JP5004669B2 - Imaging component, imaging unit, and manufacturing method thereof - Google Patents

Imaging component, imaging unit, and manufacturing method thereof Download PDF

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JP5004669B2
JP5004669B2 JP2007140804A JP2007140804A JP5004669B2 JP 5004669 B2 JP5004669 B2 JP 5004669B2 JP 2007140804 A JP2007140804 A JP 2007140804A JP 2007140804 A JP2007140804 A JP 2007140804A JP 5004669 B2 JP5004669 B2 JP 5004669B2
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substrate
imaging
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image sensor
light receiving
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JP2008294960A (en
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明彦 舟橋
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Kyocera Corp
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805Shape
    • H01L2224/4809Loop shape
    • H01L2224/48091Arched
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/73Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
    • H01L2224/732Location after the connecting process
    • H01L2224/73251Location after the connecting process on different surfaces
    • H01L2224/73265Layer and wire connectors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10Details of semiconductor or other solid state devices to be connected
    • H01L2924/1015Shape
    • H01L2924/10155Shape being other than a cuboid

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  • Solid State Image Pick-Up Elements (AREA)
  • Transforming Light Signals Into Electric Signals (AREA)
  • Studio Devices (AREA)

Description

本発明は、CCD型,CMOS型等の撮像素子を用いた、光学センサ等に適用される撮像部品および撮像ユニットに関するものである。また、撮像部品の製造方法および撮像ユニットの製造方法に関するものである。   The present invention relates to an imaging component and an imaging unit that are applied to an optical sensor or the like using an imaging element such as a CCD type or a CMOS type. The present invention also relates to a method for manufacturing an imaging component and a method for manufacturing an imaging unit.

従来、CCD型、CMOS型等の撮像素子を搭載するための撮像部品が知られている。撮像部品において、被写体から出た光は、撮像素子の受光部に画像として投影され、この画像は、撮像素子によって電気的に変換され、出力される。なお、撮像部品は、必要に応じて、撮像部品上にレンズ等が搭載される。   2. Description of the Related Art Conventionally, imaging components for mounting an image sensor such as a CCD type or a CMOS type are known. In the imaging component, light emitted from the subject is projected as an image on the light receiving unit of the imaging device, and this image is electrically converted by the imaging device and output. In addition, as for an imaging component, a lens etc. are mounted on an imaging component as needed.

このような撮像部品において、レンズが湾曲しているのに対して撮像素子の受光部が平坦であるため、撮像素子の受光部の中央部と周辺部とでは、レンズへの光学距離の違いにより、撮像素子の受光部に投影された画像がぼやけた画像となることがある。そこで、このような現象に対応する方法として、二枚以上のレンズを用いる方法が考えられている。しかしながら、複数枚のレンズを設けることは、撮像部品の大幅なコストアップや撮像ユニットの大型化に繋がってしまうことになる。   In such an imaging component, the lens is curved while the light receiving part of the image sensor is flat. Therefore, the optical distance to the lens is different between the central part and the peripheral part of the light receiving part of the image sensor. In some cases, the image projected on the light receiving portion of the image sensor becomes a blurred image. Therefore, as a method for dealing with such a phenomenon, a method using two or more lenses is considered. However, providing a plurality of lenses leads to a significant increase in cost of imaging components and an increase in size of the imaging unit.

そこで、撮像素子の受光部を湾曲させることにより、画像の調整を行うことが考えられている。このような撮像部品は、基板上面を予め所定形状に湾曲状あるいは階段状に形成しておき、この基板の形状に沿って撮像素子を湾曲させた後、撮像素子を樹脂等で固定することで形成されている。   Therefore, it is considered to adjust the image by bending the light receiving portion of the image sensor. In such an imaging component, the upper surface of the substrate is formed in a predetermined shape in a curved shape or stepped shape, and after the imaging device is curved along the shape of the substrate, the imaging device is fixed with a resin or the like. Is formed.

なお、このような撮像部品用の基板として、セラミック製の基板が知られており、例えば、基板上面を湾曲状に形成する場合、セラミックグリーンシートを焼成する際に、基板上面が湾曲状になるように焼成するといった方法により形成することができる。
特開2001−156278号公報
A ceramic substrate is known as such a substrate for an imaging component. For example, when the upper surface of the substrate is formed in a curved shape, the upper surface of the substrate is curved when the ceramic green sheet is fired. It can form by the method of baking.
JP 2001-156278 A

しかしながら、撮像素子が搭載される基板は、その製作工程において、湾曲状態や階段状態にばらつきが発生することがある。例えば、セラミックグリーンシートを焼成する際に、基板上面が不用意に反ってしまうといったことがある。このように基板上面の状態にばらつきが発生すると、この基板上に搭載される撮像素子の湾曲状態もばらついてしまい、撮像素子の受光部に精度良く画像を投影することができなくなり、結果として、撮像素子で電気的に変換し、鮮明な画像として取り出せなくなるという問題を有していた。   However, the substrate on which the image sensor is mounted may vary in a curved state or a staircase state in the manufacturing process. For example, when the ceramic green sheet is fired, the upper surface of the substrate may be inadvertently warped. When variations occur in the state of the upper surface of the substrate in this way, the curved state of the image sensor mounted on the substrate also varies, and it becomes impossible to accurately project an image on the light receiving portion of the image sensor. There is a problem that the image is electrically converted by the image sensor and cannot be taken out as a clear image.

本発明は、上記問題点に鑑み案出されたもので、その目的は、被写体を撮影する際に、湾曲させた撮像素子の受光部に精度良く画像を投影させて、撮像素子で正確に電気信号に変換し、鮮明な画像として取り出せることができる撮像部品および撮像ユニットを提供することにある。   The present invention has been devised in view of the above problems, and its purpose is to accurately project an image on a light-receiving portion of a curved image sensor when photographing a subject, and to accurately perform an electrical operation with the image sensor. An object of the present invention is to provide an imaging component and an imaging unit that can be converted into a signal and taken out as a clear image.

本発明の撮像部品は、上面に凹部を有する基板と、該基板の上面に前記凹部を覆うように配置される撮像素子と、を備え、前記撮像素子は、下に凸に湾曲しているとともに、受光部を有しており、平面視において、前記凹部の開口の面積は前記受光部の面積よりも大きく、前記撮像素子は、前記受光部が前記凹部の縁よりも内側に位置するように前記基板に配置され、前記凹部よりも外側にて、前記基板に支持されていることを特徴とするものである。
An imaging component according to the present invention includes a substrate having a concave portion on an upper surface and an imaging element disposed on the upper surface of the substrate so as to cover the concave portion, and the imaging device is curved downward and convex. The light receiving portion has an opening area larger than that of the light receiving portion in a plan view, and the image sensor is positioned so that the light receiving portion is located inside the edge of the recessed portion. It is arrange | positioned at the said board | substrate and is supported by the said board | substrate outside the said recessed part , It is characterized by the above-mentioned.

本発明の撮像部品は、上下に貫通する貫通孔を有する基板と、該基板の上面に前記貫通孔を覆うように配置される撮像素子と、を備え、前記撮像素子は、下に凸に湾曲しているとともに、受光部を有しており、平面視において、前記貫通孔の開口の面積は前記受光部の面積よりも大きく、前記撮像素子は、前記受光部が前記貫通孔の縁よりも内側に位置するように前記基板に配置され、前記貫通孔よりも外側にて、前記基板に支持されているこ
とを特徴とするものである。
An imaging component according to the present invention includes a substrate having a through-hole penetrating vertically and an imaging element disposed on the upper surface of the substrate so as to cover the through-hole, and the imaging element is convexly curved downward And has a light receiving portion, and in plan view, the area of the opening of the through hole is larger than the area of the light receiving portion, and the imaging element has the light receiving portion that is larger than the edge of the through hole. It arrange | positions at the said board | substrate so that it may be located inside, and is supported by the said board | substrate outside the said through-hole.

本発明の撮像ユニットは、本発明の撮像部品と、該撮像部品の撮像素子上に配置される透光性部材と、を備えたことを特徴とするものである。   The imaging unit of the present invention is characterized by including the imaging component of the present invention and a translucent member disposed on the imaging element of the imaging component.

本発明の撮像ユニットは、前記透光性部材は、ガラスあるいは樹脂からなることを特徴とするものである。   The imaging unit of the present invention is characterized in that the translucent member is made of glass or resin.

本発明の撮像ユニットは、本発明の撮像部品と、該撮像部品の前記撮像素子の下側に当接して配置される放熱部材と、を備えたことを特徴とするものである。   The imaging unit of the present invention includes the imaging component of the present invention and a heat dissipating member disposed in contact with the lower side of the imaging element of the imaging component.

