JP6757391B2 - Measuring method - Google Patents

Measuring method Download PDF

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JP6757391B2
JP6757391B2 JP2018216261A JP2018216261A JP6757391B2 JP 6757391 B2 JP6757391 B2 JP 6757391B2 JP 2018216261 A JP2018216261 A JP 2018216261A JP 2018216261 A JP2018216261 A JP 2018216261A JP 6757391 B2 JP6757391 B2 JP 6757391B2
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sensor
work
machine tool
accuracy
measurement
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JP2020082231A (en
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山田　智明
智明 山田
建太 神藤
建太 神藤
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DMG Mori Co Ltd
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q17/00—Arrangements for observing, indicating or measuring on machine tools
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q17/00—Arrangements for observing, indicating or measuring on machine tools
    • B23Q17/22—Arrangements for observing, indicating or measuring on machine tools for indicating or measuring existing or desired position of tool or work
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q17/00—Arrangements for observing, indicating or measuring on machine tools
    • B23Q17/24—Arrangements for observing, indicating or measuring on machine tools using optics or electromagnetic waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Machine Tool Sensing Apparatuses (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Description

本発明は、工作機械の機械精度についての測定方法に関する。 The present invention relates to a method for measuring machine accuracy of a machine tool.

工作機械の機械精度を把握して適切にキャリブレーションを行うことが、高い寸法精度を伴う機械加工を行うために重要である。これに対応するため、精度が補償された四直角マスタのような基準器を用いて、工作機械の精度測定を行う方法が提案されている（例えば、特許文献１参照）。 It is important to grasp the machine accuracy of the machine tool and perform appropriate calibration in order to perform machining with high dimensional accuracy. In order to deal with this, a method of measuring the accuracy of a machine tool using a reference device such as a four-right angle master whose accuracy is compensated has been proposed (see, for example, Patent Document 1).

特開２００９−１０３５９９号JP-A-2009-103599

特許文献１に記載の測定方法では、機内に設置した基準器を、工具主軸に取り付けたセンサで測定することにより、真直度や直角度の測定を行うことができる。しかし、基準器を別途所有する必要がある上、測定の度にセンサを機内に設置する必要があり、コストや工数の面で課題を有する。 In the measuring method described in Patent Document 1, straightness and squareness can be measured by measuring a reference device installed in the machine with a sensor attached to the tool spindle. However, it is necessary to own a reference device separately, and it is necessary to install a sensor in the machine for each measurement, which poses a problem in terms of cost and man-hours.

本発明は、上記問題に鑑みてなされたものであり、基準器を用いずに、少ない工数かつ低コストで実施可能な工作機械の機械精度に関する測定方法を提供することを目的とする。 The present invention has been made in view of the above problems, and an object of the present invention is to provide a method for measuring machine accuracy of a machine tool, which can be carried out with a small number of man-hours and at low cost without using a reference device.

上記課題を解決するために、本開示の１つの実施態様に係る測定方法は、
ワークを工作機械にセットして加工を行う工程と、
センサを前記工作機械にセットする工程と、
前記ワークの加工面の同一点を、前記センサの視野内における少なくとも２つの測定点で測定する工程と、
前記少なくとも２つの測定点における測定結果に基づいて、前記工作機械の精度を検出する工程と、
を含む。 In order to solve the above problems, the measurement method according to one embodiment of the present disclosure is described.
The process of setting the work on the machine tool and processing it,
The process of setting the sensor on the machine tool and
The step of measuring the same point on the machined surface of the work at at least two measurement points in the field of view of the sensor, and
A step of detecting the accuracy of the machine tool based on the measurement results at at least two measurement points, and
including.

上記の実施態様によれば、基準器を用いずに、少ない工数かつ低コストで実施可能な工作機械の機械精度に関する測定方法を提供することができる。 According to the above embodiment, it is possible to provide a method for measuring machine accuracy of a machine tool, which can be carried out with a small number of man-hours and at low cost without using a reference device.

主軸に取り付けられたセンサを移動させて、テーブルに載置されたワークの加工面の同一点をセンサの視野内における２つの測定点で測定する工程を模式的に示す側面図であって、特に、主軸の移動方向がテーブルの載置面の基準方向に対して平行な場合を示す図である。It is a side view schematically showing a process of moving a sensor attached to a spindle and measuring the same point on the machined surface of a workpiece placed on a table at two measurement points in the field of view of the sensor. , It is a figure which shows the case where the moving direction of a spindle is parallel to the reference direction of the mounting surface of a table. 主軸に取り付けられたセンサを移動させて、テーブルに載置されたワークの加工面の同一点をセンサの視野内における２つの測定点で測定する工程を模式的に示す側面図であって、特に、主軸の移動方向がテーブルの載置面の基準方向に対して傾斜角を有する場合を示す図である。It is a side view schematically showing a process of moving a sensor attached to a spindle and measuring the same point on the machined surface of a workpiece placed on a table at two measurement points in the field of view of the sensor. , Is a diagram showing a case where the moving direction of the main shaft has an inclination angle with respect to the reference direction of the mounting surface of the table. 主軸に取り付けられたセンサを回転及び移動させて、テーブルに載置されたワークの加工面の同一点をセンサの視野内における２つの測定点で測定する工程を模式的に示す側面図である。It is a side view which shows typically the process of rotating and moving a sensor attached to a spindle, and measuring the same point of the machined surface of the workpiece placed on a table at two measurement points in the field of view of a sensor. センサの視野内における３つの測定点を模式的に示した図である。It is a figure which showed typically three measurement points in the field of view of a sensor. 工作機械のＸ、Ｙ、Ｚ軸ごとに存在する機械精度を模式的に示した図である。It is a figure which shows typically the machine accuracy existing for each X, Y, Z axis of a machine tool. 同一の測定点が同一視野に入るようにしながら、主軸に取り付けられたセンサを順次移動させて、Ｘ軸方向における傾斜角を求める工程を示す図である。It is a figure which shows the process of finding the inclination angle in the X-axis direction by sequentially moving a sensor attached to a main shaft, while keeping the same measurement point in the same field of view.

