JP2008215827A - Method of displaying confirmation screen for visual inspecting device - Google Patents

Method of displaying confirmation screen for visual inspecting device Download PDF

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JP2008215827A
JP2008215827A JP2007049438A JP2007049438A JP2008215827A JP 2008215827 A JP2008215827 A JP 2008215827A JP 2007049438 A JP2007049438 A JP 2007049438A JP 2007049438 A JP2007049438 A JP 2007049438A JP 2008215827 A JP2008215827 A JP 2008215827A
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screen display
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confirmation screen
defective
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Naoto Sakashita
直人 阪下
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Hitachi Kokusai Electric Inc
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Priority to PCT/JP2008/053381 priority patent/WO2008105448A1/en
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    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a method of displaying a confirmation screen for a visual inspection device requiring a small load of an operator, when performing visual inspection of a failure spot determined automatically as a failure by the visual inspection device. <P>SOLUTION: When pushing a moving button, a camera 6 for confirmation screen display is moved toward an inspection object, and character display of 'under movement' and screen display in a similar color to the inspection object or a capture image display before movement are performed on a monitor, and a monitor screen is switched to a camera 6 image together with movement finish of the camera, and an image acquired by capturing temporarily a failure spot in an operation part 1 is displayed on the monitor. The operator can inspect all by a static image, and inspect without viewing an image during movement, to thereby reduce the load. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

本発明は、外観検査装置に係り、特にプリント基板などの外観検査装置において、目視による最終外観検査時の作業者の負担軽減と不良判定精度の向上とを実現するための外観検査装置の確認画面表示方法に関する。   The present invention relates to an appearance inspection apparatus, and in particular, in an appearance inspection apparatus such as a printed circuit board, a confirmation screen of the appearance inspection apparatus for realizing reduction of the burden on an operator and improvement of defect determination accuracy during visual final appearance inspection. It relates to the display method.

従来のプリント基板の外観検査装置は、一般的に装置全般の動きをコントロールする操作部と、検査対象のプリント基板の画像データを読み込むための読み込み部と、目視判定時の確認画面表示用カメラと、確認画面表示用カメラで写した不良箇所を表示するモニタとから構成される。読み込み部で読み込まれた画像データは操作部にて、予め入力されている良品の画像データ若しくはＣＡＤデータと比較し、操作部で不良判定が自動で行われる。   A conventional printed circuit board visual inspection apparatus generally includes an operation unit that controls the overall movement of the apparatus, a reading unit for reading image data of a printed circuit board to be inspected, a camera for displaying a confirmation screen at the time of visual determination, And a monitor for displaying a defective portion captured by a confirmation screen display camera. The image data read by the reading unit is compared with good image data or CAD data input in advance by the operation unit, and the defect determination is automatically performed by the operation unit.

しかしながら、外観検査装置による良否の自動判定は、読み込まれた画像データの画素毎の輝度値についてデジタル値で判定するため、例えば、２値化補正で、１か０かのどちらか、すなわち、測定領域のパターンが白か黒かで判定される場合が多い。またあるいは、３〜８ビット程度の低階調での補正で判定される場合もある。現実には中間の０.５などがあるが、装置は１か０かで判定するため、人間の目では良品と判定されるものが不良と判定されることもある。例えば、外観検査装置での自動判定は、測定領域のパターンが白か黒かで判断するので、銅線パターン上に埃が付いたりしている場合、あるいは光のかげんにより、白い部分が暗かったりする場合、不良と判定することがある。   However, since the automatic determination of pass / fail by the appearance inspection apparatus determines the luminance value for each pixel of the read image data as a digital value, for example, it is either 1 or 0 in binarization correction, that is, measurement. In many cases, it is determined whether the area pattern is white or black. Alternatively, it may be determined by correction at a low gradation of about 3 to 8 bits. In reality, there is an intermediate 0.5 or the like, but since the apparatus determines whether it is 1 or 0, what is determined to be a non-defective product by human eyes may be determined to be defective. For example, the automatic judgment in the visual inspection device judges whether the pattern of the measurement area is white or black, so if the dust is on the copper wire pattern, or if the white part is dark due to light fog If it does, it may be determined as defective.

