JP2022014176A - Laser device - Google Patents

Abstract

To provide a laser device that is less prone to misalignment of a laser beam path even when a chamber is thermally deformed.SOLUTION: A chamber houses a laser medium gas and an optical resonator. A stand supports the chamber. At one point, a horizontal position of the chamber relative to the stand is constrained. The chamber is supported so that it can be moved horizontally with respect to the stand except where the horizontal position of the chamber with respect to the stand is constrained.SELECTED DRAWING: Figure 4

Description

The present invention relates to a laser device.

The chamber of the gas laser oscillator is supported by the gantry. In this structure, the chamber is usually fixed to the gantry at four locations. In the three-axis orthogonal type laser oscillator, the laser medium gas in the chamber is circulated at high speed in order to stabilize the discharge at the discharge electrode. The laser medium gas flows into the discharge region between the pair of discharge electrodes, and the laser medium gas heated to a high temperature by the discharge is discharged from the discharge region to another region in the chamber. The laser medium gas discharged from the discharge region is cooled by the heat exchanger and re-flows into the discharge region. The chamber is thermally expanded by the laser medium gas that has become hot after being discharged. When the chamber thermally expands, the gantry also deforms according to the deformation of the chamber.

Patent Document 1 below discloses a gas laser oscillator in which a mirror of an optical resonator is arranged outside the chamber. The chamber and the optical resonator mirror are fixed to separate mounts. Therefore, even if the chamber and its gantry are thermally deformed, the optical resonator is not easily affected by the thermal deformation.

Japanese Unexamined Patent Publication No. 2-105478

In the configuration in which the mirror of the optical resonator is arranged inside the chamber, when the gantry is deformed due to the thermal deformation of the chamber, the posture of the chamber changes, and the posture and position of the mirror of the optical resonator in the chamber also change. As a result, the optical axis of the optical resonator deviates from the initial position. When the optical axis of the optical resonator shifts, the position of the laser beam incident on the beam shaping optical system or the like arranged after the laser oscillator also shifts. If the position of incidence on the beam shaping optical system shifts, the beam profile on the machined surface collapses and the machining quality deteriorates.

An object of the present invention is to provide a laser apparatus in which the path of a laser beam is less likely to shift even if the chamber is thermally deformed.

According to one aspect of the invention
A chamber that houses the laser medium gas and the optical resonator,
It has a stand to support the chamber and
The chamber is constrained in one place by the horizontal position of the chamber with respect to the gantry.
A laser device is provided in which the chamber is movably supported in the horizontal direction with respect to the gantry, except where the horizontal position of the chamber with respect to the gantry is constrained.

Even if the chamber is thermally deformed, the gantry is not easily affected by the deformation. As a result, the fluctuation of the posture of the chamber is reduced, and the deviation of the path of the laser beam is less likely to occur.

FIG. 1 is a schematic view of a laser apparatus according to the present embodiment and a processing apparatus that performs processing with a laser beam output from the laser apparatus. FIG. 2 is a side view of the laser apparatus according to the embodiment, and is a view showing a cross section of the laser oscillator. FIG. 3 is a cross-sectional view perpendicular to the optical axis of the laser device according to the embodiment. FIG. 4 is a plan view of the chamber and the gantry of the laser device according to the embodiment. 5A and 5B are cross-sectional views of the alternate long and short dash line 5A-5A and the alternate long and short dash line 5B-5B of FIG. 4, respectively. 6A is a plan view of the resonator base of the laser apparatus according to the embodiment, and FIGS. 6B and 6C are cross-sectional views taken along the alternate long and short dash line 6B-6B and the alternate long and short dash line 6C-6C, respectively. 7A and 7B are a schematic plan view and a schematic cross-sectional view of a laser apparatus according to a comparative example, respectively.

A laser apparatus according to an embodiment will be described with reference to FIGS. 1 to 7B.
FIG. 1 is a schematic view of a laser device 10 according to an embodiment and a processing device 80 that performs processing with a laser beam output from the laser device 10. The laser device 10 and the processing device 80 are fixed to the common base 100. The common base 100 is, for example, a floor.

