JP6616917B2 - Substrate processing apparatus, semiconductor device manufacturing method, and recording medium - Google Patents

Description

  The present invention relates to a substrate processing apparatus, a semiconductor device manufacturing method, and a recording medium.

  In substrate processing in a manufacturing process of a semiconductor device (device), for example, a vertical substrate processing apparatus that processes a plurality of substrates at once is used. During maintenance of the substrate processing apparatus, it is necessary to secure a maintenance area around the substrate processing apparatus, and the footprint of the substrate processing apparatus may become large in order to secure the maintenance area (for example, patents) Reference 1).

JP 2010-283356 A

  This invention is made | formed in view of such a situation, The objective is to provide the technique which can reduce a footprint, ensuring a maintenance area.

According to one aspect of the invention,
A first processing module having a first processing vessel for substrate processing;
A second processing module disposed adjacent to a side surface of the first processing module and having a second processing container for substrate processing;
A first exhaust system for exhausting the interior of the first processing container; and a first supply system for supplying a processing gas into the first processing container, adjacent to the rear surface of the first processing module. A first utility system to be arranged;
A second exhaust system for exhausting the inside of the second processing container; and a second supply system for supplying a processing gas into the second processing container, adjacent to the rear surface of the second processing module. A second utility system to be arranged;
A substrate processing apparatus comprising:
In the back direction of the first processing module and the second processing module, the first processing module and the second processing module are connected between the first utility system and the second utility system. A common maintenance area is formed for
The first utility system and the second utility system are provided with a technique in which the rear side protrudes into the maintenance area rather than the front side.

  According to the present invention, it is possible to reduce the footprint while securing the maintenance area.

It is a top view which shows roughly an example of the substrate processing apparatus used suitably by embodiment of this invention. It is a longitudinal cross-sectional view which shows roughly an example of the substrate processing apparatus used suitably by embodiment of this invention. It is a longitudinal cross-sectional view which shows roughly an example of the substrate processing apparatus used suitably by embodiment of this invention. It is a longitudinal section showing roughly an example of a processing furnace used suitably in an embodiment of the present invention. It is a cross-sectional view which shows roughly an example of the processing module used suitably by embodiment of this invention.

  Hereinafter, non-limiting exemplary embodiments of the present invention will be described with reference to the drawings. In all the drawings, the same or corresponding components are denoted by the same or corresponding reference numerals, and redundant description is omitted. Further, the storage chamber 9 side described later is referred to as a front side (front side), and the transfer chambers 6A and 6B described below are referred to as back sides (rear sides). Furthermore, let the side which faces the boundary line (adjacent surface) of processing modules 3A and 3B, which will be described later, be the inside, and the side away from the boundary line be the outside.

  In the present embodiment, the substrate processing apparatus is configured as a vertical substrate processing apparatus (hereinafter referred to as a processing apparatus) 2 that performs a substrate processing process such as a heat treatment as one process of the manufacturing process in the method of manufacturing a semiconductor device (device). Has been.

  As shown in FIGS. 1 and 2, the processing apparatus 2 includes two adjacent processing modules 3A and 3B. The processing module 3A includes a processing furnace 4A and a transfer chamber 6A. The processing module 3B includes a processing furnace 4B and a transfer chamber 6B. Transfer chambers 6A and 6B are respectively disposed below the processing furnaces 4A and 4B. Adjacent to the front side of the transfer chambers 6A and 6B, a transfer chamber 8 including a transfer machine 7 for transferring the wafer W is arranged. A storage chamber 9 for storing a pod (hoop) 5 for storing a plurality of wafers W is connected to the front side of the transfer chamber 8. An I / O port 22 is installed on the entire surface of the storage chamber 9, and the pod 5 is carried into and out of the processing apparatus 2 through the I / O port 22.

  Gate valves 90A and 90B are installed on boundary walls (adjacent surfaces) between the transfer chambers 6A and 6B and the transfer chamber 8, respectively. Pressure detectors are installed in the transfer chamber 8 and the transfer chambers 6A and 6B, respectively, and the pressure in the transfer chamber 8 is set to be lower than the pressure in the transfer chambers 6A and 6B. ing. In addition, oxygen concentration detectors are installed in the transfer chamber 8 and the transfer chambers 6A and 6B, respectively. The oxygen concentration in the transfer chamber 8A and the transfer chambers 6A and 6B is higher than the oxygen concentration in the atmosphere. Is also kept low. A clean unit 62C for supplying clean air into the transfer chamber 8 is installed at the ceiling of the transfer chamber 8, and for example, an inert gas is circulated in the transfer chamber 8 as clean air. It is configured. By circulating and purging the inside of the transfer chamber 8 with an inert gas, the inside of the transfer chamber 8 can be made a clean atmosphere. With such a configuration, it is possible to prevent particles and the like in the transfer chambers 6A and 6B from entering the transfer chamber 8, and to naturally move on the wafer W in the transfer chamber 8 and the transfer chambers 6A and 6B. Formation of an oxide film can be suppressed.

  Since the processing module 3A and the processing module 3B have the same configuration, only the processing module 3A will be described below as a representative.

  As shown in FIG. 4, the processing furnace 4A includes a cylindrical reaction tube 10A and a heater 12A as heating means (heating mechanism) installed on the outer periphery of the reaction tube 10A. The reaction tube is made of, for example, quartz or SiC. Inside the reaction tube 10A, a processing chamber 14A for processing the wafer W as a substrate is formed. A temperature detector 16A as a temperature detector is installed in the reaction tube 10A. The temperature detector 16A is erected along the inner wall of the reaction tube 10A.

