JP6260869B2 - Manufacturing method of glass film and manufacturing method of electronic device including the glass film - Google Patents

Description

  The present invention relates to a method for manufacturing a glass film and a method for manufacturing an electronic device including the glass film.

  In recent years, flat panel displays such as a liquid crystal display, a plasma display, an organic EL display, and a field emission display are widely used in place of the conventional CRT type display from the viewpoint of space saving. And in these flat panel displays, further thinning is required.

  In particular, an organic EL display and organic EL lighting can be provided with a function of being able to be folded and wound using the fact that the thickness dimension is very small (thin). As a result, not only is it easy to carry, but it can be used in a curved surface state in addition to the conventional flat state, and therefore, it is expected to be used for various purposes. Therefore, further improvement in flexibility is required for glass substrates and cover glasses used in these electronic devices.

  In order to impart flexibility to the glass substrate, it is effective to make the glass substrate thinner. Here, for example, Patent Document 1 proposes a glass film having a thickness dimension of 200 μm or less, and this makes it possible to impart high flexibility to a glass substrate that can be used in a curved state.

  On the other hand, a glass substrate used for an electronic device such as a flat panel display or a solar cell is subjected to various processing related to electronic device manufacturing such as secondary processing and cleaning. However, if the glass substrate used in these electronic devices is thinned, the glass is a brittle material, which may cause breakage even if there is a slight stress change. There is a problem that it becomes difficult. In addition, since a glass film having a thickness of 200 μm or less is rich in flexibility, there is a problem that positioning is difficult when performing various manufacturing-related processes (for example, deviation occurs during patterning).

  Regarding the above problem, for example, as shown in Patent Document 2, a laminated body is proposed in which a glass film and a supporting glass that supports the glass film are laminated and fixed to each other on a supporting glass. If various manufacturing-related treatments are performed on the structure thus configured, the support glass acts as a reinforcing material even if a glass film with poor strength and rigidity is used alone. In this case, positioning as a laminated body can be easily performed. Moreover, it becomes possible to finally acquire only the glass film to which the required process was given by peeling support glass from a glass film after completion | finish of a process. Furthermore, by making the thickness dimension of the laminated body including the glass film the same as the thickness dimension of the conventional (existing) glass substrate, the production line for the conventional glass substrate is used as the production line for electronic devices (shared) ) You can expect benefits.

  On the other hand, some manufacturing-related processes involve heating such as a film-forming process of a transparent conductive film and a sealing process. When the laminated body having the structure as described above is subjected to a treatment with heating, the fixing force between the supporting glass and the glass film that are in direct contact or indirectly through the resin layer or the inorganic thin film layer is increased. The problem that it becomes difficult to peel a glass film from support glass arises.

  In order to solve the above problem, for example, Patent Document 3 discloses a supporting glass substrate and a resin layer from an electronic device with a support in which a resin layer having easy peelability fixed to the supporting glass substrate is in close contact with the glass substrate. When peeling the support made of the above, a method has been proposed in which a knife is inserted into the interface between the resin layer of the support and the glass substrate to peel the support from the electronic device including the glass substrate.

  In order to solve the above problem, for example, in Patent Document 4, a supporting glass protrudes from a glass film and is laminated, and a thin portion is provided on an edge of the supporting glass, so that at least one of the edges of the glass film is provided. A glass film laminate in which the part is spaced apart from the supporting glass on the thin part has been proposed.

JP 2010-132531 A International Publication No. 2011/048979 JP2013-147325A JP 2012-131664 A

  In patent document 3, it is going to start peeling by inserting a knife between a glass film and a support body, but when the glass film and a support body are mutually adhered until it reaches the edge part. There is no gap for inserting the knife at the interface between the glass film and the support, and it is necessary to push the knife into the interface with a strong force. When the knife is pushed into the interface in this way, the edge of the glass film may be damaged by the pushing force acting on the glass film, which is not preferable.

  On the other hand, in Patent Document 4, since a thin portion is provided at the end of the supporting glass and a part of the edge of the glass film is separated from the supporting glass on the thin portion, the glass film can be easily formed. It seems that the glass film can be peeled relatively easily without damaging the glass film. However, this method necessitates special processing on a part of the supporting glass in advance, which increases processing costs. In addition, some manufacturing-related processes for electronic devices use a solvent such as a chemical solution. If there is a gap between the glass film and the support glass in the state of the laminate, the solvent enters the gap and is fixed. As a result, there is a problem that the glass film is broken when the glass film is peeled off from the supporting glass.

  In view of the above circumstances, in the present specification, it is a technical problem to be solved by the present invention to easily and inexpensively peel a glass film from a support regardless of the type of manufacturing-related treatment.

  The solution to the above problem is achieved by the method for producing a glass film according to the present invention. That is, this manufacturing method includes a laminate forming step of forming a laminate including a glass film by laminating a glass film and a support supporting the glass film and fixing the laminate to a peelable state, and a laminate. A manufacturing-related processing step for performing manufacturing-related processing on the substrate, and a separation step for separating the laminate into a glass film and a support by peeling the support from the glass film after the manufacturing-related processing step. A method for producing a glass film, characterized in that, in the separation step, an external force is applied only to the support and the support is bent in a direction away from the glass film. The term “support only” here means that the external force for bending the support is applied only to the support, and the external force applied for purposes other than bending the support. It does not prevent the point of action from being other than the support. In addition, the “manufacturing-related treatment” referred to here includes not only a treatment for directly processing a glass film, but also a device containing a glass film or a glass film indirectly, such as attachment of other members or cleaning of the glass film surface. It shall widely include processing to bring it close to the final product (shipment state).

