JP2022151592A - Inspection selection device - Google Patents

Abstract

To enable even a large inspection object to be appropriately selected.SOLUTION: This inspection selection device comprises: conveyance means for conveying an inspection object in a prescribed conveyance direction; irradiation means for irradiating the inspection object with a prescribed electromagnetic wave; detection means with which each of a plurality of sensors continuous in a transverse direction orthogonal to the conveyance direction detects the prescribed electromagnetic wave having gone through the inspection object being conveyed and outputs detection data for each prescribed period; inspection means for inspecting detection data and identifying detection data that indicates the presence of the inspection object and detection data that indicates abnormality; selection control means for identifying a presence range of inspection objects having abnormality from the result of identification by the inspection means and controlling a plurality of selection mechanisms in accordance with the presence range; and selection means provided with a plurality of selection mechanisms installed conveyance downstream of each sensor, for actuating the selection mechanisms in accordance with control by the selection control means and selecting an inspection object.SELECTED DRAWING: Figure 1

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an inspection and sorting apparatus that inspects an object to be inspected based on electromagnetic waves irradiated to the object and detected through the object, and that performs a predetermined sorting process according to the inspection result.

A removing means is provided for each of a plurality of conveying paths separated by a predetermined interval in the width direction perpendicular to the conveying direction of the conveyor, and X-rays are applied to various sizes of grains conveyed on the respective conveying paths by the conveyor. is irradiated, and from the X-ray transmission image generated based on the intensity of the transmitted X-ray, the transport route in which the foreign matter that needs to be removed is present is specified, and the timing at which the foreign matter reaches the removal means corresponding to the transport route There is known a sorting apparatus that removes granular materials containing foreign matter by operating a removing means in anticipation of the above (see, for example, Patent Literatures 1 and 2).

JP 2017-164723 A Utility Model Registration No. 3198202

The sorting apparatuses of Patent Documents 1 and 2 operate the removing means when the foreign matter contained in the granular material reaches the removing means, and remove the granular material containing the foreign matter from the conveying path. This is based on the idea that, on the premise that the granular object to be inspected is small, if the removal means is operated targeting only the foreign matter, the granular object containing the foreign matter can be removed together. is.

However, in the case of a larger object to be inspected, even if the removal means is operated targeting only the mixed foreign matter, sufficient external force cannot be applied to remove the object to be inspected, and appropriate sorting cannot be performed. .

SUMMARY OF THE INVENTION It is an object of the present invention to provide an inspection and sorting apparatus capable of appropriately sorting even large objects to be inspected.

The inspection and sorting apparatus of the present invention comprises transport means for transporting an object to be inspected in a predetermined transport direction, irradiating means for irradiating the object to be inspected with a predetermined electromagnetic wave, and a plurality of sensors arranged in a transverse direction orthogonal to the transport direction. Detecting means for detecting a predetermined electromagnetic wave that has passed through an inspected object being conveyed and outputting detection data at predetermined intervals, and detection means for inspecting the detected data to detect the presence of the inspected object and detection indicating an abnormality. inspection means for specifying data; sorting control means for specifying an existence range of an inspected object having an abnormality based on the result of specifying by the inspection means; and a sorting means for sorting the inspection object by operating each of the plurality of sorting mechanisms provided downstream of the sensor in the transport of the sensor. Detection data indicating an abnormality includes, for example, detection data indicating the presence of a foreign substance in an object to be inspected, detection data indicating an abnormality in the property of the object itself, and the like.

The sorting control means may determine, based on the specified range of existence, which range of sorting mechanisms to operate in what cycle range, and control the plurality of sorting mechanisms according to the determination.

The sorting control means may determine the range and cycle for operating the sorting mechanism so that the operation of the sorting mechanism affects the entire specified existence range.

The sorting control means may determine the range and cycle for operating the sorting mechanism based on the center of gravity of the specified existence range.

The sorting control means may determine the range and cycle for operating the sorting mechanism based on the existence position of the foreign matter in the identified existence range.

According to the inspection and sorting apparatus of the present invention, it is possible to appropriately sort even large objects to be inspected.

1 is a front view showing an example of the configuration of an inspection and sorting device 100; FIG. 1 is a plan view showing an example of the configuration of an inspection and sorting apparatus 100; FIG. It is a figure which shows the detection data in each sensor of each period, and an example of the inspection result.

