JPH05191036A - Device for removing part mounted on board - Google Patents

Device for removing part mounted on board

Info

Publication number
JPH05191036A
JPH05191036A JP372992A JP372992A JPH05191036A JP H05191036 A JPH05191036 A JP H05191036A JP 372992 A JP372992 A JP 372992A JP 372992 A JP372992 A JP 372992A JP H05191036 A JPH05191036 A JP H05191036A
Authority
JP
Japan
Prior art keywords
board
substrate
mounted component
mounted part
push
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP372992A
Other languages
Japanese (ja)
Inventor
Norio Oi
紀男 大井
Osamu Hayashi
修 林
Yukinobu Sakagami
幸信 坂上
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP372992A priority Critical patent/JPH05191036A/en
Publication of JPH05191036A publication Critical patent/JPH05191036A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To avoid the separation of wiring pattern from the board and the shortage in the residusl solder amount by a method wherein a hole is perforated in the position corresponding to the part mounted on a board so that the mounted part may be lift up by pushing up a push up pin through the intermediary of the hole in the direction separating from the board in the case of melting down a soldering member. CONSTITUTION:A hot blast feeder 23 is mounted on a board 14 so as to cover a mounted part 15 and then a pump is driven. At this time, the hot blast starts running into a path 26 and a hot blast feeding pipe so that the blown out hot blast may melt down a solder 17 fixing the lead 15a of the mounted part 15. Next, when a tack-bonding material 16 is peeled off, a suction pad 22 is lowered in the arrow C direction to hold the mounted part 15 and simultaneously a cylinder 19 is actuated to push up a push up pin 20 through the intermediary of a release 21 for lifting the mounted part 15 upward. Through these procedures, the mounted part 15 can be easily removed from the board 14. Accordingly, the deformation, etc., of the lead 15a can be avoided imposing no excessive stress on the mounted part 5.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】この発明は、基板上に搭載された
例えばIC等の部品を、基板上から取り外す基板搭載部
品取り外し装置に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a board mounted component removing device for removing a component such as an IC mounted on a substrate from the board.

【0002】[0002]

【従来の技術】図5は例えば実公平3−16298号公
報に示された従来の基板搭載部品取り外し装置の構成を
示す断面図である。図において、1は基板、2はこの基
板1上に搭載された例えばIC等の搭載部品、3はこの
搭載部品2を囲繞するように形成される囲繞筒、4はこ
の囲繞筒3に連結され上方に延在する外筒、5は搭載部
品2の上方に配設される吸引パッド、6はこの吸引パッ
ド5に連結され外筒4と所定の間隙を介して同心状に配
設される内筒である。
2. Description of the Related Art FIG. 5 is a sectional view showing a structure of a conventional board mounted component removing apparatus disclosed in, for example, Japanese Utility Model Publication No. 3-16298. In the figure, 1 is a substrate, 2 is a mounting component such as an IC mounted on the substrate 1, 3 is a surrounding cylinder formed so as to surround the mounting component 2, and 4 is connected to the surrounding cylinder 3. An outer cylinder 5 extending upward is a suction pad arranged above the mounting component 2, and a reference numeral 6 is connected to the suction pad 5 and is arranged concentrically with the outer cylinder 4 with a predetermined gap. It is a cylinder.

【0003】7はこの内筒6の上方から分岐し外筒の外
側に引き出される分岐管、8はこの分岐管7に連結され
る吸引ポンプ、9は分岐管7の分岐部に連結されるバル
ブ、10は外筒4および内筒6間に形成される間隙内に
配設される加熱ヒータ、11は内筒6の上端に結合され
図示しない操作源により操作される操作杆、12はこの
操作杆11を常時上方に付勢し吸引パッド5を基板1の
上方所定の位置に保持するバネ部材である。
Reference numeral 7 is a branch pipe branched from above the inner cylinder 6 and drawn outside the outer cylinder, 8 is a suction pump connected to the branch pipe 7, and 9 is a valve connected to a branch portion of the branch pipe 7. Reference numeral 10 is a heater disposed in a gap formed between the outer cylinder 4 and the inner cylinder 6, 11 is an operating rod coupled to the upper end of the inner cylinder 6 and operated by an operation source (not shown), and 12 is this operation. It is a spring member that constantly urges the rod 11 upward and holds the suction pad 5 at a predetermined position above the substrate 1.