また、検査対象とするプリント基板の配線パターンの幅は、ものによっては、数十μｍ程度と微細なパターンがあり、この場合には、読み込み精度が厳しく、ずれによる誤判定が起きたりする。あるいは銅配線パターンの表面が酸化したり、配線上に塵や埃が付着したりするため、機械による良否判定は、必ずしも１００％正しいとは限らない。読み込みの精度や、判定基準、検査対象物の表面状態、製造ばらつき等により、誤報もしくは虚報と呼ばれる実際には不良でないものが含まれる。そのため、最終的な良品判定は、目視による外観検査で判定される。   In addition, the width of the wiring pattern of the printed circuit board to be inspected may be as fine as about several tens of μm depending on the thing. In this case, reading accuracy is strict and misjudgment due to deviation may occur. Alternatively, since the surface of the copper wiring pattern is oxidized or dust or dirt adheres to the wiring, the quality determination by the machine is not necessarily 100% correct. Depending on the accuracy of reading, judgment criteria, surface condition of inspection object, manufacturing variation, etc., what is called a false or false report is not actually defective. Therefore, the final non-defective product determination is performed by visual inspection.

従来、この目視による外観検査は、図３に示すような手順で行われていた。外観検査装置による自動判定により不良品と判定されたプリント基板は、まず、ステップＳ１で、目視検査を開始するために、移動ボタンを押す。この移動ボタンの押下によりステップＳ２で、操作部を介して検査時に取得した座標データに基づいて、確認画面表示用カメラを不良箇所へ移動する。ステップＳ３で、不良と自動判定された不良箇所を、確認画面表示用カメラにより操作部を介して不良箇所をモニタ画面に表示する。この方法はキャプチャと呼ばれ、モニタに表示されている画像として操作部に記憶させる方法である。ステップＳ４で、作業者は、自動判定で不良と判定された不良箇所が誤報でないか、モニタに表示された不良箇所を観察して、良否判定を行い、ステップＳ５に進む。外観検査装置により不良と自動判定された全ての箇所の判定が終わってなければ、ステップＳ１に進み、作業者は、次の不良判定箇所への移動ボタンを押す。移動ボタンを押すと、再び自動判定したときに取得した座標データに基づいて確認画面表示用カメラは、次の不良箇所へ移動する（ステップＳ２）。不良と自動判定された全てのプリント基板の判定が終了するまで、ステップＳ１〜Ｓ５を繰り返した後、目視検査を終了する。目視検査の終了（検査終了）時には、確認画面表示用カメラは原点位置に復帰する。   Conventionally, this visual appearance inspection has been performed in the procedure as shown in FIG. A printed circuit board determined to be defective by the automatic determination by the appearance inspection apparatus is first pressed in step S1 in order to start a visual inspection. By depressing this movement button, the confirmation screen display camera is moved to a defective location based on the coordinate data acquired at the time of inspection through the operation unit in step S2. In step S3, the defective part automatically determined as defective is displayed on the monitor screen by the confirmation screen display camera via the operation unit. This method is called capture, and is stored in the operation unit as an image displayed on the monitor. In step S4, the operator observes the defective portion displayed on the monitor to determine whether or not the defective portion determined to be defective by the automatic determination is a false report, and proceeds to step S5. If determination of all the places automatically determined as defective by the appearance inspection apparatus has not been completed, the process proceeds to step S1, and the operator presses a movement button to the next defective determination position. When the move button is pressed, the confirmation screen display camera moves to the next defective portion based on the coordinate data acquired when the automatic determination is made again (step S2). The visual inspection is finished after repeating Steps S1 to S5 until the judgment of all the printed boards automatically judged as defective is finished. When the visual inspection ends (inspection ends), the confirmation screen display camera returns to the origin position.