以下、図面を参照しながら、本開示を実施するための実施形態や実施例を説明する。なお、以下に説明する測定方法は、本開示の技術思想を具体化するためのものであって、特定的な記載がない限り、本開示を以下のものに限定しない。
各図面中、同一の機能を有する部材には、同一符号を付している場合がある。要点の説明または理解の容易性を考慮して、便宜上実施形態や実施例に分けて示す場合があるが、異なる実施形態や実施例で示した構成の部分的な置換または組み合わせは可能である。後述の実施形態や実施例では、前述と共通の事柄についての記述を省略し、異なる点についてのみ説明する。特に、同様の構成による同様の作用効果については、実施形態や実施例ごとには逐次言及しないものとする。各図面が示す部材の大きさや位置関係等は、説明を明確にするため、誇張して示している場合もある。 Hereinafter, embodiments and examples for carrying out the present disclosure will be described with reference to the drawings. The measurement method described below is for embodying the technical idea of the present disclosure, and the present disclosure is not limited to the following unless otherwise specified.
In each drawing, members having the same function may be designated by the same reference numerals. Although it may be divided into embodiments and examples for convenience in consideration of explanation of the main points or ease of understanding, partial replacement or combination of the configurations shown in different embodiments or examples is possible. In the embodiments and examples described later, the description of the matters common to the above will be omitted, and only the differences will be described. In particular, similar actions and effects with the same configuration will not be mentioned sequentially for each embodiment or embodiment. The size and positional relationship of the members shown in each drawing may be exaggerated for the sake of clarity.

（本開示の第１の実施形態に係る測定方法）
はじめに、図１及び図２を参照しながら、工作機械の機械精度に関する本開示の第１の実施形態に係る測定方法の説明を行う。まず、図１を参照しながら、測定方法の基本的な説明を行う。図１は、主軸（工具主軸）に取り付けられたセンサを移動させて、テーブルに載置されたワークの加工面の同一点をセンサの視野内における２つの測定点で測定する工程を模式的に示す側面図である。特に、図１では、主軸がテーブルの載置面の基準方向（例えばＸ軸方向だがこれには限られない）に対して平行な方向へ移動した場合を示す。 (Measuring method according to the first embodiment of the present disclosure)
First, the measurement method according to the first embodiment of the present disclosure regarding the machine accuracy of the machine tool will be described with reference to FIGS. 1 and 2. First, a basic explanation of the measurement method will be given with reference to FIG. FIG. 1 schematically shows a process of moving a sensor attached to a spindle (tool spindle) and measuring the same point on the machined surface of a workpiece placed on a table at two measurement points in the field of view of the sensor. It is a side view which shows. In particular, FIG. 1 shows a case where the main axis moves in a direction parallel to the reference direction (for example, the X-axis direction, but not limited to this) of the mounting surface of the table.

本実施形態では、ワークＷを工作機械２のテーブル１０の載置面１０ａにセットして加工を行った後、ワークＷをテーブル１０から取り外すことなく、センサ３０を工作機械の主軸２０にセットする。ここで用いるセンサ３０としては、縞投影エリアセンサのような、三次元のプロファイルが得られる三次元センサを例示することができる。また、光学切断式センサを用いて、ライン光の長手方向に対して垂直な方向に走査することにより、三次元のプロファイルを得ることもできる。また、検出する方向によっては、画像センサのような二次元センサを用いることもできる。 In the present embodiment, after the work W is set on the mounting surface 10a of the table 10 of the machine tool 2 for processing, the sensor 30 is set on the spindle 20 of the machine tool without removing the work W from the table 10. .. As the sensor 30 used here, a three-dimensional sensor that can obtain a three-dimensional profile, such as a fringe projection area sensor, can be exemplified. It is also possible to obtain a three-dimensional profile by scanning the line light in a direction perpendicular to the longitudinal direction using an optical cutting type sensor. Further, depending on the detection direction, a two-dimensional sensor such as an image sensor can also be used.

何れのセンサを用いる場合も、センサ単体でのキャリブレーション（センサの測定範囲内でのキャリブレーション）が完了し、二次元の視野内の座標が校正された状態で計測を行う。
また、工作機械の基準位置（例えばテーブルの回転中心）付近でセンサの主軸に対する取り付けが校正されている状態で測定を行う。この取り付けに関する校正は基準を作るためのもので、例えばテーブル回転中心付近で視野上の２点Ｓ１、Ｓ２で同一点を測定して見かけ上の傾きを出しても良い。なお、本測定の性質上、一定の面内（測定範囲内）で精度を保証できるセンサである必要がある。 Regardless of which sensor is used, the calibration of the sensor alone (calibration within the measurement range of the sensor) is completed, and the measurement is performed in a state where the coordinates in the two-dimensional field of view are calibrated.
In addition, the measurement is performed in a state where the attachment to the spindle of the sensor is calibrated near the reference position of the machine tool (for example, the center of rotation of the table). The calibration related to this mounting is for making a reference, and for example, the same point may be measured at two points S1 and S2 on the field of view near the center of rotation of the table to obtain an apparent inclination. Due to the nature of this measurement, it is necessary to have a sensor that can guarantee the accuracy within a certain plane (within the measurement range).

本実施形態では、工作機械２の機械精度に関する測定の一例として、主軸２０の移動方向のテーブルの載置面の基準方向に対する傾斜角度を検出する場合を例にとって説明する。本実施形態では、ワークＷをテーブル１０上に固定し、主軸２０の移動によりセンサ３０を移動させて測定を行う。図１では、主軸２０がＸ軸方向に移動する場合を示す。
ただし、これに限られるものではなく、センサ側を固定して、ワーク側を移動させることもできる。例えば、センサが取り付けられた部材は動かさずに、ワークが載置されたテーブルを移動させることもできる。更に、センサ及びワークの両方を移動させることもできる。センサ及びワークを相対的に並進移動させることができれば、任意の態様を採用することができる。 In the present embodiment, as an example of measurement regarding the machine accuracy of the machine tool 2, a case where the inclination angle of the table mounting surface in the moving direction of the spindle 20 with respect to the reference direction is detected will be described as an example. In the present embodiment, the work W is fixed on the table 10, and the sensor 30 is moved by the movement of the spindle 20 to perform measurement. FIG. 1 shows a case where the spindle 20 moves in the X-axis direction.
However, the present invention is not limited to this, and the sensor side can be fixed and the work side can be moved. For example, the table on which the work is placed can be moved without moving the member to which the sensor is attached. Further, both the sensor and the workpiece can be moved. Any aspect can be adopted as long as the sensor and the work can be relatively translated.

