JP2007096140A - Article giving/receiving method and apparatus in suspended ascending/descending carrier truck - Google Patents

Article giving/receiving method and apparatus in suspended ascending/descending carrier truck Download PDF

Info

Publication number
JP2007096140A
JP2007096140A JP2005285718A JP2005285718A JP2007096140A JP 2007096140 A JP2007096140 A JP 2007096140A JP 2005285718 A JP2005285718 A JP 2005285718A JP 2005285718 A JP2005285718 A JP 2005285718A JP 2007096140 A JP2007096140 A JP 2007096140A
Authority
JP
Japan
Prior art keywords
foup
article
carriage
processing station
suspended
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2005285718A
Other languages
Japanese (ja)
Inventor
Mitsuhiro Ando
光裕前滝 進 安藤
Susumu Maetaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Asyst Shinko Inc
Original Assignee
Asyst Shinko Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asyst Shinko Inc filed Critical Asyst Shinko Inc
Priority to JP2005285718A priority Critical patent/JP2007096140A/en
Priority to KR1020087007731A priority patent/KR20080072817A/en
Priority to CNA2006800364586A priority patent/CN101278384A/en
Priority to TW095136217A priority patent/TW200737392A/en
Priority to PCT/JP2006/319512 priority patent/WO2007037397A1/en
Publication of JP2007096140A publication Critical patent/JP2007096140A/en
Pending legal-status Critical Current

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/026—Racks equipped with a displaceable load carrying surface to facilitate loading or unloading
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • B65G1/0407—Storage devices mechanical using stacker cranes
    • B65G1/0421—Storage devices mechanical using stacker cranes with control for stacker crane operations
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67775—Docking arrangements

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Warehouses Or Storage Devices (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To make exchangeable an FOUP which is mounted on an FOUP carrying-in/carrying-out port of a processing station of a plurality of processing stations provided along the annular track of each suspended ascending/descending carrier truck and applying different processings to a semiconductor manufacturing substrate (a wafer), and stores in it the processed-off substrate in the processing station; and an FOUP which is carried by each suspended ascending/descending carrier truck, and stores in it a substrate intended to be processed in the processing station; on the basis of the ascending/descnding function of each general-purpose suspended ascending/descending carrier truck. <P>SOLUTION: An FOUP 9a and an FOUP 9b are made exchangeable constitutionally by the ascending/descending mechanism of each suspended ascending/descending carrier truck, and by the action of a pair of sliding plates 10by, 10cy moved in the horizontal direction and in the ascending/descending region of each carrier truck. The FOUP 9a is mounted on an FOUP carrying-in/carrying-out port 5a of each processing station 5, and stores in it the substrate processed-off in each processing station 5. The FOUP 9b is positioned above the FOUP 9a, and is carried by each suspended type ascending/descending carrier truck, and further, stores in it the substrate intended to be processed in each processing station 5. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

本発明は、懸垂式昇降搬送台車（以下、ＯＨＴ台車という）の工程内乃至工程間環状軌道に沿う所定個所に設置され、物品（ＦＯＵＰ等）に挿脱自在に収納される基板（ウエハ、液晶等）の各種処理（洗浄、ＣＶＤほか）を行うステーション（以下、処理ステーションという）の物品搬入・搬出ポートに載置されている搬出用物品と、この搬出用物品の上方に位置し、ＯＨＴ台車に把持されている前記処理ステーションへの搬入用物品との交換方法並びにその方法を実施するための装置に関するものである。 The present invention provides a substrate (wafer, liquid crystal) that is installed in a predetermined location along an annular orbit between processes in a process of a suspended lift carriage (hereinafter referred to as an OHT carriage) and is detachably stored in an article (FOUP or the like). Etc.), an unloading article placed on an article loading / unloading port of a station (hereinafter referred to as a processing station) that performs various processes (cleaning, CVD, etc.), and an OHT carriage located above the unloading article. The present invention relates to a method for exchanging with an article for carrying into the processing station held by a machine and an apparatus for carrying out the method.