  The gas used for substrate processing is supplied into the processing chamber 14A by a gas supply mechanism 34A as a gas supply system. The gas supplied by the gas supply mechanism 34A is changed according to the type of film to be formed. Here, the gas supply mechanism 34A includes a source gas supply unit, a reaction gas supply unit, and an inert gas supply unit. The gas supply mechanism 34A is housed in a supply box 72A described later.

  The raw material gas supply unit includes a gas supply pipe 36a. A gas flow controller (MFC) 38a, which is a flow rate controller (flow rate control unit), and a valve 40a, which is an on-off valve, are provided in order from the upstream direction. It has been. The gas supply pipe 36 a is connected to a nozzle 44 a that penetrates the side wall of the manifold 18. The nozzle 44 a is erected in the vertical direction in the reaction tube 10 and has a plurality of supply holes that open toward the wafers W held by the boat 26. The source gas is supplied to the wafer W through the supply hole of the nozzle 44a.

  Thereafter, the reaction gas is supplied from the reaction gas supply unit to the wafer W through the supply pipe 36b, the MFC 38b, the valve 40b, and the nozzle 44b with the same configuration. From the inert gas supply unit, an inert gas is supplied to the wafer W via supply pipes 36c and 36d, MFCs 38c and 38d, valves 40c and 40d, and nozzles 44a and 44b.

  A cylindrical manifold 18A is connected to the lower end opening of the reaction tube 10A via a seal member such as an O-ring to support the lower end of the reaction tube 10A. The lower end opening of the manifold 18A is opened and closed by a disc-shaped lid 22A. A sealing member such as an O-ring is installed on the upper surface of the lid portion 22A, whereby the inside of the reaction tube 10A and the outside air are hermetically sealed. 24 A of heat insulation parts are mounted on the cover part 22A.

  An exhaust pipe 46A is attached to the manifold 18A. The exhaust pipe 46A is provided with a pressure sensor 48A as a pressure detector (pressure detection unit) for detecting the pressure in the processing chamber 14A and an APC (Auto Pressure Controller) valve 40A as a pressure regulator (pressure adjustment unit). A vacuum pump 52A as an evacuation device is connected. With such a configuration, the pressure in the processing chamber 14A can be set to a processing pressure corresponding to the processing. An exhaust system A is mainly configured by the exhaust pipe 46A, the APC valve 40A, and the pressure sensor 48A. The exhaust system A is accommodated in an exhaust box 74A described later.

  The processing chamber 14A accommodates therein a boat 26A as a substrate holder that supports a plurality of, for example, 25 to 150 wafers W vertically in a shelf shape. The boat 26A is supported above the heat insulating portion 24A by a rotating shaft 28A that penetrates the lid portion 22A and the heat insulating portion 24A. The rotation shaft 28A is connected to a rotation mechanism 30A installed below the lid portion 22A, and the rotation shaft 28A is configured to be rotatable in a state where the inside of the reaction tube 10A is hermetically sealed. The lid portion 22 is driven in the vertical direction by a boat elevator 32A as an elevating mechanism. Thereby, the boat 26A and the lid portion 22A are integrally moved up and down, and the boat 26A is carried into and out of the reaction tube 10A.

  The transfer of the wafer W to the boat 26A is performed in the transfer chamber 6A. As shown in FIG. 3, a clean unit 60A is installed on one side of the transfer chamber 6A (the outer side of the transfer chamber 6A, the side opposite to the side facing the transfer chamber 6B), and the transfer chamber 6A. Clean air (for example, inert gas) is circulated in the interior. The inert gas supplied into the transfer chamber 6A is exhausted from the transfer chamber 6A by the exhaust part 62A installed on the side surface (side surface facing the transfer chamber 6B) facing the clean unit 60A across the boat 26A. Re-supplied from the clean unit 60A into the transfer chamber 6A (circulation purge). The pressure in the transfer chamber 6 </ b> A is set to be lower than the pressure in the transfer chamber 8. The oxygen concentration in the transfer chamber 6A is set to be lower than the oxygen concentration in the atmosphere. With such a configuration, it is possible to suppress the formation of a natural oxide film on the wafer W during the transfer operation of the wafer W.

  A controller 100 is connected to the rotation mechanism 30A, the boat elevator 32A, the MFCs 38a to d of the gas supply mechanism 34A, the valves 40a to d, and the APC valve 50A. The controller 100 is composed of, for example, a microprocessor (computer) having a CPU, and is configured to control the operation of the processing device 2. For example, an input / output device 102 configured as a touch panel or the like is connected to the controller 100. One controller 100 may be installed in each of the processing module 3A and the processing module 3B, or one controller 100 may be installed in common.

  A storage unit 104 as a storage medium is connected to the controller 100. The storage unit 104 stores a control program for controlling the operation of the processing device 10 and a program (also referred to as a recipe) for causing each component unit of the processing device 2 to execute processing according to processing conditions in a readable manner. The

  The storage unit 104 may be a storage device (hard disk or flash memory) built in the controller 100, or a portable external recording device (magnetic disk such as magnetic tape, flexible disk or hard disk, CD or DVD, etc. It may be an optical disk, a magneto-optical disk such as an MO, or a semiconductor memory such as a USB memory or a memory card. Further, the program may be provided to the computer using a communication means such as the Internet or a dedicated line. The program is read from the storage unit 104 according to an instruction from the input / output device 102 as necessary, and the controller 100 executes processing according to the read recipe, so that the processing device 2 Under the control of 100, a desired process is executed. The controller 100 is accommodated in the controller boxes 76A and 76B.