The laser device 10 includes a gantry 11 fixed to the common base 100 and a laser oscillator 12 supported by the gantry 11. The processing apparatus 80 includes a beam shaping optical system 81 and a stage 82. The object to be machined 90 is held on the stage 82. The beam shaping optical system 81 and the stage 82 are fixed to the common base 100. The laser beam output from the laser oscillator 12 has its beam profile shaped by the beam shaping optical system 81, and is incident on the object to be machined 90.

FIG. 2 is a side view of the laser apparatus 10, and is a cross-sectional view of the laser oscillator 12. The laser oscillator 12 includes a chamber 15 that houses a laser medium gas, an optical resonator 20, and the like. The chamber 15 is supported by the gantry 11 at four points. That is, the gantry 11 receives the load from the chamber 15 at four points. In FIG. 2, the portion where the chamber 15 is supported by the gantry 11 is indicated by a triangle 30. FIG. 2 only schematically shows the portion where the chamber 15 is supported by the gantry 11 by the triangle 30, and the triangle 30 does not represent the shape of the support structure in which the gantry 11 supports the chamber 15. do not have. The gantry 11 is supported on the common base 100 by four gantry legs 13. FIG. 2 schematically represents the gantry leg 13 as a triangle, and does not represent the shape of the gantry leg 13. The discharge electrode support member 23 and the optical resonator support member 27, which will be described later, are also schematically shown in FIG.

Next, the configuration of the laser oscillator 12 will be described. The laser medium gas is housed in the chamber 15. The internal space of the chamber 15 is divided into an optical chamber 16 located relatively above and a blower chamber 17 located relatively below. The optical chamber 16 and the blower chamber 17 are partitioned by an upper and lower partition plate 18. The upper and lower partition plates 18 are provided with openings for allowing laser gas to flow between the optical chamber 16 and the blower chamber 17. The bottom plate 19 of the optical chamber 16 projects from the side wall of the blower chamber 17 in the direction of the optical axis 20A of the optical resonator 20, and the length of the optical chamber 16 in the optical axis direction is larger than the length of the optical chamber 17 in the optical axis direction. It's getting longer. The chamber 15 is supported by the gantry 11 by the bottom plate 19 or via a member fixed to the bottom plate 19.

A pair of discharge electrodes 21 and a pair of resonator mirrors 25 are arranged in the optical chamber 16. The pair of discharge electrodes 21 are supported by the bottom plate 19 via the discharge electrode support members 22 and 23, respectively. The pair of discharge electrodes 21 are arranged at intervals in the vertical direction, and a discharge region 24 is defined between them. The discharge electrode 21 excites the laser medium gas by causing a discharge in the discharge region 24. As will be described later with reference to FIG. 3, the laser medium gas flows through the discharge region 24 in the direction perpendicular to the paper surface of FIG.

The pair of resonator mirrors 25 are fixed to one resonator base 26 arranged in the optical chamber 16. The resonator base 26 is supported by the bottom plate 19 via four optical resonator support members 27. The resonator mirror 25 constitutes an optical resonator 20 having an optical axis 20A passing through the discharge region 24. A light transmission window 28 for transmitting a laser beam is attached to an intersection of an extension line extending the optical axis 20A of the optical resonator 20 in one direction (left direction in FIG. 1) and the wall surface of the optical chamber 16. .. The laser beam excited in the optical resonator passes through the light transmission window 28 and is radiated to the outside.

A blower 29 is arranged in the blower chamber 17. The blower 29 circulates the laser medium gas between the optical chamber 16 and the blower chamber 17.

FIG. 3 is a cross-sectional view perpendicular to the optical axis 20A (FIG. 2) of the laser device according to the embodiment. As described with reference to FIG. 2, the internal space of the chamber 15 is divided into an upper optical chamber 16 and a lower blower chamber 17 by the upper and lower partition plates 18. A pair of discharge electrodes 21 and a resonator base 26 that supports an optical resonator 20 (FIG. 2) are arranged in the optical chamber 16. A discharge region 24 is defined between the discharge electrodes 21.

