JP2007240197A - Three-dimensional shape measuring system - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a three-dimensional shape measuring system which measures accurate three-dimensional shapes at a high speed. <P>SOLUTION: The three-dimensional shape measuring system 1 comprises a transfer table 12 for transferring an object under measurement 10, slit light sources 141 to 149 for emitting a slit light beam, reflecting mirrors 171 to 179 for reflecting the reflected light beam of the slit light beam from the surface of the object under measurement 10, a camera 16 for photographing the reflected light beam, and a computer for calculating the three-dimensional shape of the object under measurement 10, on the basis of the position of the image of the photographed reflected light beam. The reflecting mirrors 171 to 179 are formed so that the reflected light beam of the slit light beam, from the surface of the object under measurement 10, is divided into a plurality of pieces in the longitudinal axial direction of the slit light beam and that the divided plurality of reflected light beams are arranged in a direction perpendicular to the longitudinal direction and are photographed by the camera 16. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a three-dimensional shape measurement system.

  Conventionally, as a system for measuring a three-dimensional shape of a measurement object, for example, a three-dimensional shape measurement system described in Patent Document 1 or Patent Document 2 is known.

  The three-dimensional shape measurement system described in Patent Document 1 uses a stereo image method. In this three-dimensional shape measurement system, the measurement object is imaged using two cameras, and the position of the representative point is detected from each of the two captured images. The parallax is obtained from the detected positions of the two representative points, and the three-dimensional shape of the measurement object is measured based on the parallax and the principle of triangulation.

The three-dimensional shape measurement system described in Patent Document 2 uses a light cutting method (slit light cutting method). In this three-dimensional shape measurement system, slit light is irradiated onto a measurement object, and reflected light from the surface of the measurement object is directly imaged by an imaging lens (camera). The reflected light is imaged each time the relative position between the slit light and the measurement object is changed, and the three-dimensional shape of the measurement object is measured based on the shape of the reflected light image on the imaged screen.
JP-A-8-201041 JP-A-5-26638

  In the three-dimensional shape measurement system of Patent Document 1, it is necessary to perform a very complicated process of detecting the position of a representative point from two images and calculating a parallax. For this reason, there is a problem that it takes time to measure the three-dimensional shape and the speed cannot be increased.

  In the three-dimensional shape measurement system of Patent Document 2, the height of the portion irradiated with the slit light can be specified from one image. Further, complicated calculation processing such as detection of the position of the representative point is not necessary. However, while the reflected light from the measurement object of the slit light has an elongated shape, the imaging range of a general camera is a rectangle close to a square. The distance from the measurement object must be increased, or the imaging magnification of the camera must be reduced. As a result, as shown in FIG. 10, the proportion of the reflected light 100 image in the image P10 is reduced. In such an image P10, the resolution of the image portion of the reflected light 100 becomes low, and it is difficult to accurately grasp the shape of the image of the reflected light 100. Therefore, the three-dimensional shape cannot be measured accurately.

  Accordingly, an object of the present invention is to provide a three-dimensional shape measurement system capable of measuring a three-dimensional shape accurately and at high speed.

  The three-dimensional shape measurement system of the present invention includes (1) a conveyance table that conveys a measurement object in a predetermined conveyance direction, and (2) a measurement object that is conveyed by the conveyance table, which intersects the conveyance direction. Irradiating means for irradiating slit light whose major axis extends in the direction, (3) reflecting means for reflecting the reflected light from the surface of the measurement object of the slit light irradiated from the irradiating means, and (4) via the reflecting means, (5) 3D shape calculation for calculating the 3D shape of the measurement object based on the shape of the reflected light image captured by the imaging means; (A) the reflection means divides the reflected light of the slit light from the surface of the measurement object into a plurality of pieces along the longitudinal direction of the slit light, and the divided reflected lights are long. Axial and vertical As captured by location has been the imaging means is characterized by being formed.

  The three-dimensional shape measurement system of the present invention uses a so-called optical cutting method. Therefore, complicated processing such as detection of the position of a representative point and calculation of parallax is not necessary. Therefore, it is possible to reduce the time required for measuring the three-dimensional shape.