＜主軸の移動方向がテーブルの載置面の基準方向に対して平行な場合＞
図１では、センサ３０の光軸（主軸２０の軸）がテーブル１０の載置面１０ａに対して直交し、主軸２０の移動方向がテーブル１０の載置面１０ａの基準方向に対して平行になっている場合を示す。つまり、所定の機械精度が得られている場合を示す。 <When the moving direction of the spindle is parallel to the reference direction of the table mounting surface>
In FIG. 1, the optical axis of the sensor 30 (the axis of the spindle 20) is orthogonal to the mounting surface 10a of the table 10, and the moving direction of the spindle 20 is parallel to the reference direction of the mounting surface 10a of the table 10. Indicates the case where it is. That is, the case where a predetermined mechanical accuracy is obtained is shown.

センサ３０を主軸２０にセットした後、測定用マークであるワークＷの加工面に設けられた点Ａを、センサ３０の視野３２内における２つの測定点Ｓ１、Ｓ２で測定する。具体的には、図１の実線で示す位置で点Ａを測定して、視野３２内に測定点Ｓ１を得た後、センサ３０が取り付けられた主軸２０を距離Ｌだけ移動させて（太矢印参照）、図１の破線で示す位置で再び点Ａを測定する。これにより、視野内に測定点Ｓ２を得る。 After the sensor 30 is set on the spindle 20, the point A provided on the machined surface of the work W, which is a measurement mark, is measured at two measurement points S1 and S2 in the field of view 32 of the sensor 30. Specifically, after measuring the point A at the position shown by the solid line in FIG. 1 and obtaining the measurement point S1 in the visual field 32, the spindle 20 to which the sensor 30 is attached is moved by the distance L (thick arrow). (See), the point A is measured again at the position indicated by the broken line in FIG. As a result, the measurement point S2 is obtained in the field of view.

測定用マークとなるワークＷ上の点Ａとしては、ワークにポンチやマーキングが付けられていれば、これを用いることができる。また、機械加工でワークＷに形成された凸部、凹部、エッジ部、コーナー部等を測定用マークとして用いることもできる。 As the point A on the work W that serves as the measurement mark, if the work has a punch or marking, it can be used. Further, the convex portion, the concave portion, the edge portion, the corner portion and the like formed on the work W by machining can be used as the measurement mark.

センサ３０により三次元のプロファイルが得られる場合において、測定点Ｓ１のＺ軸方向の座標Ｚ１及び測定点Ｓ２のＺ軸方向の座標Ｚ２を計測し、その偏差ΔＺ（＝Ｚ２−Ｚ１）に基づいて、主軸２０の移動方向のテーブル１０の載置面１０ａの基準方向に対する傾斜角度θを求めることができる。図１に示す場合には、偏差ΔＺ＝０となるので、主軸２０の移動方向がテーブル１０の載置面１０ａの基準方向に対して平行である（傾斜していない）と判断することができる。 When a three-dimensional profile is obtained by the sensor 30, the coordinates Z1 in the Z-axis direction of the measurement point S1 and the coordinates Z2 in the Z-axis direction of the measurement point S2 are measured, and based on the deviation ΔZ (= Z2-Z1). , The inclination angle θ with respect to the reference direction of the mounting surface 10a of the table 10 in the moving direction of the main shaft 20 can be obtained. In the case shown in FIG. 1, since the deviation ΔZ = 0, it can be determined that the moving direction of the spindle 20 is parallel (not inclined) to the reference direction of the mounting surface 10a of the table 10. ..

＜主軸の移動方向がテーブルの載置面の基準方向に対して傾斜を有する場合＞
次に、図２を参照しながら、センサ３０の光軸はテーブル１０の載置面１０ａに対して直交し、主軸２０の移動方向がテーブル１０の載置面１００ａの基準方向に対して、角度θだけ傾斜している場合について説明する。図２は、主軸に取り付けられたセンサを移動させて、テーブルに載置されたワークの加工面の同一点をセンサの視野内における２つの測定点で測定する場合を模式的に示す側面図であって、特に、主軸の移動方向がテーブルの載置面の基準方向に対して傾斜角を有する場合を示す図である。 <When the moving direction of the spindle has an inclination with respect to the reference direction of the table mounting surface>
Next, referring to FIG. 2, the optical axis of the sensor 30 is orthogonal to the mounting surface 10a of the table 10, and the moving direction of the main shaft 20 is an angle with respect to the reference direction of the mounting surface 100a of the table 10. A case where the tilt is made by θ will be described. FIG. 2 is a side view schematically showing a case where a sensor mounted on a spindle is moved to measure the same point on the machined surface of a workpiece placed on a table at two measurement points in the field of view of the sensor. In particular, it is a figure which shows the case where the moving direction of a spindle has an inclination angle with respect to the reference direction of the mounting surface of a table.

センサ３０を主軸２０にセットした後、図２の実線で示す位置で点Ａを測定して、視野内に測定点Ｓ１を得た後、センサ３０が取り付けられた主軸を距離Ｌだけ移動させて（太矢印参照）、図２の破線で示す位置で再び点Ａを測定する。これにより、視野内に測定点Ｓ２を得る。 After setting the sensor 30 on the spindle 20, measure the point A at the position shown by the solid line in FIG. 2, obtain the measurement point S1 in the field of view, and then move the spindle to which the sensor 30 is attached by the distance L. (See thick arrow), measure point A again at the position indicated by the broken line in FIG. As a result, the measurement point S2 is obtained in the field of view.