【0004】次に、上記のように構成される従来の基板
搭載部品取り外し装置の動作について説明する。まず、
取り外そうとする搭載部品2を覆うように囲繞筒3を基
板1の上面に被せ、バルブ9を開にして吸引ポンプ8を
駆動させると、外筒4と内筒6との間に形成される間隙
の上方から空気が吸入され、この空気は加熱ヒータ10
で加熱され搭載部品2上に吹きつけられて、搭載部品2
を固着している半田付部を加熱溶融した後、吸引パッド
5内に吸引され円筒6内を送られて分岐管7を介して装
置外に排出される。一方、搭載部品2を固着している半
田部が溶融状態になると、図示しない操作源が駆動しバ
ネ部材12の付勢力に打ち勝って操作杆11を下方に移
動させる。この移動により吸引パッド5は搭載部品2に
接近し、空気の吸引力によって搭載部品2を吸着し瞬時
に基板1上から取り外す。
Next, the operation of the conventional board-mounted component removing apparatus configured as described above will be described. First,
When the surrounding cylinder 3 is covered on the upper surface of the substrate 1 so as to cover the mounting component 2 to be removed, the valve 9 is opened and the suction pump 8 is driven to form a space between the outer cylinder 4 and the inner cylinder 6. Air is sucked in from above the gap, and this air is heated by the heater 10.
It is heated by and is sprayed on the mounted component 2
After heating and melting the soldered portion to which is adhered, it is sucked into the suction pad 5, sent through the cylinder 6 and discharged to the outside of the apparatus through the branch pipe 7. On the other hand, when the solder portion to which the mounting component 2 is fixed becomes molten, an operation source (not shown) is driven to overcome the biasing force of the spring member 12 and move the operation rod 11 downward. Due to this movement, the suction pad 5 approaches the mounting component 2, and the mounting component 2 is sucked by the suction force of the air and instantly removed from the substrate 1.

【0005】[0005]

【発明が解決しようとする課題】従来の基板搭載部品取
り外し装置は以上のように構成され、搭載部品2は半田
付部の溶融と垂直方向への真空吸引力で取り外されてい
るので、微細リードピッチ表面実装LSI等のように予
め補強を兼ねた接着剤による仮止め固定を行う場合に
は、この接着剤を再加熱により剥離してやる必要がある
が、この剥離が真空吸引ではなかなか困難であり、仮に
真空吸引力を強化して剥離すると、取り外し後のリード
の変形、基板1のパッド面の剥離および半田付部の半田
の残量が不足する等の問題点があり、又、搭載部品2が
IC等のように耐熱性の低いものの場合には、温度制御
が困難なため熱的損傷を生じて信頼性が低下する等の問
題点があった。
The conventional board mounting component removing device is constructed as described above, and since the mounting component 2 is detached by the melting of the soldered portion and the vacuum suction force in the vertical direction, the fine lead is removed. When temporarily fixing with an adhesive that also serves as reinforcement, such as pitch surface mounting LSI, it is necessary to peel off this adhesive by reheating, but this peeling is quite difficult with vacuum suction, If the vacuum suction force is strengthened and peeled off, there are problems such as deformation of the leads after detachment, peeling of the pad surface of the substrate 1 and shortage of the remaining amount of solder in the soldered portion. In the case of an IC or the like having low heat resistance, there is a problem in that temperature control is difficult and thermal damage occurs, resulting in reduced reliability.

【0006】この発明は上記のような問題点を解消する
ためになされたもので、搭載部品取り外し後のリードの
変形、基板のパッド面の剥離および半田付部の半田の残
量不足を無くし、又、搭載部品が耐熱性の低いものの場
合でも対応可能な基板搭載部品取り外し装置を提供する
ことを目的とするものである。
The present invention has been made in order to solve the above-mentioned problems, and eliminates deformation of leads after removal of mounted parts, peeling of the pad surface of the board and shortage of solder remaining in the soldering portion, It is another object of the present invention to provide a board mounted component removing device that can be used even when the mounted component has low heat resistance.