Next, a process (film forming process) for forming a film on the substrate using the processing apparatus 2 described above will be described. Here, by supplying DCS (SiH ₂ Cl ₂ : dichlorosilane) gas as a source gas and O ₂ (oxygen) gas as a reaction gas to the wafer W, silicon oxide (SiO _{2) is formed} on the wafer W. ) An example of forming a film will be described. In the following description, the operation of each part constituting the processing apparatus 2 is controlled by the controller 100.

(Wafer charge and boat load)
The gate valve 90A is opened and the wafer W is transferred to the boat 20A. When a plurality of wafers W are loaded into the boat 26A (wafer charge), the gate valve 90A is closed. The boat 26A is carried into the processing chamber 14 by the boat elevator 32A (boat loading), and the lower opening of the reaction tube 10A is airtightly closed (sealed) by the lid portion 22A.

(Pressure adjustment and temperature adjustment)
The processing chamber 14A is evacuated (reduced pressure) by the vacuum pump 52A so that a predetermined pressure (vacuum degree) is obtained. The pressure in the processing chamber 14A is measured by the pressure sensor 48A, and the APC valve 50A is feedback-controlled based on the measured pressure information. Further, the wafer W in the processing chamber 14A is heated by the heater 12A so as to reach a predetermined temperature. At this time, the power supply to the heater 12A is feedback-controlled based on the temperature information detected by the temperature detector 16A so that the processing chamber 14A has a predetermined temperature distribution. Further, the rotation of the boat 26A and the wafer W by the rotation mechanism 30A is started.

(Deposition process)
[Raw gas supply process]
When the temperature in the processing chamber 14A is stabilized at a preset processing temperature, DCS gas is supplied to the wafer W in the processing chamber 14A. The DCS gas is controlled to have a desired flow rate by the MFC 38a, and is supplied into the processing chamber 14A through the gas supply pipe 36a and the nozzle 44a.

[Raw material gas exhaust process]
Next, the supply of DCS gas is stopped, and the inside of the processing chamber 14A is evacuated by the vacuum pump 52A. At this time, N ₂ gas as an inert gas may be supplied from the inert gas supply unit into the processing chamber 14A (inert gas purge).

[Reactive gas supply process]
Next, O ₂ gas is supplied to the wafer W in the processing chamber 14A. The O ₂ gas is controlled to have a desired flow rate by the MFC 38b, and is supplied into the processing chamber 14A through the gas supply pipe 36b and the nozzle 44b.

[Reactant gas exhaust process]
Next, the supply of O ₂ gas is stopped, and the inside of the processing chamber 14A is evacuated by the vacuum pump 52A. At this time, N ₂ gas may be supplied from the inert gas supply unit into the processing chamber 14A (inert gas purge).

By performing a cycle of performing the above-described four steps a predetermined number of times (one or more times), a SiO ₂ film having a predetermined composition and a predetermined film thickness can be formed on the wafer W.

(Boat unload and wafer discharge)
After forming a film with a predetermined thickness, N ₂ gas is supplied from the inert gas supply unit, the inside of the processing chamber 14A is replaced with N ₂ gas, and the pressure in the processing chamber 14A is returned to normal pressure. Thereafter, the lid 22A is lowered by the boat elevator 32A, and the boat 26A is carried out (boat unloading) from the reaction tube 10A. Thereafter, the processed wafer W is taken out from the boat 26A (wafer discharge).

  Thereafter, the wafer W may be stored in the pod 5 and carried out of the processing apparatus 2, or may be transferred to the processing furnace 4B, and substrate processing such as annealing may be continuously performed. When processing the wafer W in the processing furnace 4B continuously after the processing of the wafer W in the processing furnace 4A, the gate valves 90A and 90B are opened, and the wafer W is directly transferred from the boat 26A to the boat 26B. The subsequent loading / unloading of the wafer W into / from the processing furnace 4B is performed in the same procedure as the substrate processing by the processing furnace 4A described above. Further, the substrate processing in the processing furnace 4B is performed, for example, in the same procedure as the substrate processing by the above-described processing furnace 4A.

Examples of processing conditions for forming the SiO ₂ film on the wafer W include the following.
Processing temperature (wafer temperature): 300 ° C. to 700 ° C.,
Processing pressure (processing chamber pressure) 1 Pa to 4000 Pa,
DCS gas: 100 sccm to 10000 sccm,
O ₂ gas: 100 sccm to 10000 sccm,
N ₂ gas: 100 sccm to 10000 sccm,
By setting each processing condition to a value within the respective range, it is possible to appropriately progress the film forming process.

Next, the back configuration of the processing apparatus 2 will be described.
For example, when the boat 26 is damaged, it is necessary to replace the boat 26. Further, when the reaction tube 10 is damaged or when the reaction tube 10 needs to be cleaned, it is necessary to remove the reaction tube 10. Thus, when performing maintenance in the transfer chamber 6 and the processing furnace 4, the maintenance is performed from the maintenance area on the back side of the processing apparatus 2.

