JP2001353644A - Production line - Google Patents

Abstract

PROBLEM TO BE SOLVED: To form a production line capable of flexibly adding or thinning a device in response to increase or decrease of production amount requiring a repeating process. SOLUTION: Process blocks 5 completing a basic function as a series of processes is formed for a produced work, the process blocks 5 are assembled as a unit module, and the production line is formed, thereby allowing flexible adding or thinning of the line.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a liquid crystal panel and a PDP.
(Plasma display panel), CRT (CRT) or manufacturing of industrial products in which many processing steps are repeatedly performed, such as semiconductor production. Starting and starting up with a small-scale line in order to eliminate production, gradually increase production equipment by stepwise investment to respond to increase in production volume, and flexibly respond to changes in processing processes For the production line.

[0002]

2. Description of the Related Art Conventionally, in the production of semiconductors and liquid crystal panels, which are processed by repeatedly passing through a plurality of processing steps, large-scale facilities and lines are introduced with a large initial investment as a result of considering the effect of investment. In this product field, where products and manufacturing processes tend to become obsolete rapidly, it is a major challenge to prevent waste caused by this obsolete investment for a large investment. Met.

[0003] As one of the conventional production modes, as shown in FIG. 10, a substrate input as a work to be produced at an input station 101 is cleaned in a cleaning step 102, and then a film formation 103, an exposure 104, an etching 105, The process of the typical process of peeling 106 is repeatedly performed, and a form called a so-called job shop has been adopted as a production line thereof.

[0004] In this job shop mode, a film forming 10
3, a complete process such as exposure 104, etching 105, and peeling 106 can be performed, and a film forming apparatus 107, an exposure apparatus 108, and the like as minimum units for establishing a predetermined processing process from the viewpoint of work quality. A plurality of etching devices 109 and peeling devices 110 are prepared according to the number of products and the number of products, respectively. In the prepared devices, a plurality of devices are gathered and arranged in the same area for each process, and each device forms a device group.

[0005] In the above-mentioned process organization and arrangement of the devices, the work to be processed in each process is conveyed in a predetermined order and route indicated by a dotted line in FIG. 10 and passes through the device assigned to each process. Then, while the processing is being performed, a series of processing steps are repeated as necessary, and are performed a plurality of times.

In this job shop system, it is possible to relatively easily cope with fluctuations in production quantities by increasing or decreasing individual devices as the minimum unit of each process. It is easy to make a step-by-step investment as production volume increases.

Further, when starting up a production line, it is possible to start up in a form in which the production line is completed in units of equipment, and it can be carried out independently of the relationship between the preceding and following processes.

Further, since the processing is completed in units of equipment, it is possible to centrally manage buffers serving as in-process inventory storage locations between processes in a common location.
This buffer can be reduced.

On the other hand, in contrast to the above-described job shop type line organization, a line organization called a flow shop type has been conventionally performed.

According to this method, a process block 114 is formed by directly connecting a cleaning device 111, a drying furnace 112, and a printing device 113 corresponding to a series of steps of cleaning, drying, and printing in the production of a PDP as shown in FIG. In the above-described job shop system, while the work is transported between the devices that are separately arranged in the respective areas, the work is transported within the devices constituting the process block 114, and the adjacent The work is transferred by transferring the work between the devices.

In order to repeat each process in a series of processes a predetermined number of times, a plurality of process blocks 114 are directly connected to form one line.

The line configuration based on the flow shop system has a feature that each apparatus is directly connected and the work is directly sent between the apparatuses, so that the transfer form is simplified.

As a result, the configuration of the factory is reduced, the entire factory is shrunk, and the batch processing in the job shop flow is replaced by the single-wafer processing, so that the lead time can be reduced. Further, it is possible to reduce the occurrence of a quality problem due to a change in the state of a work being conveyed, as in the case of a job shop type line organization.

Next, an information system or a transport system in the conventional line organization will be described.

[0015] As shown in Fig. 12, in the conventional system, an information system for monitoring information on each process apparatus and transfer equipment, judging the situation and managing the progress of the process, and each stage of production. And a transfer system that manages the transfer of the work corresponding to the above.

In such a configuration, a translator function is required to connect the information system and the transport system, and it is necessary to connect the transport system and the information system to each device. Had become.

[0017]

However, in the above-described conventional line knitting, in the case of the job shop system, it is necessary to transport the work between the separated devices, and it is necessary to carry out the work in the assembling process. On the other hand, in the case of a work such as a liquid crystal panel whose processed state is liable to change with time, the work changes to an unfavorable state with the passage of time due to transport between the devices, which is a quality problem. There are cases. Also, the transport route is complicated,
The control becomes complicated.