A partition plate 40 is arranged in the optical chamber 16. The partition plate 40 is a first gas flow path 41 from the opening 18A provided in the upper and lower partition plates 18 to the discharge region 24, and a second gas flow from the discharge region 24 to another opening 18B provided in the upper and lower partition plates 18. The road 42 is defined. The laser medium gas flows in the discharge region 24 in a direction orthogonal to the optical axis 20A (FIG. 2). The discharge direction is orthogonal to both the direction in which the laser medium gas flows and the optical axis 20A. The blower chamber 17, the first gas flow path 41, the discharge region 24, and the second gas flow path 42 form a circulation path through which the laser medium gas circulates. The blower 29 generates a flow of the laser medium gas indicated by an arrow so that the laser medium gas circulates in this circulation path.

The heat exchanger 43 is housed in the circulation path in the blower chamber 17. The laser medium gas heated in the discharge region 24 is cooled by passing through the heat exchanger 43, and the cooled laser medium gas is resupplied to the discharge region 24.

The upper and lower partition plates 18 are provided with an outflow hole 44 for allowing laser gas to flow out from the blower chamber 17 to the optical chamber 16. A part of the laser medium gas directed to the first gas flow path 41 by the blower 29 passes through the outflow hole 44 and flows out to the optical chamber 16. The outflow hole 44 is provided with a filter 45 for removing particles. For example, the filter 45 closes the outflow hole 44, and the laser medium gas flowing out from the blower chamber 17 to the optical chamber 16 is filtered by passing through the filter 45.

Next, a structure for supporting the chamber 15 on the gantry 11 will be described with reference to FIGS. 4 to 5B.
FIG. 4 is a plan view of the chamber 15 and the gantry 11. 5A and 5B are cross-sectional views taken along the alternate long and short dash line 5A-5A and the alternate long and short dash line 5B-5B of FIG. 4, respectively. In a plan view, bottom plates 19 are provided on both sides of the blower chamber 17 with respect to the direction of the optical axis 20A. The supported portion 32 projects from each of the two bottom plates 19 of the chamber 15 in two directions away from the optical axis 20A. The supported portion 32 may be integrally formed with the chamber 15, or the supported portion 32 may be attached to and fixed to the chamber 15 with bolts or the like. "Integrally formed" means that it is formed inseparably, for example, it is connected by welding or the like, or it is formed by a single member. A part of the bottom plate 19 may be used as the supported portion 32. The two supported portions 32 provided on each of the two bottom plates 19 are arranged at the same position in the optical axis direction. That is, the four supported portions 32 are arranged at positions corresponding to the four vertices of the rectangle.

The four support portions 31 of the gantry 11 are provided at positions overlapping each of the supported portions 32 in a plan view. The support portion 31 projects from the two frames of the gantry 11 parallel to the optical axis 20A toward the optical axis 20A. The support portion 31 may be integrally formed with the gantry 11, or the support portion 31 may be attached to the gantry 11 with bolts or the like and fixed. A part of the gantry 11 may be used as the support portion 31. Each of the support portions 31 receives the load from the supported portion 32. That is, the chamber 15 is supported by the gantry 11 at four points. A frictional force reducing member 36 (FIGS. 5A and 5B) is inserted between the supporting portion 31 and the supported portion 32. That is, at the position where the chamber 15 is supported, the gantry 11 supports the chamber 15 via the frictional force reducing member 36. The frictional force reducing member 36 does not arrange the frictional force reducing member 36, and reduces the frictional force as compared with the case where the supporting portion 31 and the supported portion 32 are in direct contact with each other. As the frictional force reducing member 36, for example, polytetrafluoroethylene (PTFE) or the like is used.