  As shown in FIG. 1, maintenance ports 78A and 78B are formed on the back sides of the transfer chambers 6A and 6B, respectively. The maintenance port 78A is formed on the transfer chamber 6B side of the transfer chamber 6A, and the maintenance port 78B is formed on the transfer chamber 6A side of the transfer chamber 6B. Maintenance ports 78A and 78B are opened and closed by maintenance doors 80A and 80B. The maintenance doors 80A and 80B are configured to be rotatable about the hinges 82A and 82B. The hinge 82A is installed on the transfer chamber 6B side of the transfer chamber 6A, and the hinge 82B is installed on the transfer chamber 6A side of the transfer chamber 6B. That is, the hinges 82A and 82B are installed so as to be adjacent to each other in the vicinity of the inner corner located on the adjacent surface on the back side of the transfer chambers 6A and 6B. The maintenance area is formed on the processing module 3B side on the back side of the processing module 3A and on the processing module 3A side on the back side of the processing module 3B.

  As indicated by the imaginary line, the maintenance doors 80A and 80B are horizontally rotated around the hinges 82A and 82B toward the rear side of the transfer chambers 6A and 6B, thereby opening the rear maintenance ports 78A and 78B. The maintenance door 80A is configured to be able to open up to 180 ° to the left toward the transfer chamber 6A. The maintenance door 80B is configured to be able to open up to 180 ° rightward toward the transfer chamber 6B. That is, toward the transfer chamber 6A, the maintenance door 80A rotates clockwise, and the maintenance door 80B rotates counterclockwise. In other words, the maintenance doors 80A and 80B are rotated in opposite directions. The maintenance doors 80A and 80B are configured to be removable, and maintenance may be performed by removing them.

  Utility systems 70A and 70B are installed in the vicinity of the back surfaces of the transfer chambers 6A and 6B. Utility systems 70A and 70B are arranged to face each other with a maintenance rear interposed therebetween. When the maintenance of the utility systems 70A and 70B is performed, the maintenance is performed inside the utility systems 70A and 70B, that is, from the space (maintenance area) between the utility systems 70A and 70B. The utility systems 70A and 70B are configured by exhaust boxes 74A and 74B, supply boxes 72A and 72B, and controller boxes 76A and 76B in this order from the housing side (the transfer chambers 6A and 6B side). The maintenance ports of the utilities 70A and 70B are formed on the inner side (maintenance area side). That is, the maintenance ports of the utilities 70A and 70B are formed so as to face each other.

  The exhaust box 74A is disposed at an outer corner located on the opposite side to the transfer chamber 6B on the back surface of the transfer chamber 6A. The exhaust box 74B is disposed at an outer corner located on the opposite side of the transfer chamber 6B from the transfer chamber 6A. That is, the exhaust boxes 74A and 74B are installed flat (smoothly) so that the outer side surfaces of the transfer chambers 6A and 6B and the outer side surfaces of the exhaust boxes 74A and 74B are connected to a plane. The supply box 72A is disposed adjacent to the side of the exhaust box 74A opposite to the side adjacent to the transfer chamber 6A. The supply box 72B is disposed adjacent to the side of the exhaust box 74B opposite to the side adjacent to the transfer chamber 6B.

  When viewed from above, the thickness (width in the short side direction) of the exhaust boxes 74A and 74B is smaller than the thickness of the supply boxes 72A and 72B. In other words, the supply boxes 72A and 72B protrude toward the maintenance area side than the exhaust boxes 74A and 74B. In the supply boxes 72A and 72B, since a gas accumulation system and a number of incidental facilities are arranged, the thickness may be larger than that of the exhaust boxes 72A and 72B. Therefore, by installing the exhaust boxes 72A and 72B on the housing side, a wide maintenance area in front of the maintenance doors 80A and 80B can be secured. That is, in the top view, the distance between the exhaust boxes 74A and 74B is larger than the distance between the supply boxes 72A and 72B. A wider maintenance space can be secured by installing 74A and 74B on the housing side.

  As shown in FIG. 3, final valves (valves 40a and 40b located at the lowest stage of the gas supply system) of the gas supply mechanisms 34A and 34B are arranged above the exhaust boxes 74A and 74B. Preferably, the exhaust boxes 74A and 74B are disposed directly above (directly above). With such a configuration, the piping length from the final valve to the processing chamber can be shortened even when the supply boxes 72A and 72B are installed away from the housing side, so that the quality of film formation can be improved. it can.

As shown in FIG. 5, the processing module 3A, 3B and utility system 70A, each configuration of 70B, processing modules 3A, are disposed plane-symmetrically with respect to the adjacent surface _{S 1} of 3B. The reaction tubes 10A, 10B are installed so that the exhaust pipes 46A, 46B face the corner direction, that is, the exhaust pipes 46A, 46B face the exhaust box 74A, 74B direction. The pipes are arranged so that the pipe lengths from the final valve to the nozzles are substantially the same in the processing modules 3A and 3B. Further, as indicated by arrows in FIG. 5, the rotation direction of the wafer W is also configured to be opposite to each other in the processing furnaces 4A and 4B.

Next, maintenance of the processing apparatus 2 will be described.
When the inside of the transfer chamber 6A is circulated and purged with an inert gas, an interlock is set so that the maintenance door 80A cannot be opened. Further, the interlock is set so that the maintenance door 80A cannot be opened even when the oxygen concentration in the transfer chamber 6A is lower than the oxygen concentration at atmospheric pressure. The same applies to the maintenance door 80B. Further, when the maintenance doors 80A and 80B are opened, an interlock is set so that the gate valves 90A and 90B cannot be opened. When the gate valves 90A and 90B are opened while the maintenance doors 80A and 80B are open, the gate valve 90A and 90B is set to the maintenance mode and the maintenance switch separately installed is turned on. The interlocks related to 90A and 90B are released, and the gate valves 90A and 90B can be opened.