In addition, a work loading function is required for each device, which leads to an increase in the size of a factory. Further, the batch processing method has a problem that the lead time becomes redundant.

In the case of the flow shop system, since each device or a process block to which each device is directly connected constitutes a continuous line, the number of devices or process blocks corresponding to an increase or a decrease in the production quantity. There was a problem that it was very difficult to add or thin out.

In addition, the start-up of a line requires the trouble of starting up a plurality of apparatuses in conjunction with the start-up of each apparatus in the job shop system, and furthermore, a buffer is dispersed at the joint between each process block. Existed, causing the entire system to become huge.

Further, in each of the conventional information system and transport system, even if a trouble occurs in either the information system or the transport system and the system is stopped, the production must be stopped. That is, when the information system stops, the transport device cannot move because the transport device does not support the transport device. When the transport system stops, the transport device cannot be transported.

In the case of the conventional system configuration, the information system and the transport system are connected by a translator, and the transport system and the information system are connected to each device. In addition to this, it is necessary to temporarily stop the information system and replace the host computer or translator by modifying the software to replace the system with the host computer or translator. There was a problem that the system had to be stopped, and it was not possible to easily add devices.

Accordingly, in view of the above problems, the present invention can eliminate waste of investment by flexibly adding or thinning out equipment in response to an increase or decrease in the production quantity of a product requiring a repetitive processing step. Minimal start-up time, simple transport mode, no large factory, shortened production lead time, started small-scale line organization, and invested step by step as production volume increased Accordingly, an object of the present invention is to provide a production line in which production equipment can be added step by step, and the quality of products in a processing process is not deteriorated.

Further, according to the present invention, even if a trouble occurs in the information system or the transport system, the production can be continued.
It is an object of the present invention to provide a production line using a simple system configuration that can easily add devices and eliminate redundancy.

[0025]

In order to solve the above-mentioned conventional problems, a production line according to the present invention is provided with a basic function as a series of steps for a workpiece to be processed which repeatedly passes through a processing step or a processing step. Is formed, and the work is produced by knitting the process blocks as unit modules.

In the above configuration, the process block is connected to a process device as a minimum unit capable of executing a completed process in the order of a plurality of continuous processes, thereby completing a basic function as a series of processes. Configuration.

Further, the production line of the present invention prepares a plurality of the above process blocks, and selects a process block for flowing the work from the plurality of process blocks according to the type of the work to be produced and the number of repetitions of the basic function. It is characterized by being knitted.

Further, the production line according to the present invention has a configuration in which the process capacity is increased or decreased as needed by gradually adding or pulling out the process blocks stepwise in response to an increase or decrease in the production quantity of the workpiece. It is characterized by having done.

The production line according to the present invention, in the above configuration, has a dispatch transfer for controlling a fully automatic transfer of a work based on a predetermined production plan, a current production progress, or a process block operation. A controller, a remote transfer controller positioned below the dispatch transfer controller, which controls automatic transfer of the work by an operator instructing an input terminal, and a remote transfer controller positioned below the remote transfer controller, The transfer of the work is controlled by a control system having a hierarchical structure including a local transfer controller that controls the transfer of the work by a controller. With this, when adding process blocks, an operation test is performed with the local transfer controller separated from the remote transfer controller, and after confirming the operation, it can be connected to the remote transfer controller instantly, so that it can be added without affecting other production can do.

The connection to or disconnection from the remote transport controller is performed by changing the data of the device master managing it.

Further, in the production line according to the present invention, the transfer condition of the work is registered in the process master based on the order of the production process of the work, and the transfer condition registered in the process master is registered in response to the change of the production line. The modification is characterized in that the change and the start-up accompanying the change are performed.

The transfer condition is registered as a process master with the selection priority from a plurality of parallel process blocks, the presence / absence of direct connection of a process device, the time constraint related to the processing content of each process, and the like. It is characterized in that a change and start-up are performed by modifying the conditions.
The process master correction at the time of correcting the transfer conditions can be performed without stopping the information system, and as a result, the line can be changed without affecting production.

Further, the production line of the present invention has an apparatus interface for exchanging operation information of a process apparatus with a host computer in the above configuration, and an exchanging data between a self-propelled carrier and the host computer. AGV interface, a man-machine interface for inputting operator's instructions, an inspection device interface for exchanging inspection information between a process device for performing inspection and the host computer, a process device for performing processing, and the host computer It is equipped with a control system that standardizes and integrates each interface of a processing device interface for exchanging processing information between the devices.