BEST MODE FOR CARRYING OUT THE INVENTION An embodiment of the present invention will be described below with reference to the drawings. In the following description, the same members are denoted by the same reference numerals, and the description of members that have already been described will be omitted as appropriate.

FIG. 1 shows a front view and FIG. 2 shows a plan view showing a configuration example of an inspection and sorting apparatus 100 of the present invention. The inspection and sorting apparatus 100 includes conveying means 101 , irradiation means 102 , detection means 103 , inspection means 104 , sorting control means 105 and sorting means 106 .

The conveying means 101 conveys the inspected object W in a predetermined conveying direction. The conveying means 101 has a depth in a direction perpendicular to the conveying direction (transverse direction) when viewed from the front, and can place and convey a plurality of inspected objects W at arbitrary positions in the transverse direction. be. As the transport means 101, any type of conveyor may be adopted as long as it can transport the placed inspection object W in a fixed direction.

In FIG. 1, the sorting means 106 is inserted in the middle of the conveying means 101, and is shown in a divided manner. The notation of the sorting means 106 means that it is possible to perform a predetermined sorting process on the inspected object W being transported at the indicated position.

The irradiating means 102 irradiates the inspection object W transported by the transporting means 101 with a predetermined electromagnetic wave. The type of electromagnetic waves to be irradiated may be appropriately selected according to the contents of the inspection, such as X-rays, visible light, and infrared rays.

The detection means 103 is arranged at a position where it can detect a predetermined electromagnetic wave which is irradiated from the irradiation means 102 and passed through the object W to be inspected. FIG. 1 shows an example in which it is arranged to face the irradiating means 102 in order to detect the transmitted electromagnetic wave from the object W to be inspected.

The detection means 103 has a plurality of sensors arranged in the transverse direction of the conveying means 101 . Each sensor detects a predetermined electromagnetic wave that has arrived from the irradiating means 102 through the object W to be inspected or directly, and outputs detection data at predetermined intervals. FIG. 2 shows an example in which eight sensors L1 to L8 are arranged in series.

Each sensor of the detection means 103 is a sensor in which one or more detection elements capable of detecting a predetermined electromagnetic wave are arranged in a row in the transverse direction. Output.

The plurality of sensors of the detection means 103 may be appropriately configured using one or more line sensors each composed of a plurality of detection elements. For example, when there are four sensors, three or less line sensors may be divided, one-to-one configuration may be performed using four line sensors, or one sensor may be composed of two or more sensors. line sensor. Also, each sensor may be arranged in a plurality of rows in the transport direction to form a TDI sensor.

The sensors are provided in the same number as the sorting mechanisms provided downstream of the transport. As a result, it is possible to perform sorting according to the outer shape and the like of the inspection object W specified based on the detection data of each sensor.

The predetermined cycle in which each sensor detects a predetermined electromagnetic wave and accumulates and outputs detection data may be, for example, the time required to pass the width of the sensor in the conveying direction at the conveying speed of the conveying means 101 . By setting the predetermined cycle in this manner, the entire inspection object W passing through the detection means 103 can be inspected without omission.

The detection data of each sensor in each cycle output by the detection means 103 is associated with the detected cycle and sensor and stored in an arbitrary storage means (not shown).

The inspection means 104 inspects the detection data output from each sensor of the detection means 103 with reference to the storage means, and specifies the detection data indicating the existence of the object to be inspected and the detection data indicating an abnormality. Circumstances that cause an abnormality in the detection data include, for example, the presence of a foreign substance in the object to be inspected, an abnormality in the properties of the object to be inspected, and the like.

When one sensor consists of a plurality of detection elements, the inspection result of the detection data as a sensor is, for example, inspecting each detection data by each detection element and comprehensively evaluating with arbitrary criteria based on each inspection result. or by checking the sum of the detection data of each detection element.

In the inspection means 104, four inspection objects W1 to W4 having the shapes shown in FIG. Next, a case in which the wafers are successively placed on the conveying means 101 and inspected will be described as an example.