One of the four supported portions 32, the supported portion 32 (supported portion 32 at the lower left in FIG. 4), is fixed to the support portion 31 with bolts 33. As a result, the position of the supported portion 32 in the horizontal direction with respect to the supported portion 31 is constrained. That is, the horizontal position of the chamber 15 with respect to the gantry 11 is constrained at one place. In the place where the horizontal position of the chamber 15 is constrained with respect to the gantry 11, the frictional force reducing member 36 may not be arranged between the chamber 15 and the gantry 11.

Side wall portions 31A and canopy portions 31B (FIGS. 5A and 5B) fixed to the gantry 11 are provided at three locations other than the locations where the horizontal positions of the chamber 15 are constrained with respect to the gantry 11. The side wall portion 31A faces the tip surface of the supported portion 32, and the canopy portion 31B faces the upper surface of the supported portion 32. In FIG. 4, the canopy portion 31B substantially overlaps with the support portion 31. The side wall portion 31A and the canopy portion 31B may be integrally formed with the gantry 11, or may be attached to the gantry 11 with bolts or the like and fixed.

An elastic member 34 such as a coil spring is arranged between the supported portion 32 and the canopy portion 31B. The elastic member 34 presses the supported portion 32 against the supported portion 31 in the same direction as the load is applied. As a result, the chamber 15 is pressed toward the gantry 11.

Two supported portions 32 (upper side in FIG. 4, right side in FIGS. 5A and 5) arranged on the opposite side of the supported portion 32 fixed to the support portion 31 when viewed from the optical axis 20A. In 32), a gap is secured between the front end surface of the supported portion 32 and the side wall portion 31A. Therefore, the supported portion 32 can move with respect to the support portion 31 in two directions, a direction parallel to the optical axis 20A and a direction orthogonal to the optical axis 20A. That is, at two locations, the chamber 15 is movably supported in two directions horizontal to the gantry 11.

The supported portion 32 (lower right in FIG. 4 and the left supported portion 32 in FIG. 5B) arranged on the same side as the supported portion 32 fixed to the support portion 31 when viewed from the optical axis 20A. The frictional force reducing member 36 is sandwiched between the tip surface of the supported portion 32 and the side wall portion 31A. In another supported portion 32 arranged at the same position as the supported portion 32 in the direction of the optical axis 20A, the elastic member 35 is arranged between the tip surface of the supported portion 32 and the side wall portion 31A. Has been done. The elastic member 35 presses the supported portion 32 against the side wall portion 31A on the opposite side of the optical axis 20A. The frictional force reducing member 36 is arranged between the tip surface of the supported portion 32 and the elastic member 35.

The front end surface and the side wall portion 31A of the supported portion 32 (supported portion 32 on the left side in FIG. 5B) arranged on the same side as the supported portion 32 fixed to the support portion 31 when viewed from the optical axis 20A. No gap is secured between them. Therefore, the position of the supported portion 32 in the direction orthogonal to the optical axis 20A is constrained with respect to the supporting portion 31. The supported portion 32 can move freely in the direction parallel to the optical axis 20A. That is, the position of the chamber 15 in the rotational direction is constrained at one place so that the chamber 15 does not displace in the horizontal direction in the horizontal plane around the position where the horizontal position of the chamber 15 with respect to the gantry 11 is constrained. There is.

Next, the structure in which the resonator base 26 is supported by the chamber 15 will be described with reference to FIGS. 6A to 6C.
6A is a plan view of the resonator base 26, and FIGS. 6B and 6C are cross-sectional views of the alternate long and short dash line 6B-6B and 6C-6C, respectively. The resonator base 26 is a flat plate long in the direction of the optical axis 20A. The resonator mirror 25 is fixed to the upper surface near both ends of the resonator base 26.