The above device interface, AGV
A line controller integrating an interface and a man-machine interface can be configured, and this line controller can be incorporated into a control system.

By connecting the line controller to the control system, it is possible to add process blocks.

Further, in the production line of the present invention, in each of the above-described configurations, an information system for monitoring information on each process device and transport equipment, judging the situation and managing the progress of the process, and managing the transport. The transport system for performing the process is constructed integrally, and only the information system is independently connected to each process block, and the transport system is made independent for each process block. It is organized using a system configuration equipped with a memory for recording the progress of the process based on the process passage history.

[0037]

DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described below with reference to the drawings.

FIG. 1 shows a schematic basic configuration of a production line for a liquid crystal panel, which includes a peeling step 1 and a film forming step 2 in each of film forming, exposing, etching, and peeling steps constituting a photolithography step. The figure shows a state directly connected with. The film forming process 2 is performed according to the difference in the specifications of the processing contents.
There are 7 types of 2g, each directly connected to the peeling step 1.
Make up the different types of blocks. Like liquid crystal, the substrate surface before film formation dislikes dust, which has a significant effect on the quality of the product, and is composed of many processing steps, and the state changes easily during the process, leading to quality problems For workpieces with a high possibility, for example, the peeling device 3
Alternatively, a process device capable of executing a completed process by itself, such as the film forming devices 4a to 4g, is set as a minimum unit, and the order of the process in which the process device as the minimum unit is continuously performed is performed. The line is knitted with the process block 5 directly connected according to the above as a unit module, and production is performed. In the process block 5 as a unit module, a series of steps from a peeling step 1 to a film forming step 2 are united to complete a basic function in the production of liquid crystal, and a series of basic functions of the unit module are completed. It is configured by paying attention to the fact that the processing of the process is repeated, and is the basis for proceeding with the following line knitting.

In the process block 5, the work is conveyed in the peeling device 3 and the film forming devices 4a to 4g, which are the process devices, and the sheet is fed continuously while directly transferring the work between the adjacent process devices. In this way, the transfer is performed.

By adopting the process block as described above, it was possible to reduce the process residence time, to reduce dust adhesion to the substrate after peeling, and to improve the film formation quality. .

Similarly, as another process block configuration example, a wet etching apparatus 6 and a dry etching apparatus 7 used in a series of steps from wet etching to dry etching as shown in FIG. 2 are directly connected to form a process block. As a result, the result that the contamination of the substrate after the wet etching can be reduced and the quality of the dry etching is improved was obtained.

Next, a description will be given of an example of line development executed in response to a change in the form of a product or its production quantity while using the above-described process block 5 as a basic configuration.

FIG. 3 is a diagram showing a line configuration at the time when the start-up of an initial line for liquid crystal production is completed. In contrast to the configuration of the initial line shown in FIG. 3, the line configuration shown in FIG. 4 is expanded while replacing the process block 8 with a new configuration, which is processed to evolve a product to a new configuration. The content of the process itself is improved, and replacement of the device accompanying the process is performed in units of process blocks, and the increase in the production volume of the work is dealt with by increasing the number of devices. The addition of the exposure step in FIG. 4 means that the exposure process itself does not involve any change such as improvement.
It simply added or expanded process blocks with the same contents as at the time of the initial line. In the present embodiment, as described above, in the line development in various forms, a process block that completes the basic function is set as a unit module, and these are replaced, and the number is increased or decreased.
It enables flexible line organization regardless of location and layout restrictions.

Here, in the present embodiment, the configuration of a system relating to information and transport control for enabling flexible line organization as described above will be described below.

The control system according to this embodiment is shown in FIG.
Has a hierarchical structure composed of three transport controllers as shown in FIG.

That is, the type of work to be produced, the production order,
Regarding the production line, etc., the dispatch transfer controller 20 for controlling the fully automatic transfer based on the predetermined production plan and the current production progress status on the production line, the opening status of the equipment, the lot staying status, etc. It is positioned and controls work transfer in normal production.

A remote transfer controller 21 is positioned below the dispatch transfer controller 20, and controls the automatic transfer of the work at the line level when the operator instructs the input terminal.

Further, the remote transfer controller 21
The local transport controller 22 is located below the, and the transport device is controlled by the individual controller. When a process device or process block is added, the local transfer controller 22 is added as shown by a broken line in FIG.