本発明の撮像部品の製造方法は、上下に貫通する貫通孔を有する基板と、該基板の上面に前記貫通孔を覆うように配置される撮像素子と、を備え、前記撮像素子は、下に凸に湾曲しているとともに、受光部を有しており、平面視において、前記貫通孔の開口の面積は前記受光部の面積よりも大きく、前記撮像素子は、前記受光部が前記貫通孔の縁よりも内側に位置するように前記基板に配置され、前記貫通孔よりも外側にて、前記基板に支持されている撮像部品の製造方法であって、撮像素子を準備する第1の工程と、該撮像素子を前記基板上に配置する第2の工程と、前記撮像素子を前記基板の貫通孔から吸引することにより湾曲させる第3の工程と、を経ることを特徴とするものである。
An imaging component manufacturing method according to the present invention includes a substrate having a through-hole penetrating vertically and an image sensor arranged to cover the through-hole on an upper surface of the substrate, It is convexly curved and has a light receiving portion, and in plan view, the area of the opening of the through hole is larger than the area of the light receiving portion, and the image sensor includes the light receiving portion of the through hole. A method of manufacturing an imaging component that is disposed on the substrate so as to be positioned on the inner side of the edge and supported on the substrate on the outer side of the through hole, the first step of preparing an imaging device; The second step of arranging the image pickup element on the substrate and the third step of bending the image pickup element by sucking the image pickup element from the through-hole of the substrate are characterized.

本発明の撮像部品の製造方法は、上下に貫通する貫通孔を有する基板と、該基板の上面に前記貫通孔を覆うように配置される撮像素子と、を備え、前記撮像素子は、下に凸に湾曲しているとともに、受光部を有しており、平面視において、前記貫通孔の開口の面積は前記受光部の面積よりも大きく、前記撮像素子は、前記受光部が前記貫通孔の縁よりも内側に位置するように前記基板に配置され、前記貫通孔よりも外側にて前記基板に支持されている撮像部品の製造方法であって、あらかじめ下に凸に湾曲した撮像素子を準備する第1の工程と、該湾曲した撮像素子を前記基板上に配置する第2の工程と、前記基板の貫通孔から前記撮像素子を吸引することにより湾曲度合いの調整を行う第3の工程と、を経ることを特徴とするものである。
An imaging component manufacturing method according to the present invention includes a substrate having a through-hole penetrating vertically and an image sensor arranged to cover the through-hole on an upper surface of the substrate, It is convexly curved and has a light receiving portion, and in plan view, the area of the opening of the through hole is larger than the area of the light receiving portion, and the image sensor includes the light receiving portion of the through hole. A method of manufacturing an imaging component that is arranged on the substrate so as to be located on the inner side of the edge and supported by the substrate on the outer side of the through-hole, and preparing an imaging element that is curved downward and convex in advance A first step of arranging the curved imaging device on the substrate, a third step of adjusting the degree of curvature by sucking the imaging device from the through-hole of the substrate, It is characterized by going through.

本発明の撮像ユニットの製造方法は、上下に貫通する貫通孔を有する基板と、該基板の上面に前記貫通孔を覆うように配置される撮像素子と、を備え、前記撮像素子は、下に凸に湾曲しているとともに、受光部を有しており、平面視において、前記貫通孔の開口の面積は前記受光部の面積よりも大きく、前記撮像素子は、前記受光部が前記貫通孔の縁よりも内側に位置するように前記基板に配置され、前記貫通孔よりも外側にて前記基板に支持されている撮像部品と、該撮像部品の撮像素子上に配置される透光性部材と、を備えた撮像ユニットの製造方法であって、撮像素子を準備する第1の工程と、該撮像素子を前記基板上に配置する第2の工程と、前記撮像素子上に透光性部材を配置する第3の工程と前記撮像素子を前記基板の貫通孔から吸引することにより、前記撮像素子を湾曲させる第4の工程と、を経ることを特徴とするものである。 An image pickup unit manufacturing method according to the present invention includes a substrate having a through-hole penetrating vertically and an image pickup device disposed on an upper surface of the substrate so as to cover the through-hole, and the image pickup device is provided below It is convexly curved and has a light receiving portion, and in plan view, the area of the opening of the through hole is larger than the area of the light receiving portion, and the image sensor includes the light receiving portion of the through hole. An imaging component that is disposed on the substrate so as to be located on the inner side of the edge and supported by the substrate on the outer side of the through hole; and a translucent member that is disposed on the imaging element of the imaging component; A first step of preparing an imaging device, a second step of arranging the imaging device on the substrate, and a translucent member on the imaging device. A third step of placement and the imaging element through the substrate? By suction, it is characterized in that through the a fourth step of bending the imaging element.

本発明の撮像部品は、上面に凹部を有する基板と、基板の上面に凹部を覆うように配置される撮像素子と、を備え、撮像素子は、下に凸に湾曲しているとともに、撮像素子は、凹部の開口縁にて、基板に支持されている。このことから、凹部内にて撮像素子の湾曲状態を、基板や撮像素子のそれぞれの製品ばらつき毎に合わせて微調整できるので、撮像素子の受光部に画像を精度良く投影することができ、撮像素子で正確に電気信号に変換し、鮮明な画像を取り出すことができるようになる。   An imaging component according to the present invention includes a substrate having a recess on an upper surface thereof, and an imaging element disposed on the upper surface of the substrate so as to cover the recess, and the imaging device is convexly curved downward. Is supported by the substrate at the opening edge of the recess. As a result, the curved state of the image sensor in the recess can be finely adjusted according to product variations of the substrate and the image sensor, so that the image can be accurately projected onto the light receiving portion of the image sensor, The element can be accurately converted into an electric signal and a clear image can be taken out.

本発明の撮像部品は、上下に貫通する貫通孔を有する基板と、基板の上面に貫通孔を覆うように配置される撮像素子と、を備え、撮像素子は、下に凸に湾曲しているとともに、撮像素子は、貫通孔の開口縁にて基板に支持されている。このことから、貫通孔内にて撮像素子の湾曲状態を、基板や撮像素子のそれぞれの製品ばらつき毎に合わせて微調整できるので、撮像素子の受光部に画像を精度良く投影することができ、撮像素子で正確に電気信号に変換し、鮮明な画像を取り出すことができるようになる。   An imaging component according to the present invention includes a substrate having a through-hole penetrating vertically and an imaging device disposed on the upper surface of the substrate so as to cover the through-hole, and the imaging device is curved convexly downward. At the same time, the imaging element is supported by the substrate at the opening edge of the through hole. From this, the curved state of the image sensor in the through hole can be finely adjusted according to each product variation of the substrate and the image sensor, so that the image can be accurately projected on the light receiving portion of the image sensor, The image sensor can accurately convert the signal into an electric signal, and a clear image can be taken out.

本発明の撮像ユニットは、本発明の撮像部品と、撮像部品の撮像素子上に配置される透光性部材と、を備えたことから、本発明の撮像部品を用いることにより、鮮明な画像を取り出すことができる撮像ユニットとすることができる。   Since the imaging unit of the present invention includes the imaging component of the present invention and a translucent member disposed on the imaging element of the imaging component, a clear image can be obtained by using the imaging component of the present invention. The imaging unit can be taken out.

また、本発明の撮像ユニットの透光性部材は、ガラスあるいは樹脂からなる。このことから、上述と同様に、鮮明な画像を取り出すことができる撮像ユニットとすることができる。   The translucent member of the imaging unit of the present invention is made of glass or resin. From this, it can be set as the imaging unit which can take out a clear image similarly to the above-mentioned.

本発明の撮像ユニットは、本発明の撮像部品と、撮像部品の撮像素子の下側に当接して配置される放熱部材と、を備えたことから、撮像素子の熱を放熱部材に伝熱させて、撮像素子の温度が高くなることを抑制できるので、熱により撮像素子に歪が発生することを抑制し、投影される画像に歪みが発生することを抑制させることができ、鮮明な画像を取り出すことができるようになる。   Since the imaging unit of the present invention includes the imaging component of the present invention and a heat radiating member disposed in contact with the lower side of the image sensor of the imaging component, the heat of the image sensor is transferred to the heat radiating member. Therefore, it is possible to suppress the temperature of the image sensor from becoming high, so it is possible to suppress the occurrence of distortion in the image sensor due to heat, and to suppress the occurrence of distortion in the projected image. It can be taken out.

