JPH07244504A - Production equipment managing device - Google Patents

Abstract

PURPOSE:To provide a production equipment managing device capable of reducing the development manhour of a program and controlling a production system. CONSTITUTION:A program for driving a computer 1 is constituted of an inter- system communication control module 1-1 mounting a communication control function for communication with the external, a starting order managing module 1-3 for determining the starting order of a lot in a process, a production condition managing module 1-4 for managing production condition data, an experience information managing module 1-5 for collecting the processing experience of a lot, a stocker control module 1-6 for controlling production equipments 2 to 5, an AGV control module 1-7, a photolithography through processor control module 1-8, an automatic wafer testing device control module 1-9, a management module 1-12 for dynamically connecting plural modules, etc. The modules 1-6 to 1-9 have control functions inherent in each production equipment.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a production equipment management device for managing production equipment constituting a production system.

[0002]

2. Description of the Related Art Conventionally, a program for driving a production equipment management device (for example, a computer) for automatically operating a production equipment group that constitutes a production system such as a production line or a production plant, automatically processes a workpiece in the production equipment group. Control functions required for execution, information collection function, information processing function, facility communication control function, work start order determination function, work manufacturing condition data management function, work processing result data collection management function, It has an interface function with workers and a communication control function with other systems. As an example of such a program, a program for driving a computer that automatically operates a production equipment group that constitutes a semiconductor wafer production line will be described with reference to FIG. As shown in FIG. 5, the wafer processing equipment to be automatically operated in the production line is arranged in a group according to manufacturing processes (also called bays) such as a photolithography process, an ion implantation process, and an electrode deposition process. One computer 62 is provided for each manufacturing process and is connected to the manufacturing equipment 57, 59, 61 by the equipment communication line 65. Computer 62 and wafer processing equipment 57, 59, 61
Exchange control signals. In addition, these calculators 62
Is an information management system connected to the local communication line network 66 and also connected to the communication line network 66, for example, a progress management system 63 that manages process progress data of the work of the entire line, and manufacturing condition data of the work. The necessary information is exchanged by communicating with the manufacturing condition management system 64 managed for each case. FIG. 5 shows the structure of a program for automatically operating the production equipment group constituting the semiconductor wafer production line and driving the computer 62 placed for each manufacturing process, and the relationship between the program and the production equipment. Calculator 6
The manufacturing process in which 2 is placed assumes an exposure process (photolithography process). The equipment to be automatically operated is a stocker 2 for temporarily storing cassettes (hereinafter referred to as lots) loaded with a plurality of wafers put into the process, and an automatic transfer robot for automatically transferring lots between the equipments. (Hereinafter referred to as AGV) 59, photolitho consistent processing device 61 for processing coating, exposure and development, and automatic wafer inspection device 68
Is. The computer 62 is also connected to a man-machine terminal for workers. The program that drives the computer 62 is composed of a plurality of modules. Its components are (1)
Upper linkage unit 53 that implements a communication control function with the progress management system 63 and the manufacturing condition management system 64, (2)
Stocker 57, AGV59, Photolitho integrated processing device 6
1. Receiving information on the processing status of the wafer automatic inspection device 68, determining the next processing from the information, and collecting the production results of the production equipment control unit 51 that automatically operates these devices, (3) lot. Achievement collecting unit 52, (4) stocker 57,
According to the information from the AGV 59, the photolithographic integrated processing device 61, and the wafer automatic inspection device 68, the bay controller 54 that distributes the information to the production equipment control unit 51, the performance collection unit 52, and the upper linkage unit 53, (5) Production equipment control In response to the processing determined by the unit 51, the devices 57, 59, 61,
68 to control the transfer between these devices 57, 59, 6
1, 67, equipment transfer control section 55 for sending work instructions, and equipment communication section 5 for communicating with devices 57, 59, 61, 68
6,58,60,67. This program was coded in consideration of the flow of goods throughout the bay, resulting in a very complicated coding. Therefore, in recent years, the ratio of the man-hours required for developing these programs to the man-hour required for developing the entire automatic production line is rapidly increasing. For example, the devices 57, 59,
61, 67 addition or deletion, devices 57, 59, 61,
When there was a change inside 67, there was a change in the algorithm and data flow of the production equipment control unit 51, and it was also necessary to change the performance collection unit 52, bay control 54, and equipment transportation control unit 55. In order to make these changes, it was necessary to understand the flow of goods throughout the bay, and the change operation was complicated and time-consuming. Therefore, there are many proposals of inventions for the purpose of reducing the number of man-hours for developing this type of program. For example, JP-A-4-205
Japanese Patent No. 306 discloses a technique in which modularization is advanced slightly from FIG. 5, and modularized by function, that is, in units of a control unit, an information collecting unit, and an information processing unit. As another example, JP-A-4-1122
The automatic control device for the sequence control program described in Japanese Patent Laid-Open No. 07-2007 and the EIC integrated control device described in Japanese Patent Laid-Open No. 4-312102 reduce the number of program man-hours by devising data operation and utilizing a shared database. There is a method aiming at reduction and at the same time improvement of program maintainability, and a method devised to handle global variables and local variables in a module constituting a program as described in JP-A-4-302026. ,Proposed.