Four optical resonator support members 27A, 27B, 27C, and 27D are arranged at positions included in the resonator base 26 in a plan view. Each of the optical resonator support members 27A and 27B is a stepped pin, and is arranged on the same side of the optical axis 20A in a plan view. The straight line passing through the center of the optical resonator support members 27A and 27B is parallel to the optical axis 20A. The other two optical resonator support members 27C and 27D are pins having no step, and are arranged at positions of line symmetry of the optical resonator support members 27A and 27B with respect to the optical axis 20A in a plan view, respectively. .. That is, the four optical resonator support members 27A to 27D are arranged at positions corresponding to the four vertices of the rectangle. The lower ends of the four optical resonator support members 27A to 27D are embedded in the bottom plate 19 and fixed to the bottom plate 19.

The resonator base 26 is provided with a circular hole 51 and an elongated hole 52. The circular hole 51 and the elongated hole 52 are arranged at positions corresponding to the optical resonator support members 27A and 27B in a plan view, respectively. The elongated hole 52 has a long shape in a direction parallel to the optical axis 20A in a plan view. A portion of the optical resonator support members 27A and 27B above the step is inserted into the circular hole 51 and the elongated hole 52. The resonator base 26 is supported in a direction in which a load is applied by the stepped portions of the optical resonator support members 27A and 27B and the upper end surfaces of the optical resonator support members 27C and 27D.

The portion of the resonator base 26 around the circular hole 51 is constrained in position in the horizontal plane with respect to the optical resonator support member 27A. The optical resonator support member 27B inserted into the elongated hole 52 is movable in a one-dimensional direction parallel to the optical axis 20A with respect to the resonator base 26. The optical resonator support members 27C and 27D can move in two directions in a horizontal plane with respect to the resonator base 26. That is, the resonator base 26 is constrained in the horizontal position at one place with respect to the chamber 15, and is not constrained in the horizontal position at the other three places.

Next, the excellent effects of the above-mentioned examples will be described while comparing with the comparative examples shown in FIGS. 7A and 7B.

7A and 7B are a schematic plan view and a schematic cross-sectional view of a laser apparatus according to a comparative example, respectively. In the comparative example, all of the four supported portions 32 of the chamber 15 are fixed to the four supporting portions 31 of the gantry 11 with bolts 33. In FIG. 7B, the pair of the support portion 31 and the supported portion 32 is schematically represented by a triangle 30. When the laser oscillator 12 is operated, the temperature of the laser medium gas rises due to the discharge. As a result, the temperature of the chamber 15 also rises, and the chamber 15 thermally expands. In FIGS. 7A and 7B, each component after thermal expansion is shown by a broken line. In addition, in FIGS. 7A and 7B, in order to facilitate understanding, the amount of deformation due to thermal expansion is shown to be extremely larger than the actual amount of deformation.

In the cross section shown in FIG. 3, the temperature of the laser medium gas on the downstream side of the discharge region 24 is higher than the temperature of the laser medium gas on the upstream side. Therefore, there is a difference in the temperature rise width between the two side surfaces of the chamber 15, and a difference in the amount of thermal expansion of the side surface of the chamber 15. Therefore, as shown in FIG. 7A, one side surface of the chamber 15 (the upper side surface in FIG. 7A) expands more than the other side surface, and the chamber 15 is deformed. Due to the deformation of the chamber 15, the gantry 11 is also deformed.

When the gantry 11 is deformed, the posture of the bottom plate 19 of the chamber 15 supported by the gantry 11 changes. The posture of the resonator base 26 supported by the bottom plate 19 also changes, and as a result, the position and direction of the optical axis 20A change. Since the path of the laser beam output from the laser oscillator 12 (FIG. 1) changes according to the change in the position and direction of the optical axis 20A, the incident position of the laser beam on the beam shaping optical system 81 (FIG. 1) is changed. It deviates from the initial position. As a result, the beam profile on the surface of the object to be machined 90 is broken, and machining defects are likely to occur.