  In this way, when separating the glass film and the support that supports the glass film, by applying an external force to the support and bending the support in a direction away from the glass film, the support is removed from a flat state. Turn according to direction. On the other hand, since the glass film is fixed to the support, it tends to bend together with the support from a flat state. At this time, the support body is restricted from moving in the direction to return to the flat state by an external force, but such a restricting force does not act on the glass film, so the force to return to the flat state (restoring force) Only works. That is, the regulation force and the restoring force cooperate to act as a force in the direction of separating the glass film and the support from each other, so that the end of the glass film can be relatively easily performed without bending the support so much. It becomes possible to form a gap as a starting point of peeling between the substrate and the support. In addition, since the external support is applied only to the support and the support is bent, the starting point of peeling can be formed without contacting the glass film. Thereby, compared with the case where the knife is pushed into the interface between the glass film and the support as in the prior art to form the starting point of peeling, the starting point of peeling can be formed safely. In addition, the support can be formed flat so that the support comes in contact with the glass film over the entire surface thereof, and it is not necessary to perform special secondary processing, so that an increase in processing cost can be avoided. Of course, if the laminate is configured so that the entire surface of the glass film is supported by the support, it is possible to avoid a situation in which a solvent such as a chemical solution enters the gap, so it can be used in a wide range of applications regardless of manufacturing-related processing. The present invention can be applied when manufacturing the glass film according to the present invention.

  Further, in the method for producing a glass film according to the present invention, the support body protrudes from the glass film in a state where the laminate is viewed in plan, and in the separation step, the protrusion portion from the glass film in the support body. Alternatively, an external force may be applied only to bend the support in a direction away from the glass film.

  Thus, by applying an external force to the portion of the support that protrudes from the glass film, the point of action of the external force is located at a location away from the fixing surface (interface) with the glass film. Therefore, a larger bending moment can be generated at the interface end portion between the support and the glass film, and a gap serving as a starting point of peeling can be formed with a smaller amount of bending. Further, if the external force is applied to the region where the support and the glass film overlap in the thickness direction, even if the external force is applied to the surface of the support opposite to the glass film, the influence of the external force is Although it is difficult to completely eliminate the concentrated load on the glass film located directly behind, it is preferable to apply an external force to the protruding portion because there is no concern as described above.

  Further, in the method for producing a glass film according to the present invention, both the glass film and the support have a corner portion, and in the laminate, the support protrudes from the glass film at the corner portion. In addition, an external force may be applied only to the protruding portion at the corner portion of the support, and the support may be bent in a direction away from the glass film.

  By doing in this way, it is possible to preferentially and intensively apply the force (external force and restoring force as the regulating force described above) for forming the starting point of peeling start to the top of the corner portion of the glass film. it can. Further, since the peeling area gradually increases as the peeling progresses, it is possible to form the starting point of the peeling more smoothly. That is, even if it is the starting point of the peeling start, it is important that a gap is formed between the glass film and the support over a certain range in consideration of the smooth peeling operation after the starting point is formed. . For this reason, it is desirable that the gap is sequentially formed from the top of the corner as described above.

  Moreover, the manufacturing method of the glass film which concerns on this invention may provide the external force equivalent to 2 edges of the support body which comprises a corner part, and may bend a support body.

  In this way, the corner portion of the support can be bent like an isosceles triangle in a plan view. Therefore, the corner portion of the glass film supported by this support can also form a gap that is the starting point of peeling equally like an isosceles triangle, and the glass film can be peeled smoothly and smoothly. .

  Moreover, the manufacturing method of the glass film which concerns on this invention may provide the adsorption | suction force of the direction away from a glass film to the surface on the opposite side to the glass film of a support body as external force. Alternatively, as an external force, a pressing force in a direction away from the glass film may be applied to the surface of the protruding portion of the support on the glass film side.

  Thus, as an external force, if an adsorption force is applied to the surface of the support opposite to the glass film, an appropriate amount of external force can be easily applied only to the support, even without a protruding portion. The support can be bent in a predetermined direction. In addition, if there is a protruding portion, by applying a pressing force to the surface of the protruding portion of the support on the glass film side, an appropriate external force can be applied only to the support more easily. The support can be bent in a predetermined direction.

  Moreover, the manufacturing method of the glass film which concerns on this invention gives an external force only to a support body in the state which adsorb | sucked the glass film with the adsorption member from the opposite side to a support body in a isolation | separation process, and leaves | separates from a glass film. The support may be bent in the direction.

  In this way, when the support is bent, the glass film has a force (restoring force) to return to its original state when it is bent together with the support, and in the same direction as the restoring force by the adsorbing member. It will be in the state where the adsorption | suction power of was provided. Thereby, even if it exists in the state bent in the direction which leaves | separates a support body from a glass film, a glass film can be maintained in a flat state as much as possible. Therefore, it is possible to form a gap that becomes a starting point of peeling more safely without almost bending the glass film itself.