  The imaging means of the present invention images the reflected light of the slit light from the surface of the measurement object via the reflecting means. The image to be picked up is an image of reflected light divided into a plurality along the major axis direction of the slit light and arranged in the direction perpendicular to the major axis direction. That is, in the image, the divided reflected light images are arranged in the horizontal width direction of the image, for example, and each image extends in the vertical width direction of the image, for example. Rather than directly capturing the elongated light reflected by the surface of the measurement object of the slit light, the reflected light is divided and imaged using the reflecting means, so that the imaging range of a general camera can be used effectively. As a result, the ratio of the reflected light image in the entire image can be remarkably increased as compared with an image obtained by directly capturing reflected light from the surface of the measurement object. Therefore, the shape of the reflected light image can be accurately grasped, and the three-dimensional shape can be accurately measured.

  In the three-dimensional shape measurement system of the present invention, the irradiating means includes a plurality of slit light sources, and the reflecting means includes the same number of reflecting mirrors as the plurality of slit light sources corresponding to each of the plurality of slit light sources. The plurality of reflecting mirrors preferably reflect the reflected light from the surface of the measurement object of the slit light emitted from the corresponding slit light source. Thus, by using a plurality of reflecting mirrors, it is possible to divide and reflect the reflected light of the slit light from the surface of the measurement object. By providing the same number of reflecting mirrors as the slit light sources, it is easy to align the slit light irradiation position and the reflecting mirror position.

  According to the present invention, a three-dimensional shape can be measured accurately and at high speed.

  Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. In the description, the same reference numerals are used for the same elements or elements having the same function, and redundant description is omitted.

  A three-dimensional shape measurement system according to the present embodiment will be described with reference to the drawings. FIG. 1 is a perspective view of a three-dimensional shape measurement system according to this embodiment.

  As shown in FIG. 1, the three-dimensional shape measurement system 1 of the present embodiment includes a transfer table 12, a light source unit (irradiation unit) 14, a camera (imaging unit) 16, a mirror unit (reflection unit) 17, and the like. , A computer device (three-dimensional shape calculating means) 18 and a display 20 are provided.

  The conveyance table 12 is configured by a belt conveyor that rotates at a constant speed, and conveys the measurement object 10 placed on the belt in a predetermined conveyance direction. Here, the predetermined transport direction is the X-axis positive direction shown in FIG. The conveyance table 12 conveys the measuring object 10 placed on the belt at a speed of 0.01 mm / msec.

  The light source unit 14 is for irradiating the measurement object 10 being conveyed by the conveyance table 12 with slit light. The irradiation direction of the slit light is a direction that intersects the transport direction, that is, the X-axis positive direction.

  More specifically, the light source unit 14 has nine slit light sources 141, 142, 143, 144, 145, 146, 147, 148, 149 that irradiate slit light. As the nine slit light sources 141 to 149, various configurations such as a one-dimensional semiconductor laser eye, a combination of a semiconductor laser and a cylindrical lens, a combination of a semiconductor laser and a laser beam scanning mechanism (for example, a rotating mirror) are adopted. Can be done.

  The slit light sources 141 to 149 are disposed above the transport table 12, that is, in the positive Z-axis direction in FIG. 1, and respectively irradiate the measurement target 10 transported by the transport table 12 with slit light. The irradiation direction of the slit light by the slit light sources 141 to 149 is fixed. The long axis of each slit light extends in the direction intersecting the transport direction of the measurement object 10 by the transport table 12, that is, the Y-axis direction in FIG.

  When the slit light sources 141 to 149 irradiate the measuring object 10 with slit light, reflected light from the surface of the measuring object 10 is generated. The mirror unit 17 reflects this reflected light. The mirror unit 17 divides the generated reflected light into a plurality along the major axis direction of the slit light, and the plurality of divided reflected lights are arranged in a direction perpendicular to the major axis direction so as to be imaged by the camera 16. Is formed.