本発明の撮像部品の製造方法は、撮像素子を準備する第1の工程と、撮像素子を基板上に配置する第2の工程と、撮像素子を基板の貫通孔から吸引することにより湾曲させる第3の工程とを経る。このことから、吸引により撮像素子を湾曲させて貫通孔を介して撮像素子を湾曲状態とすることができる。従って、撮像部品は、撮像素子の受光部に画像を精度良く投影することができ、鮮明な画像を取り出すことができるようになる。   The manufacturing method of an imaging component according to the present invention includes a first step of preparing an imaging device, a second step of arranging the imaging device on a substrate, and a first step of bending the imaging device by suction from a through-hole of the substrate. 3 steps are followed. From this, it is possible to bend the image pickup element by suction so that the image pickup element is bent through the through hole. Therefore, the imaging component can accurately project an image on the light receiving portion of the imaging element, and a clear image can be taken out.

本発明の撮像部品の製造方法は、あらかじめ下に凸に湾曲した撮像素子を準備する第1の工程と、湾曲した撮像素子を基板上に配置する第2の工程と、基板の貫通孔から前記撮像素子を吸引することにより湾曲度合いの調整を行う第3の工程とを経る。このことから、撮像素子の湾曲状態を容易に調整することができる。従って、撮像部品は、撮像素子の受光部に画像をさらに精度良く投影することができ、鮮明な画像を取り出すことができるようになる。   The manufacturing method of the imaging component of the present invention includes a first step of preparing an imaging element that is curved downward and convex in advance, a second step of arranging the curved imaging element on a substrate, and the through-hole of the substrate. A third step of adjusting the degree of curvature by sucking the image sensor is performed. From this, the curved state of the image sensor can be easily adjusted. Therefore, the imaging component can project an image on the light receiving portion of the imaging element with higher accuracy, and can extract a clear image.

本発明の撮像ユニットの製造方法は、撮像素子を準備する第1の工程と、撮像素子を基板上に配置する第2の工程と、撮像素子上に透光性部材を配置する第3の工程と撮像素子を基板の貫通孔から吸引することにより、撮像素子を湾曲させる第4の工程とを経る。このことにより、撮像素子の受光部に投影された画像の状態を確認しながら、撮像素子の湾曲状態を調整することができるので、撮像ユニットは、撮像素子の受光部に画像を精度良く投影することができる。従って撮像素子で正確に電気信号に変換し、鮮明な画像を取り出すことができるようになる。   The manufacturing method of the imaging unit of the present invention includes a first step of preparing an imaging device, a second step of arranging the imaging device on a substrate, and a third step of arranging a translucent member on the imaging device. And a fourth step of bending the image pickup device by sucking the image pickup device from the through hole of the substrate. As a result, the curved state of the image sensor can be adjusted while confirming the state of the image projected on the light receiver of the image sensor, so that the image pickup unit projects the image onto the light receiver of the image sensor with high accuracy. be able to. Accordingly, it is possible to accurately convert the electric signal into an electric signal by the image pickup device and to extract a clear image.

本発明の撮像部品を、図を用いて説明する。図1(a)は、本発明の撮像部品の実施の形態の一例を示す平面図であり、(b)は、(a)における基板の平面図である。図2は、図1(a)のA−A’線における断面図である。これらの図において、1は撮像部品、2は基板、2aは凹部、3は撮像素子、3aは受光部、4は配線導体である。   The imaging component of the present invention will be described with reference to the drawings. Fig.1 (a) is a top view which shows an example of embodiment of the imaging component of this invention, (b) is a top view of the board | substrate in (a). FIG. 2 is a cross-sectional view taken along line A-A ′ of FIG. In these drawings, 1 is an imaging component, 2 is a substrate, 2a is a recess, 3 is an imaging element, 3a is a light receiving portion, and 4 is a wiring conductor.

本発明の撮像部品1は、上面に凹部2aを有する基板2と、基板2の上面に凹部2aを覆うように配置される撮像素子3とを備え、撮像素子3は、下に凸に湾曲しているとともに、撮像素子3は、凹部2aの開口縁にて、基板2に支持されている。   The imaging component 1 of the present invention includes a substrate 2 having a recess 2a on the upper surface, and an image sensor 3 disposed on the upper surface of the substrate 2 so as to cover the recess 2a. The image sensor 3 is convexly curved downward. In addition, the image sensor 3 is supported by the substrate 2 at the opening edge of the recess 2a.

なお、図1(a)において、凹部2aの内周面となる領域を透過させて破線にて示している。   In FIG. 1 (a), a region serving as the inner peripheral surface of the recess 2a is transmitted and indicated by a broken line.

本発明の基板2は、セラミックス等からなり、例えば、酸化アルミニウム質焼結体、ムライト質焼結体、窒化アルミニウム質焼結体、炭化珪素質焼結体等の電気絶縁材料から成る。基板2が、酸化アルミニウム質焼結体から成る場合には、アルミナ(Al)、シリカ(SiO)、カルシア(CaO)、マグネシア(MgO)等の原料粉末に適当な有機溶剤、溶媒を添加混合して泥漿状となすとともにこれを従来周知のドクターブレード法やカレンダーロール法等を採用し、シート状に成形することによってセラミックグリーンシートを得、次にセラミックグリーンシートに適当な打ち抜き加工を施すとともに必要に応じて複数枚積層し、高温(約1500〜1800℃)で焼成することによって製作される。 The substrate 2 of the present invention is made of ceramics or the like, and is made of an electrically insulating material such as an aluminum oxide sintered body, a mullite sintered body, an aluminum nitride sintered body, or a silicon carbide sintered body. When the substrate 2 is made of an aluminum oxide sintered body, a suitable organic solvent or solvent for the raw material powder such as alumina (Al 2 O 3 ), silica (SiO 2 ), calcia (CaO), magnesia (MgO), etc. Add and mix to make a mud-like shape, and then apply the well-known doctor blade method and calender roll method, etc. to form a ceramic green sheet by forming into a sheet shape, then punch the ceramic green sheet appropriately In addition, a plurality of sheets are laminated as necessary, and are fired at a high temperature (about 1500 to 1800 ° C.).

また、基板2には、上面に凹部2aが形成される。このような凹部2aは、基板2用のセラミックグリーンシートのいくつかに凹部2a用の貫通孔を金型やパンチングによる打ち抜き方法またはレーザ加工方法等により形成しておき、他のセラミックグリーンシートと積層することにより形成することができる。   In addition, the substrate 2 has a recess 2a formed on the upper surface. Such recesses 2a are formed by forming through holes for the recesses 2a in some ceramic green sheets for the substrate 2 by a punching method using a die or punching, a laser processing method, or the like, and laminating with other ceramic green sheets. Can be formed.

配線導体4は、基板2に配置される撮像素子を外部電気回路基板に接続するための銅電路として機能する。配線導体4は、タングステンやモリブデン、銅、銀等の金属粉末メタライズから成り、基板2用のセラミックグリーンシートにスクリーン印刷法等により配線導体4用のメタライズペーストを印刷塗布し、そのメタライズペーストを基板用のセラミックグリーンシートとともに焼成することによって所定の領域に被着形成される。   The wiring conductor 4 functions as a copper electric circuit for connecting the image pickup device disposed on the substrate 2 to the external electric circuit substrate. The wiring conductor 4 is made of metal powder metallization such as tungsten, molybdenum, copper, or silver. The metallized paste for the wiring conductor 4 is printed on the ceramic green sheet for the substrate 2 by screen printing or the like, and the metallized paste is applied to the substrate. It is deposited and formed in a predetermined region by firing together with a ceramic green sheet for use.

配線導体4用のメタライズペーストは、主成分の金属粉末に有機バインダー、有機溶剤、必要に応じて分散剤等を加えてボールミル、三本ロールミル、プラネタリーミキサー等の混練手段により混合および混練することで製作される。セラミックグリーンシートの焼結挙動に合わせたり、焼結後の基板2との接合強度を高めたりするためにガラスやセラミックスの粉末を添加しても良い。   The metallized paste for the wiring conductor 4 is mixed and kneaded by a kneading means such as a ball mill, a three-roll mill, a planetary mixer, etc. with an organic binder, an organic solvent, and a dispersant as required added to the main component metal powder. Will be produced. Glass or ceramic powder may be added to match the sintering behavior of the ceramic green sheet or to increase the bonding strength with the substrate 2 after sintering.