In such a configuration of the transfer control system, when a process device or a process block is added, an operation test is performed by a local transfer controller separated from the remote transfer controller 21, and after the operation is confirmed, the operation is connected to the remote transfer controller instantly. By doing
Even when other process equipment, process blocks, or other lines are operating for their original production, only the locations to be expanded or changed can be started and adjusted or changed, which may affect the operation of other lines. Will not give.

The connection or disconnection with the remote transport controller is performed by changing the data of the device master 19 that manages the connection or disconnection.

As described above, since the system configuration is based on a hierarchical structure, in the system configuration using the same software having an integral structure, the range to be started is smaller than when the entire operation must be stopped. Can be started at the line level or the equipment level according to the size of the device. In addition, even if a partial change occurs in the lower component, the changed component is started while minimizing the influence on the upper component. It is possible to flexibly add or change while maintaining the production of the unchanged parts, and smoothly start up.

Next, how to deal with a change in line organization, a change in factory layout, a change in production process, and the like will be described.

FIG. 6 is a flow chart showing the production process sequence of a plurality of types of works. In FIG. 6, for example, in the case of a certain work, the work passes in the order of steps 1 → 2 → 3 → 4 → 5,
In the case of another work, a step 1a is added after the step 1, and in the order of 1 → 1a → 2 → 3 → 4 → 5, and depending on the work, steps 3 or 4 are skipped. 4A shows a process flow of various workpieces such as the one to which 4a is added.

In the production of each work having the process flow defined as described above, various transfer conditions based on the process flow are registered in advance as masters. Here, the transfer condition means, for example, from the process flow side or the apparatus side, from among the process blocks arranged in a plurality of blocks in parallel, the priority order of which process block to select and flow, As shown in FIG. 7, the work is directly connected to the process devices 23 to flow the work across a plurality of types of process devices 23 as shown by an arrow A in the drawing, or the work devices are directly connected to each other by the loading device 24. Toka presence or absence of direct such or to carry as in FIG arrow B the inserted workpiece removed by the unloading device 25, the process blocks used in the step 3 in FIG. 6 is M ₁ or M _2, or of M ₃ And the process block used in step 4 is M ₄ or M ₅ or M
₆ is any one of, for example, when using a process block M ₁ in step 3, such conditions that used to direct the process 4 at process block M ₄ corresponds to this.

Further, as one of the transport conditions, the start of each process,
Like end time and duration, whether there is a process on what kind of time constraints, also included such as, for example, in FIG. 6, the time constraints required from step 1 to step 2 have a T ₁ within actually T _The condition is that if the value exceeds ₁ , the process returns to the process 1 via the reprocessing process 2a after the process 2.

By registering the above-mentioned various transfer conditions and the process conditions relating to the contents of the process itself in the process master 18 shown in FIG. 5, the process evolution such as change of line organization, update of facilities, layout change, etc. Also, changes in the process flow itself can be handled simply by modifying the process master registration without major modification of the basic system configuration and software.
Further, the process master correction can be performed without stopping the information system, and the production line can be flexibly changed and the start-up can be performed smoothly without affecting the production.

Next, the interface between the process device and the control system in this embodiment will be described with reference to FIG.

In FIG. 8, reference numeral 35 denotes an apparatus interface (hereinafter abbreviated as I / F) I for exchanging operation information relating to the operation state and trouble state of the process apparatus 30 with the host computer 31.
In order to be able to cope with the expansion of the system, the signal format is unified. 36 is an AGV I / F for exchanging data between a self-propelled transport vehicle (hereinafter abbreviated as AGV) 32 and a host computer 31, and 37 is a man-machine I / F for inputting an instruction of an operator 33. Yes,
The functions of these device I / F I35, AGV I / F and man-machine I / F 37 are incorporated in the line controller, and the line controller
Has a standardized configuration corresponding to each function, and has a standardized configuration as a whole.

Similarly, 38 is a device I / F II for exchanging inspection information with the host computer 31 when the process device 30 is an inspection device, and 39 is a processing and processing device for the process device 30. In this case, it is a device I / F III for exchanging processing information with the host computer 31.

These device I / F II 38 and device I / F
III39 also has a configuration in which information is exchanged under a unified communication procedure (protocol) and data area.

As described above, since the interfaces for incorporating each process device 30 into the control system are unified and standardized, the process devices 30 can be easily added simply by connecting the line controller 34, for example. Conversely, the same applies when thinning out the process devices 30, and it is possible to flexibly cope with such an increase or decrease or update of the process devices 30 and perform a smooth startup.