[0003]

However, it is difficult to say that the conventionally proposed invention essentially contributes to the reduction of the man-hours for developing a program of this kind. For example, what aimed at reducing the development man-hours of the program by devising the data operation and utilizing the shared database is to express the algorithm adopted in the program by data, and to use the debugging tools equipped in the program development environment. Since such utility support cannot be fully utilized, the program development efficiency may be rather reduced. In addition, devising global variables and local variables is important for improving readability and maintainability of programs.
Only indirect contribution can be expected to reduce the development man-hours of the program. It is an object of the present invention to provide a production facility management device that manages a production system that allows easy program development.

[0004]

In order to achieve the above object, in a production equipment management device for managing a plurality of production equipments, a plurality of equipment control modules provided for each of the production equipments and controlling the production equipments are provided. , The start order management for determining the processing order between the production equipments of the work to be produced by the production equipments, managing the data related to the processing order, and inputting / outputting the data with other modules. A module and a management module that is connected to the equipment control module and the construction sequence management module and mediates input / output of data between the plurality of modules, and each of the plurality of equipment control modules corresponds to the production The equipment is caused to execute the processing of the work, and information is input and output between the other modules and the corresponding production equipment, Processes, with respect to the other modules, in the information providing and processing is obtained and requests for performing at least one.

[0005]

In the above structure, among the modules constituting the control program, the equipment control module is provided for each equipment, and the processing unique to the equipment is executed by this module. Work transfer information or work end information is only exchanged between modules. Conventionally, when the production equipment is added, deleted, or changed in the production equipment, the change in the algorithm in the control program occurs in each part in the control program, but if modularized as in the present invention, The equipment control module corresponding to the equipment may be mainly changed. Therefore, when the production equipment is added or deleted, or the inside of the equipment is changed, the module is added or deleted, or the inside of the module is changed, but the change does not affect other modules. Therefore, it is possible to easily replace / expand the production equipment and the module corresponding thereto, and upgrade the production equipment and the module alone. Although it is indirect, the readability and maintainability of the program are improved.

[0006]