The objects W1 and W2 to be inspected have a width corresponding to four sensors in the transverse direction and a width corresponding to one cycle in the transport direction. Object W2 to be inspected contains foreign matter F in part. The object to be inspected W3 has a width of two sensors in the transverse direction and a width of one cycle in the transport direction, and a width of one sensor in the transverse direction and a width of two cycles in the transport direction. . The object W4 to be inspected has a width corresponding to three sensors in the transverse direction and a width corresponding to one period in the conveying direction. Also, between the object W1 and the object W2 to be inspected, between the object W2 and the object W3 to be inspected, and between a part of the object W3 to be inspected and the object W4 to be inspected is one period. There is an interval, and the period between the remaining portion of the inspection object W3 and the inspection object W4 is continuous.

Four inspected objects W1 to W4 are conveyed, and when the cycle in which the transmitted electromagnetic wave from the inspected object W1 is detected is defined as the first cycle, the transmitted electromagnetic waves in the sensors L1 to L8 in the 1st to 7th cycles. An example of detected data is shown in FIG. In FIG. 3(a), the data detected by each sensor is shown in white, which means that the period in which there is no obstacle to the electromagnetic wave reaches high intensity. As for the period in which the amount of transmission is large, it is shown in a lighter color. It is also assumed that the objects W1 to W4 to be inspected are the same product, and that the amount of electromagnetic waves transmitted by the foreign matter F is smaller than that of the objects W1 to W4 to be inspected.

From FIG. 3(a), sensors L3 to L6 in the 1st period, sensors L2 to L5 in the 3rd period, sensors L5 to L7 in the 5th period, sensor L7 in the 6th period, and sensors L2 to L4 in the 7th period. can be specified as detection data indicating the presence of the object to be inspected, and the detection data in the third cycle sensor L3 can be specified as detection data indicating the presence of foreign matter F.

The sorting control means 105 specifies the existence range of the object to be inspected having an abnormality based on the result of specifying by the inspection means 104, and controls the operations of the plurality of sorting mechanisms of the sorting means 106 according to the existence range.

First, based on the result of identification by the inspection means 104, the range presumed to be integral is identified as the existence range of the object to be inspected. Specifically, for example, it can be identified by the unity of the detection position and the detection period. Specifically, in the case of the detection data shown in FIG. 3(a), as shown in the thick line frame in FIG. Since the detection data of and the detection data of the sensors L2 to L4 in the 7th cycle are recognized to be integrated, each can be specified as an object to be inspected, and the existence range of each can be specified (each specified The objects to be inspected correspond to the objects to be inspected W1, W2 and W4 in FIG. In addition, since the sensors L5 to L7 of the fifth period and the sensor L7 of the sixth period are recognized to be integrated, this can also be specified as an object to be inspected, and the existence range can be specified (the specified object The object to be inspected corresponds to the object to be inspected W3 in FIG.

Subsequently, by specifying the existence range of the object to be inspected W2, it is specified that the sensor L3 of the third cycle in which the foreign matter F is present is included in the object to be inspected W2. It is identified as an object to be inspected.

In addition, by storing acceptable shapes of the objects to be inspected in advance in the sorting control means 105, by comparing this with the shapes indicated by the existence ranges of the objects to be inspected W1 to W4, it is possible to detect abnormalities in shape, bites, and defects. Objects to be inspected that have an abnormality such as a fold or bend can be identified. For example, if the registered acceptable shape is the same shape as the object W1, the object W3 has a curved shape and the object W4 has a short dimension. be done.

In addition, detection of abnormalities in inspections can be done by comparing the arrival strength of electromagnetic waves and acceptable shapes, as well as by applying detection data to a learning model that has learned when an object to be inspected is normal and when it is abnormal. It may be done by any method.

As described above, the objects to be inspected W2, W3, and W4 are identified as objects to be inspected that have an abnormality.

Then, it is determined in what period and in what range the sorting mechanism of the sorting means 106 should be operated so that the objects to be inspected W2, W3 and W4 are excluded by the sorting means 106. FIG.