ここで、次の不良箇所を観察するために移動する際は、通常、検査時間を短くするため高速で移動し、図４（ｃ）に示すように、画像ぶれのような、目視では判別できない程の高速な動画となる。作業者は、不良と自動判定されたプリント基板の枚数だけ、繰り返し不良箇所の判定を行うため、図４(ｃ)に示したような移動画面を何度も繰り返し見ることになる。なお、図４（ａ）は、外観検査装置の自動判定で不良と判定された複数の画像データの一例を示す図であり、図４(ｂ)の点線矢印で示した部分は、その拡大図である。図４（ｃ）は、次の不良箇所の配線パターンがある図４（ｄ）へ、確認画面表示用カメラ６が移動しているときの画面であり、画像が流れるようなぼやけた状態である。図４（ｂ）では、実線矢印で示した部分の銅配線パターンに、はがれや、付着物が観察され、不良と判定される。図４（ｄ）は、次の不良判定パターンの画面であり、この場合も実線矢印で示す部分の細い配線パターンに断線が発生していることが観察されるので、不良と判定される。なお、図４（ｂ）、（ｄ）において、点のパターンで示した領域は、銅配線パターンを、斜線の領域はプリント基板の下地表面（銅が剥離された部分）を示している。   Here, when moving to observe the next defective portion, it usually moves at a high speed in order to shorten the inspection time, and as shown in FIG. The video will be as fast as possible. Since the operator repeatedly determines a defective portion by the number of printed circuit boards that are automatically determined to be defective, the operator sees the moving screen as shown in FIG. 4C repeatedly. 4A is a diagram illustrating an example of a plurality of image data determined to be defective by the automatic determination of the appearance inspection apparatus, and a portion indicated by a dotted arrow in FIG. 4B is an enlarged view thereof. It is. FIG. 4C is a screen when the confirmation screen display camera 6 is moving to FIG. 4D having the wiring pattern of the next defective portion, and is in a blurred state in which an image flows. . In FIG. 4B, peeling and deposits are observed on the copper wiring pattern in the portion indicated by the solid line arrow, and it is determined as defective. FIG. 4D shows a screen for the next failure determination pattern. In this case as well, it is observed that a disconnection has occurred in the thin wiring pattern indicated by the solid line arrow, so it is determined as a failure. 4B and 4D, a region indicated by a dot pattern indicates a copper wiring pattern, and a hatched region indicates a base surface (portion where copper is peeled) of a printed board.

外観検査装置の他の従来例として、例えば、下記の特許文献１には、ウエハのような試料の同様のパターン部分を観察点とする場合、次の観察点に向けての移動完了後、表示画像を更新しても、その内容が類似しているため、作業者に認識させることが難しく、同様のパターン部分を観察点とする場合には、観察効率が低下してしまう問題があり、これを解決するために、効率よく行える観察装置として、観察中と移動中とが容易に把握できるように、観察点Ａから次の観察点Ｂに向けての移動中と、観察中とで画像の表示形態を視覚的に異なる形態に設定すること、すなわち、観察中と移動中とで画像の色を変更して表示装置に表示することが提案されている。   As another conventional example of an appearance inspection apparatus, for example, in Patent Document 1 below, when a similar pattern portion of a sample such as a wafer is used as an observation point, a display is displayed after completion of movement toward the next observation point. Even if the image is updated, the content is similar, so it is difficult for the operator to recognize it, and there is a problem that the observation efficiency decreases when the same pattern part is used as the observation point. In order to solve this problem, the observation device can be used efficiently and easily so that it can be easily grasped whether the image is being observed or moving. It has been proposed to set the display form to a visually different form, that is, to change the color of the image during observation and during movement and display it on a display device.

特開２００５−３５１８０９号公報JP-A-2005-351809

前述した従来のプリント基板の外観を検査する外観検査装置での目視検査では、作業者は、同じようなパターンのプリント基板が表示されるモニタ画面により、不良箇所の観察を何度も繰り返し行う。このため、図４（ｃ）に示したような移動画面を、繰り返し見ることとなり、作業者の目が疲れる作業となるので負担が大きい。また、不良箇所が同じ対象物の場合には、コントラストが非常に似ているので、判定が難しくなるという問題もある。   In the visual inspection performed by the above-described conventional visual inspection apparatus for inspecting the external appearance of a printed circuit board, an operator repeatedly observes a defective portion many times on a monitor screen on which a printed circuit board having a similar pattern is displayed. For this reason, the moving screen as shown in FIG. 4C is repeatedly viewed, and the burden on the operator's eyes becomes tired. In addition, in the case where the defective part is the same object, since the contrast is very similar, there is a problem that the determination becomes difficult.