近年、クリーンルーム内の工程内乃至工程間環状軌道に沿って配置され、ウエハの各種表面処理（薄膜形成、フォトリソグラフィー、洗浄、エッチング、検査等）を行う一連の処理ステーションで必要な処理を行うためＯＨＴ台車を用い、前記ウエハを収納したＦＯＵＰを、搬送することが多い。
基板の処理工程は基板が収納されるＦＯＵＰに取り付けられたタグで管理され、タグの内容も基板処理工程の進行に従い逐次更新される。基板処理の工程はＦＯＵＰに付されたタグの情報により特定され、以降の必要な処理はこのタグ情報に基づきコンピュータによって管理される。 In order to perform necessary processing at a series of processing stations which are arranged in a clean room in a process or along an annular track between processes and perform various surface treatments (thin film formation, photolithography, cleaning, etching, inspection, etc.) of a wafer in recent years. In many cases, the FOUP containing the wafer is transported using an OHT carriage.
The substrate processing process is managed by a tag attached to the FOUP in which the substrate is accommodated, and the contents of the tag are sequentially updated as the substrate processing process proceeds. Substrate processing steps are specified by tag information attached to the FOUP, and subsequent necessary processing is managed by a computer based on the tag information.

この際、各処理ステーションは処理の種類の相違に応じて処理に要する時間が相違するため工程時間の調整が必要となり、ＦＯＵＰを一時待機させるためのストッカーが設けられている。
このストッカーは、多数のＦＯＵＰ載置用棚と、所定の棚へのＦＯＵＰの搬入或いは所定の棚からＦＯＵＰを搬出するスタッカクレーンを備えている。 At this time, since the time required for processing differs depending on the type of processing at each processing station, it is necessary to adjust the process time, and a stocker for temporarily waiting the FOUP is provided.
The stocker includes a large number of FOUP placement shelves and a stacker crane that carries FOUPs into or out of predetermined shelves.

さて、前記ストッカー及び各種処理を行う処理ステーションは、ＯＨＴ台車の環状軌道に沿って配置される。
そして、この環状軌道は半導体製造装置の規模に応じて複数設けられ、各環状軌道は工程内環状軌道と工程間環状軌道の連係により構成され、ＯＨＴ台車はこれらの軌道において、安定した走行制御を受けるため常時一定方向に走行制御され、ウエハ等の基板を収納したＦＯＵＰを所定のストッカー乃至処理ステーションに搬送する。
なお、クリーンルーム内におけるＦＯＵＰの搬送手段としてＯＨＴ台車が用いられる理由は、当該ＯＨＴ台車の走行路に沿って配置される各種処理を担う多数の処理ステーション、或いはＦＯＵＰの一時待機用ストッカー等の諸設備を地上に配置する場合の自由度が大となることや、安全上の問題による。 Now, the said stocker and the processing station which performs various processes are arrange | positioned along the cyclic | annular track | orbit of an OHT cart.
A plurality of the annular tracks are provided according to the scale of the semiconductor manufacturing apparatus. Each annular track is formed by linking the in-process annular track and the inter-process annular track, and the OHT carriage performs stable traveling control in these tracks. Therefore, the FOUP containing a substrate such as a wafer is transferred to a predetermined stocker or processing station.
The reason why the OHT carriage is used as a means for transporting FOUPs in a clean room is that there are a number of processing stations for carrying out various processes arranged along the travel path of the OHT carriage, or various facilities such as temporary stockers for FOUPs. This is due to the greater freedom in placing the slab on the ground and safety issues.

さて、ＯＨＴ台車は、前記工程内環状軌道又は工程間環状軌道を、ＦＯＵＰを把持しつつ走行し、当該ＦＯＵＰに挿脱自在に収納した多数枚（例えば、２５枚）のウエハ等の基板に対して、プロセスの段階に応じた必要な処理（薄膜形成、フォトリソグラフィー、洗浄、エッチング、検査等）のために所定のステーションにおけるＦＯＵＰ用搬入・搬出ポートに対向する位置に停止する。
次いで、把持しているＦＯＵＰを降下させ、前記所定のステーションの搬入・搬出ポートに載置する。 Now, the OHT carriage travels on the intra-process annular track or the inter-process annular track while gripping the FOUP, and with respect to a large number of (for example, 25) wafers and other substrates that are detachably stored in the FOUP. Then, it stops at a position facing the FOUP loading / unloading port in a predetermined station for necessary processing (thin film formation, photolithography, cleaning, etching, inspection, etc.) according to the stage of the process.
Next, the gripped FOUP is lowered and placed on the loading / unloading port of the predetermined station.