  More specifically, the mirror unit 17 has nine reflecting mirrors 171, 172, 173, 174, 175, 176, 177, 178 and 179. Each of the reflecting mirrors 171 to 179 has a strip shape. FIG. 2 shows a side view of the reflecting mirrors 171 to 179 when viewed from the positive Y-axis direction of FIG. Further, FIG. 3 shows a side view of the measuring object 10 on the reflecting mirrors 171 to 179, the camera 16, and the transfer table 12 when viewed from the positive X-axis direction of FIG.

  As shown in FIG. 2, the reflecting mirrors 171 to 179 are arranged substantially along the X-axis direction. Further, as shown in FIG. 3, the reflecting mirrors 171 to 179 form a predetermined angle θ with the central axis of the telecentric lens 16 a included in the camera 16. The angle θ is different for each of the reflecting mirrors 171 to 179. The reflecting mirror 171 is 25 °, the reflecting mirror 172 is 30 °, the reflecting mirror 173 is 35 °, the reflecting mirror 174 is 40 °, the reflecting mirror 175 is 45 °, and the reflecting mirror 176. Is 50 °, 55 ° for the reflecting mirror 177, 60 ° for the reflecting mirror 178, and 65 ° for the reflecting mirror 179. Each of the reflecting mirrors 171 to 179 of the present embodiment has a long side L1 of 22.5 mm and a short side W1 of 2.5 mm, as shown in FIGS.

  As shown in FIG. 1, the nine reflecting mirrors 171 to 179 correspond to the nine slit light sources 141 to 149, respectively. The nine reflecting mirrors 171 to 179 reflect the reflected light of the slit light emitted from the slit light sources 141 to 149 toward the camera 16.

  FIG. 4 is a diagram showing a reflection region of the measurement object 10 on the transport table 12, and is when the measurement object 10 is viewed from the positive direction of the Z axis shown in FIG. Here, the reflection regions R1 to R9 are regions irradiated with slit light by the slit light sources 141 to 149, respectively. The reflection regions R1 to R9 are discontinuous. Moreover, when the measurement object 10 is conveyed, the positions of the reflection regions R1 to R9 are moved. This is because the irradiation position of the slit light on the measurement object 10 moves according to the conveyance of the measurement object 10.

  Reflected light of the slit light irradiated from the slit light source 141 by the reflection region R <b> 1 is reflected toward the camera 16 by the reflecting mirror 171. Reflected light in the reflection regions R2 to R9 of the slit light irradiated from the slit light sources 142 to 149 is reflected toward the camera 16 by the reflecting mirrors 172 to 179, respectively. Thus, the nine reflecting mirrors 171 to 179 reflect the nine reflected lights generated by the nine slit light sources 141 to 149 irradiating the slit light. By providing the same number of slit light sources 141 to 149 and reflecting mirrors 171 to 179 in a one-to-one relationship, it is possible to reliably reflect the generated reflected light and to align the slit light source and the reflecting mirror. It becomes easy.

  As shown in FIG. 1, a camera 16 is installed at a position substantially facing the nine reflecting mirrors 171 to 179. The camera 16 images the reflected light from the surface of the measurement object 10 of the slit light emitted from the slit light sources 141 to 149 via the mirror unit 17. More specifically, the camera 16 images the reflected light of the slit light emitted from the slit light sources 141 to 149 by the reflection regions R1 to R9 on the surface of the measurement object 10 via the reflecting mirrors 171 to 179.

  The camera 16 has a telecentric lens 16a with an imaging magnification of 1. As shown in FIG. 3, the orientation of the camera 16 is adjusted so that the central axis of the telecentric lens 16 a is parallel to the transport table 12. A distance D1 between the central axis of the telecentric lens 16a and the transport table 12 in the Z-axis direction is 71 mm. A distance D2 between the camera 16 and the nine reflecting mirrors 171 to 179 is 78 mm.