  When opening the maintenance door 80A, an air atmosphere flows from the clean unit 62A into the transfer chamber 6A in order to increase the oxygen concentration in the transfer chamber 6A to the oxygen concentration in the atmosphere or more, preferably to the oxygen concentration in the atmosphere. Let At this time, the circulation purge in the transfer chamber 6A is canceled and the atmosphere in the transfer chamber 6A is exhausted outside the transfer chamber 6A so that the pressure in the transfer chamber 6A does not become higher than the pressure in the transfer chamber 8. At the same time, the rotational speed of the fan of the clean unit 62A is reduced below the rotational speed at the time of the circulation purge, and the amount of air flowing into the transfer chamber 6A is controlled. By controlling in this way, the pressure in the transfer chamber 6A can be kept lower than the pressure in the transfer chamber 8 while increasing the oxygen concentration in the transfer chamber 6A.

  When the oxygen concentration in the transfer chamber 6A becomes equal to the oxygen concentration in atmospheric pressure, the interlock is released and the maintenance door 80A can be opened. At this time, even if the oxygen concentration in the transfer chamber 6A is equal to the oxygen concentration in atmospheric pressure, the maintenance door 80A cannot be opened if the pressure in the transfer chamber 6A is higher than the pressure in the transfer chamber 8. Is set to When the maintenance door 80A is opened, the rotational speed of the fan of the clean unit 62A is made larger than at least the rotational speed during the circulation purge. More preferably, the rotational speed of the fan of the clean unit 62A is maximized.

  Maintenance in the transfer chamber 9 is performed from a maintenance port 78 </ b> C formed in a portion in front of the transfer chamber 9 where no pod opener is installed. The maintenance port 78C is configured to be opened and closed by a maintenance door. As described above, when the entire processing apparatus 2 is set to the maintenance mode, the gate valves 90A and 90B can be opened and maintenance can be performed from the gate valves 90A and 90B side. That is, the maintenance in the transfer chamber 8 can be performed from either the front of the apparatus or the back of the apparatus.

<Effects of this embodiment>
According to the present embodiment, one or more effects shown below can be obtained.

  (1) By arranging the utility system from the housing side to the exhaust box and the supply box, the maintenance area on the rear surface of the processing apparatus can be widened. With such a configuration, the maintenance port on the back surface of the transfer chamber can be widely formed, and the maintainability can be improved. In addition, by widening the maintenance area on the back of the processing apparatus, it is not necessary to secure maintenance areas on both sides of the apparatus, so that the footprint of the apparatus can be reduced.

  (2) By installing the utility system of the left and right processing modules facing each other on both outer side surfaces of the processing apparatus, the space on the back of the apparatus can be used as a maintenance area common to the left and right processing modules. For example, in a conventional apparatus, a supply box and an exhaust box may be installed so as to face each other at both ends on the back of the apparatus. When two apparatuses having such a configuration are arranged, one exhaust box and the other supply box are adjacent to each other at the boundary line between the two apparatuses. On the other hand, according to the present embodiment, since a utility system is not arranged at the boundary line between two processing modules, a wide maintenance area can be secured.

  (3) By installing the final valve of the gas supply system above the exhaust box, the piping length from the final valve to the processing chamber can be shortened. That is, gas delay and flow rate fluctuations during gas supply can be suppressed, and the quality of film formation can be improved. Usually, since the quality of film formation is affected by gas supply conditions such as gas flow rate and gas pressure, it is preferable to install a supply box near the casing in order to stably supply gas into the reaction tube. However, in the present invention, by providing the final valve near the reaction tube, it is possible to dispose the supply box at a position away from the housing without adversely affecting the quality of film formation. Further, by disposing the exhaust box below the exhaust pipe extending from the processing vessel (reaction tube) and disposing the final valve immediately above it, the piping length to the processing chamber can be shortened. Further, by installing the final valve directly above the exhaust box, maintenance such as replacement of the final valve becomes easy.

  (4) By disposing each configuration line-symmetrically with respect to the boundary between the processing modules, it is possible to suppress variations in film formation quality between the left and right processing modules. That is, by installing each configuration in the processing module, utility system, gas supply pipe arrangement and exhaust pipe arrangement symmetrically, the pipe length from the supply box to the reaction pipe and the pipe length from the reaction pipe to the exhaust box can be reduced. The left and right processing modules can be substantially the same. Accordingly, film formation can be performed under the same conditions in the left and right processing modules, and the quality of the film formation can be made uniform, so that productivity can be improved.

  (5) The maintenance door can be opened 180 degrees by installing the maintenance door on the boundary between the two processing modules and rotating toward the other processing module. Since the maintenance port can be formed widely, the maintenance performance can be improved.

  (6) While performing substrate processing with one processing module, it becomes possible to perform maintenance on the other processing module and the transfer chamber. Thereby, since maintenance can be performed without stopping the film forming process, the operating rate of the apparatus can be increased and productivity can be improved.

  (7) When opening the maintenance door of one processing module, the oxygen concentration in the transfer chamber is increased to the oxygen concentration at atmospheric pressure while maintaining the pressure in the transfer chamber lower than the pressure in the transfer chamber. Inflow of the atmosphere from the transfer chamber to the transfer chamber to the transfer chamber can be suppressed. In addition, after opening the maintenance door, the number of rotations of the fan of the clean unit in the transfer chamber is increased from that during the circulation purge. Can be prevented from flowing in. With such a configuration, even if the maintenance door is opened in one processing module, the other processing module can continue to operate. That is, even if maintenance is performed in the transfer chamber, a clean atmosphere in the transfer chamber can be maintained, and an increase in oxygen concentration in the transfer chamber can be suppressed. Without being affected, it is possible to maintain the processing module being stopped. As a result, maintenance of the other processing module can be performed while one processing module is in operation, so that it is not necessary to stop operation of the entire processing apparatus during maintenance, and productivity can be improved. .

