as the inspection points shown in FIG. The BM stripes 1a to 1i are inspected by using the CCD cameras 9a, 9b, and 9c in combination with the horizontal movement mechanism unit 10 and the turning mechanism unit 11. Embodiment 2 according to the present invention
Then, a standard stripe pattern panel 17 (not shown) is arranged in a position parallel to, for example, the panel 1 in the inspection system, and the standard stripe pattern is periodically inspected. The feature is that it has a function to automatically diagnose

That is, when the measured value of the inspection of the standard stripe pattern panel 17 becomes out of the specified range as compared with the reference value of the standard stripe pattern, an alarm is issued to stop the stripe pattern inspection apparatus. I have. In this embodiment, three CCD cameras are used, but the number of installed cameras can be freely selected as long as the number is one or more.

On the other hand, the BM stripe 1a at the center of the panel 1 and the BM stripes 1b to 1
i, 5 to 9 places in total, three CCD cameras 9a, 9b,
The inspection values of the BM stripes 1a to 1i photographed and inspected by using the horizontal moving mechanism 10 and the turning mechanism 11 in combination with 9c are processed by the image processing unit 16 with a data processing function for each purpose. For example, it is often the case that an inspection value actually inspected is trend-managed and used.

A description will be given of an example of a stripe pattern inspection apparatus having three CCD cameras and an image processing unit for performing a plurality of samplings of the same color stripe or RGB three color stripes as a set and performing an arithmetic processing for obtaining an equivalent average width and a pitch. However, the present invention is not limited to this example. For example, a CCD camera having a function of moving one CCD camera along a panel surface, or a CCD camera on a surface on which more CCD cameras are attached at predetermined positions. Needless to say, the image processing apparatus may have a group, and the algorithm of image processing is not limited to the above example.

Therefore, another point of the present invention is that the image processing unit 16 with the data processing function feeds back the information obtained by trend management of the actually inspected inspection values to the exposure table 20, and outputs the information to the BM stripe. For automatically controlling the light control filter moving mechanism 6a for setting the X and Y coordinate axes of the light control filter 6 of the exposure table 20 and / or the light source output variable mechanism 6a for setting the illuminance of the exposure light source 4. It is to have. That is, the BM stripes 1a to
By feeding back the inspection value 1i to the exposure table 20, a high-quality BM stripe can be formed.

[0033]

As described above, according to the stripe pattern inspection apparatus of the present invention, the enlarged pattern of the BM stripe captured by the CCD camera is image-processed to determine the individual BM stripe width or the BM stripe pitch between the RGB colors. For the inspection, not only the average width and pitch of the BM stripe but also the dimensions and pitch including the variation can be inspected, so that an accurate BM stripe pattern can be inspected. Further, since the CCD camera with the automatic focusing mechanism has the horizontal moving mechanism and the turning mechanism arranged side by side, automatic inspection in process in-line becomes easy. By incorporating the database into the image processing unit, it is possible to feed back to the exposure table, and at the same time, it becomes easy to maintain and manage the manufacturing quality such as the transition of the inspection value of the stripe pattern.

Further, by periodically inspecting the standard stripe pattern provided in the inspection system, the accuracy of the inspection system of the inspection apparatus can be automatically diagnosed, and the periodic calibration by the operator becomes unnecessary. On the other hand, by feeding back information obtained by trend management of the inspection value of the BM stripe pattern to the exposure table, a dimming filter moving mechanism for setting the dimming filter X and Y coordinates of the exposure table forming the BM stripe, and (Or) The light source output variable mechanism for setting the illuminance of the exposure light source can be automatically controlled, so that correction and adjustment work by an operator is not required.

[Brief description of the drawings]

FIG. 1 is a configuration diagram of a stripe pattern inspection apparatus according to a first embodiment of the present invention.

FIG. 2 is a perspective view showing inspection points of a BM stripe pattern of a panel according to the present invention.

FIG. 3 is a schematic explanatory diagram of grouping according to the present invention.

FIG. 4 is a photograph of an image processing performed by a stripe pattern inspection apparatus.

FIG. 5 is a configuration diagram of an image processing unit with a data processing function according to the present invention.

FIG. 6 is a configuration diagram of a stripe pattern inspection apparatus according to a second embodiment of the present invention.

FIG. 7 is a configuration diagram of a conventional general color cathode ray tube exposure table.

FIG. 8 is a configuration diagram of a conventional hole diameter inspection apparatus.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 Panel 1a-1i BM stripe (RGB film of BM film) 2 Shadow mask 3, 13 Table 4 Exposure light source 5 Correction lens 6 Dimming filter 6a Dimming filter moving mechanism 9a, 9b, 9c CCD camera 10 Horizontal moving mechanism Unit 11 Rotating mechanism unit 12 Image processing unit 12a Measurement condition setting unit 14 Transmission light source 15 Database 16 Image processing unit with data processing function 17 Standard stripe pattern panel 20 Exposure table 21 Light source output variable mechanism unit 22 Light control filter moving mechanism unit 30 Control unit S Standard stripe pattern panel

Claims (10)

[Claims] 1. A stripe pattern inspection apparatus for inspecting an RGB stripe pattern of a black matrix film formed on an inner surface of a face panel of a color cathode ray tube, a CCD camera with an automatic focusing mechanism, and a horizontal movement mechanism for holding and moving the CCD camera. Unit, a turning mechanism for rotating the horizontal movement mechanism, an image processing unit for processing and inspecting the individual stripe patterns from an enlarged image taken by the CCD camera, and a light source for transmission. Pattern inspection equipment. 2. An image processing section according to claim 1, wherein said image processing section converts the enlarged image into RGB data.
2. The method according to claim 1, wherein the same color stripe is sampled at a plurality of points among the three colors, and an individual stripe width is inspected.
The stripe pattern inspection apparatus according to the above. 3. The method according to claim 1, wherein the image processing unit converts the enlarged image into RGB data.
Sampling a plurality of points as a set of three color stripes,
2. The stripe pattern inspection apparatus according to claim 1, wherein the stripe pitch between the colors is inspected. 4. A stripe pattern inspection apparatus according to claim 1, wherein said stripe pattern is inspected at a plurality of central portions and peripheral portions of said panel surface. 5. The stripe pattern inspection apparatus according to claim 1, wherein said image processing unit performs a trend management process on the inspection data of said stripe pattern. 6. A self-diagnosis process for automatically diagnosing an inspection system accuracy of the inspection apparatus by inspecting a standard stripe pattern by additionally connecting a control unit to an exposure table to the stripe pattern inspection apparatus according to claim 5. A stripe pattern inspection apparatus having a function. 7. The stripe pattern inspection apparatus according to claim 6, wherein said standard stripe pattern is built in an inspection system of said stripe pattern inspection apparatus. 8. A stripe according to claim 6, further comprising a control unit for controlling a setting condition of said exposure table for forming said stripe by said data information managed by said image processing unit. Pattern inspection device. 9. The setting conditions for controlling the exposure table are a light control filter moving mechanism for setting the X and Y coordinates of the light control filter and / or a light source output variable mechanism for setting the illuminance of the exposure light source. 9. The stripe pattern inspection apparatus according to claim 8, wherein: 10. The stripe pattern inspection apparatus according to claim 6, wherein when the self-diagnosis processing section detects an abnormality, an alarm is issued and the stripe pattern inspection apparatus is automatically stopped.