この処理ステーションの搬入・搬出ポートに載置されたＦＯＵＰに収納されている基板は、ステーションに備えられているロボットにより１枚ずつステーション内に導かれ、所定の処理を受ける。
この基板への処理に要する時間は処理の種類によって異なるが、相応の時間を要するためＦＯＵＰを搬送してきたＯＨＴ台車はＦＯＵＰ載置後は別の搬送命令を実行するよう搬送システムコントローラから指示され、システム全体の稼動効率の低下を防止している。 Substrates stored in the FOUP placed at the loading / unloading port of the processing station are guided one by one into the station by a robot provided in the station, and are subjected to predetermined processing.
The time required for processing on this substrate varies depending on the type of processing, but since it takes a corresponding time, the OHT cart that has transported the FOUP is instructed by the transport system controller to execute another transport command after the FOUP is mounted, This prevents a decrease in the operating efficiency of the entire system.

ところで、処理ステーションでの処理が終了した後のＦＯＵＰの扱いは、順次（１）〜（５）の通りである。
（１）処理ステーションが搬送システムコントローラに処理済みのＦＯＵＰの引取り要求をする。
（２）システムコントローラは該処理ステーション近傍に待機する空のＯＨＴ台車に引取りの指令を出す。
（３）引取り命令を受けたＯＨＴ台車は該処理ステーションに到達後搬入・搬出ポートに載置されたＦＯＵＰを把持し、システムコントローラより指示された搬送先まで搬送する。
（４）システムコントローラは、該処理ステーションから処理済みＦＯＵＰの回収されたことを確認し、ストッカー等に保管されている新たなＦＯＵＰを該処理ステーションに運ぶよう軌道上に待機する別の空ＯＨＴ台車に指令する。
（５）搬送指令を受けたＯＨＴ台車はストッカー等に保管されている新たなＦＯＵＰを該処理ステーションまで搬送する。
従って、処理ステーションから処理済みのＦＯＵＰを引取るＯＨＴ台車と新たなＦＯＵＰを供給するＯＨＴ台車は別になる。
一方、この処理ステーションへのＦＯＵＰの引取りと供給が１つのＯＨＴ台車で実行できれば、引取りと供給作業の簡便化と搬送時間の短縮化を図れることが期待できる。
しかし、従来技術でこれを実行すると、ストッカー等に保管されていた新たなＦＯＵＰを搬送してきたＯＨＴ台車が処理ステーションの搬入・搬出ポートにＦＯＵＰを降下載置させようとした時、該ポート上で今だ引取りの済まない処理済みＦＯＵＰに衝突し、事故になる。 By the way, the handling of FOUPs after the processing at the processing station is completed is sequentially as (1) to (5).
(1) The processing station requests the transport system controller to collect the processed FOUP.
(2) The system controller issues a take-off command to an empty OHT cart waiting in the vicinity of the processing station.
(3) The OHT cart that has received the take-in command reaches the processing station, holds the FOUP placed on the carry-in / carry-out port, and carries it to the transfer destination instructed by the system controller.
(4) The system controller confirms that the processed FOUP has been collected from the processing station, and waits on the track to carry a new FOUP stored in a stocker or the like to the processing station. To
(5) The OHT cart that has received the transport command transports a new FOUP stored in a stocker or the like to the processing station.
Therefore, the OHT cart that picks up the processed FOUP from the processing station is different from the OHT cart that supplies a new FOUP.
On the other hand, if the take-up and supply of the FOUP to the processing station can be executed by one OHT cart, it is expected that simplification of the take-up and supply work and shortening of the transport time can be achieved.
However, when this is performed in the prior art, when an OHT cart that has transported a new FOUP stored in a stocker or the like attempts to lower the FOUP to the loading / unloading port of the processing station, It collides with a processed FOUP that has not yet been picked up, resulting in an accident.

従って、所定の処理ステーションのＦＯＵＰ搬入・搬出ポートに載置され、この処理ステーションでの処理を終えた基板を収納したＦＯＵＰと、ＯＨＴ台車に把持され、このステーションでの処理を行おうとしている基板を収納したＦＯＵＰとの交換は一つのＯＨＴ台車では実施できない。 Therefore, a FOUP that is placed on a FOUP loading / unloading port of a predetermined processing station and contains a substrate that has been processed at this processing station, and a substrate that is gripped by the OHT carriage and is about to process at this station. Replacement with a FOUP that houses the hood is not possible with a single OHT cart.