Further, since the above configuration is adopted, the line controller 34 is provided to the device maker before the device is brought into the production site from the device maker, so that the signal exchange can be performed normally. It is possible for the device maker to confirm in advance whether the process can be performed, and as a result, it is possible to accurately start up the device in a short time.

Next, the relationship between the information system and the transport system in the present embodiment will be described.

Information from each process device is collected, the status of each process device and transport equipment is monitored, and an information system for managing the progress of the process, a transport system for managing transport, and an interface with an operator are provided. PLC
(ProgrammableLogic Contro
ller) nets, and the connection is performed in a distributed manner for each process block. With this configuration, the entire system is simplified, and the risk is dispersed even when a trouble occurs, so that the problem can be minimized.

As shown in FIG. 9, the information system and the transport system are integrally integrated into a system configuration, and each transport device such as a stocker controller for each bay, an AGV controller for controlling the AGV, and the like. The controller 13 and the information system 15 are directly connected.

Since only the information system 15 is connected to each process block 14, the information system 15 grasps the status of each process device 9 constituting each process block 14, so that a transport device such as an AGV can be started. Thus, the redundancy of the system can be eliminated, and simplification can be achieved.

Further, since the transport system is independently connected to the information system 15 for each process block 14, and similarly, the transport system is independently connected to the information system 15 for each process block 14. Even if a trouble occurs in the transport system or the process block 14, the other process blocks can continue production.

When, for example, four process devices 9a, 9b, 9c, 9d are provided in the process block 14, the master device 16 of the process block 14 in the information system 15 is provided with the process devices 9a, 9b. , 9
Model and lot N of the work to be produced by c and 9d
o. The information table 17 holds real-time data on the production start or end time, the operation status, and a request signal for loading / unloading the work to / from the line. Since this data has the same item and length, even when the fifth process device 9e is added to the above four process devices, the information table can be changed without changing the software of the information system 15. 17 can be added and started only by adding the data 9e 'of the process device 9e.

Since each work is equipped with a memory for recording a history indicating what process has been performed,
Even if a trouble occurs in the information system, production can be continued by manual operation.

As described above, the transport equipment and the information system 15
Is divided into the minimum units, the effect of the trouble can be minimized, and the effect that the process block can be added from the transport side and the information side can be obtained.

This also makes it possible to add a process block without changing the basic configuration of the system even in a distant place, without being restricted by layout restrictions as described above. . In addition, with such a configuration, starting from a small-scale line based on a process block, the process block is expanded or partially replaced by increasing the number of workpieces or improving the process. It will be possible to proceed with line composition by stepwise investment in response.

Then, device information,
It is possible to manage the progress of the process with real-time and comprehensive judgment and to perform production while constantly monitoring the transport equipment information.

[0073]

According to the present invention, it is possible to flexibly increase or decrease the number of devices in response to an increase or decrease in the production quantity of a product requiring a processing step without being restricted by a place or a layout.
Minimized equipment start-up, simple transport mode, no large factory, reduced production lead time, started small-scale line organization, and invested gradually in response to increase in production volume It is possible to gradually increase production equipment in units of process blocks, or to partially replace process blocks by improving processes, and to organize production lines without reducing the quality of products in the processing process. Become.

When there is a line to be changed or added, even when other lines are operating for the original production, only the target line is changed without affecting those lines. Or start-up adjustment.

Further, by registering the transfer conditions in master corresponding to the process flows of various workpieces, it is possible to change line composition, update equipment, change process contents, etc. only by correcting the master registration. It is possible to perform flexible changes and a smooth start-up without involving a large-scale modification of the basic configuration and software of the system.

Further, since the interfaces for incorporating each process device into the control system are unified and standardized, it is possible to add process devices or to thin out the reverse process only by combining them.

Further, according to the present invention, even if a trouble occurs in the information system or the transport system, production can be continued.
It is possible to easily add devices, and it is possible to form a production line using a simple system configuration without redundancy.

The configuration of these control systems makes it possible to flexibly add or partially replace or change the process blocks described above.

[Brief description of the drawings]

FIG. 1 is a diagram showing a schematic basic configuration of a production line according to an embodiment of the present invention.

FIG. 2 is a diagram showing a configuration example of a process block;

FIG. 3 is a diagram showing a configuration at the time of initial startup of a production line.

FIG. 4 is a diagram showing a state where a process block is added to the production line shown in FIG. 3;

FIG. 5 is a diagram showing a hierarchical structure of a control system.