【0007】[0007]

【課題を解決するための手段】この発明に係る請求項1
の基板搭載部品取り外し装置は、基板の搭載部品と対応
する位置に予め穴を穿設し溶着部材の溶融時に搭載部品
を基板から離反する方向に穴を介して押し上げピンで押
し上げるようにしたものであり、又、請求項2の基板搭
載部品取り外し装置は、請求項1において、吸引パッド
を囲繞するように配設された二重管内に形成される通路
と、この通路内に充填された球状部材とでなる温度制御
通路を介して加熱風を搭載部品の溶着剤仮止部に供給す
るようにしたものであり、さらに、請求項3の基板搭載
部品取り外し装置は、請求項1において、溶着部材の溶
融温度が所定の値に達した時に押し上げピンを押し上げ
るようにしたものである。
[Means for Solving the Problems] Claim 1 according to the present invention
The board mounted component removing device is one in which a hole is pre-drilled at a position corresponding to the mounted component on the board and the mounted component is pushed up through the hole in the direction of separating the mounted member from the substrate when the welding member is melted. According to a second aspect of the present invention, there is provided the board mounted component removing device according to the first aspect, wherein the passage is formed in the double pipe arranged so as to surround the suction pad, and the spherical member filled in the passage. The heating air is supplied to the welding agent temporary fixing portion of the mounted component via the temperature control passage consisting of the above. Further, the board mounted component removing device according to claim 3 is the welding member according to claim 1. The push-up pin is pushed up when the melting temperature of reaches a predetermined value.

【0008】[0008]

【作用】この発明における基板搭載部品取り外し装置の
押し上げピンは、搭載部品を基板から離反する方向、す
なわち、吸引パッドの吸引方向に押し上げて搭載部品の
取り外しを容易にし、又、温度制御通路は加熱風の温度
が過上昇するのを抑制して、搭載部品の熱的損傷を防止
する。
The push-up pin of the board mounted component removing device according to the present invention pushes the mounted component away from the board, that is, in the suction direction of the suction pad to facilitate the removal of the mounted component and to heat the temperature control passage. It prevents the temperature of the wind from rising excessively and prevents thermal damage to the mounted components.

【0009】[0009]

【実施例】実施例1.以下、この発明の実施例を図につ
いて説明する。図1はこの発明の実施例1における基板
搭載部品取り外し装置の概略構成を示す図、図2ないし
図4は図1における基板搭載部品取り外し装置の要部の
詳細を示す図である。図1において、12は台板、13
はこの台板12上に立設される複数の支柱、14はこれ
らの支柱13で支持された基板、15はこの基板14上
に仮止用の接着剤16で固着され、リード部15aは半
田17で溶着された例えばIC等の搭載部品、18は基
板14の搭載部品15と対応する位置に穿設される穴、
19は台板12上に固設されるシリンダ、20は穴18
を貫通するように配設される押し上げピン、21はシリ
ンダ19の図中矢印Aで示す動作を押し上げピン20の
図中矢印Bで示す動作として伝達するレリーズである。
EXAMPLES Example 1. Embodiments of the present invention will be described below with reference to the drawings. 1 is a diagram showing a schematic configuration of a board mounted component removing device according to a first embodiment of the present invention, and FIGS. 2 to 4 are diagrams showing details of essential parts of the board mounted component removing device shown in FIG. In FIG. 1, 12 is a base plate, 13
Is a plurality of columns upright on the base plate 12, 14 is a substrate supported by these columns 13, 15 is fixed on the substrate 14 with an adhesive 16 for temporary fixing, and the lead portion 15a is soldered. A mounting component such as an IC welded at 17 is provided, and 18 is a hole formed at a position corresponding to the mounting component 15 on the substrate 14.
19 is a cylinder fixed on the base plate 12, 20 is a hole 18
A push-up pin 21 is provided so as to penetrate therethrough. Reference numeral 21 is a release for transmitting the operation of the cylinder 19 indicated by the arrow A in the figure as the operation of the push-up pin 20 indicated by the arrow B in the figure.