  The camera 16 has a high frame rate of 1000 fps or higher. As such a camera, for example, FASTCAM ultra1024 of Photolon Co., Ltd. can be mentioned. The camera 16 preferably has a spatial resolution of 1024 pixels × 1024 pixels or more, but can be appropriately changed to 512 pixels × 512 pixels or 128 pixels × 128 pixels depending on the required accuracy. The camera 16 is preferably a color camera capable of capturing a color image of 256 gradations (8 bits) or more for each RGB, but captures a color image of each of RGB having less than 256 gradations (8 bits). It is also possible to use a color camera or a monochrome camera that captures a monochrome image. The pixel size of the camera 16 is 17 μm × 17 μm, and the sensor size of the camera 16 is 17.6 mm × 17.6 mm.

  FIG. 5 is a diagram illustrating an image captured by the camera 16. Since the imaging range of the camera 16 is a rectangle close to a square, the captured image P is also a rectangle close to a square. The positional relationship between the camera 16 and the reflecting mirrors 171 to 179 is adjusted so that an image P on which images of reflected light from the reflection regions R1 to R9 on the surface of the measurement object 10 are reflected can be reliably captured. The reflected light images 34 reflected by the slit light reflecting regions R1 to R9 shown in the image P each extend in one side direction (Py axis direction) of the image P. The reflected light images 34 are arranged in the other side direction (Px axis direction). The camera 16 outputs the captured image P to the computer device 18.

  The computer device 18 is a part that calculates the three-dimensional shape of the measurement object 10 based on the shape of the reflected light image 34 captured by the camera 16 and reflected by the slit light reflection regions R1 to R9. FIG. 6 is a diagram showing the configuration of the computer device 18. The computer device 18 is physically a general-purpose computer such as a personal computer or a workstation. By installing specific software, the input interface unit 18a, the three-dimensional shape calculation unit 18b, and the storage unit illustrated in FIG. The functions of 18c and the output interface unit 18d are realized.

  The input interface unit 18 a is a part that sequentially captures the images P output from the camera 16. The input interface unit 18a outputs the captured image P to the three-dimensional shape calculation unit 18b.

  The three-dimensional shape calculation unit 18b is a part that calculates the shape (two-dimensional shape) of the sliced measurement object 10 from the image P and calculates the three-dimensional shape based on the shape. The calculation procedure of the three-dimensional shape by the three-dimensional shape calculation unit 18b will be described using the image P shown in FIG.

  The three-dimensional shape calculation unit 18b receives the image P from the input interface unit 18a. The three-dimensional shape calculation unit 18b extracts nine pixel areas A1 to A9 extending in the Py axis direction from the image P. The pixel areas A1 to A9 are portions corresponding to the reflection areas R1 to R9, respectively. The pixel areas A1 to A9 all have the same size, but the reflection areas R1 to R9 have different sizes. Therefore, the three-dimensional shape calculation unit 18b corrects the sizes of the pixel regions A1 to A9 according to the actual sizes of the reflection regions R1 to R9 in order to measure an accurate three-dimensional shape.

  A method of correcting the size will be specifically described. The sensor of the camera 16 shown in FIG. 3 has a vertical width L2 of 17.6 mm. Therefore, the actual length dy (unit: mm) in the Y-axis direction of the reflection regions R1 to R9 can be calculated by the following equation (1). As described above, θ is an angle formed by the reflecting mirrors 171 to 179 and the central axis of the telecentric lens 16a.

  dy = 17.6 / sin (2θ) (1)

  According to equation (1), the actual length dy1 of the reflective region R1 is 22.98 mm. The actual length of the reflection regions R2 and R8 is 20.32 mm, the actual length of the reflection regions R3 and R7 is 18.7 mm, and the actual length of the reflection regions R4 and R6 is 17.9 mm. The actual length of the reflection region R5 is 17.6 mm, and the actual length of the reflection region R9 is 22.98 mm. In the three-dimensional shape calculation unit 18b, the ratio of the lengths of the pixel areas A1 to A9 is the ratio of the lengths of the reflection areas R1 to R9 (22.98: 20.32: 18.7: 17.9: 17.6: 17.9: 18.7: 20.32: 22.98). The sizes of the pixel areas A1 to A9 are corrected so as to be the same. When correcting the size, the position of the reflected light image 34 shown in the pixel areas A1 to A9 is also corrected.