そこで、本発明の目的は、外観検査装置の自動判定で不良と判定された箇所を、目視により最終外観検査を行う際に、作業者の負担の軽減と、判定精度の向上が可能な外観検査装置の確認画面表示方法を提供することにある。   Accordingly, an object of the present invention is to provide an appearance inspection capable of reducing the burden on the operator and improving the determination accuracy when the final appearance inspection is visually performed on a portion determined to be defective by the automatic determination of the appearance inspection apparatus. An object of the present invention is to provide a device confirmation screen display method.

本発明に係る外観検査装置の確認画面表示方法は、カメラで取り込んだ検査対象物の画像データを画像処理することによって検査対象物の外観不良の自動判定を行う外観検査装置において不良と自動判定された検査対象物の目視検査時における前記外観検査装置の確認画面表示方法であって、
前記外観検査装置の移動ボタンの押下に連動して確認画面表示用カメラを不良判定箇所へ移動し、モニタの画面に、前記検査対象物と同系色の静止画面表示、または移動前にキャプチャした画像の表示を行い、
前記確認画面表示用カメラの移動終了時点で、前記確認画面表示用カメラで写した当該不良判定箇所の画面表示に切り替えることを特徴とするものである。 The confirmation screen display method of the appearance inspection apparatus according to the present invention is automatically determined as defective in the appearance inspection apparatus that automatically determines the appearance defect of the inspection object by performing image processing on the image data of the inspection object captured by the camera. A confirmation screen display method of the visual inspection apparatus at the time of visual inspection of the inspection object,
The confirmation screen display camera is moved to a defect determination location in conjunction with the pressing of the movement button of the appearance inspection apparatus, and a still screen display of the same color as the inspection object is displayed on the monitor screen, or an image captured before the movement Is displayed,
When the movement of the confirmation screen display camera is completed, the screen is switched to the screen display of the defect determination portion taken by the confirmation screen display camera.

本発明によれば、作業者は全て静止画像により検査できるので、負担が軽減される。また、次の不良判定箇所への移動ボタンを押した際には、モニタ画面に「移動中」と文字で表示すると共に、検査対象物と同系色の画面表示、または移動前にキャプチャした画像をモニタ画面に表示するので、移動前にキャプチャして保存された不良箇所の静止画像を表示する場合は、作業者の見た目上は、保存された画像データと不良箇所の静止画とは同じであることから、違和感がなく負担が少ない。また、装置本体のフリーズ時との判別もできる。   According to the present invention, since all workers can be inspected with still images, the burden is reduced. In addition, when the move button to the next failure determination location is pressed, the text “moving” is displayed on the monitor screen, and the screen display of the same color as the object to be inspected or the image captured before moving is displayed. Since it is displayed on the monitor screen, when displaying a still image of a defective part captured and stored before moving, the stored image data and the still image of the defective part are the same in appearance to the operator. Therefore, there is no sense of incongruity and there is little burden. In addition, it is possible to discriminate when the main body of the apparatus is frozen.

本発明に係る外観検査装置の確認画面表示方法の一実施例について、添付図面を用いて詳細に述べる。図２は、外観検査装置の構成例を示すブロック図である。図２に示すように、従来例と同様に、プリント基板の外観検査装置は、少なくとも装置全般の動きをコントロールするＣＰＵが内蔵された操作部１と、検査対象物を搬送する搬送機構（不図示）と、顕微鏡３に取付けられたカメラ４を備える読み込み部５と、移動可能な確認画面表示用カメラ６と、画像データを表示するモニタ７と、取り込んだ画像データや、予め入力したＣＡＤデータを格納するハードディスク等のメモリ部８とから構成される。   An embodiment of a confirmation screen display method for an appearance inspection apparatus according to the present invention will be described in detail with reference to the accompanying drawings. FIG. 2 is a block diagram illustrating a configuration example of the appearance inspection apparatus. As shown in FIG. 2, as in the conventional example, the printed circuit board visual inspection apparatus includes an operation unit 1 including a CPU that controls at least the movement of the entire apparatus, and a transport mechanism (not shown) for transporting an inspection object. ), A reading unit 5 having a camera 4 attached to the microscope 3, a movable confirmation screen display camera 6, a monitor 7 for displaying image data, captured image data, and CAD data input in advance. And a memory unit 8 such as a hard disk for storing.