  Moreover, the manufacturing method of the glass film which concerns on this invention may move an adsorption | suction member to the direction spaced apart from a support body in the state which adsorb | sucked the glass film with the adsorption member, and the state which bent the support body. .

  In this way, by bending the support while adsorbing the glass film, even if the starting point of the peeling start is not sufficiently formed at that time (they can be easily peeled off by a known main peeling operation thereafter). Even if a gap of a certain size is not formed), a tensile force in a direction away from the support can be applied to the glass film by further moving the adsorption member in a direction away from the support from that state. it can. Thereby, it becomes possible to form reliably the starting point of peeling start between a glass film and a support body. In addition, in order to give the tensile force of the direction to separate to the glass film in the flat state by moving the adsorption member already in the adsorption state with the glass film, the tensile force is applied to the glass film as much as possible and without bias. Can be granted. In addition, since the restoring force has already been applied to the glass film, a gap having an appropriate size as a starting point of peeling can be formed without applying a very large tensile force. For the above reasons, the possibility of causing damage to the glass film is very small.

  In addition, the glass film manufacturing method according to the present invention has both the glass film and the adsorption part of the adsorption member have a corner part, and in the separation step, the corner part of the adsorption part is aligned with the corner part of the glass film, A glass film may be adsorbed by an adsorbing member.

  If it does in this way, adsorption power can be most effectively given to a glass film, and it can maintain a flat state as much as possible until the glass film reaches the end. Therefore, it is possible to form a gap serving as a starting point of peeling without bending the glass film as much as possible.

  In the method for producing a glass film according to the present invention, the support may be plate glass. In this case, in the laminate, the plate glass and the glass film may be in direct contact.

  Thus, the support body which was excellent in surface accuracy can be manufactured at low cost by making a support body into plate glass. In addition, by directly adhering the glass sheet and the glass film having excellent surface accuracy in this way, the glass film can be fixed to the support body without misalignment, but the glass film support body according to the present invention can be securely and safely. It becomes possible to peel from the sheet glass as.

  Moreover, the solution of the above-mentioned problem is also achieved by the electronic device manufacturing method according to the present invention. That is, this manufacturing method includes a laminate forming step of forming a laminate including a glass film by laminating a glass film and a support supporting the glass film and fixing the laminate to a peelable state, and a laminate. An attachment step of attaching an electronic device element to the glass film of the method, and an electronic device with a support comprising the electronic device element attached to the laminate by peeling the support from the glass film after the attachment step, the glass film including the glass film An electronic device manufacturing method comprising an electronic device and a separation step of separating the support into the support, wherein in the separation step, an external force is applied only to the support and the support is bent in a direction away from the glass film. Characterized with points.

  As described above, according to the present invention, when the electronic device including the glass film and the support that supports the electronic device are separated, the regulation force (external force) and the restoring force described above cooperate to support the glass film. Since it acts as a force in the direction of separating the body from each other, a gap that becomes the starting point of the peeling start is formed between the end of the glass film and the support relatively easily without bending the support so much. Is possible. In addition, since the external support is applied only to the support and the support is bent, the starting point of peeling can be formed without contacting the glass film. Thereby, compared with the case where a knife is inserted in the clearance gap between a glass film and a support body and the starting point of peeling start is formed, the starting point of peeling start can be formed safely. In addition, the support can be formed flat so that the support comes in contact with the glass film over the entire surface thereof, and it is not necessary to perform special secondary processing, so that an increase in processing cost can be avoided. Of course, if the laminate is configured so that the entire surface of the glass film is supported by the support, it is possible to avoid a situation in which a solvent such as a chemical solution enters the gap, regardless of the attachment contents of the electronic device element, The present invention can be applied when manufacturing electronic devices for a wide range of applications.

  As described above, according to the present invention, it is possible to start peeling between the support and the glass film easily and at low cost regardless of the type of manufacturing-related treatment.

It is a flowchart which shows the procedure of the manufacturing method of the electronic device which concerns on 1st embodiment of this invention. It is sectional drawing of the laminated body containing a glass film. It is a top view of the laminated body shown in FIG. It is sectional drawing of the electronic device with a support body which attaches an electronic device element to the laminated body shown in FIG. It is a top view of the starting point formation apparatus for forming the starting point of the peeling start of a glass film and a support body. It is a perspective view of the latching | locking part which comprises an external force provision part. It is principal part sectional drawing of the starting point formation apparatus shown in FIG. It is principal part sectional drawing for demonstrating the operation | movement which forms the starting point of peeling start using the starting point formation apparatus shown in FIG. It is a principal part perspective view for demonstrating the operation | movement which forms the starting point of peeling start using the starting point formation apparatus shown in FIG. It is principal part sectional drawing of the starting point formation apparatus which concerns on 2nd embodiment of this invention. It is principal part sectional drawing for demonstrating the operation | movement which forms the starting point of peeling start using the starting point formation apparatus shown in FIG. It is a principal part top view which shows the other arrangement | positioning aspect of the adsorption | suction member of the starting point formation apparatus shown in FIG. It is principal part sectional drawing which shows the other arrangement | positioning aspect of the adsorption | suction member of the starting point formation apparatus shown in FIG. It is principal part sectional drawing of the starting point formation apparatus which concerns on 3rd embodiment of this invention. It is principal part sectional drawing of the starting point formation apparatus which concerns on 4th embodiment of this invention. It is sectional drawing of the liquid crystal panel with a support body at the time of manufacturing a liquid crystal panel as an electronic device which is an application object of this invention.