In order to operate each sorting mechanism of the sorting means 106 arranged downstream of the transport at an appropriate timing based on the detection data of each sensor of the detecting means 103, it is necessary to synchronize them by a predetermined method. For example, for the detection data output from the detection means 103 in each cycle, after the detection data is output, after the number of cycles corresponding to the time required for transportation between the detection means 103 and the sorting means 106 has elapsed, the detection data is inspected. The sorting means 106 may sort according to the results. More specifically, for example, every time detection data is output in each cycle, the detection means 103 performs sorting for that cycle by the number of cycles corresponding to the time required for transportation between the detection means 103 and the sorting means 106 from that cycle. The sorting means 106 may be notified of information indicating what is to be done based on the result of inspection of the previous detection data, and the sorting means 106 may sort according to the notification.

Based on such a synchronization method, the range of cycles in which the sorting mechanism of the sorting means 106 is operated corresponds to the cycle in which the detection data of each object to be inspected in the detection means 103 is detected. It should be decided by attaching.

Specifically, for example, as shown in FIG. 3B, if the period in which the detection data of the object to be inspected W1 is detected is the first period, the electromagnetic waves passing through the object to be inspected W2 are detected in the third period. Therefore, the sorting mechanism to be operated is determined based on a predetermined rule from among the sorting mechanisms S2 to S5 corresponding to the sensors L2 to L5, respectively. Further, since the electromagnetic waves passing through the object W3 to be inspected are detected by the sensors L5 to L7 in the fifth period and detected by the sensor L7 in the sixth period, the sorting mechanism to be operated in each period is selected from the sensors L5 to L7. Based on a predetermined rule, one of the sorting mechanisms S5 to S7 corresponding to each of L7 is determined. Further, since the electromagnetic waves passing through the object W4 to be inspected are detected by the sensors L2 to L4 in the seventh cycle, the sorting mechanisms to be operated are selected from among the sorting mechanisms S2 to S4 corresponding to the sensors L2 to L4, respectively. Determined based on predetermined rules. In the 1st, 2nd and 4th cycles, there are no inspection objects to be excluded, so it is decided not to operate any of the sorting mechanisms.

Any predetermined rule may be used to determine which range of sorting mechanisms to operate from among the plurality of sorting mechanisms corresponding to the plurality of sensors in which the inspected object is detected in each cycle.

For example, there is a rule that determines according to the shape indicated by the existence range of the object to be inspected W to be excluded. That is, it is determined so that the operation of the sorting mechanism acts on the entire existence range. For example, for the object to be inspected W2, all the sorting mechanisms S2 to S5 corresponding to the sensors L2 to L5 are operated in the third cycle. For the object to be inspected W3, all the sorting mechanisms S5 to S7 corresponding to the sensors L5 to L7 are operated in the fifth cycle, and the sorting mechanism S7 corresponding to the sensor L7 is operated in the sixth cycle. In the case of the object to be inspected W4, all the sorting mechanisms S2 to S4 corresponding to the sensors L2 to L4 are operated in the seventh cycle.

As a result, it is possible to appropriately sort even a large object to be inspected.

As another decision rule, there is a method of deciding based on the center of gravity of the existence range of the object to be inspected W to be excluded. The center of gravity may be determined geometrically from the shape indicated by the existence range of the object to be inspected, or may be determined by other methods. Then, only the sorting mechanism corresponding to the position corresponding to the obtained center of gravity may be operated, or the sorting mechanism in an arbitrary range around the sorting mechanism corresponding to the position corresponding to the obtained center of gravity may be operated. good. For example, when the center of gravity of the object W3 to be inspected is in the portion marked with a star in FIG. The sorting mechanisms S6 and S7 may be operated, and the sorting mechanism S7 may be operated in the sixth cycle.

By narrowing down the target to the center of gravity or its periphery in this way, it is possible to efficiently operate the sorting mechanism and perform sorting appropriately.

As another determination rule, there is a method of determining based on the position of the foreign matter within the existence range of the inspection object W when the inspection object W to be excluded includes a foreign matter. At this time, only the sorting mechanism corresponding to the position where the foreign substance exists may be operated, or the sorting mechanisms in an arbitrary range around the sorting mechanism corresponding to the position where the foreign substance exists may also be operated. For example, for the inspection object W2 containing foreign matter, only the sorting mechanism S3 may be operated in the third cycle, or the sorting mechanisms S2 to S4 may be operated in correspondence with only the position of the foreign matter. .

By narrowing the target to the foreign matter in this way, it is possible to appropriately sort the foreign matter while efficiently operating the sorting mechanism when the density of the foreign matter is high.