しかし、このようなＦＯＵＰの交換を一つのＯＨＴ台車にて実行しようとした先行技術として下記特許文献１がある。
この特許文献１は、所定の処理ステーションのＦＯＵＰ搬入・搬出ポートに載置され、内部に保有している各基板の当該処理ステーションにおける処理が完了しているＦＯＵＰと、当該所定の処理ステーションにてこれから処理を受けようとする基板を収納しているＦＯＵＰＵの交換を行う技術を開示している。
具体的には、ＦＯＵＰ把持用の一対のフィンガ機構を有するＯＨＴ台車を主体とした５つの実施の形態が挙げられている。以下、これらの実施の形態について概要を述べる。 However, there is Patent Document 1 below as a prior art in which such FOUP replacement is executed by one OHT cart.
In this patent document 1, a FOUP placed on a FOUP carry-in / carry-out port of a predetermined processing station and processing of each substrate held therein is completed at the processing station, and the predetermined processing station. A technique for exchanging a FOUPU containing a substrate to be processed is disclosed.
Specifically, there are five embodiments mainly based on an OHT carriage having a pair of finger mechanisms for holding a FOUP. The outline of these embodiments will be described below.

実施の形態１：
図３に示される通り、ＯＨＴ台車１は、その走行方向に沿ってＦＯＵＰ把持用一対のフィンガ機構１８ａ、１８ｂを備えており、２個のキャリア（ＦＯＵＰ）２０ａ、２０ｂを夫々個別に把持、開放制御できるように構成されている。
そして、処理装置２には、キャリア搬入・搬出用ポート８が備えられ、当該キャリア搬入・搬出用ポート８上には、ＯＨＴ台車１の走行方向に進退可能に移動可能であって、キャリア内の基板を一枚ずつ所定の処理を行うロードポート２１に位置決めできる荷受テーブル４６が備えられる。 Embodiment 1:
As shown in FIG. 3, the OHT carriage 1 includes a pair of finger mechanisms 18a and 18b for gripping FOUP along its traveling direction, and grips and releases two carriers (FOUP) 20a and 20b individually. It is configured to be controllable.
The processing device 2 is provided with a carrier carry-in / carry-out port 8, which is movable on the carrier carry-in / carry-out port 8 so as to be able to advance and retreat in the traveling direction of the OHT carriage 1. A load receiving table 46 capable of positioning the substrates one by one at the load port 21 for performing predetermined processing is provided.

以上の構成により、先ず、ＯＨＴ台車１の走行路に沿って設置されているストッカー或いは他の処理装置から図３における処理装置２にて処理を予定している基板を収納したキャリア２０ｂをフィンガ機構１８ｂにより把持した状態でＯＨＴ搬送台車１がキャリア搬入・搬出用ポート８の上方位置に達する。
次に、昇降ベルト１６の繰り出しに伴い、グリッパ機構１７が降下し、処理装置２にて処理済みの基板を収納し、荷受テーブル４６上に載置されているキャリア２０ａをフィンガ機構１８ａにより把持する。 With the above configuration, first, a carrier mechanism 20b storing a substrate scheduled to be processed by the processing apparatus 2 in FIG. 3 from a stocker or other processing apparatus installed along the traveling path of the OHT carriage 1 is provided with a finger mechanism. The OHT transport carriage 1 reaches the position above the carrier carry-in / carry-out port 8 in a state of being gripped by 18b.
Next, as the elevating belt 16 is fed out, the gripper mechanism 17 is lowered, the substrate processed by the processing apparatus 2 is stored, and the carrier 20a placed on the load receiving table 46 is gripped by the finger mechanism 18a. .