  Hereinafter, a first embodiment of an electronic device manufacturing method according to the present invention will be described with reference to FIGS. In addition, in this embodiment, when manufacturing the organic EL panel as an electronic device, the organic EL panel with the support is attached to the organic EL panel and the support by peeling the glass film and the support. An example of the case of separation will be described below.

  As shown in FIG. 1, the manufacturing method of the electronic device which concerns on one Embodiment of this invention is electronic to a glass film with the laminated body formation process S1 which forms the laminated body containing a glass film, and the heating to a glass film. An attachment step S2 for attaching the device element, and a separation step S3 for separating the laminated body attached with the electronic device element into an electronic device and a support. Hereinafter, each process will be described in detail.

(S1) Laminate Forming Step First, as shown in FIG. 2, a glass film 2 is laminated on a support 1 to form a laminate 3.

  Here, the glass film 2 is formed of, for example, silicate glass, silica glass, or the like, preferably formed of borosilicate glass, and more preferably formed of alkali-free glass. If the glass film 2 contains an alkali component, cations may drop on the surface, and so-called soda blowing may occur. In that case, since the part which becomes structurally rough arises in the glass film 2, when using this glass film 2 in the curved state, there is a possibility of causing damage starting from the part roughened due to aging. is there. For the above reasons, when there is a possibility of using the glass film 2 in a non-flat state, it is preferable to form the glass film 2 with non-alkali glass.

  In addition, an alkali-free glass here refers to the glass which does not contain an alkali component (alkali metal oxide) substantially, and specifically refers to the glass whose alkali component is 3000 ppm or less. Of course, from the viewpoint of preventing or reducing deterioration over time due to the above reason, glass of 1000 ppm or less is preferable, glass of 500 ppm or less is more preferable, and glass of 300 ppm or less is more preferable.

  The thickness dimension of the glass film 2 is set to 300 μm or less, preferably 200 μm or less, and more preferably 100 μm or less. The lower limit of the thickness dimension can be set without any particular restriction, but in consideration of the handleability after molding (when laminated with the support 1 or during peeling), it is set to 1 μm or more, preferably 5 μm or more. Is done.

The support 1 is a plate-like glass in the present embodiment, and is formed of a known glass such as silicate glass, silica glass, borosilicate glass, non-alkali glass, and the like, similar to the glass film 2. However, from the viewpoint of preventing as much as possible unnecessary deformation and breakage of the glass film 2 due to the difference in thermal deformation in the manufacturing-related processing of the electronic device with heating (in the mounting step S2 in the present embodiment), 30 ° C. It is good to select the kind of glass so that the difference of the linear expansion coefficient of the support body 1 and the glass film 2 between -380 degreeC may be less than 5 * 10 < ^-7 > / degreeC. In this case, it is preferable to form the support body 1 and the glass film 2 with the same kind of glass.

  The thickness dimension of the support 1 is not particularly limited as long as the handleability of the glass film 2 can be improved, and is set to the same level or more as the thickness dimension of the glass film 2. Specifically, the thickness dimension of the support 1 is set to 400 μm or more, preferably 500 μm or more. The upper limit value of the thickness dimension can be set without any particular limitation, but it is preferable to keep the thickness dimension so as to withstand the bending of the support 1 described later. Specifically, it should be set to 1000 μm or less, preferably 700 μm or less.

  The support 1 and the glass film 2 are formed by a known forming method such as a down draw method, preferably by an overflow down draw method. It is also possible to mold by a float method, a slot down draw method, a roll out method, an up draw method or the like. In addition, it is also possible to set it to the thickness dimension of less than 100 micrometers by giving a secondary process as needed (stretching a glass primary molded object by a redraw).

  In the state in which the laminate 3 is configured, the support 1 and the glass film 2 are fixed to such an extent that they can be peeled. Arbitrary means can be adopted as the fixing means, and in this embodiment, the plate-like glass as the support 1 and the glass film 2 are directly brought into close contact with each other without interposing an adhesive or the like. Realized.

  At this time, the surface 2a on the support 1 side of the glass film 2 (lower surface in FIG. 2) and the surface 1a on the glass film 2 side of the support 1 (upper surface in FIG. 2). Both surface roughness Ra is set to 2.0 nm or less. By setting the surface roughness Ra of each of the surfaces 1a and 2a within the above-described range, the support 1 and the glass film 2 can be laminated in a state where they are fixed to each other without misalignment (form the laminate 3). It becomes possible. Of course, from the viewpoint of improving adhesion, the thickness is preferably 1.0 nm or less, and more preferably 0.2 nm or less.

  On the other hand, the size of the surface roughness Ra of the surface 2b opposite to the support 1 of the glass film 2 is not particularly limited, but in the mounting step S2 to be described later, the surface to be subjected to electronic device related processing such as film formation Therefore, the surface roughness Ra is preferably 2.0 nm or less, more preferably 1.0 nm or less, and further preferably 0.2 nm or less.