また、基板2の表面および内部に形成された配線導体4は、必要に応じて基板1を貫通する貫通導体により電気的に接続されている。このような貫通導体は、配線導体4を形成するためのメタライズペーストの印刷塗布に先立って基板用のセラミックグリーンシートに金型やパンチングによる打ち抜き方法またはレーザ加工等の加工方法により貫通導体用の貫通孔を形成し、この貫通孔に貫通導体用のメタライズペーストをスクリーン印刷法等の印刷手段により充填しておき、これを基板2用のセラミックグリーンシートとともに焼成することによって各領域に形成される。貫通導体用のメタライズペーストは配線導体4用のメタライズペーストと同様にして作製されるが、有機バインダーや有機溶剤の量により充填に適した粘度に調製される。   Further, the wiring conductor 4 formed on the surface and inside of the substrate 2 is electrically connected by a through conductor penetrating the substrate 1 as necessary. Such penetrating conductors are penetrated for penetrating conductors by a punching method using a die or punching or a processing method such as laser processing on a ceramic green sheet for a substrate prior to printing and application of a metallized paste for forming the wiring conductor 4. Holes are formed, and metallized paste for through conductors is filled in the through holes by printing means such as a screen printing method, and this is fired together with the ceramic green sheet for the substrate 2 to form each region. The metallized paste for the through conductor is produced in the same manner as the metallized paste for the wiring conductor 4, but is prepared to have a viscosity suitable for filling depending on the amount of the organic binder or organic solvent.

また、配線導体4の表面が露出する部分は、ニッケル(Ni)、金(Au)等の耐蝕性に優れる金属を被着させておくと、配線導体4が酸化腐食するのを有効に防止できるとともに、配線導体4と電子部品との接合、および配線導体4とAuワイヤや半田バンプ等の電気的接続、および配線導体4と外部の回路基板との接合を強固なものとすることができる。従って、配線導体4の表面が露出する部分には、厚み1〜10μm程度のNiめっき層と厚み0.1〜3μm程度の金(Au)めっき層とが電解めっき法や無電解めっき法により順次被着されている。   Further, if the surface of the wiring conductor 4 exposed is coated with a metal having excellent corrosion resistance such as nickel (Ni) or gold (Au), the wiring conductor 4 can be effectively prevented from being oxidized and corroded. In addition, the bonding between the wiring conductor 4 and the electronic component, the electrical connection between the wiring conductor 4 and the Au wire, the solder bump, and the like, and the bonding between the wiring conductor 4 and the external circuit board can be made strong. Accordingly, a Ni plating layer having a thickness of about 1 to 10 μm and a gold (Au) plating layer having a thickness of about 0.1 to 3 μm are sequentially formed on the exposed portion of the surface of the wiring conductor 4 by an electrolytic plating method or an electroless plating method. It is attached.

撮像素子3は、凹部2aの開口縁にて、基板2の上面にエポキシ樹脂や半田等の接合部材6にて接合されるとともに、凹部2aを覆うように配置される。撮像素子3の電極(図示せず)は、ボンディングワイヤ5等の電気的接続手段を介して基板2の配線導体4に接続される。   The imaging device 3 is disposed at the opening edge of the recess 2a so as to be bonded to the upper surface of the substrate 2 by a bonding member 6 such as epoxy resin or solder and to cover the recess 2a. An electrode (not shown) of the image sensor 3 is connected to the wiring conductor 4 of the substrate 2 through an electrical connection means such as a bonding wire 5.

また、撮像素子3には、シリコンの基板上にCCD型、CMOS型の受光部3aが形成されており、この受光部3aには、被写体を撮影する際に、被写体から出た光が画像として投影される。そして、撮像素子3で電気信号に変換することにより、画像として取り出される。   The image sensor 3 has a CCD-type and CMOS-type light receiving portion 3a formed on a silicon substrate. When the subject is photographed, the light emitted from the subject is displayed as an image. Projected. And it is taken out as an image by converting into an electrical signal with the image pick-up element 3.

なお、撮像素子3は、超音波接合法等によりフリップチップ接合して基板2の配線導体に電気的に接続してもよい。なお、撮像素子3の接合部の周囲には、基板2と撮像素子3との接合を補強するために、エポキシ樹脂等の接合材を塗布しておいても良い。   Note that the image sensor 3 may be electrically connected to the wiring conductor of the substrate 2 by flip-chip bonding by an ultrasonic bonding method or the like. Note that a bonding material such as an epoxy resin may be applied around the bonding portion of the imaging element 3 in order to reinforce the bonding between the substrate 2 and the imaging element 3.

そして、本発明において、撮像素子3は、下に凸に湾曲している。なお、下に凸に湾曲しているとは、基板2の上面に配置された撮像素子3が、凹部2aの開口面側から凹部2aの底面側の方向に向かって湾曲していることをいう。このことから、凹部2a内にて撮像素子3の湾曲状態を、基板2や撮像素子3のそれぞれの製品ばらつき毎に合わせて微調整できるので、撮像素子3の受光部3aに画像を精度良く投影することができ、撮像素子3で正確に電気信号に変換し、鮮明な画像を取り出すことができるようになる。   And in this invention, the image pick-up element 3 is curving convexly downward. Note that “being convexly curved downward” means that the imaging device 3 disposed on the upper surface of the substrate 2 is curved from the opening surface side of the concave portion 2a toward the bottom surface side of the concave portion 2a. . Therefore, the curved state of the image sensor 3 in the recess 2a can be finely adjusted according to the product variations of the substrate 2 and the image sensor 3, so that the image is accurately projected on the light receiving unit 3a of the image sensor 3. Therefore, the image pickup device 3 can accurately convert the signal into an electric signal and take out a clear image.

なお、撮像素子3は、予め撮像素子3を下(凹部2aの開口面から凹部2aの底面の方向)に凸に湾曲させた状態で基板2の上面に載置し、接合部材6により固定することにより、下に凸に湾曲して配置される。   The image sensor 3 is placed on the upper surface of the substrate 2 in a state where the image sensor 3 is curved in a convex manner downward (from the opening surface of the recess 2 a to the bottom surface of the recess 2 a), and is fixed by the joining member 6. Therefore, it is arranged to be curved downward and convex.

また、撮像素子3は、平面視した際に、凹部2aの開口の面積が撮像素子3の受光部3aの面積よりも大きく、撮像素子3の受光部3aが凹部2aの開口縁よりも内側に位置するように基板2上に配置されることが好ましい。これにより、凹部2aの開口縁よりも内側の領域と凹部2aの開口縁よりも外側の領域とにおいて、撮像素子3の湾曲の度合いに違いが発生したとしても、撮像素子3の受光部3aの湾曲の度合いの歪みを小さくすることができ、撮像素子3の受光部3aに画像を精度良く投影させやすくなる。   Further, when the image pickup device 3 is viewed in plan, the area of the opening of the concave portion 2a is larger than the area of the light receiving portion 3a of the image pickup device 3, and the light receiving portion 3a of the image pickup device 3 is inside the opening edge of the concave portion 2a. It is preferable to be disposed on the substrate 2 so as to be positioned. As a result, even if there is a difference in the degree of curvature of the image pickup device 3 between the region inside the opening edge of the recess 2a and the region outside the opening edge of the recess 2a, the light receiving portion 3a of the image pickup device 3 The distortion of the degree of curvature can be reduced, and the image can be easily projected onto the light receiving unit 3a of the image sensor 3 with high accuracy.

また、図3に示すように、基板2が複数の段差を備えた凹部2aであり、撮像素子3が凹部2a内に収納されるようにしても構わない。なお、この場合においても、上述と同様な理由により、撮像素子3が搭載される段における基板2の上面において、受光部3aが凹部2aの開口縁よりも内側に位置するように基板2上に撮像素子3を配置していることが好ましい。また、図4に示すように、配線導体4を基板2の側面方向に導出して形成していても構わない。   Also, as shown in FIG. 3, the substrate 2 may be a recess 2a having a plurality of steps, and the image sensor 3 may be housed in the recess 2a. Even in this case, for the same reason as described above, on the upper surface of the substrate 2 at the stage where the image pickup device 3 is mounted, the light receiving portion 3a is positioned on the substrate 2 so as to be located inside the opening edge of the recess 2a. It is preferable to arrange the image sensor 3. In addition, as shown in FIG. 4, the wiring conductor 4 may be formed by being led out in the side surface direction of the substrate 2.