【0010】22は搭載部品15を吸着する吸引パッド
で図中矢印Cで示す方向に移動する。23は吸引パッド
22を囲繞するように配設され、基板14上の取り外そ
うとする搭載部品15およびそのリード部15a上に加
熱風を吹きつけて加熱する加熱風供給部で、詳しくは図
2ないし図4に示すように構成されている。各図におい
て、24、25は吸引パッド22を囲繞するように配設
される内筒および外筒、26はこれら内筒24および外
筒25間に形成される通路、27はこの通路26内に充
填される例えば鉄球、石等の球状部材、28は通路26
の開口端を覆うように配設され球状部材27を保持する
網状部材、そして、これら通路26、球状部材27およ
び網状部材28で温度制御通路29を構成している。3
0はこの温度制御通路29を囲繞するように配設される
複数本の加熱風供給パイプ、31はこの加熱風供給パイ
プ30から供給される加熱風が温度制御通路29側に流
れるのを遮る遮へい板である。
Reference numeral 22 is a suction pad for sucking the mounting component 15 and moves in the direction indicated by arrow C in the figure. Reference numeral 23 denotes a heating air supply unit which is arranged so as to surround the suction pad 22 and which blows and heats the mounting component 15 to be removed on the substrate 14 and the lead portion 15a thereof to heat it. 2 to 4 are configured. In each drawing, 24 and 25 are an inner cylinder and an outer cylinder arranged so as to surround the suction pad 22, 26 is a passage formed between the inner cylinder 24 and the outer cylinder 25, and 27 is inside the passage 26. A spherical member such as an iron ball or stone to be filled, 28 is a passage 26
The temperature control passage 29 is constituted by a mesh member arranged to cover the open end of the spherical member 27 and holding the spherical member 27, and the passage 26, the spherical member 27 and the mesh member 28. Three
Reference numeral 0 denotes a plurality of heating air supply pipes arranged so as to surround the temperature control passage 29, and 31 denotes a shield that blocks the heating air supplied from the heating air supply pipe 30 from flowing to the temperature control passage 29 side. It is a plate.

【0011】次に、上記のように構成される実施例1に
おける基板搭載部品取り外し装置の動作について説明す
る。まず、取り外そうとする搭載部品15を覆うよう
に、加熱風供給部23を基板14の上面に被せてポンプ
(図示せず)を作動させると、通路26および加熱風供
給パイプ30に加熱風が流れ始め、加熱風供給パイプ3
0から吹き出される加熱風は搭載部品15のリード15
aを固定している半田17を加熱し溶融させる。一方、
通路26内を流れる加熱風は球状部材27で熱の一部を
奪われ、適温となって網状部材28を通り搭載部品15
上に吹きつけられ、仮止用の接着剤16を加熱し剥離を
行う。
Next, the operation of the board mounted component removing apparatus according to the first embodiment configured as described above will be described. First, when the pump (not shown) is operated by covering the upper surface of the substrate 14 with the heated air supply unit 23 so as to cover the mounted component 15 to be removed, the heated air is supplied to the passage 26 and the heated air supply pipe 30. Begins to flow, heating air supply pipe 3
The heated air blown from 0 is the lead 15 of the mounting component 15.
The solder 17 fixing a is heated and melted. on the other hand,
Part of the heat of the heated air flowing in the passage 26 is taken by the spherical member 27, and the temperature becomes an appropriate temperature, passes through the mesh member 28, and the mounting component 15
The adhesive 16 which is sprayed on and temporarily fixed is heated and peeled off.

【0012】このように、搭載部品15のリード15a
を固定している半田17が溶融し、仮止用の接着剤16
が剥離されると、吸引パッド22が図中矢印C方向に下
降して搭載部品15を吸着する。そして、これと同時に
シリンダ19が作動しレリーズ21を介して押し上げピ
ン20が押し上げられ、搭載部品15を上方に押し上げ
るので、搭載部品15は基板14上から容易に取り外さ
れる。したがって、搭載部品15には無理な力がかかる
こともなくなるので、リード15aの変形、基板14の
パッド面の剥離および半田17の残量の不足等は解消さ
れる。
In this way, the lead 15a of the mounting component 15 is
The solder 17 fixing the
When is peeled off, the suction pad 22 descends in the direction of the arrow C in the figure to adsorb the mounting component 15. At the same time, the cylinder 19 operates and the push-up pin 20 is pushed up via the release 21 to push the mounting component 15 upward, so that the mounting component 15 can be easily removed from the substrate 14. Therefore, the mounting component 15 is not subjected to an unreasonable force, so that the deformation of the lead 15a, the peeling of the pad surface of the substrate 14, the shortage of the remaining amount of the solder 17 and the like are eliminated.