  Moreover, in the state which laminated | stacked the glass film 2 and the support body 1 from the viewpoint of protecting the edge part of the glass film 2, the support body 1 has protruded from the glass film 2 (FIG. 2). In this case, the amount of protrusion of the support 1 from the glass film 2 is set to, for example, 0.5 mm or more and 10 mm or less, preferably 0.5 mm or more and 1.0 mm or less. As described above, by reducing the amount of protrusion of the support 1 (about 10 mm at the maximum), the glass film 2 having a relatively large area can be efficiently supported on the entire surface.

  In the present embodiment, as shown in FIG. 3, the support 1 protrudes from the glass film 2 at the entire periphery of the laminate 3, whereby the support 1 is a glass film at the corner portion 4 of the support 1. It's starting from 2. In the present embodiment, the support body 1 protrudes from the glass film 2 at all four edges of the laminate 3. Of course, the support body 1 is made of glass at three or one edge. It is also possible to take a form protruding from the film 2. In this case, it is desirable that the end surface of the glass film 2 and the end surface of the support 1 coincide with each other on the non-projecting side edge.

  In addition, when forming the above-mentioned laminated body 3, you may make it perform a lamination | stacking operation under reduced pressure. Thereby, when the glass film 2 is laminated | stacked on the support body 1, it becomes possible to reduce or eliminate the bubble which arises (remains) between the glass film 2 and the support body 1. FIG.

(S2) Attachment process After forming the laminated body 3 including the glass film 2 as described above, manufacturing related processing of an electronic device involving heating of the laminated body 3, specifically, organic as an electronic device element The EL element 5 is attached. Thereby, as shown in FIG. 4, the organic EL element 5 is formed on the surface 2b on the opposite side to the support body 1 of the glass film 2 which forms a part of the laminated body 3. Then, the cover glass 6 is placed on the organic EL element 5, and the periphery of the cover glass 6 is fixed to the glass film 2 to seal the organic EL element 5. Thereby, the organic EL panel 8 with a support in a state where the support 1 is fixed to the organic EL panel 7 is formed.

  The thickness dimension of the cover glass 6 is set to, for example, 300 μm or less, preferably 200 μm or less, and more preferably 100 μm or less. Thus, by setting the thickness dimension of the cover glass 6, it is possible to give the cover glass 6 appropriate flexibility.

  Moreover, the attachment aspect of the organic EL element 5 on the glass film 2 is arbitrary, for example, on the surface 2b on the opposite side to the support 1 of the glass film 2, by a known film formation method such as CVD or sputtering, The organic EL element 5 may be formed by sequentially forming an anode layer, a hole transport layer, a light emitting layer, an electron transport layer, a cathode layer, and the like (detailed illustration is omitted). Further, the means for fixing the cover glass 6 to the glass film 2 is also arbitrary. For example, the cover glass 6 may be fixed to the glass film 2 using a known laser sealing technique. In this case, the film forming process by the CVD method, sputtering, or the like corresponds to the manufacturing related process of the electronic device with heating. Therefore, the glass film 2 is heated by forming the organic EL element 5 on the surface 2b opposite to the support 1 of the glass film 2 as described above. Further, a new bond is formed between the glass film 2 and the support 1 due to this heating, and the glass film 2 and the support 1 are compared with each other when laminated (when the laminate 3 is formed). Fixing force increases.

  In the form shown in FIG. 4, the cover glass 6 and the glass film 2 are directly fixed. However, the cover glass 6 is attached to the glass film 2 by appropriately using a known glass frit, spacer, or the like (not shown). It may be bonded and fixed.

(S3) Separation Step After forming the organic EL panel 8 with a support in this manner, the support 1 is peeled off from the glass film 2 constituting the organic EL panel 8 with a support, thereby supporting the organic EL with the support. The panel 8 is separated into the organic EL panel 7 and the support 1. FIG. 5 shows a plan view of the starting point forming apparatus 10 for forming the starting point of separation during the separation. The apparatus 10 mainly includes a holding base 11 that holds the laminate 3 including the glass film 2 and an external force applying unit 12 that applies an external force only to the support 1. In FIG. 5 and subsequent figures, the organic EL element 5 and the cover glass 6 are omitted.

  The holding table 11 is capable of holding the laminated body 3 in a flat state. In the present embodiment, the holding table 11 has a mounting surface 13 on which the surface 1b opposite to the glass film 2 of the support 1 is mounted, and a mounting surface. 13 and a holding portion 14 that holds the edge portion of the support 1 with the mounting surface 13 in the thickness direction. In this embodiment, the clamping part 14 comprises the corner part 4 of the support body 1, and is arrange | positioned in the position which can clamp the 2 edge of the support body 1 adjacent to the mounting surface 13 mutually. .

  The external force applying unit 12 is provided at one corner 15 of the holding table 11. In the present embodiment, the external force imparting portion 12 constitutes one corner portion 15 of the holding base 11, and the lifting portion 16 that can be lifted and lowered along the normal direction of the mounting surface 13, It has an engaging part 17 which is provided at the upper part and engages with the corner part 4 of the support 1 placed on the placing surface 13 as the elevating part 16 descends.