DESCRIPTION OF THE PREFERRED EMBODIMENTS An example in which the present invention is applied to a program for driving a computer for automatically operating a production equipment group constituting a semiconductor wafer production line will be described below. As shown in Figure 1,
In the production line, the wafer processing equipment s-1 to be automatically operated is arranged in a group according to the manufacturing process.
One computer s-2 is placed for each manufacturing process and is connected to the manufacturing equipment group by the equipment communication line s-3. The computer s-2 and the wafer processing equipment group s-1 exchange control signals with appropriate firmware. In addition, these computers s-2
Is an information management system connected to the local communication line network s-4 and also connected to the communication line network s-4, such as a progress management system s-5 for managing the processing progress data of the work of the entire line or a work. It communicates with the manufacturing condition management system s-6, which manages the manufacturing condition data for each process, and exchanges necessary information. FIG. 2 shows the relationship between the structure of a program that drives a computer that automatically operates the production equipment group that constitutes the semiconductor wafer production line and drives the computer that is placed for each manufacturing process, and the production equipment. The manufacturing process in which the computer 1 is placed assumes an exposure process. The equipment to be automatically operated is a stocker 2 for temporarily storing a cassette (hereinafter referred to as a lot) loaded with a plurality of wafers put into the process, and an automatic transfer robot for automatically transferring a lot between the equipments. 3, a photolitho consistent processing device 4 for coating, exposing and developing, and an automatic wafer inspection device 5. The computer 1 includes a man-machine terminal 6 for workers, a local communication line 7
Connect with. The program that drives the computer 1 is composed of a plurality of modules. The components are a progress management system, an intersystem communication control module 1-1 that implements a communication control function with a manufacturing condition management system, a man-machine control module 1-2 that implements a function of controlling the man-machine terminal 6, and a process. Start order management module 1-3 for deciding the start order of the lots inside, manufacturing condition management module 1-4 for managing the manufacturing condition data in the process, performance information management module 1-5 for collecting the processing results of the lot,
Stocker control module 1 that automatically operates the stocker 1
6. AGV control module 1 that automatically operates AGV3
7. Photolitho integrated processing device control module 1-8 for automatically operating the photolitho integrated processing device 4; Wafer automatic inspection device control module 1-9 for automatically operating the wafer automatic inspection device 5; and data necessary for operating the system. Management data management module 1-10, system integration management module 1-11 that executes appropriate processing for initialization of the system and abnormality of other systems, and management module that dynamically connects the modules 1
-12. Next, an outline of the operation of these module groups will be described. FIG. 3 shows an operation until the lot put in the stocker 2 is unloaded from the stocker 2, automatically conveyed by the AGV 3, mounted on the photolitho integrated processing device 4, and the lot processing in the photolitho integrated processing device is completed. It is a figure. When the lot is loaded into the stocker 2, the bar code reader installed in the stocker 2 reads the lot number from the bar code attached to the lot.
To read. This is reported to the stocker control module 1-6. The stocker control module 1-6 transmits the message (1) “Out-of-bay storage completion (lot No)” to the construction order management module 1-3. In response to this, a new work-in-process lot number is set in the internal table of the work order management module 1-3. Since the start order management module 1-3 acquires the detailed information of the lot,
The message (2) "lot information request (lot number)" is transmitted to the inter-system communication control module 1-1. The inter-system communication control module 1-1 inquires the progress management system via the in-house communication line 7 to acquire the detailed information of the requested lot number, and acquires the detailed information of the lot to manage the start order. Message (3) "Lot information request response to module 1-3 (lot N
o, data) ”is issued. In response to this, the start order management module 1-3 sets detailed information of the lot in an internal table. The photolitho consistent processing device control module 1-8 causes the photolithographic integrated processing device 4 to operate. (4) "schedule request (photoriso integrated processing device) to the start order management module 1-3 when the equipment condition of the equipment is monitored in real time and the data satisfying the condition indicating that the lot is acceptable are confirmed. ) ”Is sent. With this message as a trigger, the start order management module 1-3 executes the scheduling process for the lot to be started by the photolithography consistent processing apparatus 4. When the start lot is determined, the start order management module 1- 3 responds to the stocker control module 1-6 with the message (5) “Out of bay receipt completion response (lock Transmitting a No) ". Stocker control module 1-6 to this message to trigger,
Instruct the stocker to issue the lot. Stocker 2
In response to this instruction, the lot is delivered to the AGV-dedicated lot entry / exit port 1, and the AGV control module 1-7 sends a message (6) “transport request (From, lot N
O, stocker, loading / unloading port 1) is sent to request delivery of the lot. In addition, the construction order management module 1-3
Sends the message (7) "Schedule request response (lot N
o, process) "and notifies the lot number and process determined by scheduling. In response to this, the photolitho integrated processing system control module 1-8 sends a message (8)" recipe to the manufacturing condition management module. Request (lot number, process) ”is transmitted. In response to this, the manufacturing condition management module searches for a recipe for processing the process of the lot, and the photolithographic integrated processing device control module 1-
8 message (9) "recipe request response (lot N
o, recipe) ". In response, the photolithographic integrated processing device control module 1-8 instructs the photolithographic integrated processing device 4 to execute processing preparations such as reticle replacement as necessary, and executes AGV control. A message (10) "transport request (To, lot number, photolitho integrated processing device, port 1) is transmitted to the module 1-7. The AGV control module 1-7 creates a FromTo transportation command by using the argument “lot No” set in the transportation request message transmitted from each equipment control module as a key. A map showing the position of the AGV 3 and the work status of the AGV 3 which the AGV control module 1-7 is monitoring in real time in response to the created transfer command, and the layout of the production equipment set in the AGV control module 1-7. The optimal transfer execution order is calculated from the data of
Instructed by GV3. In response to this, the AGV 3 executes the lot transportation. In the case of this example, the lot is automatically conveyed from the stocker inlet 1 to the port 1 of the photolitho consistent processing apparatus 4. At the same time when the transfer instruction is given to the AGV 3, the information (1) is sent from the AGV control module 1-7 to the stocker control module 1-6 and the photolitho consistent processing apparatus control module 1-8 at the same time.