【0013】又、温度制御通路29内で適温となった加
熱風が搭載部品15上に吹きかけられて接着剤16が剥
離されるので、搭載部品15が熱的損傷を受けることも
なく信頼性が向上する。さらに、遮へい板31が設けら
れているので、加熱風供給パイプ30から吹き出される
高温の加熱風が搭載部品15側に流れて熱的影響を与え
ることもない。
Further, since the heating air having an appropriate temperature in the temperature control passage 29 is blown onto the mounting component 15 and the adhesive 16 is peeled off, the mounting component 15 is not thermally damaged and reliability is improved. improves. Further, since the shielding plate 31 is provided, the high-temperature heating air blown from the heating-air supply pipe 30 does not flow to the mounting component 15 side and exert a thermal influence.

【0014】実施例2.なお、上記実施例1における加
熱風は空気を例に説明したが、不活性ガスを用いれば、
半田接合面の酸化が防止されて接続不良等の不具合が解
消される。
Example 2. In addition, although the heating air in the above-mentioned Example 1 was explained using air as an example, if an inert gas is used,
Oxidation of the solder joint surface is prevented and problems such as poor connection are eliminated.

【0015】実施例3.又、図示はしていないが、接着
剤16および半田17と対応する位置に温度測定用熱電
対を設置しておき、例えば半田17の温度が溶融温度以
上になったことを確認した後、シリンダ19を作動させ
て搭載部品15を押し上げるようにすれば、タイミング
良く正確に早く取り外すことが可能になる。
Example 3. Although not shown, a thermocouple for temperature measurement is installed at a position corresponding to the adhesive 16 and the solder 17, and, for example, after confirming that the temperature of the solder 17 is higher than the melting temperature, the cylinder By activating 19 to push up the mounted component 15, it is possible to remove the mounted component accurately and quickly at a proper timing.

【0016】[0016]

【発明の効果】以上のように、この発明によれば基板の
搭載部品と対応する位置に予め穴を穿設し溶着部材の溶
融時に搭載部品を基板から離反する方向に穴を介して押
し上げピンで押し上げるようにしたので、搭載部品取り
外し後のリードの変形、基板のパッド面の剥離および半
田付部の半田の残量不足の発生を防止し、又、吸引パッ
ドを囲繞するように配設された二重管内に形成される通
路と、この通路内に充填された球状部材とでなる温度制
御通路を介して加熱風を搭載部品の接着剤仮止部に供給
するようにしたので、搭載部品が耐熱性の低いものの場
合でも対応でき、さらに、溶着部材の溶融温度が所定の
値に達した時に押し上げピンを押し上げるようにしたの
で、タイミング良く正確に取り外すことができる基板搭
載部品取り外し装置を提供することが可能になる。
As described above, according to the present invention, a hole is preliminarily formed at a position corresponding to a mounting component on a substrate, and the mounting component is pushed through the hole in a direction of separating the mounting component from the substrate when the welding member is melted. Since it is pushed up with, it prevents the deformation of the lead after the mounting parts are removed, the peeling of the pad surface of the board and the shortage of the remaining amount of solder in the soldering part, and it is arranged so as to surround the suction pad. The heating air is supplied to the adhesive temporary fixing portion of the mounted component through the temperature control passage consisting of the passage formed in the double pipe and the spherical member filled in the passage. Even if the heat resistance is low, and the push-up pin is pushed up when the melting temperature of the welding member reaches a predetermined value, so that it can be removed accurately and with good timing. It is possible to provide a.

【図面の簡単な説明】[Brief description of drawings]

【図1】この発明の実施例1における基板搭載部品取り
外し装置の概略構成を示す図である。
FIG. 1 is a diagram showing a schematic configuration of a board mounted component removing device according to a first embodiment of the present invention.