The three-dimensional shape calculation unit 18b stores the corrected pixel area A1 information in the storage unit 18c. This information includes information about the corrected position and the like of the reflected light image 34 in the pixel region A1. When storing, an identifier of A1 (t _n ) is given to the information of the pixel region A1. From this identifier, it can be seen that the stored information is information about the position of the reflected light image 34 in the pixel region “A1” in the image P captured “n” milliseconds after the start of measurement. Similarly, the three-dimensional shape calculation unit 18b stores the corrected pixel areas A2 to A9 in the storage unit 18c. When storing, identifiers of A2 (t _n ) to A9 (t _n ) are given.

  Next, the three-dimensional shape calculation unit 18b obtains the shape of the sliced measurement object 10 based on the information stored in the storage unit 18c.

  FIG. 8 shows the measurement object 10 as viewed from the positive direction of the Z axis shown in FIG. As described above, the reflection regions R1 to R9 are discontinuous. Moreover, since each of the reflecting mirrors 171 to 179 has a rectangular shape having a short side of 2.5 mm, it can be seen that the reflecting regions R1 to R9 are also a rectangular shape having a short side dx of 2.5 mm. Furthermore, the conveyance speed of the measuring object 10 is 0.01 mm / msec. From these facts, as shown in FIG. 8, the reflection region R9 after m milliseconds (R9 (m) in FIG. 8) and the reflection region R8 after m + 250 milliseconds (R8 (m + 250) in FIG. 8). ), The reflection area R7 after m + 500 milliseconds (R7 (m + 500) in FIG. 8), the reflection area R6 after m + 750 milliseconds (R6 (m + 750) in FIG. 8), and after m + 1000 milliseconds The reflection region R5 (R5 (m + 1000) in FIG. 8), the reflection region R4 after m + 1250 milliseconds (R4 (m + 1250) in FIG. 8), and the reflection region R3 after m + 1500 milliseconds (R3 in FIG. 8). (m + 1500)), the reflection area R2 after m + 1750 milliseconds (R2 (m + 1750) in FIG. 8), and the reflection area R1 after m + 2000 milliseconds (R1 (m + 2000) in FIG. 8). It can be seen that they are continuously arranged along the Y-axis direction of FIG.

Therefore, the three-dimensional shape calculation unit 18b includes identifiers A1 (t _{m + 2000} ), A2 (t _{m + 1750} ), A3 (t _{m + 1500} ), A4 (t _{m + 1250} ), A5 (t _{m + 1000} ), A6 (t _{m + 750} ), A7 (t _{m + 500} ), A8 (t _{m + 250} ), and information to which A9 (t _m ) are assigned are extracted from the storage unit 18c, and these pieces of information are arranged in order to obtain the composite image S shown in FIG. The composite image S obtained in this way has an elongated shape. In the obtained composite image S, the reflected light image 34 is continuous.

  The continuous reflected light image 34 in the composite image S is a single slit light that crosses the measurement object 10 in the Y-axis direction with respect to the measurement object 10 on the transport table 12 shown in FIG. This is the same as the image of the reflected light that is generated when. In the composite image S, since the ratio of the reflected light image 34 to the whole is large, it is possible to accurately grasp the shape in which the reflected light image 34 is continuous.

  The three-dimensional shape calculation unit 18b calculates the surface height of the measurement object 10 with respect to the transport table 12 from the shape of the continuous reflected light image 34 in the composite image S by a known method. Thereby, the shape of what sliced measurement object 10 in the major axis direction (Y-axis direction of Drawing 1) of slit light is measured.

  The three-dimensional shape calculation unit 18b repeats the above-described process for the image of the measurement object 10 that is conveyed while being irradiated with the slit light. Thereby, the shape of what sliced measurement object 10 in the major axis direction (Y-axis direction of Drawing 1) of slit light will be computed one by one. The three-dimensional shape calculation unit 18b calculates a three-dimensional shape by superimposing these in the X-axis direction of FIG.