センサ３０により三次元のプロファイルが得られる場合において、測定点Ｓ１のＺ軸方向の座標Ｚ１及び測定点Ｓ２のＺ軸方向の座標Ｚ２を計測し、その偏差ΔＺ（＝Ｚ２−Ｚ１）に基づいて、主軸２０の移動方向のテーブル１０の載置面１０ａの基準方向に対する傾斜角度θを求めることができる。図２に示す場合には、偏差ΔＺがゼロ以外の所定の値となるので、主軸２０の移動方向がテーブル１０の載置面１０ａの基準方向に対して平行ではない（傾斜している）と判断することができる。そして、偏差ΔＺの値に基づいて、主軸２０の移動方向のテーブル１０の載置面１０ａの基準方向に対する傾斜角度θを求めることができる。具体的には、角度θ＝ＡＲＣＳＩＮ（ΔＺ／Ｌ)で傾斜角度θを算出することができる。 When a three-dimensional profile is obtained by the sensor 30, the coordinates Z1 in the Z-axis direction of the measurement point S1 and the coordinates Z2 in the Z-axis direction of the measurement point S2 are measured, and based on the deviation ΔZ (= Z2-Z1). , The inclination angle θ with respect to the reference direction of the mounting surface 10a of the table 10 in the moving direction of the main shaft 20 can be obtained. In the case shown in FIG. 2, since the deviation ΔZ is a predetermined value other than zero, the moving direction of the spindle 20 is not parallel (inclined) to the reference direction of the mounting surface 10a of the table 10. You can judge. Then, based on the value of the deviation ΔZ, the inclination angle θ with respect to the reference direction of the mounting surface 10a of the table 10 in the moving direction of the main shaft 20 can be obtained. Specifically, the inclination angle θ can be calculated by the angle θ = ARCSIN (ΔZ / L).

以上のように、第１の実施形態においては、センサ３０及びワークＷを相対的に並進移動させることにより、ワークＷの加工面の同一点を、センサ３０の視野内における２つの測定点Ｓ１、Ｓ２で測定し、この測定結果に基づいて、工作機械２の精度として、主軸２０の移動方向のテーブル１０の載置面１０ａの基準方向に対する傾斜角度θを検出することができる。 As described above, in the first embodiment, by relatively translating the sensor 30 and the work W, the same point on the machined surface of the work W can be measured at the two measurement points S1 in the field of view of the sensor 30. The measurement is performed in S2, and based on the measurement result, the inclination angle θ with respect to the reference direction of the mounting surface 10a of the table 10 in the moving direction of the spindle 20 can be detected as the accuracy of the machine tool 2.

（本開示の第２の実施形態に係る測定方法）
次に、図３を参照しながら、本開示の第２の実施形態に係る測定方法の説明を行う。図３は、主軸に取り付けられたセンサを回転及び移動させて、テーブルに載置されたワークの加工面の同一点をセンサの視野内における２つの測定点で測定する場合を模式的に示す側面図である。 (Measurement method according to the second embodiment of the present disclosure)
Next, the measurement method according to the second embodiment of the present disclosure will be described with reference to FIG. FIG. 3 is a side surface schematically showing a case where a sensor attached to a spindle is rotated and moved to measure the same point on the machined surface of a workpiece placed on a table at two measurement points in the field of view of the sensor. It is a figure.

上記の第１の実施形態では、センサ３０及びワークＷを相対的に並進移動させることにより、
センサ３０の視野３２内に測定点Ｓ１及び測定点Ｓ２を得て、工作機械２の精度を検出している。本実施形態では、センサ３０及びワークＷを相対的に回転移動及び並進移動させることにより、センサ３０の視野３２内に測定点Ｓ１及び測定点Ｓ１’を得て、工作機械２の精度を検出する。 In the first embodiment described above, the sensor 30 and the work W are relatively translated.
A measurement point S1 and a measurement point S2 are obtained in the field of view 32 of the sensor 30, and the accuracy of the machine tool 2 is detected. In the present embodiment, the sensor 30 and the work W are relatively rotationally moved and translated to obtain a measurement point S1 and a measurement point S1'in the field of view 32 of the sensor 30, and the accuracy of the machine tool 2 is detected. ..

センサ３０の視野３２内において、測定点Ｓ１は、センサ３０（主軸２０）の回転中心ＣＬと結ぶ線が主軸２０の移動方向に一致するように配置されている。また、測定点Ｓ１は、センサ３０の回転中心ＣＬから距離Ｍだけ離間して配置されている。
この状態において、図３の実線で示す位置で点Ａを測定して、視野内に測定点Ｓ１を得た後、センサ３０が取り付けられた主軸３２を１８０度回転させるとともに、主軸３２を距離２×Ｍだけ移動させて（太矢印参照）、図３の破線で示す位置で再び点Ａを測定する。これにより、視野内に測定点Ｓ１’を得る。 In the field of view 32 of the sensor 30, the measurement point S1 is arranged so that the line connecting the rotation center CL of the sensor 30 (spindle 20) coincides with the moving direction of the spindle 20. Further, the measurement point S1 is arranged at a distance M from the rotation center CL of the sensor 30.
In this state, the point A is measured at the position shown by the solid line in FIG. 3, and after obtaining the measurement point S1 in the field of view, the spindle 32 to which the sensor 30 is attached is rotated 180 degrees, and the spindle 32 is moved to a distance of 2. Move by × M (see thick arrow), and measure point A again at the position indicated by the broken line in FIG. As a result, the measurement point S1'is obtained in the field of view.

センサ３０により三次元のプロファイルが得られる場合において、測定点Ｓ１のＺ軸方向の座標Ｚ１及び測定点Ｓ１’のＺ軸方向の座標Ｚ１’を計測し、その偏差ΔＺ（＝Ｚ１’−Ｚ１）に基づいて、主軸２０の移動方向のテーブル１０の載置面１０ａの基準方向に対する傾斜角度θを求めることができる。具体的には、角度θ＝ＡＲＣＳＩＮ（ΔＺ／Ｌ)で傾斜角度θを算出することができる。
その他の点については、第１の実施形態と同様なので、更なる説明は省略する。 When a three-dimensional profile is obtained by the sensor 30, the coordinates Z1 in the Z-axis direction of the measurement point S1 and the coordinates Z1'in the Z-axis direction of the measurement point S1'are measured, and the deviation ΔZ (= Z1'-Z1). Based on the above, the inclination angle θ with respect to the reference direction of the mounting surface 10a of the table 10 in the moving direction of the main shaft 20 can be obtained. Specifically, the inclination angle θ can be calculated by the angle θ = ARCSIN (ΔZ / L).
Since other points are the same as those in the first embodiment, further description will be omitted.