【図2】図1における基板搭載部品取り外し装置の要部
を構成する加熱風供給部を示す正面図である。
FIG. 2 is a front view showing a heated air supply unit that constitutes a main part of the board mounted component removing device in FIG.

【図3】図2における加熱風供給部を示す平面図であ
る。
FIG. 3 is a plan view showing a heated air supply unit in FIG.

【図4】図2における加熱風供給部の要部を構成する温
度制御通路を示す断面図である。
4 is a cross-sectional view showing a temperature control passage forming a main part of the heated air supply unit in FIG.

【図5】従来の基板搭載部品取り外し装置の構成を示す
断面図である。
FIG. 5 is a cross-sectional view showing a configuration of a conventional board-mounted component removing device.

【符号の説明】[Explanation of symbols]

14 基板 15 搭載部品 15a リード 16 接着剤 17 半田 18 穴 20 押し上げピン 22 吸引パッド 23 加熱風供給部 24 内筒 25 外筒 26 通路 27 球状部材 28 網状部材 29 温度制御通路 30 加熱風供給パイプ 14 board 15 mounted component 15a lead 16 adhesive 17 solder 18 hole 20 push-up pin 22 suction pad 23 heated air supply section 24 inner cylinder 25 outer cylinder 26 passage 27 spherical member 28 mesh member 29 temperature control passage 30 heated air supply pipe

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 基板上に加熱風を供給して搭載部品のリ
ードを固定している溶着部材を溶融し吸引パッドで吸引
することにより上記搭載部品を上記基板から取り外すよ
うにした基板搭載部品取り外し装置において、上記基板
の上記搭載部品と対応する位置に予め穴を穿設し上記溶
着部材の溶融時に上記搭載部品を上記基板から離反する
方向に上記穴を介して押し上げピンで押し上げるように
したことを特徴とする基板搭載部品取り外し装置。
1. Removal of the mounted component from the substrate by supplying heated air onto the substrate to melt a welding member fixing the lead of the mounted component and sucking the fused member with a suction pad. In the apparatus, a hole is preliminarily formed at a position corresponding to the mounting component on the substrate, and the mounting component is pushed up through the hole in a direction away from the substrate when the welding member is melted. Board mounted component removal device.
【請求項2】 吸引パッドを囲繞するように配設された
二重管内に形成される通路と、この通路内に充填された
球状部材とでなる温度制御通路を介して加熱風を搭載部
品の接着剤仮止部に供給するようにしたことを特徴とす
る請求項1記載の基板搭載部品取り外し装置。
2. The heating air is passed through a temperature control passage consisting of a passage formed in a double pipe arranged so as to surround the suction pad and a spherical member filled in the passage. 2. The board mounted component removing device according to claim 1, wherein the adhesive is temporarily supplied.
【請求項3】 溶着部材の溶融温度が所定の値に達した
時に押し上げピンを押し上げるようにしたことを特徴と
する請求項1記載の基板搭載部品取り外し装置。
3. The board mounted component removing device according to claim 1, wherein the push-up pin is pushed up when the melting temperature of the welding member reaches a predetermined value.
JP372992A 1992-01-13 1992-01-13 Device for removing part mounted on board Pending JPH05191036A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP372992A JPH05191036A (en) 1992-01-13 1992-01-13 Device for removing part mounted on board

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP372992A JPH05191036A (en) 1992-01-13 1992-01-13 Device for removing part mounted on board

Publications (1)

Publication Number Publication Date
JPH05191036A true JPH05191036A (en) 1993-07-30

Family

ID=11565359

Family Applications (1)

Application Number Title Priority Date Filing Date
JP372992A Pending JPH05191036A (en) 1992-01-13 1992-01-13 Device for removing part mounted on board

Country Status (1)

Country Link
JP (1) JPH05191036A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7156722B2 (en) * 2004-11-16 2007-01-02 Samsung Electronics Co., Ltd. Platen structure of polishing apparatus for processing semiconductor wafer and method for exchanging polishing pad affixed to the same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7156722B2 (en) * 2004-11-16 2007-01-02 Samsung Electronics Co., Ltd. Platen structure of polishing apparatus for processing semiconductor wafer and method for exchanging polishing pad affixed to the same

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