  The latching | locking part 17 is comprised so that it may contact | abut by equal distance with the two edges which comprise the corner part 4 of the support body 1 (refer FIG. 5). Moreover, in this embodiment, the latching | locking part 17 has the inclined surface 17a (refer FIG. 6). The inclined surface 17a is for adjusting the curvature (radius) of the corner portion 4 when the support body 1 is bent as will be described later, and the inclination angle of the inclined surface 17a and the descending amount of the elevating unit 16 are adjusted. Thus, the curvature (radius) of the corner portion 4 is controlled to a predetermined size. In the illustrated example, the inclined surface 17a is provided at two locations so as to come into contact with the two edges of the corner portion 4 of the support 1, respectively, and when the corner portion 4 is bent at a predetermined curvature (radius), Each inclined surface 17a is set to a corresponding inclination angle so that the upper surface (surface 1a on the glass film 2 side) of the portion 4 is in contact with the two inclined surfaces 17a. Of course, the inclined surface 17a may be a tapered surface as shown, or may be a curved surface having a predetermined curvature for the reason described above.

  Next, an example of the separation operation using the starting point forming apparatus 10 having the above configuration will be described mainly based on FIGS.

  First, as shown in FIG. 5, the organic EL panel 8 with a support is placed on the placement surface 13 of the starting point forming apparatus 10. At this time, the corner portion 4 of the support 1 is placed in accordance with one corner portion 15 (lower left in FIG. 5) of the holding base 11 where the external force applying portion 12 is provided. In this state, as shown in FIG. 7, the end surface of the support 1 abuts against the side surface of the locking portion 17, thereby positioning the support 1 and the organic EL panel 8 with the support including the support 1 in the planar direction. The Further, by inserting two edges of the support 1 between the holding portion 14 provided on the mounting surface 13 and the mounting surface 13, the two edges are sandwiched in the thickness direction. 1 is held on the mounting surface 13. In addition, in the state which mounted and hold | maintained the organic EL panel 8 with a support body on the mounting surface 13, both the support body 1 and the glass film 2 are in a flat state (FIG. 7). Further, the upper surface 16 a of the elevating unit 16 is disposed flush with the placement surface 13 in the corner portion 15 of the holding table 11.

  And the raising / lowering part 16 is lowered | hung and the latching | locking part 17 is pressed on the surface 1a of the support body 1. FIG. After the pressing, the elevating part 16 is continuously lowered, whereby a downward external force F is applied to the support 1 at the contact point with the locking part 17 (FIG. 8), whereby the support 1 is made of a glass film. Turn away from 2 (Fig. 9). On the other hand, since the glass film 2 is being fixed to the support body 1, it tends to bend with the support body 1 from a flat state (it tries to deform | transform from the form shown as a continuous line in FIG. 8 to the form shown with a chain line). At this time, the movement of the support body 1 in the direction of returning to the flat state is restricted by the external force F, but such a restricting force does not act on the glass film 2, so that the force of returning to the flat state ( Only the restoring force G) acts. That is, since the regulation force (external force F) and the restoring force G cooperate to act as a force in a direction to separate the glass film 2 and the support 1 from each other, the comparison is performed without bending the support 1 so much. It is possible to easily form a gap 18 as a starting point of peeling between the end of the glass film 2 and the support 1 (FIGS. 8 and 9). As long as the gap 18 having the appropriate size is formed, the user simply holds the support 1 or the glass film 2 and pulls one of them away from the other, or blows air or the like toward the gap 18. Thus, the glass film 2 and the support 1 can be easily peeled over the entire area. In addition, since the support 1 is bent by applying the external force F only to the support 1, the starting point (gap 18) for starting peeling can be formed without contacting the glass film 2. As a result, it is possible to safely form the starting point of peeling as compared with the conventional case where the knife is pushed into the interface between the glass film 2 and the support 1 to form the starting point of peeling.

  In the present embodiment, the support 1 is bent by applying an external force to the portion of the support 1 that protrudes from the glass film 2. By applying the external force F in this way, the point of action of the external force F is located at a location away from the end of the fixed surface (interface) with the glass film 2. Therefore, a larger bending moment can be generated at the interface end portion of the support 1 and the glass film 2, and the gap 18 that becomes the starting point of peeling can be formed with a smaller amount of bending. Further, if the external force F is applied to the region where the support 1 and the glass film 2 overlap in the thickness direction, even if the external force F is applied to the surface 1b opposite to the glass film 2 of the support 1. It is difficult to completely eliminate the influence of the external force F as a concentrated load on the glass film 2 located behind it, but if the external force F is applied to the protruding portion, the above-mentioned concern It is preferable because it is not present.

  Moreover, in this embodiment, since the external force F was given only to the protrusion part in the corner part 4 of the support body 1, and the support body 1 was bent in the direction away from the glass film 2, the glass film 2 of The force (external force F and restoring force G as the regulating force described above) for forming the starting point of the separation start can be preferentially and intensively applied to the top of the corner portion 9. Further, since the peeling area gradually increases as the peeling progresses, it is possible to easily and smoothly form the gap 18 as a starting point of the peeling.

  As mentioned above, although one Embodiment (1st embodiment) of the manufacturing method of the electronic device containing the glass film which concerns on this invention was described, this manufacturing method naturally can take arbitrary forms within the scope of the present invention. it can.