  The embodiment of the present invention has been specifically described above. However, the present invention is not limited to the above-described embodiment, and various modifications can be made without departing from the scope of the present invention.

For example, in the above-described embodiment, the example in which the DCS gas is used as the source gas has been described, but the present invention is not limited to such an aspect. For example, as the source gas, inorganic halosilane source materials such as DCS gas, HCD (Si ₂ Cl ₆ : hexachlorodisilane) gas, MCS (SiH ₃ Cl: monochlorosilane) gas, TCS (SiHCl ₃ : trichlorosilane) gas, etc. Halogen group-free such as gas, 3DMAS (Si [N (CH ₃ ) ₂ ] ₃ H: trisdimethylaminosilane) gas, BTBAS (SiH ₂ [NH (C ₄ H ₉ )] ₂ : Bisthal butylaminosilane) gas, etc. Amino group (amine) silane source gas, MS (SiH ₄ : monosilane) gas, DS (Si ₂ H ₆ : disilane) gas, and other inorganic group-free silane source gases can be used.

For example, in the above-described embodiment, the example in which the SiO ₂ film is formed has been described. However, the present invention is not limited to such an embodiment. For example, in addition to these, or in addition to these, nitrogen (N) -containing gas (nitriding gas) such as ammonia (NH ₃ ) gas, carbon (C) -containing gas such as propylene (C ₃ H ₆ ) gas, trichloride A boron (B) -containing gas such as boron (BCl ₃ ) gas or the like can be used to form a SiN film, a SiON film, a SiOCN film, a SiOC film, a SiCN film, a SiBN film, a SiBCN film, or the like. Even in the case where these films are formed, the film formation can be performed under the same processing conditions as in the above-described embodiment, and the same effect as in the above-described embodiment can be obtained.

  Further, for example, the present invention provides titanium (Ti), zirconium (Zr), hafnium (Hf), tantalum (Ta), niobium (Nb), aluminum (Al), molybdenum (Mo), tungsten (W) on the wafer W. The present invention can also be suitably applied to the case of forming a film containing a metal element such as

  In the above-described embodiment, an example in which a film is deposited on the wafer W has been described. However, the present invention is not limited to such an aspect. For example, the present invention can also be suitably applied to a case where a process such as an oxidation process, a diffusion process, an annealing process, or an etching process is performed on the wafer W or a film formed on the wafer W.

  Further, the above-described embodiments and modifications can be used in appropriate combination. The processing conditions at this time can be set to the same processing conditions as in the above-described embodiment or modification, for example.

3 ... Processing module 72 ... Supply box 74 ... Exhaust box 76 ... Controller box

Claims (40)