また、撮像部品1は、図5、図6に示すように、上下に貫通する貫通孔2bを有する基板2と、基板2の上面に貫通孔2bを覆うように配置される撮像素子3とを備え、撮像素子3は、下に凸に湾曲しているとともに、撮像素子3は、貫通孔2bの開口縁にて、基板2に支持されていてもよい。なお、図5(a)は、本発明の撮像部品の実施の形態の一例を示す平面図であり、図5(b)は、図5(a)における基板の平面図である。また、図6は、図5(a)のB−B’線における断面図である。なお、図5(a)においても、上述と同様に、貫通孔2bの内周面となる領域を透過させて破線にて示している。また、下に凸に湾曲しているとは、基板2の上面に配置された撮像素子3が、基板2の上面側の貫通孔2bの開口面から基板2の下面側の貫通孔2bの開口面の方向に向かって湾曲していることをいう。このことから、貫通孔2b内にて撮像素子3の湾曲状態を、基板2や撮像素子3のそれぞれの製品ばらつき毎に合わせて微調整できるので、撮像素子3の受光部3aに画像を精度良く投影することができ、撮像素子3で正確に電気信号に変換し、鮮明な画像を取り出すことができるようになる。   As shown in FIGS. 5 and 6, the imaging component 1 includes a substrate 2 having a through-hole 2 b penetrating vertically and an imaging element 3 arranged on the upper surface of the substrate 2 so as to cover the through-hole 2 b. The imaging device 3 may be convexly curved downward, and the imaging device 3 may be supported by the substrate 2 at the opening edge of the through hole 2b. 5A is a plan view showing an example of the embodiment of the imaging component of the present invention, and FIG. 5B is a plan view of the substrate in FIG. 5A. FIG. 6 is a cross-sectional view taken along line B-B ′ of FIG. Also in FIG. 5A, similarly to the above, the region which becomes the inner peripheral surface of the through hole 2b is transmitted and indicated by a broken line. In addition, the convexly curved downward means that the imaging element 3 disposed on the upper surface of the substrate 2 opens from the opening surface of the through hole 2b on the upper surface side of the substrate 2 to the through hole 2b on the lower surface side of the substrate 2. It is curved toward the direction of the surface. From this, the curved state of the image sensor 3 in the through hole 2b can be finely adjusted according to each product variation of the substrate 2 and the image sensor 3, so that the image is accurately displayed on the light receiving portion 3a of the image sensor 3. The image can be projected, and the image pickup device 3 can accurately convert the signal into an electric signal, and a clear image can be taken out.

また、貫通孔2bは、凹部2aと同様な方法により製作することができる。例えば、貫通孔2bは、基板2用のセラミックグリーンシートに貫通孔2b用の貫通孔を金型やパンチングによる打ち抜き方法またはレーザ加工方法等により形成しておくことにより形成することができる。なお、基板2が複数層からなる場合、基板2用のセラミックグリーンシートのそれぞれに貫通孔2b用の貫通孔を形成した後、これらのセラミックグリーンシートを積層することにより1つの貫通孔2bを形成しても良いし、基板2用のセラミックグリーンシートを積層した後に、これらのセラミックグリーンシートに1つの貫通孔2bを形成しても構わない。基板2の厚みや貫通孔2bの大きさ、形状等に合わせて選択すればよい。   Moreover, the through-hole 2b can be manufactured by the same method as the recessed part 2a. For example, the through hole 2b can be formed by forming a through hole for the through hole 2b in the ceramic green sheet for the substrate 2 by a punching method using a die or punching, a laser processing method, or the like. In addition, when the board | substrate 2 consists of two or more layers, after forming the through-hole for through-holes 2b in each of the ceramic green sheets for board | substrates 2, one through-hole 2b is formed by laminating | stacking these ceramic green sheets. Alternatively, after the ceramic green sheets for the substrate 2 are laminated, one through hole 2b may be formed in these ceramic green sheets. What is necessary is just to select according to the thickness of the board | substrate 2, the magnitude | size of the through-hole 2b, a shape, etc.

撮像素子3は、基板2の上面に撮像素子3を基板2の上面に搭載した後、基板2の下面側から貫通孔2bを介して撮像素子3を吸引し、接合部材6により固定することにより、下(基板2の上面側の貫通孔2bの開口面から基板2の下面側の貫通孔2bの開口面の方向)に湾曲して配置される。   The image pickup device 3 is mounted on the upper surface of the substrate 2 by sucking the image pickup device 3 from the lower surface side of the substrate 2 through the through hole 2 b and fixing the image pickup device 3 by the bonding member 6. And curved downward (from the opening surface of the through hole 2b on the upper surface side of the substrate 2 to the opening surface of the through hole 2b on the lower surface side of the substrate 2).

また、平面視における貫通孔2bの形状は、四角形状等の多角形状、円形状等とすることができる。なお、貫通孔2b内にて撮像素子3を均等に湾曲させるために、貫通孔2bの形状は、円形状であることが好ましい。   Further, the shape of the through hole 2b in a plan view can be a polygonal shape such as a square shape, a circular shape, or the like. In addition, in order to bend the image pick-up element 3 equally in the through-hole 2b, it is preferable that the shape of the through-hole 2b is circular.

また、撮像素子3は、上述と同様に、平面視した際に、貫通孔2bの開口の面積が撮像素子3の受光部3aの面積よりも大きく、撮像素子3の受光部3aが貫通孔2bの開口縁よりも内側に位置するように基板2上に配置していることが好ましい。これにより、撮像素子3の湾曲の度合いに違いが発生したとしても、撮像素子3の受光部3aの湾曲の度合いの歪みを小さくすることができ、撮像素子3の受光部3aに画像を精度良く投影させやすくなる。   Similarly to the above, when the image pickup device 3 is viewed in plan, the area of the opening of the through hole 2b is larger than the area of the light receiving portion 3a of the image pickup device 3, and the light receiving portion 3a of the image pickup device 3 is the through hole 2b. It is preferable to arrange on the board | substrate 2 so that it may be located inside the opening edge. As a result, even if a difference occurs in the degree of curvature of the image sensor 3, distortion of the degree of curvature of the light receiving unit 3 a of the image sensor 3 can be reduced, and an image can be accurately displayed on the light receiving unit 3 a of the image sensor 3. Easy to project.

また、図7、図8に示すように、基板2の下面側において、段差を設けたものであっても構わない。なお、図7(b)において、基板2の下面側には対向する2辺方向のみに段差を設けているが、4辺方向全てに段差を設け、基板2の下面側の貫通孔2bを囲むような枠部としてもよい。また、基板2の上面側と下面側とにそれぞれ段差を設ける場合、平面視において、これらの段差の内壁面が上面側と下面側とで同一に位置するようにしておくことが好ましい。これにより、基板2用のセラミックグリーンシートを複数枚積層する際に、これらのセラミックグリーンシート間における積層不良や撮像素子3が搭載される面における基板2の変形を抑制することができる。   Further, as shown in FIGS. 7 and 8, a step may be provided on the lower surface side of the substrate 2. In FIG. 7B, a step is provided only on the two opposite sides on the lower surface side of the substrate 2. However, a step is provided on all four sides to surround the through hole 2 b on the lower surface side of the substrate 2. Such a frame portion may be used. Moreover, when providing a level | step difference in the upper surface side and the lower surface side of the board | substrate 2, respectively, it is preferable that the inner wall surface of these level | step differences is located in the upper surface side and the lower surface side in planar view. Thereby, when a plurality of ceramic green sheets for the substrate 2 are stacked, it is possible to suppress the stacking failure between these ceramic green sheets and the deformation of the substrate 2 on the surface on which the imaging element 3 is mounted.

また、図9に示すように、撮像素子3は、受光部3aが偏心して配置しているものであってもよく、このような場合、受光部3の中心に対する湾曲の度合いの偏りを抑制するため、撮像素子3の受光部3aの中心が、凹部2aあるいは貫通孔2bの中心に位置するように、撮像素子3の受光部3aの配置に合わせて凹部2aおよび貫通孔2bを基板2に形成しておき、基板2の上面に撮像素子3を配置すればよい。   In addition, as shown in FIG. 9, the image sensor 3 may be one in which the light receiving unit 3 a is eccentrically arranged. In such a case, the deviation of the degree of curvature with respect to the center of the light receiving unit 3 is suppressed. Therefore, the concave portion 2a and the through hole 2b are formed in the substrate 2 in accordance with the arrangement of the light receiving portion 3a of the image pickup device 3 so that the center of the light receiving portion 3a of the image pickup device 3 is positioned at the center of the concave portion 2a or the through hole 2b. In addition, the image sensor 3 may be disposed on the upper surface of the substrate 2.

また、図10に示すように、接合部材6は、貫通孔2b内に塗布あるいは充填されていても構わない。この場合、接合部材6により撮像素子3の下面を保護することができる。また、接合部材6は、凹部2a内に塗布あるいは充填されていても構わない。   Moreover, as shown in FIG. 10, the joining member 6 may be applied or filled in the through hole 2b. In this case, the lower surface of the image sensor 3 can be protected by the bonding member 6. Moreover, the joining member 6 may be applied or filled in the recess 2a.