以上のように、上記の第１及び第２の実施形態に係る測定方法では、
センサ３０が主軸２０に取り付けられ、
ワークＷがテーブル１０に載置され、
センサ３０の視野内における２つの測定点Ｓ１、Ｓ２（Ｓ１、Ｓ１’）における測定結果の差分に基づいて、主軸２０の移動方向及びテーブル１０の載置面１０ａの基準方向に対する傾斜角θを検出することができる。 As described above, in the measurement method according to the first and second embodiments described above,
The sensor 30 is attached to the spindle 20 and
Work W is placed on the table 10
Based on the difference between the measurement results at the two measurement points S1 and S2 (S1, S1') in the field of view of the sensor 30, the inclination angle θ with respect to the moving direction of the spindle 20 and the reference direction of the mounting surface 10a of the table 10 is detected. can do.

これにより、基準器等を工作機械２の機内に設置することなく、加工したワークＷを用いて、少ない工数で確実に傾斜に関する精度を測定することができる。 As a result, it is possible to reliably measure the accuracy of inclination with a small number of man-hours using the machined work W without installing a reference device or the like in the machine tool 2.

特に、センサ３０及びワークＷを相対的に並進移動させることにより、ワークＷの加工面の同一点Ｐを、センサ３０の視野３２内における少なくとも２つの測定点Ｓ１、Ｓ２で測定して、工作機械２の精度を検出することができる（第１の実施形態）。更に、センサ３０及びワークＷを相対的に回転及び並進移動させることにより、ワークＷの加工面の同一点Ｐを、センサ３０の視野３２内における少なくとも２つの測定点Ｓ１、Ｓ１’で測定して、工作機械２の精度を検出することができる（第２の実施形態）。何れにおいても、工作機械２の機能を有効利用して、工作機械２の精度を効率的に検出することができる。 In particular, by relatively translating the sensor 30 and the work W, the same point P on the machined surface of the work W is measured at at least two measurement points S1 and S2 in the field of view 32 of the sensor 30, and the machine tool The accuracy of 2 can be detected (first embodiment). Further, by relatively rotating and translating the sensor 30 and the work W, the same point P on the machined surface of the work W is measured at at least two measurement points S1 and S1'in the field of view 32 of the sensor 30. , The accuracy of the machine tool 2 can be detected (second embodiment). In either case, the accuracy of the machine tool 2 can be efficiently detected by effectively utilizing the function of the machine tool 2.

また、センサ３０及びワークＷを相対的に回転移動及び並進移動させることにより、ワークＷの加工面の同一点を、センサ３０の視野内における少なくとも２つの測定点で測定することにより、工作機械２の精度を検出することができる。この場合においても、工作機械２の機能を有効利用して、工作機械２の精度を効率的に検出することができる。
特に、２つの測定点の偏差に基づいて並進移動における誤差を検出し、２つの測定点の和に基づいて回転移動における誤差を検出することができるので、回転移動誤差及び並進移動誤差の分離推定が容易になる。
なお、ここではセンサ３０を取り付けた主軸２０を回転させているが、これに限られるものではなく、テーブル１０側を回転させることもできる。このとき、研削により平面に加工されたワークＷの表面は、テーブル１０ではなく、主軸２０の移動方向に沿って加工されている。このため、テーブル１０の１８０°回転により、ワークＷの表面は逆方向に傾斜することとなり、基準器を使った場合より高感度でＸ軸の傾斜を検出することができる。 Further, by relatively rotating and translating the sensor 30 and the work W, the same point on the machined surface of the work W is measured at at least two measurement points in the field of view of the sensor 30, so that the machine tool 2 The accuracy of can be detected. Even in this case, the accuracy of the machine tool 2 can be efficiently detected by effectively utilizing the function of the machine tool 2.
In particular, since the error in translational movement can be detected based on the deviation of the two measurement points and the error in rotational movement can be detected based on the sum of the two measurement points, the rotational movement error and the translational movement error can be estimated separately. Becomes easier.
Although the spindle 20 to which the sensor 30 is attached is rotated here, the present invention is not limited to this, and the table 10 side can also be rotated. At this time, the surface of the work W processed into a flat surface by grinding is processed along the moving direction of the spindle 20 instead of the table 10. Therefore, the 180 ° rotation of the table 10 causes the surface of the work W to be tilted in the opposite direction, and the tilt of the X-axis can be detected with higher sensitivity than when a reference device is used.

上記においては、主軸２０の移動方向の傾斜角度θの検出を例にとって説明したが、検出する機械精度はこれに限られるものではない。例えば、ワークＷの加工面の同一点Ｐを、センサ３０の視野３２内における少なくとも２つの測定点Ｓ１、Ｓ２で測定して、センサ３０の光軸（主軸２０の軸）のテーブル１０の載置面１０ａに対する傾斜角度を検出することもできる。具体的には、測定点２の座標と、センサ３０の光軸（主軸２０の軸）がテーブル１０の載置面１０ａに対して直交している場合の座標との偏差に基づいて、センサ３０の光軸（主軸２０の軸）の傾斜角度を求めることができる。 In the above, the detection of the inclination angle θ in the moving direction of the spindle 20 has been described as an example, but the mechanical accuracy for detecting is not limited to this. For example, the same point P on the machined surface of the work W is measured at at least two measurement points S1 and S2 in the field of view 32 of the sensor 30, and the table 10 on the optical axis (axis of the spindle 20) of the sensor 30 is placed. It is also possible to detect the inclination angle with respect to the surface 10a. Specifically, the sensor 30 is based on the deviation between the coordinates of the measurement point 2 and the coordinates when the optical axis of the sensor 30 (the axis of the main axis 20) is orthogonal to the mounting surface 10a of the table 10. The inclination angle of the optical axis (axis of the main axis 20) can be obtained.