  FIG. 10 shows a cross-sectional view of the main part of the starting point forming apparatus 10 according to the second embodiment of the present invention. The starting point forming apparatus 10 further includes an adsorption member 19 that can adsorb the glass film 2 from the side opposite to the support 1 in addition to the holding table 11 and the external force applying unit 12. The adsorbing member 19 can adsorb a pad-like adsorbing portion 20 provided at the tip of the adsorbing member 19 to the surface 2b opposite to the support 1 of the glass film 2, and the adsorbing operation causes the support 1 to be attached to the glass film 2. A force (adsorption force H) in a direction away from the surface can be applied.

  Therefore, first, the organic EL panel 8 with the support is set on the mounting surface 13 of the holding table 11, and then the suction portion 20 is brought into contact with the surface 2 b of the glass film 2 as shown in FIG. Then, the suction part 20 is sucked onto the surface 2b by vacuuming or the like. In this state, the elevating part 16 is lowered and the locking part 17 is pressed against the surface 1a of the support 1 to apply a downward external force F to the support 1 (FIG. 11). Thereby, the support body 1 bends away from the glass film 2. At this time, the glass film 2 is given a suction force H in the same direction as the restoring force G by the suction member 19 in addition to a force (restoring force G) that tries to return the glass film 2 together with the support 1. It will be in the state. Therefore, even when the support 1 is bent in a direction away from the glass film 2, the gap 18 that is a starting point for starting peeling is safely and effectively maintained while keeping the glass film 2 as flat as possible. It becomes possible to form.

  At this time, as shown in FIGS. 12 and 13, the suction portion 20 is substantially rectangular in a plan view, and the corner portion 20 a of the suction portion 20 and the corner portion 9 of the glass film 2 are aligned. It is preferable to adsorb in a wet state. By adsorbing in this way, the adsorption force H substantially reaches the top of the corner portion 9 of the glass film 2, that is, the end of the interface between the glass film 2 and the support 1. Therefore, it is possible to form the gap 18 that becomes the starting point of the peeling start more easily. Moreover, by using the adsorption | suction part 20 whose hardness is 50 Hv or more. Even when the support 1 is bent, the holding state of the glass film 2 can be maintained, and the gap 18 can be easily formed as a starting point of peeling.

  FIG. 14: has shown principal part sectional drawing of the starting point formation apparatus 10 which concerns on 3rd embodiment of this invention. In the present embodiment, a part of the mounting surface 13 is replaced with the suction plate 21, and evacuation is performed by driving a vacuum pump (not shown) connected to the suction plate 21. The surface 1 b opposite to the glass film 2 is sucked and held by the suction plate 21. At this time, if the suction plate 21 is disposed up to the boundary with the lifting / lowering part 16, when the lifting / lowering part 16 is lowered and the corner part 4 of the supporting body 1 is pushed and bent by the locking part 17, the supporting body 1 becomes the corner part. 4 may not bend naturally (curvature). Therefore, as shown in FIG. 10, by arranging the suction plate 21 with a certain distance (for example, about 50 mm) from the boundary with the elevating unit 16, the required curvature (unnecessarily constraining the corner portion 4 ( (Radius) can be bent. If the support 1 is sucked and held in this way, the clamping portion 14 may not be provided.

  FIG. 15: has shown principal part sectional drawing of the starting point formation apparatus 10 which concerns on 4th embodiment of this invention. In the present embodiment, a part of the upper surface 16a of the elevating unit 16 is replaced with the suction plate 22, and the support is provided by evacuating by driving a vacuum pump (not shown) connected to the suction plate 22. The surface 1 b at the corner portion 4 of 1 is sucked and held by the suction plate 21. According to this, since the support body 1 can be bent without pushing down the support body 1 by the latching | locking part 17, the burden to the support body 1 is small (the possibility of damage is small). In this case, the suction plate 22 needs to be deformed following the bending of the support 1. However, if the deformation followability of the suction plate 22 is insufficient, a pad shape as shown in FIG. May be disposed on the opposite side of the support 1 from the glass film 2 to adsorb the surface 1b on the opposite side.

  Or although illustration is abbreviate | omitted, it replaces with the suction plates 21 and 22, and the support body 1 is mounted by providing the suction groove | channel or hole in the mounting surface 13 or the upper surface 16a of the raising / lowering part 16, and vacuuming. You may make it adsorb | suck hold | maintain on the mounting surface 13 or the upper surface 16a of the raising / lowering part 16. FIG.

  Moreover, in the said embodiment, although the plate-like glass was employ | adopted as the support body 1 and this support body 1 and the glass film 2 were fixed to each other by direct contact | adherence, of course, glass glass was carried out by means other than this. The present invention can be applied to a laminate 3 in which 2 and the support 1 are fixed. For example, the support 1 is composed of a layer made of a non-glass material such as an acrylic adhesive layer, a silicone thin film layer, an inorganic thin film layer (ITO, oxide, metal, carbon) and a sheet glass, and the non-glass material layer and the glass film The present invention can also be applied to a laminate (not shown) in which 2 are closely attached.

  In the above description, at the stage before the support 1 is bent, for example, the gap 18 that is the starting point of the peeling is formed at the interface end portion of the glass film 2 and the support 1 (the top of the interface at the corner portion 9). A sharp cutting edge may be applied to the top of the interface. Alternatively, after forming a gap 18 as a starting point of peeling by bending the support 1, the sharp blade edge may be inserted into the gap 18. In any case, it is sufficient to apply a very small force as compared with the case of forming the gap 18 which is a starting point of substantial peeling start, and the possibility of causing damage to the glass film 2 is very small.