1), (12) "Transport request response (lot number)" is reported. If the AGV3 reports to the Photoriso integrated processing unit control module 1-8 that a lot has been loaded in the port 1 of the Photoriso integrated processing unit 4, the Photoriso integrated processing unit control module 1
-8 instructs the photolithography consistent processing apparatus 4 to execute lot processing. When the lot processing is completed, the photolithographic integrated processing device 4 reports the processing result to the photolithographic integrated processing device control module 1-8. In response to this, the photolithographic integrated processing device control module 1-8 reports the message (13) “result report (lot No., data)” to the result information management module 1-5. In response to this, the performance information management module acquires the processing performance information, registers it in the internal database, and sends a message (14) "result report response (lot No.)" to the photolitho consistent processing apparatus control module 1-8. Reply. The lotriso integrated processing unit control module 1-8 which has executed the processing of the lot and confirmed this instructs the photolitho integrated processing unit 4 to perform the work necessary for receiving the next lot, and when the preparation is completed, the start order management module A message (15) “processing completion report (lot No.)” is sent to 1-3, and the process starts waiting for unstarted lot information from the start order management module 1-3. As described above, the control of the entire program is started by each wafer processing sequence installed in the equipment control module group such as the photolitho consistent processing apparatus control module 1-8. As in the past, the production equipment control unit 5
One does not decide the work content of each production facility while grasping the status of all production facilities. In this way, since each facility control module includes all the work contents specific to each production facility, the independence between the modules is enhanced and the addition / change of the production facility is facilitated. Also,
As a work that cannot be handled by only the photolithographic integrated processing device control module 1-8, for example, when it is necessary to confirm the manufacturing conditions of the process by trial and error, only one sheet is processed for trial and the inspection result shows that You may have to decide whether to try more. At this time, the processing is performed as follows. An unprocessed lot mounted on the photolithographic integrated processing device 4, that is, one wafer from a cassette loaded with a plurality of wafers is processed by the photolithographic integrated processing device 4 in advance, and this wafer is loaded into another cassette. AGV3 automatically conveys to wafer automatic inspection device 5 for inspection. The photolithographic integrated processing unit control module 1-8 recognizes the inspection result, and if the inspection result is good, the photolithographic integrated processing unit 4 is processed for the remaining unprocessed wafers waiting on the photolithographic integrated processing unit 4. To instruct. If the inspection result is defective, the photolithographic consistent processing apparatus 4 is instructed to adjust the data of the manufacturing conditions. After the adjustment is completed, the photolitho consistent processing apparatus 4 is again instructed to perform the preceding processing of the second wafer, and after the processing is completed, the wafer automatic inspection apparatus 5 again inspects the processed wafer.
Therefore, it is necessary to exchange messages between the photolithographic integrated processing equipment control module 1-8 and the wafer automatic inspection equipment control module 1-9 to execute the request and fulfillment of this service. Only the photolitho integrated processing equipment control module 1-4, the wafer automatic inspection equipment control module 1-9, and the AGV control module 1-7 are related to the request and fulfillment of this service. Further, the AGV control module 1-7 creates a transportation command for the transportation request message transmitted from each equipment control module using the argument “lot No” as a key, and causes the AGV 3 to execute this. It doesn't detect anything else.
In other words, the starting order management module 1-3 and the manufacturing condition management module 1-4 do not detect the presence of the automatic inspection device 5, the automatic inspection device control module 1-9, and messages related thereto. This is an automatic wafer inspection system 5
The same applies not only to the photolithographic integrated processing device but also to a plurality of wafer processing devices. In this way, since the processing unique to each equipment is concealed for each equipment control module, the start order management module 1-3, the manufacturing condition management module 1-4, etc. that provide a service to the equipment control module. The information management module can be designed with a simple structure. Each equipment control module can also be designed with a highly independent structure. Further, in order to loosen the coupling between the modules, the management module 1-12 is prepared, and always intervenes in the message exchange between the modules to dynamically couple the modules. FIG. 4 shows an outline of the operation.
A module Xt-1 and a module Yt-3 exist, and the addresses 101 and 101 of the management module t-2 are respectively present.
The address of each module connected to the management module t-2 is set in the internal table of the management module t-2. Here, the current module Xt-1 is referred to as “Y.y1 (p1, p1, p
2) ”, the interface requires a well-defined service. This service is run as follows. (M-1) From the module Xt-1, to the address 101 of the management module t-2, Y. y1 (p
1, p2) is transmitted. (M-2) The address 101 of the management module t-2 is Y.Y. from the address map registered in the own module. Module Y that executes y1 (p1, p2)
Know that t-3 is connected to address 201. (M-3) The address 101 in the management module t-2 connects the line to the address 201 Op
issue n. (M-4) When the line is connected, Connect is returned to the address 101 from the address 201 in the management module t-2. (M-5) The address 101 in the management module t-2 corresponds to the Y. y1_Req
Issue the user est. Request y1 service. (M-6) The address 201 in the management module t-2 is the same as that of the module Yt-3. y1_S
issue the status, Y. Check the usage status of y1. (M-7) The module Yt-3 includes the Y. After confirming the usage status of y1, Y. If y1 is available, the address 201 of the management module t-2 is assigned Y.Y. y1_R
eady, Y. If y1 is in service to another module, Y. Returns y1_Busy. (M-8) The address 201 in the management module t-2 is Y. When y1_ready is received,
Y. y1_Ready is returned to the address 101, and Y.
When y1_Busy is received, module Yt-3
When any message from Y. y1_St
Reissue atus to module Yt-3. (M-9) The address 101 of the management module t-2 is Y. When y1_Ready is returned, Y. Send y1 (p1, p2). (M-10) Module Yt-3 is Module Xt
−1 to Y. Return y1_ans () to fulfill the service. (M-11) Module Xt-1 is Module Yt
-3, Y. Send y1_Complete to report service completion. (M-12) The module Yt-3 sends the Y. 3 address to the address 201 in the management module t-2. y1_
Issue Disconnect. (M-13) The address 201 within the management module t-2 is
Issue ect. In this way, each equipment control module is designed to exchange standardized messages.