  The output interface unit 18d outputs the three-dimensional shape data of the measurement object 10 calculated by the three-dimensional shape calculation unit 18b to the display 20. The display 20 displays a feature amount (such as the position and height of the highest point with respect to the transport table 12) regarding the three-dimensional shape of the measurement target object 10 from the data output from the output interface unit 18d, or the measurement target object 10 3D shape data is displayed as 3D graphics.

  Subsequently, the operation of the three-dimensional shape measurement system 1 of the present embodiment will be described. In measuring the three-dimensional shape of the measurement object 10, first, the measurement object 10 is placed on the belt of the conveyance table 12 as shown in FIG. 1. By moving the transport table 12, the measurement object 10 placed on the belt is transported in the positive X-axis direction. The measurement object 10 being conveyed by the conveyance table 12 is irradiated with slit light from the slit light sources 141 to 149 of the light source unit 14.

  In the reflection regions R1 to R9 of the measurement object 10, reflected light is generated by the slit light emitted from the slit light sources 141 to 149, respectively. The reflecting mirrors 171 to 179 reflect these reflected lights toward the camera 16, respectively. Thereby, the reflected light from the reflection regions R1 to R9 is captured by the camera 16. As shown in FIG. 7, the camera 16 outputs an image P in which the reflected light image 34 is reflected. In the image P, the reflected light images 34 by the slit light reflection regions R1 to R9 each extend in one side direction (Py axis direction) of the image P. The reflected light images 34 are arranged in the other side direction (Px axis direction) of the image P. Such an image P is captured by the input interface unit 18a of the computer device 18 and then output to the three-dimensional shape calculation unit 18b. The camera 16 outputs an image P each time the reflection areas R1 to R9 change according to the conveyance of the measurement object 10.

  When the three-dimensional shape calculation unit 18b receives the image P from the input interface unit 18a, the three-dimensional shape calculation unit 18b extracts nine pixel regions A1 to A9 corresponding to the reflection regions R1 to R9 from the image P. The three-dimensional shape calculation unit 18b corrects the sizes of the pixel areas A1 to A9 so that the size ratio of the pixel areas A1 to A9 is the same as the size ratio of the reflection areas R1 to R9. Then, the corrected pixel areas A1 to A9 are sequentially stored in the storage unit 18c together with the identifier.

Subsequently, the three-dimensional shape calculation unit 18b extracts information on the pixel regions A1 to A9 from the storage unit 18c. Information to be extracted includes identifiers A1 (t _{m + 2000} ), A2 (t _{m + 1750} ), A3 (t _{m + 1500} ), A4 (t _{m + 1250} ), A5 (t _{m + 1000} ), A6 (t _{m + 750} ), A7 (t _{m + 500} ), A8 ( t _{m + 250} ) and A9 (t _m ), respectively. The three-dimensional shape calculation unit 18b acquires the composite image S by arranging the extracted information.

  The three-dimensional shape calculation unit 18b calculates the surface height of the measurement object 10 with respect to the transport table 12 from the shape of the continuous reflected light image 34 in the composite image S by a known method. Thereby, the shape of what sliced measurement object 10 in the major axis direction (Y-axis direction of Drawing 1) of slit light is measured.

  The three-dimensional shape calculation unit 18b repeats the above process every time the image P is output from the input interface unit 18a. And the shape of what sliced measurement object 10 in the major axis direction (Y-axis direction of Drawing 1) of slit light is computed one by one, and the shape of what superposed these in the X-axis direction of Drawing 1 is computed. In this way, the three-dimensional shape calculation unit 18b measures the three-dimensional shape of the measurement object 10. The three-dimensional shape calculation unit 18b outputs the measured three-dimensional shape data of the measurement object 10 to the output interface unit 18d.

  The output interface unit 18 d outputs the data received from the three-dimensional shape calculation unit 18 b to the display 20. Based on this data, the display 20 displays the feature quantity in the three-dimensional shape of the measurement object 10, or displays the three-dimensional shape of the measurement object 10 in three-dimensional graphics.