On the other hand, in the above embodiment, only one of the four supported portions 32 (FIG. 4) is fixed to the supported portion 31, and the remaining three supported portions 32 are the supported portions 31. It can move horizontally with respect to. That is, the horizontal position of the chamber 15 with respect to the gantry 11 is constrained at one of the four locations where the chamber 15 is supported, and the chamber 15 is horizontal with respect to the gantry 11 at the remaining three locations. It is supported to be movable. Further, since the frictional force reducing member 36 is arranged between the supported portion 32 and the supported portion 31, the supported portion 32 easily moves in the horizontal direction with respect to the supported portion 31. Therefore, the deformation of the gantry 11 when the chamber 15 is thermally expanded is suppressed. Since the gantry 11 is less likely to be deformed, the optical axis 20A is less likely to be displaced due to the deformation of the gantry 11.

Further, in FIG. 4, the lower right supported portion 32 is movable in the direction parallel to the optical axis 20A, but the position in the direction orthogonal to the optical axis 20A is constrained. Therefore, it is possible to restrain the posture in the rotational direction about the supported portion 32 fixed to the support portion 31.

Further, a straight line connecting the supported portion 32 fixed to the support portion 31 (FIG. 4) and the supported portion 32 whose position in the direction orthogonal to the optical axis 20A is constrained is the optical axis 20A. Is parallel to. Therefore, even if the chamber 15 thermally expands, the posture of the chamber 15 in the rotational direction does not substantially change.

The supported portion 32 is pressed against the supported portion 31 by the elastic member 34 at a position where the supported portion 32 is not fixed to the supported portion 31. Therefore, an excellent effect that the vertical position of the chamber 15 is stabilized can be obtained.

The resonator base 26 (FIGS. 6A to 6C) is fixed to the chamber 15 in the horizontal plane only at a position supported by the optical resonator support member 27A, and other optical resonator support members 27B, 27C, 27D. Horizontal movement is allowed where it is supported by. Therefore, the resonator base 26 is not easily affected by the deformation of the chamber 15, and the optical axis 20A is not easily displaced.

Further, the position of the resonator base 26 supported by the optical resonator support member 27B is constrained in a position orthogonal to the optical axis 20A. Therefore, the position of the resonator base 26 in the horizontal plane in the horizontal direction is constrained.

Actually, a comparative experiment was conducted on the position stability of the beam path between the laser apparatus according to the above embodiment and the laser apparatus according to the comparative examples shown in FIGS. 7A to 7B. The contents of the comparative experiment will be described below.

The laser apparatus according to the embodiment and the laser apparatus according to the comparative example were operated under two oscillation conditions having different pulse repetition frequencies and outputs. With the temperature of the chamber stable, the beam spot was detected at a position separated from the output end of the optical resonator by a certain distance, and the amount of deviation of the position of the beam spot under the two oscillation conditions was measured. When the pulse repetition frequency is high and the output is also large, the chamber becomes hotter than when the pulse repetition frequency is low and the output is low.

The amount of deviation of the beam spot in the laser apparatus according to the present embodiment was about 1/4 to 1/3 of the amount of deviation of the beam spot in the laser apparatus according to the comparative example. From this comparative experiment, it can be seen that the position of the laser beam path of the laser device having the structure according to the above embodiment is not easily affected by the thermal deformation of the chamber.

Next, a modification of the above embodiment will be described.
In the above embodiment, the number of the supported portion 32 of the chamber 15 and the number of the supporting portions 31 of the gantry 11 are four, but the number may be two, three, or five or more. That is, the gantry 11 may support the chamber 15 at two, three, or five or more locations. When the chamber 15 is supported at two points, for example, the chamber 15 is supported by an elongated region connecting the two supported portions 32 located on the left side in FIG. 4, and the two supported portions 32 located on the right side are connected. It is advisable to support the chamber 15 in an elongated region. In this case, the corresponding support portion 31 of the gantry 11 also has an elongated shape in a plan view. It is preferable to fix the chamber 15 to the gantry 11 with bolts or the like at one place near one end of the elongated region on the left side that supports the chamber 15. Of the elongated region on the left side that supports the chamber 15, the horizontal position of the chamber 15 with respect to the gantry 11 is not constrained in the region that is not fixed by bolts or the like. Further, in the elongated region on the right side supporting the chamber 15, the chamber 15 can move horizontally with respect to the gantry 11 in the entire area.