読み込み部５に搬送されたプリント基板２は、読み込み部５において顕微鏡３の倍率を操作部１からの操作により所要の倍率、例えば３０倍などにした後、顕微鏡に取付けられたカメラ４により、検査対象の配線パターンを撮影する。撮影した画像は、画像データとして取り込まれる。取り込まれた画像データは、操作部１へ送られ、操作部１では、送られてきた画像データと、メモリ部８に予め入力してある判定基準となるデータ（良品データ、ＣＡＤデータ、或いは良品として保存されている画像データ）と比較し、自動的に不良判定が行なわれる。このとき、検査対象物の不良箇所の座標データも取得される。なお、カメラ４と確認画面表示用カメラ６は、例えば、ＦＡ（Factory Automation）カメラであって、連続画像または動画像を映像信号として出力するカメラである。また例えば、カメラ４と確認画面表示用カメラ６はデジタルカメラでもアナログカメラでも良い。また例えば、カメラ４は、ラインセンサカメラでも良い。   The printed circuit board 2 conveyed to the reading unit 5 is inspected by the camera 4 attached to the microscope after the reading unit 5 sets the magnification of the microscope 3 to a required magnification, for example, 30 times by the operation from the operation unit 1. Photograph the target wiring pattern. The captured image is captured as image data. The captured image data is sent to the operation unit 1. In the operation unit 1, the sent image data and data (determination product data, CAD data, or non-defective product) that is input in advance in the memory unit 8 are used. And image data stored in the memory) are automatically determined as defective. At this time, coordinate data of the defective part of the inspection object is also acquired. The camera 4 and the confirmation screen display camera 6 are, for example, FA (Factory Automation) cameras that output continuous images or moving images as video signals. For example, the camera 4 and the confirmation screen display camera 6 may be a digital camera or an analog camera. For example, the camera 4 may be a line sensor camera.

この後、搬送機構により検査済のプリント基板２が読み込み部５から搬出されると、次のプリント基板が読み込み部５に搬送される。これら一連の動作が測定対象のプリント基板の枚数だけ繰り返され、外観検査装置による機械での良否判定が自動で行われる。   Thereafter, when the inspected printed circuit board 2 is unloaded from the reading unit 5 by the conveyance mechanism, the next printed circuit board is conveyed to the reading unit 5. A series of these operations is repeated for the number of printed circuit boards to be measured, and the machine quality is automatically determined by the appearance inspection apparatus.

しかし、前述したように、外観検査装置による機械での良否判定は、必ずしも１００％正しいとは限らず、誤報もしくは虚報と呼ばれる実際には不良でないものが含まれるため、最終的な良品判定は、目視による外観検査で判定する。   However, as described above, the pass / fail judgment on the machine by the visual inspection apparatus is not necessarily 100% correct, and includes what is not actually defective called false or false information. Judge by visual inspection.

次に、図１を用いて、本発明に係る外観検査装置を用いた目視検査時の、確認画面表示方法の外観検査フローを説明する。外観検査装置による自動判定により、不良品と判定されたプリント基板は、まず、ステップＳ１０で、目視検査を開始するために、移動ボタンを押す。この移動ボタンの押下によりステップＳ１１で、操作部１を介して自動外観検査時に取得した座標データに基づいて、確認画面表示用カメラ６を不良箇所へ移動すると共に、一時的に操作部に記憶させ、モニタ７に「移動中」の文字表示と、検査対象物である不良品と自動判定されたプリント基板と同系色の画面表示、または移動前のキャプチャ画像を表示する。   Next, the appearance inspection flow of the confirmation screen display method at the time of visual inspection using the appearance inspection apparatus according to the present invention will be described with reference to FIG. The printed circuit board determined to be defective by the automatic determination by the appearance inspection apparatus first presses the movement button in order to start the visual inspection in step S10. By pressing this move button, the confirmation screen display camera 6 is moved to a defective location on the basis of the coordinate data acquired at the time of automatic visual inspection via the operation unit 1 in step S11, and temporarily stored in the operation unit. On the monitor 7, a character display of “moving” and a screen display of a color similar to the printed circuit board automatically determined as a defective product to be inspected or a captured image before the movement are displayed.