（本開示の第３の実施形態に係る測定方法）
次に、図４を参照しながら、本開示の第３の実施形態に係る測定方法の説明を行う。図４は、
センサの視野内における３つの測定点を模式的に示した図である。
上記の第１または第２の実施形態に係る測定方法を、Ｘ軸方向だけでなく、Ｙ軸方向にも行うことにより、図４に示すようなセンサの視野内における３つの測定点Ｔ１〜Ｔ３を得ることができる。これにより、センサ３０の視野３２内における２つの測定点における測定結果の差分に基づいて、Ｘ軸方向及びＹ軸方向における主軸２０の移動方向のテーブル１０の載置面１０ａの基準方向に対する傾斜角θを検出することができる。同様に、センサ３０の光軸（主軸２０の軸）のテーブル１０の載置面１０ａに対する傾斜角度を検出することもできる。 (Measurement method according to the third embodiment of the present disclosure)
Next, the measurement method according to the third embodiment of the present disclosure will be described with reference to FIG. FIG. 4 shows
It is a figure which showed typically three measurement points in the field of view of a sensor.
By performing the measurement method according to the first or second embodiment not only in the X-axis direction but also in the Y-axis direction, three measurement points T1 to T3 in the field of view of the sensor as shown in FIG. Can be obtained. As a result, based on the difference between the measurement results at the two measurement points in the field of view 32 of the sensor 30, the inclination angle of the mounting surface 10a of the table 10 in the movement direction of the spindle 20 in the X-axis direction and the Y-axis direction with respect to the reference direction. θ can be detected. Similarly, the inclination angle of the optical axis of the sensor 30 (the axis of the main axis 20) with respect to the mounting surface 10a of the table 10 can be detected.

（本開示の第４の実施形態に係る測定方法）
本開示の第４の実施形態に係る測定方法では、センサ３０及びワークＷを相対的に回転移動させて、ワークＷの加工面の同一点を、センサの視野内における少なくとも２つの測定点で測定する。この測定方法を用いて、機械精度として、例えば、センサ３０の光軸（主軸２０の軸）のテーブル１０の載置面１０ａに対する傾斜角度を検出することができる。 (Measurement method according to the fourth embodiment of the present disclosure)
In the measurement method according to the fourth embodiment of the present disclosure, the sensor 30 and the work W are relatively rotationally moved, and the same point on the machined surface of the work W is measured at at least two measurement points in the field of view of the sensor. To do. Using this measuring method, for example, the tilt angle of the optical axis of the sensor 30 (the axis of the spindle 20) with respect to the mounting surface 10a of the table 10 can be detected as the mechanical accuracy.

センサ３０及びワークＷを相対的に３６０度回転移動させた場合、仮に、センサ３０（主軸２０）の回転軸がテーブル１０の載置面１０ａに対して垂直であれば、視野３２上の点のワークＷへの投影像は真円を描くことになる。一方、仮に、センサ３０（主軸２０）の回転軸がテーブル１０の載置面１０ａに対して傾斜している場合には、上記の真円の投影像に対して偏差が生じる。よって、この偏差に基づいて、センサ３０（主軸２０）の回転軸、つまりセンサ３０の光軸（主軸２０の軸）のテーブル１０の載置面１０ａに対する傾斜角度を求めることができる。少なくとも、ワーク上の３点で測定を行えば、センサ３０（主軸２０）の回転軸のテーブル１０の載置面１０ａに対する傾斜角度を求めることができる。 When the sensor 30 and the work W are rotated and moved by 360 degrees, if the rotation axis of the sensor 30 (spindle 20) is perpendicular to the mounting surface 10a of the table 10, the point on the field of view 32 The projected image on the work W will draw a perfect circle. On the other hand, if the rotation axis of the sensor 30 (spindle 20) is tilted with respect to the mounting surface 10a of the table 10, a deviation occurs from the projected image of the perfect circle. Therefore, based on this deviation, the inclination angle of the rotation axis of the sensor 30 (spindle 20), that is, the optical axis of the sensor 30 (the axis of the spindle 20) with respect to the mounting surface 10a of the table 10 can be obtained. If the measurement is performed at least at three points on the work, the inclination angle of the rotation axis of the sensor 30 (spindle 20) with respect to the mounting surface 10a of the table 10 can be obtained.

また、センサ３０でワーク上の点Ａを測定して、視野３２内に測定点Ｓ１を得た後、センサ３０を所定の角度だけ回転させる。そして、センサ３０（主軸２０）の回転軸ＣＬがテーブル１０の載置面１０ａに対して垂直な場合に、回転後の測定点Ｓ１’が点Ａの位置に戻るような移動量でセンサ３０移動させる。このとき、得られた測定点Ｓ１及びＳ１’の間の座標の偏差に基づいて、センサ３０の光軸の傾斜角度を求めることができる。ワークＷの加工面の同一点Ａを、センサ３０の視野内における少なくとも３つの測定点（３つの回転角度）で測定することにより、センサ３０の光軸のテーブル１０の載置面１０ａに対する傾斜角度を求めることができる。 Further, the sensor 30 measures the point A on the work, obtains the measurement point S1 in the visual field 32, and then rotates the sensor 30 by a predetermined angle. Then, when the rotation axis CL of the sensor 30 (spindle 20) is perpendicular to the mounting surface 10a of the table 10, the sensor 30 is moved by an amount of movement such that the measured point S1'after rotation returns to the position of the point A. Let me. At this time, the tilt angle of the optical axis of the sensor 30 can be obtained based on the deviation of the coordinates between the obtained measurement points S1 and S1'. By measuring the same point A on the machined surface of the work W at at least three measurement points (three rotation angles) in the field of view of the sensor 30, the tilt angle of the optical axis of the sensor 30 with respect to the mounting surface 10a of the table 10 Can be sought.