  Moreover, although the case where the organic EL panel 7 was manufactured as an electronic device was illustrated in the above description, of course, this invention is applicable also to the manufacturing method of other electronic devices. FIG. 16 shows a cross-sectional view of the liquid crystal panel 23 with a support according to the example. The panel 23 is formed by fixing a pair of supports 1 and 1 on both sides of a liquid crystal panel 24 as a final product. For example, the panel 23 is formed as follows. That is, first, a pair of laminates 3 and 3 formed by laminating the support 1 and the glass film 2 are formed (laminate formation step S1). Thereafter, a spacer 25 for defining a space for enclosing a liquid crystal (not shown) is formed on the surface 2b of the glass film 2 of one laminate 3, and the glass of the other laminate 3 is formed on the spacer 25. The film 2 is fixed (attachment step S2). Thus, after forming the liquid crystal panel 23 with a support body, the support body 1 is peeled one by one by the peeling method mentioned above, and the two support bodies 1 and 1 and the liquid crystal panel 24 are separated (separation). Step S3). Therefore, even when the liquid crystal panel 24 is manufactured, the present invention is applied, and the support 1 can be separated from the liquid crystal panel 24 safely and easily without damaging the glass film 2.

  Of course, even when the glass film 2 itself is acquired (manufactured) as a final product, the support 1 is separated from the glass film 2 safely and easily without damaging the glass film 2 by applying the present invention. It becomes possible.

DESCRIPTION OF SYMBOLS 1 Support body 2 Glass film 3 Laminate body 4 Corner part (support body)
5 Organic EL element 6 Cover glass 7 Organic EL panel 8 Organic EL panel with support 9 Corner (glass film)
DESCRIPTION OF SYMBOLS 10 Starting point formation apparatus 11 Holding base 12 External force provision part 13 Mounting surface 14 Clamping part 15 Corner part (holding base)
16 Lifting part 17 Locking part 18 Gap 19 Adsorption member 20 Adsorption part 21, 22 Adsorption plate 23 Liquid crystal panel with support 24 Liquid crystal panel 25 Spacer F External force G Restoring force H Adsorption force

Claims (12)

Laminate forming step of forming a laminate including a glass film by laminating a glass film and a support that supports the glass film and fixing to a peelable level;
Manufacturing-related processing steps for performing manufacturing-related processing on the laminate;
In the manufacturing method of the glass film provided with the isolation | separation process which isolate | separates the said laminated body into the said glass film and the said support body by peeling the said support body from the said glass film after the said manufacturing related process process. There,
In the separation step, an external force is applied only to the support, and the support is bent in a direction away from the glass film. In a state where the laminate is viewed in plan, the support body is protruding from the glass film,
2. The separation step according to claim 1, wherein an external force is applied only to a protruding portion from the glass film in the support, and the support is bent in a direction away from the glass film. Glass film manufacturing method. Both the glass film and the support have a corner, and in the laminate, the support protrudes from the glass film at the corner,
3. The glass film production according to claim 1, wherein, in the separation step, an external force is applied only to the protruding portion at a corner portion of the support, and the support is bent in a direction away from the glass film. Method.   The manufacturing method of the glass film of Claim 2 or 3 which gives an external force equivalent to the 2 edge of the said support body which comprises the said corner part, and bends the said support body.   The manufacturing method of the glass film in any one of Claims 1-4 which provides the adsorption force of the direction away from the said glass film to the surface on the opposite side to the said glass film of the said support body as the said external force.   The glass film production according to any one of claims 2 to 4, wherein a pressing force in a direction away from the glass film is applied to the surface of the protruding portion of the support on the glass film side as the external force. Method.   In the separation step, an external force is applied only to the support in a state where the glass film is adsorbed by an adsorbing member from the side opposite to the support, and the support is bent in a direction away from the glass film. Item 7. A method for producing a glass film according to any one of Items 1 to 6.   The method for producing a glass film according to claim 7, wherein the adsorption member is moved in a direction away from the support while the glass film is adsorbed by the adsorption member and the support is bent. Both the glass film and the suction part of the suction member have a corner part,
The manufacturing method of the glass film of Claim 7 or 8 which adsorb | sucks the said glass film with the said adsorption member in the said separation process in the state which match | combined the corner part of the said adsorption | suction part with the corner part of the said glass film.   The said support body is plate-shaped glass, The manufacturing method of the glass film in any one of Claims 1-9.   The said laminated glass and the said glass film are the manufacturing methods of the glass film of Claim 10 in which the said laminated body is directly_contact | adhered directly. Laminate forming step of forming a laminate including a glass film by laminating a glass film and a support that supports the glass film and fixing to a peelable level;
An attaching step of attaching an electronic device element to the glass film of the laminate;
After the attaching step, by peeling the support from the glass film, an electronic device with a support in which the electronic device element is attached to the laminate, an electronic device including the glass film, and the support An electronic device manufacturing method comprising a separation step of separating
In the separating step, an external force is applied only to the support, and the support is bent in a direction away from the glass film.

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