プリント基板と同系色とは、例えば、パターンの色と同系色あるいは、プリント基板の下地と同系色ということである。もちろん、カメラ４から出力される映像信号の輝度は、コントラストが同程度になるように、ほぼ同レベルが望ましい。   The color similar to the printed circuit board is, for example, a color similar to the color of the pattern or a color similar to the base of the printed circuit board. Of course, it is desirable that the luminance of the video signal output from the camera 4 is approximately the same level so that the contrast is approximately the same.

ステップＳ１２で、確認画面表示用カメラ６が目的の不良箇所に到達して移動を終了すると共に、モニタ７の画面表示を、確認画面表示用カメラ６の映像に切替え、不良箇所を一時的に操作部１にキャプチャし、これをモニタ７に表示させる。ステップ１３で、作業者は、不良と自動判定された不良箇所が表示されたモニタ画面を観察して、自動判定が誤報や虚報でないか良否判定を行い、ステップＳ１４に進み、外観検査装置により不良と自動判定された全ての箇所の判定が終わってなければ、作業者は、不良と自動判定された全てのプリント基板の判定が終了するまで、ステップＳ１０〜Ｓ１４を繰り返した後、目視検査を終了する。目視検査の終了（検査終了）時には確認画面表示用カメラは原点位置に復帰する。   In step S12, the confirmation screen display camera 6 reaches the target defective portion and finishes moving. At the same time, the screen display on the monitor 7 is switched to the image of the confirmation screen display camera 6, and the defective portion is temporarily operated. The data is captured by the unit 1 and displayed on the monitor 7. In step 13, the operator observes the monitor screen on which the defective part automatically determined to be defective is displayed, determines whether the automatic determination is false or false, and proceeds to step S14, where the visual inspection apparatus performs the defect. If the determination of all the points automatically determined is not completed, the operator repeats steps S10 to S14 until the determination of all printed boards automatically determined to be defective is completed, and then ends the visual inspection. To do. At the end of the visual inspection (end of inspection), the confirmation screen display camera returns to the origin position.

図３、図４を用いて前述した従来の外観検査装置による目視検査では、作業者は、同じようなパターンのプリント基板が表示されるモニタ画面による不良箇所の観察を、何度も繰り返し行うので、図４（ｃ）に示すような移動画面を、繰り返し見ることになり、負担が大きかった。また、不良箇所が同じ対象物の場合には、コントラストが非常に似ているので判定が難しくなるという問題もあったが、本発明に係る外観検査装置の画面確認方法では、全て静止画像により検査でき、かつ、移動ボタンを押した際に、モニタ画面に「移動中」と画面上に文字で表示されるので、作業者は動画状態を見ることなく、移動中であることが認識でき、作業者の負担が大幅に軽減される。また、プリント配線基板の外観検査の場合、作業者は通常、配線パターン部分を観察するので、パターン検査対象のプリント基板の配線と同系色の均一画面表示とすることで、検査対象画面に切り替わった際に、変化が認識しやすく、不良判定をし易くなるので、外観検査精度を高められる。   In the visual inspection using the conventional visual inspection apparatus described above with reference to FIGS. 3 and 4, the operator repeatedly observes the defective portion on the monitor screen on which the printed circuit board having the same pattern is displayed many times. The moving screen as shown in FIG. 4C was repeatedly viewed, and the burden was large. In addition, in the case where the defective part is the same object, there is a problem that the determination is difficult because the contrast is very similar. However, in the screen checking method of the appearance inspection apparatus according to the present invention, all inspections are performed using still images. When the move button is pressed, the word “moving” is displayed on the monitor screen as text on the screen, so that the operator can recognize that the user is moving without looking at the video status. The burden on the person is greatly reduced. In addition, in the case of visual inspection of printed wiring boards, since the operator usually observes the wiring pattern portion, the screen is switched to the inspection target screen by displaying a uniform screen of the same color as the wiring of the printed circuit board subject to pattern inspection. At this time, since the change can be easily recognized and the defect can be easily determined, the appearance inspection accuracy can be improved.