When the chamber 15 is supported at three points, for example, in FIG. 4, one elongated region connecting the two supported portions 32 on the left side and the two supported portions 32 on the right side may support the chamber 15. Alternatively, the chamber 15 may be supported by one elongated region connecting the two supported portions 32 on the right side in FIG. 4 and the two supported portions 32 on the left side. When the chamber 15 is supported at five or more points, for example, it is preferable to newly provide a supported portion and a supported portion between the two supported portions 32 on the upper side or the lower side in FIG.

That is, the gantry 11 may support the chamber 15 at a plurality of locations. In this case, one of the plurality of supported portions 32 may be a fixed supported portion 32 whose position in the horizontal direction is constrained with respect to the corresponding support portion 31. That is, the horizontal position of the chamber 15 with respect to the gantry 11 may be constrained at one location.

Of the plurality of supported portions 32, the supported portions 32 other than the fixed supported portions may be movable in the horizontal direction with respect to the corresponding supported portions 31. That is, the chamber 15 may be movable in the horizontal direction with respect to the gantry 11 at the support points other than the support points where the horizontal position of the chamber 15 is constrained. In one of the plurality of supported portions 32 other than the fixed supported portion 32, the supported portion 32 restrains the position in the horizontal plane about the fixed supported portion in the horizontal plane with respect to the corresponding support portion 31. It is good to configure it. That is, at one support location, the position of the chamber 15 in the horizontal plane in the rotational direction with respect to the fixed supported portion may be constrained.

The above examples are examples, and the present invention is not limited to the above examples. For example, it will be obvious to those skilled in the art that various changes, improvements, combinations, etc. are possible.

10 Laser device 11 Stand 12 Laser oscillator 13 Stand base 15 Chamber 16 Optical chamber 17 Blower chamber 18 Upper and lower partition plates 18A, 18B Opening 19 Bottom plate 20 Optical cavity 20A Optical axis 21 Discharge electrode 22, 23 Discharge electrode support member 24 Discharge region 25 Resonator mirror 26 Resonator base 27, 27A, 27B, 27C, 27D Optical resonator support member 28 Light transmission window 29 Blower 31 Support part 31A Side wall part 31B Canopy part 32 Supported part 33 Bolt 34, 35 Elastic member 36 Friction force Reduction member 40 Partition plate 41 1st gas flow path 42 2nd gas flow path 43 Heat exchanger 44 Outflow hole 45 Filter 51 Circular hole 52 Long hole 80 Processing device 81 Beam shaping optical system 82 Stage 90 Processing target 100 Common base

Claims (5)

A chamber that houses the laser medium gas and the optical resonator,
It has a stand to support the chamber and
The chamber is constrained in one place by the horizontal position of the chamber with respect to the gantry.
A laser device in which the chamber is supported so as to be movable in the horizontal direction with respect to the gantry, except where the horizontal position of the chamber with respect to the gantry is constrained. The laser device according to claim 1, further comprising an elastic member that presses the chamber in the same direction as the load is applied at a position where the chamber is movably supported in a horizontal direction with respect to the gantry. According to claim 1 or 2, where the chamber is supported so as to be movable in the horizontal direction with respect to the gantry, the gantry supports the chamber via a frictional force reducing member that reduces the frictional force. The laser device described. The said in a horizontal plane centered on a place where the horizontal position of the chamber with respect to the pedestal is constrained at one of the places where the chamber is movably supported in the horizontal direction with respect to the pedestal. The laser device according to any one of claims 1 to 3, wherein the position of the chamber in the rotational direction is constrained. The optical resonator is
A pair of resonator mirrors and
It has a resonator base that is supported by the chamber and fixes the pair of resonator mirrors, and the resonator base is supported and supported in a direction in which a load is applied at a plurality of three or more locations. The laser device according to any one of claims 1 to 4, wherein the horizontal position is constrained in one of the locations, and the horizontal position is not constrained in the other plurality of locations.

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