The determination result of the range in which the sorting means 106 operates the plurality of sorting mechanisms, which is associated with the output cycle of the detection data of the detection means 103, in the sorting control means 105 is stored in an arbitrary means (not shown) for reference. control while The determination result may be stored, for example, in the form of map data in which 1's and 0's indicate whether or not the sorting mechanism operates in each cycle, as shown in FIG. 3(c).

The sorting means 106 has a plurality of sorting mechanisms provided downstream of the respective sensors, and operates each of the plurality of sorting mechanisms under the control of the sorting control means 105 to sort the inspection object W. For example, each time the detection means 103 outputs the detection data in each cycle, the sorting of the cycle is performed by selecting the number of cycles before the cycle corresponding to the time required for transportation between the detection means 103 and the sorting means 106. When notifying the sorting means 106 of information indicating what to do based on the inspection results, the sorting means 106 operates each of the plurality of sorting mechanisms according to the determination of the sorting control means 105 in each cycle, triggered by the notification. .

The sorting of the inspected objects W is generally a sorting in which the inspected objects W to be excluded are separated from the conveying means 101 by the operation of the sorting mechanism, but this is not the only option. Sorting may be performed by changing the conveying direction of the objects W to be inspected.

The method of the sorting mechanism for sorting the objects W to be inspected is arbitrary, and examples thereof include an air jet method, a flipper method, a drop method, and the like. FIG. 2 shows an example in which eight sorting mechanisms S1 to S8 are provided downstream of sensors L1 to L8.

According to the inspection and sorting apparatus 100 of the present invention described above, by operating the sorting mechanism according to the shape of the object to be inspected, the effect of the operation can be effectively exerted on the object to be inspected. It is possible to appropriately sort even the objects to be inspected.

It should be noted that the present invention is not limited to the above embodiments. The above-described embodiment is an example, and any device having substantially the same configuration as the technical idea described in the claims of the present invention and exhibiting the same effect is the present invention. included in the technical scope of That is, modifications can be made as appropriate within the scope of the technical ideas expressed in the present invention, and forms with such modifications and improvements are also included in the technical scope of the present invention.

100 Inspection and selection device 101 Transport means 102 Irradiation means 103 Detection means 104 Inspection means 105 Selection control means 106 Selection means L1 to L8 Sensors S1 to S8 Selection mechanism W, W1 to W4 Object to be inspected

Claims (7)

a conveying means for conveying an object to be inspected in a predetermined conveying direction;
irradiating means for irradiating the object to be inspected with a predetermined electromagnetic wave;
detection means for each of a plurality of sensors arranged in a row in a transverse direction perpendicular to the conveying direction to detect the predetermined electromagnetic wave that has passed through the inspected object being conveyed and to output detection data at predetermined intervals;
inspection means for inspecting the detection data and specifying the detection data indicating the existence of the object to be inspected and the detection data indicating an abnormality;
sorting control means for specifying an existence range of the inspected object having an abnormality based on the identification result by the inspection means, and controlling operations of a plurality of sorting mechanisms according to the existence range;
a sorting means for sorting the object to be inspected by operating each of the plurality of sorting mechanisms according to the control by the sorting control means;
inspection and sorting device. 2. The inspection and sorting apparatus according to claim 1, wherein the detection data indicating the abnormality is the detection data indicating the presence of foreign matter in the object to be inspected. 2. The inspection and selection apparatus according to claim 1, wherein said detection data indicating said abnormality is said detection data indicating abnormality in the property of said object to be inspected. The sorting control means is characterized in that, based on the specified existence range, it determines in what range of cycles and in what range the sorting mechanisms are to be operated, and controls the plurality of sorting mechanisms according to the determination. The inspection and selection device according to any one of claims 1 to 3. 5. The inspection and sorting apparatus according to claim 4, wherein said sorting control means determines the range and cycle of operation of said sorting mechanism so that the operation of said sorting mechanism affects the entire existing range. 5. The inspection and sorting apparatus according to claim 4, wherein said sorting control means determines the range and period of operation of said sorting mechanism based on the center of gravity of said existence range. 5. The inspection and sorting apparatus according to claim 4, wherein the sorting control means determines the operating range and cycle of the sorting mechanism based on the existence position of the foreign matter in the existence range.

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