以上、好適な実施例について述べたが、本発明の精神を逸脱しない範囲内で、種々の変更が可能なことは勿論である。実施の形態ではプリント配線回路基板の外観検査を例に説明したが、例えば、シリコンウエハに形成したパターンの外観検査にも適用できることは言うまでもない。   Although the preferred embodiment has been described above, it goes without saying that various modifications can be made without departing from the spirit of the present invention. In the embodiment, the appearance inspection of the printed circuit board has been described as an example, but it goes without saying that it can be applied to the appearance inspection of a pattern formed on a silicon wafer, for example.

なお、上述の実施例では、検査対象物の不良箇所へ移動するのは、確認画面表示用カメラ６であった。しかし確認画面表示用カメラ６が移動せず検査対象物が移動しても良く、確認画面表示用カメラ６と検査対象物の両者が移動しても良い。また、カメラ４も同様である。   In the above-described embodiment, the confirmation screen display camera 6 moves to the defective part of the inspection object. However, the inspection screen display camera 6 may not move and the inspection object may move, or both the confirmation screen display camera 6 and the inspection object may move. The same applies to the camera 4.

本発明の外観検査フローを示す図。The figure which shows the external appearance inspection flow of this invention. 外観検査装置の構成例を示すブロック図。The block diagram which shows the structural example of an external appearance inspection apparatus. 従来の外観検査フローを示す図。The figure which shows the conventional external appearance inspection flow. 外観検査装置の従来の目視検査時のモニタ表示例を示す図。The figure which shows the example of a monitor display at the time of the conventional visual inspection of an external appearance inspection apparatus.

符号の説明Explanation of symbols

１…操作部、２…基板、３…顕微鏡、４…カメラ、５…読み込み部、６…確認画面表示用カメラ、７…モニタ、８…メモリ部。   DESCRIPTION OF SYMBOLS 1 ... Operation part, 2 ... Board | substrate, 3 ... Microscope, 4 ... Camera, 5 ... Reading part, 6 ... Confirmation screen display camera, 7 ... Monitor, 8 ... Memory part.

Claims (1)

カメラで取り込んだ検査対象物の画像データを画像処理することによって検査対象物の外観不良の自動判定を行う外観検査装置において不良と自動判定された検査対象物の目視検査時における前記外観検査装置の確認画面表示方法であって、
前記外観検査装置の移動ボタンの押下に連動して確認画面表示用カメラを不良判定箇所へ移動し、モニタの画面に、前記検査対象物と同系色の静止画面表示、または移動前にキャプチャした画像の表示を行い、
前記確認画面表示用カメラの移動終了時点で、前記確認画面表示用カメラで写した当該不良判定箇所の画面表示に切り替えることを特徴とする外観検査装置の確認画面表示方法。 In the appearance inspection apparatus at the time of visual inspection of the inspection object automatically determined as defective in the appearance inspection apparatus that automatically determines the appearance defect of the inspection object by performing image processing on the image data of the inspection object captured by the camera A confirmation screen display method,
The confirmation screen display camera is moved to a defect determination location in conjunction with the pressing of the movement button of the appearance inspection apparatus, and a still screen display of the same color as the inspection object is displayed on the monitor screen, or an image captured before the movement Is displayed,
A confirmation screen display method for an appearance inspection apparatus, wherein, when the movement of the confirmation screen display camera is completed, the screen is switched to the screen display of the defect determination portion copied by the confirmation screen display camera.
JP2007049438A 2007-02-28 2007-02-28 Method of displaying confirmation screen for visual inspecting device Pending JP2008215827A (en)

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PCT/JP2008/053381 WO2008105448A1 (en) 2007-02-28 2008-02-27 Confirmation screen display method for external appearance inspection device

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