テーブル１０
（本開示の第５の実施形態に係る測定方法）
次に、図５及び図６を参照しながら、本開示の第５の実施形態に係る測定方法の説明を行う。図５は、工作機械のＸ、Ｙ、Ｚ軸ごとに存在する機械精度を模式的に示した図である。図６は、同一の測定点が同一視野に入るようにしながら、主軸に取り付けられたセンサを順次移動させて、Ｘ軸方向における傾斜角を求める工程を示す図である。 Table 10
(Measurement method according to the fifth embodiment of the present disclosure)
Next, the measurement method according to the fifth embodiment of the present disclosure will be described with reference to FIGS. 5 and 6. FIG. 5 is a diagram schematically showing the machine accuracy existing for each of the X, Y, and Z axes of the machine tool. FIG. 6 is a diagram showing a process of sequentially moving sensors attached to the main shaft to obtain an inclination angle in the X-axis direction while keeping the same measurement points in the same field of view.

図５に示すように、工作機械２の機械精度として、各軸ごとに、軸方向における位置、水平方向の真直度、垂直方向の真直度、軸周りのローリング、ヨーイング及びピッチングがある。更に、各軸間の直角度（ＸＹ軸、ＸＺ軸及びＹＺ軸間の直角度）がある。よって、工作機械２の機械精度として、６要素×３軸＋３要素（軸間）＝２１個の要素がある。
これらの機械精度の各要素は、ワークＷ上の所定の箇所を基準にすることにより、上記の実施形態で説明した測定方法を用いて算出することができる。 As shown in FIG. 5, the machine accuracy of the machine tool 2 includes axial position, horizontal straightness, vertical straightness, rolling around the axis, yawing, and pitching for each axis. Further, there is a squareness between each axis (squareness between the XY axis, the XZ axis and the YZ axis). Therefore, as the machine accuracy of the machine tool 2, there are 6 elements × 3 axes + 3 elements (between axes) = 21 elements.
Each element of these mechanical accuracy can be calculated by using the measuring method described in the above embodiment by referring to a predetermined position on the work W.

上記の要素を求めるため、図６に示すように、同一の測定点が同一視野に入るようにしながら、主軸２０に取り付けられたセンサ３０を順次移動させて、Ｘ軸方向における傾斜角を求めるステップを繰り返す。つまり、視野内の精度を頼りに、全体の測定を尺取り虫状につないでいく所謂逐次三点法を採用することができる。図６では、視野内の測定点のうち、少なくとも２点を視野内の同一の位置で測定するように、ステップ１からステップ２を行ったところを示す。 In order to obtain the above elements, as shown in FIG. 6, the step of sequentially moving the sensor 30 attached to the spindle 20 to obtain the inclination angle in the X-axis direction while keeping the same measurement point in the same field of view. repeat. That is, it is possible to adopt the so-called sequential three-point method in which the entire measurement is connected in the shape of an inchworm, depending on the accuracy in the field of view. FIG. 6 shows the steps 1 to 2 performed so that at least two measurement points in the visual field are measured at the same position in the visual field.

例えば、視野の２／３（以下２／３ＦＯＶ)の距離だけ離間した測定マークＴ１、Ｔ２がある場合（ステップ１参照）に、ステージを２／３ＦＯＶずつ動かして、ステップ２では、測定マークＴ２がステップ１における測定マークＴ１の位置に来るようにして測定する。このように、予めキャリブレーションされた視野内で同じ点を２か所で測ることによって、センサ３０の精度を尺取虫状につないでいき、ワークＷ全体の測定を行うことができる。 For example, when there are measurement marks T1 and T2 separated by a distance of 2/3 of the field of view (hereinafter, 2/3 FOV) (see step 1), the stage is moved by 2/3 FOV, and in step 2, the measurement mark T2 is set. The measurement is performed so as to come to the position of the measurement mark T1 in step 1. In this way, by measuring the same point at two points in the pre-calibrated field of view, the accuracy of the sensor 30 can be connected in the shape of an inchworm, and the entire work W can be measured.

このとき、ワークＷには、センサ３０の視野内に複数入る間隔で多数の測定用マークを作り込む必要がある。例えば、ワークＷがラックアンドピニオンのラックであれば、ラックの長手方向に沿って、多数の測定用マークを得ることができる。この共通のマークを仲介として、長ストロークの相対座標変化を検出することができる。
これをＸ軸だけでなく、Ｙ軸方向に行うことにより、上記の機械精度の各要素を検出することができ、適正なキャリブレーションを行うことができる。なお、測定に用いるワークＷの形状としては、測定用マークとしての点が特定できる形状が望ましいので、多面錐体、円錐、凸球、凹球の一部が好ましいといえる。 At this time, it is necessary to make a large number of measurement marks in the work W at intervals of being within the field of view of the sensor 30. For example, if the work W is a rack and pinion rack, a large number of measurement marks can be obtained along the longitudinal direction of the rack. With this common mark as an intermediary, it is possible to detect a long stroke relative coordinate change.
By performing this not only in the X-axis direction but also in the Y-axis direction, each element of the above mechanical accuracy can be detected, and proper calibration can be performed. As the shape of the work W used for the measurement, a shape in which a point as a measurement mark can be specified is desirable, so it can be said that a part of a polyhedral cone, a cone, a convex sphere, and a concave sphere is preferable.

上記の実施形態においては、センサ３０を工作機械２の主軸２０に取り付ける場合を例にして説明したが、これに限られるものではない。センサ３０をワークＷに対して相対的に移動可能であれば、センサ３０を工作機械２のその他の任意の部材に取り付けることができる。 In the above embodiment, the case where the sensor 30 is attached to the spindle 20 of the machine tool 2 has been described as an example, but the present invention is not limited to this. If the sensor 30 is movable relative to the work W, the sensor 30 can be attached to any other member of the machine tool 2.

以上のように、上記の実施形態に係る測定方法では、
ワークＷを工作機械２にセットして加工を行う工程と、
センサ３０を工作機械２にセットする工程と、
ワークＷの加工面の同一点を、センサ３０の視野内における少なくとも２つの測定点で測定する工程と、
少なくとも２つの測定点における測定結果に基づいて、工作機械２の精度を検出する工程と、
を含む。 As described above, in the measurement method according to the above embodiment,
The process of setting the work W on the machine tool 2 and processing
The process of setting the sensor 30 on the machine tool 2 and
The process of measuring the same point on the machined surface of the work W at at least two measurement points in the field of view of the sensor 30 and
A process of detecting the accuracy of the machine tool 2 based on the measurement results at at least two measurement points, and
including.