[0007]

[Effect] As described above, it is possible to easily replace / add modules that compose a program that drives the production equipment management device that automatically operates the production equipment group, and easily upgrade the modules alone. As a result, in order to automatically operate the production equipment group that constitutes the production system, it is possible to share the module among the programs installed in a plurality of units and driving the production equipment management device between different processes. In addition, it is possible to minimize and localize the program change for the partial version upgrade that is frequently performed in this type of system. Although it is indirect, the readability and maintainability of the program are improved. As a result of the above, it is possible to effectively reduce the number of man-hours for creating a program.

[Brief description of drawings]

FIG. 1 is an explanatory diagram of a system for automatically operating a semiconductor wafer production line.

FIG. 2 is an explanatory diagram of a program for driving a computer that automatically operates production equipment in a photolithography process of a semiconductor wafer production line.

FIG. 3 is an operation explanatory diagram of modules constituting a program according to the present invention.

FIG. 4 is an operation explanatory diagram of a management module.

FIG. 5 is an explanatory diagram of a program for driving a computer for automatically operating production equipment in a photolithography process of a semiconductor wafer production line according to a conventional technique.

[Explanation of symbols]

1 ... Computer, 1-1 ... Inter-system communication control module,
1-2 ... Man-machine control module, 1-3 Start-of-work management module, 1-4 ... Manufacturing condition management module, 1-
6 ... Stocker control module, 1-7 ... AGV control module, 1-8 ... Photolitho integrated processing equipment control module, 1-9 ... Wafer automatic inspection equipment control module, 1
-10 ... Operation data management module, 1-11 ... System integrated management module, 1-12 ... Management module, 2 ... Stocker, 3 ... AGV (automatic transfer robot), 4 ... Photolitho consistent processing device, 5 ... Wafer automatic inspection device , 6 ... Man-machine terminal, 7 ... Private network, s
-1 ... Wafer processing device, s-2 ... Computer, s-3 ... Equipment communication line, s-4 ... Local communication line, s-5 ... Progress management system, s-6 ... Manufacturing condition management system, t-1 …
Module X, t-2 ... Management module, t-
3 ... Module Y.

Claims (3)

[Claims] 1. A production facility management apparatus for managing a plurality of production facilities, wherein a plurality of facility control modules, which are provided for each of the production facilities and control the production facilities, and a workpiece which is a production target of the production facility. A work order management module that determines a processing order between production facilities, manages data related to the processing order, and inputs / outputs the data to / from other modules, and the equipment control module and the work order management module. And a management module that mediates input / output of data between the plurality of modules, and each of the plurality of equipment control modules causes the corresponding production equipment to execute the processing of the work, Information to and from each module and corresponding production equipment, process the information, and A production facility management apparatus, which requests execution of at least one of information provision and processing. 2. The production facility management apparatus according to claim 1, further comprising a production condition management module that manages data relating to the production conditions of the work and inputs and outputs the data to and from other modules. Characteristic production equipment management device. 3. The production facility management apparatus according to claim 1, further comprising a record information management module that manages data related to the processing record of the work and inputs / outputs the data to / from other modules. A production facility management device characterized by the above.