  Then, the effect | action and effect of the three-dimensional shape measurement system 1 of this embodiment are demonstrated.

  The three-dimensional shape measurement system 1 uses an optical cutting method. For this reason, it is possible to reduce the time required for measuring a three-dimensional shape as compared with a system using a stereo image method.

  Further, the mirror unit 17 of the three-dimensional shape measurement system 1 has nine reflecting mirrors 171 to 179. The reflecting mirrors 171 to 179 reflect the reflected light from the slit light reflecting regions R1 to R9, respectively. That is, the reflecting mirrors 171 to 179 divide and reflect the reflected light from the surface of the measuring object 10 for each of the reflection regions R1 to R9. The camera 16 captures the reflected light from the surface of the measurement object 10 via the reflecting mirrors 171 to 179 and obtains an image P. In the obtained image P, the divided reflected light image 34 extends in one side direction (Py axis direction shown in FIG. 5), and the other side direction (Px axis direction shown in FIG. 5). ). In this way, by using the reflecting mirrors 171 to 179 to capture the image in which the divided reflected light images 34 are arranged in parallel, the entire elongated reflected light from the measurement target surface of the slit light is directly imaged. Compared with the case where it did, the ratio of the image of the reflected light which occupies for the whole image can be increased markedly. As a result, it is easy to accurately grasp the shape of the reflected light image 34.

  The preferred embodiments of the present invention have been described above, but the present invention is not necessarily limited to these embodiments.

  For example, in the present embodiment, nine reflecting mirrors and nine slit light sources are used, but the number of reflecting mirrors and slit light sources is not limited thereto. However, when changing the number of reflecting mirrors and slit light sources, it is necessary to appropriately change the size and direction of the reflecting mirror, the angle between the reflecting mirror and the central axis of the telecentric lens 16a, and the like.

It is a perspective view of the three-dimensional shape measurement system which concerns on this embodiment. It is a side view of a reflecting mirror. It is a side view of the measuring object on a reflective mirror, a camera, and a conveyance table. It is a figure which shows the reflective area | region of a measuring object. It is a figure which shows the image imaged with the camera. It is a figure which shows the structure of a computer apparatus. It is a figure for demonstrating the calculation procedure of the three-dimensional shape by a three-dimensional shape calculation part. This is when the measurement object is viewed from the positive direction of the Z-axis shown in FIG. It is a figure which shows a synthesized image. It is a figure which shows the image imaged with the conventional three-dimensional shape measurement system.

Explanation of symbols

    DESCRIPTION OF SYMBOLS 1 ... Three-dimensional shape measurement system, 10 ... Measuring object, 12 ... Conveyance table, 14 ... Light source unit, 141-149 ... Slit light source, 16 ... Camera, 17 ... -Mirror unit, 171-179 ... reflecting mirror, 18 ... computer device, 20 ... display.

Claims (2)

A transport table for transporting the measurement object in a predetermined transport direction;
Irradiation means for irradiating the measurement object being conveyed by the conveyance table with slit light having a long axis extending in a direction intersecting the conveyance direction;
Reflecting means for reflecting light reflected from the surface of the measurement object of the slit light irradiated from the irradiation means;
Imaging means for imaging reflected light from the surface of the measurement object of the slit light through the reflecting means;
Three-dimensional shape calculating means for calculating a three-dimensional shape of the measurement object based on the shape of the image of the reflected light imaged by the imaging means;
With
The reflecting means divides the reflected light of the slit light from the surface of the measurement object into a plurality of parts along the major axis direction of the slit light, and the plurality of divided reflected lights are perpendicular to the major axis direction. A three-dimensional shape measurement system, wherein the three-dimensional shape measurement system is formed so as to be imaged by the imaging means. The irradiation means comprises a plurality of slit light sources,
The reflecting means includes the same number of reflecting mirrors as the plurality of slit light sources respectively corresponding to the plurality of slit light sources.
2. The three-dimensional shape measurement system according to claim 1, wherein the plurality of reflecting mirrors reflect reflected light from the surface of the measurement object of the slit light irradiated from the corresponding slit light source.

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