これにより、基準器等を工作機械２の機内に設置することなく、加工したワークＷを用いて、工作機械２の精度を測定するので、少ない工数かつ低コストで工作機械の精度の測定を行うことができる。特に、ワークの加工面の同一点を、センサの視野内における少なくとも２つの測定点で測定することにより、効率的に確実に工作機械の精度を測定することができる。
基準器は、毎年検定が必要であり、１回の検定に多額の費用がかかる。また、何かの事故で変形してしまうと、使用不能な状態に陥る。また、基準器が基準として使えるのは、温度条件が一定（例えば、２０℃±０．５℃）である必要があり、工作機上で使用するのが困難な場合もある。よって、基準器を用いないことにより、大きな利点がもたらされる。 As a result, the accuracy of the machine tool 2 is measured using the machined work W without installing a reference device or the like in the machine tool 2, so that the accuracy of the machine tool can be measured with a small number of man-hours and low cost. be able to. In particular, by measuring the same point on the machined surface of the workpiece at at least two measurement points within the field of view of the sensor, the accuracy of the machine tool can be measured efficiently and reliably.
The standard device needs to be tested every year, and one test costs a lot of money. Also, if it is deformed by some accident, it will be in an unusable state. Further, the reference device can be used as a reference because the temperature condition must be constant (for example, 20 ° C. ± 0.5 ° C.), and it may be difficult to use it on a machine tool. Therefore, the absence of a reference device provides a great advantage.

センサ３０が光学切断式センサであっても、ライン光の長手方向に対して垂直な方向に走査することにより、三次元のプロファイルを得ることもできる。
また、センサ３０として、縞投影エリアセンサのような三次元センサを用いる場合には、より短かい時間で測定を完了することが期待できる。 Even if the sensor 30 is an optical cutting type sensor, a three-dimensional profile can be obtained by scanning in a direction perpendicular to the longitudinal direction of the line light.
Further, when a three-dimensional sensor such as a fringe projection area sensor is used as the sensor 30, it can be expected that the measurement can be completed in a shorter time.

本発明の実施の形態、実施の態様を説明したが、開示内容は構成の細部において変化してもよく、実施の形態、実施の態様における要素の組合せや順序の変化等は請求された本発明の範囲および思想を逸脱することなく実現し得るものである。 Although the embodiments and embodiments of the present invention have been described, the disclosure contents may be changed in the details of the configuration, and the invention in which the embodiments and the combinations and orders of the elements in the embodiments are changed are requested. It can be realized without deviating from the scope and ideas of.

２ 工作機械
１０ テーブル
１０ａ 載置面
３０ センサ
３２ 視野
Ｗ ワーク 2 Machine tool 10 Table 10a Mounting surface 30 Sensor 32 Field of view W Work

Claims (7)

ワークを工作機械にセットして加工を行う工程と、
センサを前記工作機械の加工に用いる機械構成体にセットする工程と、
前記加工を行う工程で形成された前記ワークの加工面の同一点を、前記センサの視野内における少なくとも２つの測定点で測定する工程と、
前記少なくとも２つの測定点における測定結果に基づいて、前記工作機械の精度を検出する工程と、
を含むことを特徴とする工作機械の精度の測定方法。
The process of setting the work on the machine tool and processing it,
The process of setting the sensor in the machine structure used for processing the machine tool , and
A step of measuring the same point on the machined surface of the work formed in the step of performing the machining at at least two measurement points in the field of view of the sensor.
A step of detecting the accuracy of the machine tool based on the measurement results at at least two measurement points, and
A method for measuring the accuracy of a machine tool, which comprises.
前記センサ及び前記ワークを相対的に並進移動させることにより、前記ワークの加工面の同一点を、前記センサの視野内における少なくとも２つの測定点で測定することを特徴とする請求項１に記載の工作機械の精度の測定方法。
The first aspect of claim 1, wherein the same point on the machined surface of the work is measured at at least two measurement points in the field of view of the sensor by relatively translating the sensor and the work. How to measure the accuracy of machine tools.
前記センサ及び前記ワークを相対的に回転移動及び並進移動させることにより、前記ワークの加工面の同一点を、前記センサの視野内における少なくとも２つの測定点で測定することを特徴とする請求項１に記載の工作機械の精度の測定方法。
Claim 1 is characterized in that the same point on the machined surface of the work is measured at at least two measurement points in the field of view of the sensor by relatively rotating and translating the sensor and the work. The method for measuring the accuracy of a machine tool described in.
前記センサが光学切断式センサであることを特徴とする請求項１から３の何れか1項に記載の工作機械の精度の測定方法。
The method for measuring the accuracy of a machine tool according to any one of claims 1 to 3, wherein the sensor is an optical cutting type sensor.
前記センサが縞投影エリアセンサであることを特徴とする請求項１から３の何れか1項に記載の工作機械の精度の測定方法。
The method for measuring the accuracy of a machine tool according to any one of claims 1 to 3, wherein the sensor is a fringe projection area sensor.
前記センサが主軸に取り付けられ、
前記ワークがテーブルに載置され、
前記センサの視野内における２つの測定点における測定結果の差分に基づいて、前記主軸の移動方向及び前記テーブルの載置面の基準方向に対する傾斜角を検出することを特徴とする請求項４または５に記載の工作機械の精度の測定方法。
The sensor is attached to the spindle and
The work is placed on the table and
Claim 4 or 5 is characterized in that the inclination angle with respect to the moving direction of the spindle and the reference direction of the mounting surface of the table is detected based on the difference between the measurement results at the two measurement points in the field of view of the sensor. The method for measuring the accuracy of a machine tool described in.
予めキャリブレーションされた前記センサを用いて、少なくとも２点を視野内の同一の位置で測定する工程を繰り返して、前記ワークの全体を測定することを特徴とする請求項１から６の何れか1項に記載の工作機械の精度の測定方法。 Any one of claims 1 to 6, wherein the entire work is measured by repeating the step of measuring at least two points at the same position in the field of view using the sensor calibrated in advance. The method for measuring the accuracy of the machine tool described in the section.
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