本発明の撮像ユニット10は、図11に示すように、上述の撮像部品1と、撮像部品1の撮像素子3上に配置される透光性部材11とを備えている。このことから、上述の撮像部品1を用いることにより、鮮明な画像を取り出すことができる撮像ユニット10とすることができる。   As shown in FIG. 11, the imaging unit 10 of the present invention includes the above-described imaging component 1 and a translucent member 11 disposed on the imaging element 3 of the imaging component 1. For this reason, by using the above-described imaging component 1, the imaging unit 10 that can extract a clear image can be obtained.

なお、このような透光性部材11は、エポキシ樹脂等の樹脂からなるポッティング材や、ガラスあるいはエポキシ樹脂等の樹脂からなる板状の窓部材やレンズ等を用いることができる。例えば、図11に示すように、透光性部材11が、板状の窓部材からなる場合、窓部材は、エポキシ樹脂やガラス等の接着剤により基板2に接着され、撮像素子3および撮像素子3の受光部3を保護することができる。また、図12に示すように、透光性部材11が、ポッティング材からなる場合、ポッティング材は、撮像素子3上に塗布され、撮像素子3および撮像素子3の受光部3を保護することができる。また、図13に示すように、透光性部材11が、レンズからなる場合、レンズは、レンズ固定部材13に取り付けられ、レンズ固定部材13の開口部13aを介してレンズを透過した光を受光部3aに入射することができる。なお、レンズ固定部材13は、樹脂や金属等からなり、エポキシ樹脂や半田等の接着剤により基板2に固定、或いはレンズ固定部材13に予め設けられた鉤部等により基板2に固定される。   Note that the translucent member 11 can be a potting material made of a resin such as an epoxy resin, a plate-like window member made of a resin such as glass or an epoxy resin, a lens, or the like. For example, as shown in FIG. 11, when the translucent member 11 is a plate-shaped window member, the window member is bonded to the substrate 2 with an adhesive such as epoxy resin or glass, and the imaging element 3 and the imaging element. The three light receiving portions 3 can be protected. In addition, as shown in FIG. 12, when the translucent member 11 is made of a potting material, the potting material is applied on the image sensor 3 to protect the image sensor 3 and the light receiving unit 3 of the image sensor 3. it can. As shown in FIG. 13, when the translucent member 11 is a lens, the lens is attached to the lens fixing member 13 and receives light transmitted through the lens through the opening 13 a of the lens fixing member 13. It can enter into part 3a. The lens fixing member 13 is made of resin, metal, or the like, and is fixed to the substrate 2 with an adhesive such as epoxy resin or solder, or is fixed to the substrate 2 with a flange or the like provided in advance on the lens fixing member 13.

なお、基板2の配線導体4と撮像素子3の電極とがボンディングワイヤ5等により電気的に接続される場合、図14に示すように、基板2の配線導体やボンディングワイヤ5、或いは撮像素子3の電極をエポキシ樹脂等の封止材12により部分的に保護しておいてもよい。また、図15に示すように、窓部材やレンズ等の透光性部材11を組み合わせたものであっても構わない。   In addition, when the wiring conductor 4 of the board | substrate 2 and the electrode of the image pick-up element 3 are electrically connected by the bonding wire 5 grade | etc., As shown in FIG. 14, the wiring conductor of the board | substrate 2, the bonding wire 5, or the image pick-up element 3 is shown. These electrodes may be partially protected by a sealing material 12 such as an epoxy resin. Moreover, as shown in FIG. 15, you may combine the translucent members 11, such as a window member and a lens.

また、撮像ユニット10は、撮像部品1と、撮像部品1の撮像素子3の下側に当接して配置される放熱部材とを備えていてもよい。このことから、撮像素子3の熱を放熱部材に伝熱させて、撮像素子3の温度が高くなることを抑制できるので、熱により撮像素子3に歪が発生することを抑制し、投影される画像に歪みが発生することを抑制させることができ、鮮明な画像を取り出すことができるようになる。なお、撮像ユニット10を外部回路基板上に搭載した際、放熱部材の熱を放熱するために、放熱部材と外部回路基板とが当接するようにしていると好ましい。また、放熱部材を外部回路基板側に予め形成しておき、撮像ユニット10を外部回路基板上に搭載する際、放熱部材が撮像素子3の下面に当接するようにしても構わない。   Further, the imaging unit 10 may include the imaging component 1 and a heat radiating member that is disposed in contact with the lower side of the imaging element 3 of the imaging component 1. Accordingly, the heat of the image sensor 3 can be transferred to the heat radiating member so that the temperature of the image sensor 3 can be prevented from being increased. Therefore, the image sensor 3 is prevented from being distorted by heat and projected. Generation of distortion in the image can be suppressed, and a clear image can be extracted. In addition, when the imaging unit 10 is mounted on the external circuit board, it is preferable that the heat dissipation member and the external circuit board are in contact with each other in order to dissipate the heat of the heat dissipation member. Further, a heat radiating member may be formed in advance on the external circuit board side, and the heat radiating member may be brought into contact with the lower surface of the image sensor 3 when the imaging unit 10 is mounted on the external circuit board.

次に、本発明の撮像部品の製造方法を、図を用いて説明する。図16は、本発明の撮像部品の製造方法の実施の形態の一例を示す断面図である。なお、これらの図における参照符号についての説明は、上述の撮像部品1と同様の符号を用いているため、省略することとする。   Next, the manufacturing method of the imaging component of this invention is demonstrated using figures. FIG. 16 is a cross-sectional view showing an example of an embodiment of a method for manufacturing an imaging component according to the present invention. Note that the description of the reference numerals in these drawings is omitted because the same reference numerals as those of the imaging component 1 described above are used.

本発明の撮像部品の製造方法は、撮像素子3を準備する第1の工程と、撮像素子を基板2上に配置する第2の工程と、撮像素子3を基板2の貫通孔2bから吸引することにより湾曲させる第3の工程とを経るものである。   The method for manufacturing an imaging component according to the present invention includes a first step of preparing the imaging device 3, a second step of arranging the imaging device on the substrate 2, and sucking the imaging device 3 from the through hole 2 b of the substrate 2. This is followed by the third step of bending.

まず、図16(a)に示すように、第1の工程として、上下に貫通する貫通孔2bを有する基板2と,上面に受光部3aを有する撮像素子3を準備する。次に、図16(b)に示すように、第2の工程として、基板2の上面に、基板2の貫通孔2bを覆うように撮像素子3を配置する。そして、図16(c)に示すように、第3の工程として、撮像素子3を基板2の下面から貫通孔2bを介して吸引することにより、撮像素子3を下(基板2の上面側の貫通孔2bの開口面から基板2の下面側の貫通孔2bの開口面の方向)に凸に湾曲させる。このことから、吸引により撮像素子3を湾曲させて貫通孔2bを介して撮像素子を湾曲状態とすることができる。従って、撮像部品1は、撮像素子3の受光部3aに画像を精度良く投影することができ、鮮明な画像を取り出すことができるようになる。   First, as shown in FIG. 16A, as a first step, a substrate 2 having a through hole 2b penetrating vertically and an imaging element 3 having a light receiving portion 3a on the upper surface are prepared. Next, as illustrated in FIG. 16B, as a second step, the imaging element 3 is disposed on the upper surface of the substrate 2 so as to cover the through hole 2 b of the substrate 2. Then, as shown in FIG. 16C, as a third step, the image pickup device 3 is sucked down from the lower surface of the substrate 2 through the through hole 2b, thereby lowering the image pickup device 3 (on the upper surface side of the substrate 2). Curved convexly from the opening surface of the through hole 2b toward the opening surface of the through hole 2b on the lower surface side of the substrate 2. From this, the image pickup device 3 can be bent by suction, and the image pickup device can be bent through the through hole 2b. Therefore, the imaging component 1 can accurately project an image on the light receiving unit 3a of the imaging device 3, and a clear image can be taken out.

なお、上述の第3の工程において、撮像素子3を基板2の下面から貫通孔2bを介して吸引する際に、撮像素子3の湾曲度合いの調整を行うと、撮像素子3の湾曲状態を容易に調整することができる。従って、撮像部品1は、撮像素子3の受光部3aに画像をさらに精度良く投影することができ、鮮明な画像を取り出すことができるようになる。   In the third step described above, when the imaging element 3 is sucked from the lower surface of the substrate 2 through the through hole 2b, the bending state of the imaging element 3 can be easily adjusted by adjusting the degree of bending of the imaging element 3. Can be adjusted. Therefore, the imaging component 1 can project an image on the light receiving unit 3a of the imaging device 3 with higher accuracy, and can extract a clear image.