FIG. 6 is a flowchart showing a production process sequence of a plurality of types of works.

FIG. 7 is a diagram showing a state in which process devices are directly connected.

FIG. 8 is a diagram illustrating an interface between a process device and a control system.

FIG. 9 is a diagram showing a system configuration in which an information system and a transport system are integrated.

FIG. 10 is a diagram showing a conventional production line configuration of a job shop system.

FIG. 11 is a diagram showing a production line configuration of a conventional flow shop system.

FIG. 12 is a diagram showing a configuration of a conventional control system.

[Explanation of symbols]

Reference Signs List 3 stripping device (process device) 4a, 4b, 4c, 4d, 4e, 4f, 4g film forming device (process device) 5, 8, 8a, 8b, 14 process block 6 wet etching device (process device) 7 dry etching device (Process device) 9, 9a, 9b, 9c, 9d, 9e, 16, 23, 30
Process device 13 Transport device controller 15 Information system 18 Process master 20 Dispatch transport controller 21 Remote transport controller 22 Local transport controller 31 Host computer 32 Self-propelled transport vehicle (AGV) 33 Line controller 35, 38, 39 Device interface 36 AGV interface

Continuing from the front page (72) Inventor Ayuki Kubota 1006 Kadoma Kadoma, Osaka Prefecture Matsushita Electric Industrial Co., Ltd. ) 3C042 RF01 5H215 AA06 BB03 BB20 CC09 CX09 KK04

Claims (11)

[Claims] 1. A process block that completes a basic function as a series of processes is formed on a workpiece to be processed that repeatedly passes through a machining process or a process process, and the process block is knitted as a unit module to form the process block. A production line characterized by the production of workpieces. 2. A configuration in which a basic function as a series of steps is completed by connecting a process block as a minimum unit capable of executing a completed step in accordance with an order of a plurality of continuous steps. The production line according to claim 1. 3. A process block according to claim 1, wherein a plurality of process blocks are prepared, and a process block for flowing the work is selected from the plurality of process blocks in accordance with the type of work to be produced and the number of repetitions of basic functions. A production line characterized by: 4. A production line configured to gradually increase or decrease the production capacity in a stepwise manner by increasing or decreasing the process block according to claim 1 stepwise in response to an increase or decrease in the production quantity of a workpiece. . 5. A dispatch transfer controller for controlling a fully automatic transfer of a work based on a predetermined production plan, a current production progress, or an operation state of a process block, and a dispatch transfer controller positioned below the dispatch transfer controller. A remote transfer controller that controls automatic transfer of the work by an operator instructing an input terminal; and a local transfer that is positioned below the remote transfer controller and controls transfer of the work by an individual controller of a transfer device. With a control system having a hierarchical structure consisting of a controller,
3. The apparatus according to claim 1, wherein the transfer of the work is controlled.
Or the production line according to 3 or 4. 6. The transfer condition of the work is registered in a master based on the order of the production process of the work, and the change and the start-up accompanying the change are performed by correcting the transfer condition registered in the master in response to the change of the production line. The production line according to claim 1, 2, 3, or 4. 7. As transfer conditions, the priority order of selection from a plurality of process blocks arranged in parallel, the presence / absence of direct connection of a process device, the time constraint related to the processing content of each process, and the like are master registered. 7. The production line according to claim 6, wherein the change and the start-up are performed by the modification. 8. An apparatus interface for exchanging operation information of a process apparatus with a host computer, an AGV interface for exchanging data between a self-propelled carrier and the host computer, and an instruction of an operator. A man-machine interface for inputting, an inspection device interface for exchanging inspection information between the process device for performing inspection and the host computer, and an exchange of processing information between the process device for performing processing and the host computer. The production line according to claim 1, further comprising a control system in which each interface of the processing device interface is standardized, standardized, and incorporated. 9. The production line according to claim 8, wherein an apparatus interface, an AGV interface, and a man-machine interface are integrated to form a line controller, and the line controller is incorporated in a control system. 10. The production line according to claim 4, wherein process lines are added and knitted by connecting the line controller according to claim 9 to a control system. 11. An information system for monitoring information on each process device and transport equipment, judging the situation and managing the progress of the process, and a transport system for managing transport are integrally formed. And, to each process block, only the information system is independently connected to each other, and the transport system is made independent for each process,
5. The production line according to claim 1, wherein each work is knitted with a memory for recording a progress of a process based on a history of the process passage.