A first processing module having a first processing vessel for substrate processing;
A second processing module disposed adjacent to a side surface of the first processing module and having a second processing container for substrate processing;
A first exhaust system for exhausting the interior of the first processing container; and a first supply system for supplying a processing gas into the first processing container, adjacent to the rear surface of the first processing module. A first utility system to be arranged;
A second exhaust system for exhausting the inside of the second processing container; and a second supply system for supplying a processing gas into the second processing container, adjacent to the rear surface of the second processing module. A second utility system to be arranged;
With
In the back direction of the first processing module and the second processing module, the first processing module and the second processing module are connected between the first utility system and the second utility system. A common maintenance area is formed for
The substrate processing apparatus, wherein the first utility system and the second utility system are formed such that a rear side protrudes into the maintenance area rather than a front side. The first utility system includes a first supply box including the first supply system, and a first exhaust box including the first exhaust system,
The substrate processing apparatus according to claim 1, wherein the second utility system includes a second supply box including the second supply system, and a second exhaust box including the second exhaust system.   The maintenance area includes a region where the front side of the first utility system and the second utility system is larger than the back side of the first utility system and the second utility system. The substrate processing apparatus according to claim 2. A first final valve provided in a first pipe between the first processing container and the first supply box;
A second final valve provided in a second pipe between the second processing container and the second supply box;
The substrate processing apparatus according to claim 2, wherein the first final valve and the second final valve are disposed so as to avoid the maintenance area.   The maintenance port so that the maintenance port of the first exhaust box and the maintenance port of the second exhaust box face each other, and the maintenance port of the first supply box and the maintenance port of the second supply box face each other. The substrate processing apparatus of Claim 2 arrange | positioned at the area side. The first utility system includes an operation of the first final valve, the first exhaust system, and the first supply system on the back side of the first exhaust box and the first supply box. A first controller box for storing a first controller for controlling
The second utility system includes operations of the second final valve, the second exhaust system, and the second supply system on the back side of the second exhaust box and the second supply box. The substrate processing apparatus according to claim 4, wherein a second controller box that houses a second controller that controls the substrate is provided. The first exhaust box houses at least a first APC valve provided in the first exhaust system,
The substrate processing apparatus according to claim 2, wherein the second exhaust box houses at least a second APC valve provided in the second exhaust system. The first processing module and the second processing module are arranged symmetrically with respect to adjacent surfaces of the first processing module and the second processing module,
The substrate processing apparatus according to claim 1, wherein the first utility system and the second utility system are arranged symmetrically with respect to the adjacent surface.   The substrate processing apparatus according to claim 1, wherein the substrate processed in the first processing container and the substrate processed in the second processing container are rotated in directions opposite to each other.   The substrate processing apparatus according to claim 1, wherein each of the first processing container and the second processing container stores therein a substrate holder that supports a plurality of substrates vertically in a shelf shape. The first final valve is provided outside the first utility system,
The substrate processing apparatus according to claim 4, wherein the second final valve is provided outside the second utility system.   The first controller is configured to allow the first final valve to perform a plurality of cycles in which a source gas and a reaction gas are sequentially supplied into the first processing container. 2. The substrate processing apparatus according to 1.   The substrate processing according to claim 4, wherein a pipe length from the first final valve to the first processing container and a pipe length from the second final valve to the second processing container are configured to be equal. apparatus.   The substrate processing apparatus according to claim 1, wherein the first processing module and the second processing module are arranged without providing a gap therebetween. The first supply box houses at least a gas accumulation system provided in the first supply system,
The substrate processing apparatus according to claim 2, wherein the second supply box houses at least a gas integrated system included in the second supply system. In the first utility system, the smaller one of the first supply box and the first exhaust box is disposed on the first processing module side,
3. The substrate processing according to claim 2, wherein a smaller one of the second supply box and the second exhaust box is disposed on the second processing module side in the second utility system. apparatus.   The substrate processing according to claim 1, wherein the maintenance area is used in common for a first transfer chamber of the first processing module and a second transfer chamber of the second processing module. apparatus.   The maintenance area is adjacent to the back surface of the first transfer chamber of the first processing module and the second transfer chamber of the second processing module, and the first utility system and the second utility system. The first utility system and the second utility system are not present in between, and are used in common for the first transfer chamber and the second transfer chamber. Item 3. The substrate processing apparatus according to Item 2.   The maintenance area is adjacent to the back of the first maintenance door of the first transfer chamber of the first processing module and the second maintenance door of the second transfer chamber of the second processing module, and Between the one utility system and the second utility system, neither the first utility system nor the second utility system exists, and the first maintenance door and the second maintenance door 3. The substrate processing apparatus according to claim 1, wherein the substrate processing apparatus is commonly used for opening and closing. A first exhaust system for exhausting the inside of the first processing container of the first processing module; and a first supply system for supplying a processing gas into the first processing container. A first utility system disposed adjacent to the back surface;
A second exhaust system for exhausting the inside of the second processing container of the second processing module adjacent to the side surface of the first processing module; and a second exhaust gas for supplying a processing gas into the second processing container. A second utility system that is disposed adjacent to the back surface of the second processing module.
In the back direction of the first processing module and the second processing module, the first processing module and the second processing module are connected between the first utility system and the second utility system. A common maintenance area is formed for
The first utility system and the second utility system use a substrate processing apparatus formed so that the rear side protrudes into the maintenance area rather than the front side.
Processing gas is supplied from the first supply system into the first processing container, the first processing container is exhausted from the first exhaust system, and the substrate is processed in the first processing container. A first processing step,
A processing gas is supplied from the second supply system into the second processing container, the second processing container is exhausted from the second exhaust system, and the substrate is processed in the second processing container. A second processing step,
A method for manufacturing a semiconductor device, comprising:
The first processing step and the second processing step are:
The first utility system includes a first supply box including the first supply system, and a first exhaust box including the first exhaust system,
21. The second utility system is performed by the substrate processing apparatus including a second supply box including the second supply system and a second exhaust box including the second exhaust system. Semiconductor device manufacturing method. The first processing step and the second processing step are:
The substrate processing apparatus in which the maintenance area is configured such that the front side of the first utility system and the second utility system is larger than the back side of the first utility system and the second utility system. The method for manufacturing a semiconductor device according to claim 20, wherein the method is performed. A first final valve provided in a first pipe between the first processing container and the first supply box;
A second final valve provided in a second pipe between the second processing container and the second supply box;
The first final valve and the second final valve use the substrate processing apparatus arranged to avoid the maintenance area,
In the first processing step, the processing gas is supplied to the first processing container via the first final valve,
The method of manufacturing a semiconductor device according to claim 21, wherein, in the second processing step, the processing gas is supplied to the second processing container via the second final valve. The first processing step and the second processing step are:
The maintenance port so that the maintenance port of the first exhaust box and the maintenance port of the second exhaust box face each other, and the maintenance port of the first supply box and the maintenance port of the second supply box face each other. The method for manufacturing a semiconductor device according to claim 21, wherein the method is performed by the substrate processing apparatus disposed on an area side. In the first processing step, the first utility system includes a first controller housed in a first controller box provided on the back side of the first exhaust box and the first supply box. Controlling the operations of the first final valve, the first exhaust system and the first supply system;
In the second processing step, the second utility system includes a second controller housed in a second controller box provided on the back side of the second exhaust box and the second supply box. 24. The method of manufacturing a semiconductor device according to claim 23, wherein operations of the second final valve, the second exhaust system, and the second supply system are controlled. The first processing step includes a step of controlling exhaust in the first processing container by an APC valve provided in the first exhaust system and housed in the first exhaust box.
The said 2nd process process has the process of controlling the exhaust_gas | exhaustion in a said 2nd process container by the APC valve with which the said 2nd exhaust system accommodated in the said 2nd exhaust box is equipped. Semiconductor device manufacturing method. The first processing step and the second processing step are:
The first processing module and the second processing module are arranged in plane symmetry with respect to adjacent surfaces of the first processing module and the second processing module;
The method for manufacturing a semiconductor device according to claim 20 or 21, wherein the first utility system and the second utility system are performed by the substrate processing apparatus arranged in plane symmetry with respect to the adjacent surface. In the first processing step, the substrate is rotated and processed in the first processing container,
The semiconductor device according to claim 20 or 21, wherein, in the second processing step, processing is performed by rotating the substrate in a direction opposite to a rotation direction of the substrate in the first processing container in the second processing container. Manufacturing method. In the first processing step, a substrate holder for supporting a plurality of substrates vertically in a shelf shape in the first processing container is respectively housed and processed,
The semiconductor device according to claim 20 or 21, wherein, in the second processing step, a substrate holder for supporting a plurality of substrates vertically in a shelf shape in the second processing container is respectively accommodated and processed. Manufacturing method. In the first processing step, the processing gas is supplied to the first processing container via the first final valve provided outside the first utility system,
24. The semiconductor device according to claim 23, wherein, in the second processing step, the processing gas is supplied to the second processing container via the second final valve provided outside the second utility system. Production method.   26. In the first processing step, the first controller causes the first final valve to perform a cycle of sequentially supplying a source gas and a reaction gas into the first processing container a plurality of times. Semiconductor device manufacturing method. The first processing step and the second processing step are:
24. The substrate processing apparatus according to claim 23, wherein a pipe length from the first final valve to the first processing container is equal to a pipe length from the second final valve to the second processing container. Semiconductor device manufacturing method. The first processing step and the second processing step are:
The method of manufacturing a semiconductor device according to claim 20 or 21, wherein the first processing module and the second processing module are performed by the substrate processing apparatus arranged without providing a gap therebetween. In the first processing step, a step of controlling the supply of the processing gas into the first processing container in a gas accumulation system provided in the first supply system and housed in the first supply box. Have
In the second processing step, a step of controlling the supply of the processing gas into the second processing container in a gas integrated system provided in the second supply system and housed in the second supply box. A method for manufacturing a semiconductor device according to claim 21. The first processing step and the second processing step are:
In the first utility system, the smaller one of the first supply box and the first exhaust box is disposed on the first processing module side,
In the second utility system, the smaller one of the second supply box and the second exhaust box is performed by the substrate processing apparatus disposed on the second processing module side. Item 22. A method for manufacturing a semiconductor device according to Item 21. The first processing step and the second processing step are:
The maintenance area is performed by the substrate processing apparatus configured to be used in common for the first transfer chamber of the first processing module and the second transfer chamber of the second processing module. A method for manufacturing a semiconductor device according to claim 20 or claim 21. The first processing step and the second processing step are:
The maintenance area is adjacent to the back of the first transfer chamber of the first processing module and the second transfer chamber of the second processing module, and the first utility system and the second utility system In the meantime, neither the first utility system nor the second utility system exists, and it is configured to be used in common for the first transfer chamber and the second transfer chamber. The method for manufacturing a semiconductor device according to claim 20, wherein the method is performed by the substrate processing apparatus. The first processing step and the second processing step are:
The maintenance area is adjacent to the back of the first maintenance door of the first transfer chamber of the first processing module and the second maintenance door of the second transfer chamber of the second processing module, and Between the one utility system and the second utility system, neither the first utility system nor the second utility system exists, and the first maintenance door and the second maintenance door The method for manufacturing a semiconductor device according to claim 20 or 21, wherein the method is performed by the substrate processing apparatus configured to be commonly used for opening and closing. A first exhaust system for exhausting the inside of the first processing container of the first processing module; and a first supply system for supplying a processing gas into the first processing container. A first utility system disposed adjacent to the back surface;
A second exhaust system for exhausting the inside of the second processing container of the second processing module adjacent to the side surface of the first processing module; and a second exhaust gas for supplying a processing gas into the second processing container. A second utility system that is disposed adjacent to the back surface of the second processing module.
In the back direction of the first processing module and the second processing module, the first processing module and the second processing module are connected between the first utility system and the second utility system. A common maintenance area is formed for
The first utility system and the second utility system are formed by a substrate processing apparatus formed so that the rear side protrudes into the maintenance area rather than the front side.
Processing gas is supplied from the first supply system into the first processing container, the first processing container is exhausted from the first exhaust system, and the substrate is processed in the first processing container. A first processing procedure,
A processing gas is supplied from the second supply system into the second processing container, the second processing container is exhausted from the second exhaust system, and the substrate is processed in the second processing container. A second processing procedure,
A program stored in a computer-readable recording medium for performing
A first exhaust system for exhausting the inside of the first processing container of the first processing module; and a first supply system for supplying a processing gas into the first processing container. A first utility system disposed adjacent to the back surface;
A second exhaust system for exhausting the inside of the second processing container of the second processing module adjacent to the side surface of the first processing module; and a second exhaust gas for supplying a processing gas into the second processing container. A second utility system that is disposed adjacent to the back surface of the second processing module.
In the back direction of the first processing module and the second processing module, the first processing module and the second processing module are connected between the first utility system and the second utility system. A common maintenance area is formed for
The first utility system and the second utility system are formed by a substrate processing apparatus formed so that the rear side protrudes into the maintenance area rather than the front side.
Processing gas is supplied from the first supply system into the first processing container, the first processing container is exhausted from the first exhaust system, and the substrate is processed in the first processing container. A first processing procedure,
A processing gas is supplied from the second supply system into the second processing container, the second processing container is exhausted from the second exhaust system, and the substrate is processed in the second processing container. A second processing procedure,
A computer-readable recording medium storing a program for performing the operation.

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