また、上述の第2の工程において、撮像素子3を基板2上に配置した後、撮像素子3を基板2に形成された配線導体4に接続することが好ましい。このことから、撮像素子3を湾曲させる前に撮像素子3の電極と基板2の配線導体4とが電気的に接続されていることとなり、湾曲させた後に撮像素子3の電極と基板2の配線導体4とを電気的に接続する場合と比較して、電気的な接続が行いやすいので、撮像素子3の電極と基板2の配線導体4との電気的接続の不具合が発生することを抑制できる。従って、信頼性に優れた撮像部品1とすることができる。   In the second step described above, it is preferable that the image pickup device 3 is disposed on the substrate 2 and then connected to the wiring conductor 4 formed on the substrate 2. For this reason, the electrode of the imaging device 3 and the wiring conductor 4 of the substrate 2 are electrically connected before the imaging device 3 is bent. After the bending, the electrode of the imaging device 3 and the wiring of the substrate 2 are connected. Compared with the case where the conductor 4 is electrically connected, it is easy to make an electrical connection. Therefore, it is possible to suppress the occurrence of a problem in the electrical connection between the electrode of the imaging element 3 and the wiring conductor 4 of the substrate 2. . Therefore, the imaging component 1 having excellent reliability can be obtained.

次に、本発明の撮像ユニットの製造方法を図を用いて説明する。図17は、本発明の撮像ユニットの製造方法の実施の形態の一例を示す断面図である。なお、これらの図における参照符号についての説明は、上述の撮像ユニット10と同様の符号を用いているため、省略することとする。   Next, a method for manufacturing the imaging unit of the present invention will be described with reference to the drawings. FIG. 17 is a cross-sectional view showing an example of an embodiment of a method for manufacturing an imaging unit according to the present invention. It should be noted that description of reference numerals in these drawings is omitted because the same reference numerals as those of the imaging unit 10 described above are used.

本発明の撮像ユニットの製造方法は、撮像素子3を準備する第1の工程と、撮像素子3を基板2上に配置する第2の工程と、撮像素子3上に透光性部材11を配置する第3の工程と、撮像素子3を基板2の貫通孔2bから吸引することにより、撮像素子3を湾曲させる第4の工程とを経るものである。   In the manufacturing method of the imaging unit of the present invention, the first step of preparing the imaging device 3, the second step of arranging the imaging device 3 on the substrate 2, and the translucent member 11 are arranged on the imaging device 3. And a fourth step of bending the image pickup device 3 by sucking the image pickup device 3 from the through hole 2b of the substrate 2.

まず、図17(a)に示すように、第1の工程として、上下に貫通する貫通孔2bを有する基板2と,上面に受光部3aを有する撮像素子3を準備する。次に、図17(b)に示すように、第2の工程として、基板2の上面に、基板2の貫通孔2bを覆うように撮像素子3を配置する。そして、図17(c)に示すように、第3の工程として、撮像素子3上に透光性部材11を配置し、図17(d)に示すように、第4の工程として、撮像素子3を基板2の下面から貫通孔2bを介して吸引することにより、撮像素子3を下(基板2の上面から下面の方向)に凸に湾曲させる。このことにより、撮像素子3の受光部3aに投影された画像の状態を確認しながら、撮像素子3の湾曲状態を調整することができるので、撮像ユニット10は、撮像素子3の受光部3aに画像を精度良く投影することができる。従って撮像素子3で正確に電気信号に変換し、鮮明な画像を取り出すことができるようになる。   First, as shown in FIG. 17A, as a first step, a substrate 2 having a through hole 2b penetrating vertically and an imaging element 3 having a light receiving portion 3a on its upper surface are prepared. Next, as shown in FIG. 17B, as a second step, the image sensor 3 is arranged on the upper surface of the substrate 2 so as to cover the through hole 2 b of the substrate 2. Then, as shown in FIG. 17 (c), as the third step, the translucent member 11 is arranged on the image pickup device 3, and as shown in FIG. 17 (d), as the fourth step, the image pickup device. By sucking 3 from the lower surface of the substrate 2 through the through hole 2b, the imaging element 3 is bent convexly downward (from the upper surface to the lower surface of the substrate 2). Thus, the curved state of the image sensor 3 can be adjusted while confirming the state of the image projected on the light receiver 3 a of the image sensor 3, so that the image pickup unit 10 can be connected to the light receiver 3 a of the image sensor 3. An image can be projected with high accuracy. Accordingly, the image pickup device 3 can accurately convert the signal into an electric signal and extract a clear image.

また、撮像ユニット10を外部回路基板上に搭載し、基板2の配線導体4と外部回路基板の配線導体とを接続した後に、撮像素子3を貫通孔2bを介して吸引し、撮像素子3を下に凸に湾曲させても構わない。なお、配線導体4と外部回路基板の配線導体との接続は、半田等により接合して電気的に接続してもよいし、外部回路基板に設けられた導通ピン等の配線導体を基板2の配線導体に接触させて電気的に接続しても構わない。   Further, after mounting the imaging unit 10 on the external circuit board and connecting the wiring conductor 4 of the substrate 2 and the wiring conductor of the external circuit board, the imaging element 3 is sucked through the through hole 2b, and the imaging element 3 is removed. It may be curved convexly downward. The connection between the wiring conductor 4 and the wiring conductor of the external circuit board may be performed by soldering or the like, or the wiring conductor such as a conductive pin provided on the external circuit board may be connected to the board 2. The wiring conductor may be contacted and electrically connected.

なお、本発明は上述の実施の形態に限定されるものではなく、本発明の要旨を逸脱しない範囲内で種々の変更を施すことは何等差し支えない。例えば、図18、図19に示すように、撮像部品1および撮像ユニット10には、基板2の上面あるいは下面に撮像素子3以外のICチップやLSIチップ等の半導体素子、各種センサ、コンデンサ等の電子部品14が搭載されていてもよい。なお、これらの電子部品14は、撮像素子3と同様に、ボンディングワイヤ等の電気的に接続手段(図示せず)により、基板2の配線導体4に電気的に接続される。なお、電子部品14は、半田等により基板2の配線導体4に電気的に接続されていても構わない。   It should be noted that the present invention is not limited to the above-described embodiment, and various modifications can be made without departing from the scope of the present invention. For example, as illustrated in FIGS. 18 and 19, the imaging component 1 and the imaging unit 10 include, on the upper surface or the lower surface of the substrate 2, semiconductor elements such as IC chips and LSI chips other than the imaging element 3, various sensors, capacitors, and the like. The electronic component 14 may be mounted. These electronic components 14 are electrically connected to the wiring conductors 4 of the substrate 2 by means of electrical connection means (not shown) such as bonding wires, as in the case of the imaging device 3. The electronic component 14 may be electrically connected to the wiring conductor 4 of the substrate 2 by solder or the like.

(a)は、本発明の撮像部品の実施の形態の一例を示す平面図であり、(b)は、(a)における基板の平面図である。(A) is a top view which shows an example of embodiment of the imaging component of this invention, (b) is a top view of the board | substrate in (a). 図1(a)のA−A’線における断面図である。It is sectional drawing in the A-A 'line | wire of Fig.1 (a). 本発明の撮像部品の実施の形態の一例を示す断面図である。It is sectional drawing which shows an example of embodiment of the imaging component of this invention. 本発明の撮像部品の実施の形態の一例を示す断面図である。It is sectional drawing which shows an example of embodiment of the imaging component of this invention. (a)は、本発明の撮像部品の実施の形態の一例を示す平面図であり、(b)は、(a)における基板の平面図である。(A) is a top view which shows an example of embodiment of the imaging component of this invention, (b) is a top view of the board | substrate in (a). 図5(a)のB−B’線における断面図である。It is sectional drawing in the B-B 'line of Fig.5 (a). (a)は、本発明の撮像部品の実施の形態の一例を示す平面図であり、(b)は、(a)における撮像部品の下面図である。(A) is a top view which shows an example of embodiment of the imaging component of this invention, (b) is a bottom view of the imaging component in (a). 図7のC−C’線における断面図である。It is sectional drawing in the C-C 'line of FIG. 本発明の撮像部品の実施の形態の一例を示す平面図である。It is a top view which shows an example of embodiment of the imaging component of this invention. 本発明の撮像部品の実施の形態の一例を示す断面図である。It is sectional drawing which shows an example of embodiment of the imaging component of this invention. 本発明の撮像ユニットの実施の形態の一例を示す断面図である。It is sectional drawing which shows an example of embodiment of the imaging unit of this invention. 本発明の撮像ユニットの実施の形態の一例を示す断面図である。It is sectional drawing which shows an example of embodiment of the imaging unit of this invention. 本発明の撮像ユニットの実施の形態の一例を示す断面図である。It is sectional drawing which shows an example of embodiment of the imaging unit of this invention. 本発明の撮像ユニットの実施の形態の一例を示す断面図である。It is sectional drawing which shows an example of embodiment of the imaging unit of this invention. 本発明の撮像ユニットの実施の形態の一例を示す断面図である。It is sectional drawing which shows an example of embodiment of the imaging unit of this invention. 本発明の撮像部品の製造方法の実施の形態の一例を示す断面図である。It is sectional drawing which shows an example of embodiment of the manufacturing method of the imaging component of this invention. 本発明の撮像ユニットの製造方法の実施の形態の一例を示す断面図である。It is sectional drawing which shows an example of embodiment of the manufacturing method of the imaging unit of this invention. 本発明の撮像ユニットの実施の形態の一例を示す断面図である。It is sectional drawing which shows an example of embodiment of the imaging unit of this invention. 本発明の撮像ユニットの実施の形態の一例を示す断面図である。It is sectional drawing which shows an example of embodiment of the imaging unit of this invention.

符号の説明Explanation of symbols

1・・・撮像部品
2・・・基板
2a・・・凹部
2b・・・貫通孔
3・・・撮像素子
3a・・・受光部
4・・・配線導体
7・・・突起部
10・・・撮像ユニット
11・・・透光性部材
12・・・封止材
13・・・レンズ固定部材
14・・・電子部品
DESCRIPTION OF SYMBOLS 1 ... Imaging component 2 ... Board | substrate 2a ... Recessed part 2b ... Through-hole 3 ... Imaging element 3a ... Light-receiving part 4 ... Wiring conductor 7 ... Projection part 10 ... Imaging unit 11 ... translucent member 12 ... sealing material 13 ... lens fixing member 14 ... electronic component

Claims (8)

上面に凹部を有する基板と、
該基板の上面に前記凹部を覆うように配置される撮像素子と、を備え、
前記撮像素子は、下に凸に湾曲しているとともに、受光部を有しており、
平面視において、前記凹部の開口の面積は前記受光部の面積よりも大きく、
前記撮像素子は、前記受光部が前記凹部の縁よりも内側に位置するように前記基板に配置され、前記凹部よりも外側にて、前記基板に支持されている撮像部品。
A substrate having a recess on the upper surface;
An image sensor disposed on the upper surface of the substrate so as to cover the recess,
The image sensor is convexly curved downward and has a light receiving portion,
In plan view, the area of the opening of the recess is larger than the area of the light receiving part,
The imaging element is an imaging component that is disposed on the substrate such that the light receiving portion is located inside an edge of the recess, and is supported by the substrate outside the recess.
上下に貫通する貫通孔を有する基板と、
該基板の上面に前記貫通孔を覆うように配置される撮像素子と、を備え、
前記撮像素子は、下に凸に湾曲しているとともに、受光部を有しており、
平面視において、前記貫通孔の開口の面積は前記受光部の面積よりも大きく、
前記撮像素子は、前記受光部が前記貫通孔の縁よりも内側に位置するように前記基板に配置され、前記貫通孔よりも外側にて、前記基板に支持されている撮像部品。
A substrate having a through-hole penetrating vertically;
An image sensor disposed on the upper surface of the substrate so as to cover the through-hole,
The image sensor is convexly curved downward and has a light receiving portion,
In a plan view, the area of the opening of the through hole is larger than the area of the light receiving part,
The imaging element is an imaging component that is disposed on the substrate such that the light receiving portion is located inside an edge of the through hole, and is supported by the substrate outside the through hole.
請求項1乃至請求項2のいずれかに記載の撮像部品と、
該撮像部品の撮像素子上に配置される透光性部材と、を備えた撮像ユニット。
The imaging component according to claim 1,
An imaging unit comprising: a translucent member disposed on an imaging element of the imaging component.
前記透光性部材は、ガラスあるいは樹脂からなることを特徴とする請求項3に記載の撮像ユニット。   The imaging unit according to claim 3, wherein the translucent member is made of glass or resin. 請求項1乃至請求項4のいずれかに記載の撮像部品と、
該撮像部品の前記撮像素子の下側に当接して配置される放熱部材と、を備えた撮像ユニット。
The imaging component according to any one of claims 1 to 4,
And a heat dissipating member disposed in contact with the lower side of the image sensor of the imaging component.
上下に貫通する貫通孔を有する基板と、該基板の上面に前記貫通孔を覆うように配置される撮像素子と、を備え、前記撮像素子は、下に凸に湾曲しているとともに、受光部を有しており、平面視において、前記貫通孔の開口の面積は前記受光部の面積よりも大きく、前記撮像素子は、前記受光部が前記貫通孔の縁よりも内側に位置するように前記基板に配置され、前記貫通孔よりも外側にて、前記基板に支持されている撮像部品の製造方法であって、
撮像素子を準備する第1の工程と、
該撮像素子を前記基板上に配置する第2の工程と、
前記撮像素子を前記基板の貫通孔から吸引することにより湾曲させる第3の工程と、
を経る撮像部品の製造方法。
A substrate having a through-hole penetrating vertically and an image sensor disposed on the upper surface of the substrate so as to cover the through-hole, and the image sensor is convexly curved downward and includes a light receiving portion In plan view, the area of the opening of the through hole is larger than the area of the light receiving part, and the imaging element is arranged so that the light receiving part is located inside the edge of the through hole. A method of manufacturing an imaging component that is disposed on a substrate and supported by the substrate outside the through hole,
A first step of preparing an image sensor;
A second step of disposing the image sensor on the substrate;
A third step of bending the imaging element by sucking from the through-hole of the substrate;
The manufacturing method of the imaging component which passes through.
上下に貫通する貫通孔を有する基板と、該基板の上面に前記貫通孔を覆うように配置される撮像素子と、を備え、前記撮像素子は、下に凸に湾曲しているとともに、受光部を有しており、平面視において、前記貫通孔の開口の面積は前記受光部の面積よりも大きく、前記撮像素子は、前記受光部が前記貫通孔の縁よりも内側に位置するように前記基板に配置され、前記貫通孔よりも外側にて、前記基板に支持されている撮像部品の製造方法であって、
あらかじめ下に凸に湾曲した撮像素子を準備する第1の工程と、
該湾曲した撮像素子を前記基板上に配置する第2の工程と、
前記基板の貫通孔から前記撮像素子を吸引することにより湾曲度合いの調整を行う第3の工程と、を経ることを特徴とする撮像部品の製造方法。
A substrate having a through-hole penetrating vertically and an image sensor disposed on the upper surface of the substrate so as to cover the through-hole, and the image sensor is convexly curved downward and includes a light receiving portion In plan view, the area of the opening of the through hole is larger than the area of the light receiving part, and the imaging element is arranged so that the light receiving part is located inside the edge of the through hole. A method of manufacturing an imaging component that is disposed on a substrate and supported by the substrate outside the through hole,
A first step of preparing an image sensor that is convexly curved downward in advance;
A second step of disposing the curved imaging element on the substrate;
And a third step of adjusting the degree of curvature by sucking the image sensor from the through hole of the substrate.
上下に貫通する貫通孔を有する基板と、該基板の上面に前記貫通孔を覆うように配置される撮像素子と、を備え、前記撮像素子は、下に凸に湾曲しているとともに、受光部を有しており、平面視において、前記貫通孔の開口の面積は前記受光部の面積よりも大きく、前記撮像素子は、前記受光部が前記貫通孔の縁よりも内側に位置するように前記基板に配置され、前記貫通孔よりも外側にて、前記基板に支持されている撮像部品と、
該撮像部品の撮像素子上に配置される透光性部材と、を備えた撮像ユニットの製造方法であって、
撮像素子を準備する第1の工程と、
該撮像素子を前記基板上に配置する第2の工程と、
前記撮像素子上に透光性部材を配置する第3の工程と
前記撮像素子を前記基板の貫通孔から吸引することにより、前記撮像素子を湾曲させる第4の工程と、を経る撮像ユニットの製造方法。
A substrate having a through-hole penetrating vertically and an image sensor disposed on the upper surface of the substrate so as to cover the through-hole, and the image sensor is convexly curved downward and includes a light receiving portion In plan view, the area of the opening of the through hole is larger than the area of the light receiving part, and the imaging element is arranged so that the light receiving part is located inside the edge of the through hole. is disposed on the substrate, wherein at the outer side of the through hole, an imaging part being supported on said substrate,
A translucent member disposed on an imaging element of the imaging component, and a manufacturing method of an imaging unit comprising:
A first step of preparing an image sensor;
A second step of disposing the image sensor on the substrate;
Manufacturing of an imaging unit through a third step of arranging a translucent member on the imaging device and a fourth step of bending the imaging device by sucking the imaging device from the through-hole of the substrate. Method.
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