この状態で、グリッパ機構１７を若干上昇させ、荷受テーブル４６とキャリア２０ａとの間に空隙を形成し、荷受テーブル４６を前記キャリア２０ｂの下方部に移動させ、グリッパ機構を降下させ、キャリア２０ｂを荷受テーブル４６上に載置し、フィンガ機構１８ｂによるキャリア２０ｂの把持状態を解除する。
以上の動作で、荷受テーブル４６上にあり、処理装置２にて処理済みの基板を収納したキャリア２０ａと、処理装置２にて処理を予定している基板を収納したキャリア２０ｂとを交換させることができる。 In this state, the gripper mechanism 17 is slightly raised to form a gap between the load receiving table 46 and the carrier 20a, the load receiving table 46 is moved to a lower portion of the carrier 20b, the gripper mechanism is lowered, and the carrier 20b is moved downward. It is placed on the load receiving table 46 and the gripping state of the carrier 20b by the finger mechanism 18b is released.
With the above operation, the carrier 20a on the receiving table 46 and containing the substrate processed by the processing apparatus 2 is replaced with the carrier 20b containing the substrate scheduled to be processed by the processing apparatus 2. Can do.

実施の形態２：
実施の形態１の図３に開示の荷受テーブル４６を省略し、図６に開示のように構成の簡素化を図っている。
通常、ＯＨＴ台車の逆方向の走行は台車衝突の危険を著しく増大させ、しかも搬送効率を低下させるため、禁止するのが常識である。この実施の形態２においては、図６の「Ｂ」の位置におけるフィンガ機構にて処理を予定している基板を収納したキャリア２０ｂを把持することが必要であり、異なる処理装置２においてキャリアの把持と載置との交換作業は１回毎にストッカーに戻る等の工程が加わり連続的に実施することはできない。 Embodiment 2:
The load receiving table 46 disclosed in FIG. 3 of the first embodiment is omitted, and the configuration is simplified as disclosed in FIG.
In general, it is common sense to prohibit the OHT carriage from traveling in the reverse direction because it significantly increases the danger of the carriage collision and lowers the transport efficiency. In the second embodiment, it is necessary to grip the carrier 20b containing the substrate to be processed by the finger mechanism at the position “B” in FIG. The exchanging operation with the mounting cannot be performed continuously by adding a process such as returning to the stocker every time.

実施の形態３：
図７に示されるように、実施の形態１の構成において、「Ａ」、「Ｂ」の位置にあるフィンガ機構１８ａ、１８ｂが夫々独立の昇降ベルト１６ａ、１６ｂにて独立に昇降制御を可能に構成されている。
このように構成することによって、装置としての自由度が高くなり、複数個の積載手段を他の積載手段の昇降に影響されないで、自在に動作させることができ、その結果、位置合せが容易となり、ＯＨＴ台車の搬送効率が向上する。 Embodiment 3:
As shown in FIG. 7, in the configuration of the first embodiment, the finger mechanisms 18a and 18b at the positions "A" and "B" can be controlled independently by independent lifting belts 16a and 16b, respectively. It is configured.
With this configuration, the degree of freedom as an apparatus is increased, and a plurality of stacking means can be freely operated without being affected by the lifting and lowering of other stacking means, and as a result, alignment becomes easy. , The transport efficiency of the OHT cart is improved.

実施の形態４：
図８に示されるように、前記実施の形態２と基本構成を共通にし、前記実施の形態３と同様「Ａ」、「Ｂ」の位置にあるフィンガ機構１８ａ、１８ｂが夫々独立の昇降ベルト１６ａ、１６ｂにて独立に昇降制御を可能に構成されている。 Embodiment 4:
As shown in FIG. 8, the basic structure is the same as that of the second embodiment, and the finger mechanisms 18a and 18b at the positions "A" and "B" are independent from each other as in the third embodiment. , 16b are configured to be capable of independent lifting control.

実施の形態５：
図１０に示す構成により、ＯＨＴ台車１にキャリア１８を格納している状況においてキャリアの位置を「Ａ」の位置から「Ｂ」の位置に移動できる構成としている。
この構成の付加によって、前記実施の形態２、４に開示の構成（実施の形態１、３に開示のＯＨＴ搬送台車１の走行方向及びその反対方向に沿って移動自在の荷受テーブルを有しない構成）においても一旦、ストッカーに戻ることなく、連続的に異なる処理装置２において処理済みの基板を収納したキャリア２０ａと、処理を予定している基板を収納したキャリア２０ｂの交換を可能とする。
特開２００５−２２５３９ Embodiment 5:
With the configuration shown in FIG. 10, the carrier position can be moved from the “A” position to the “B” position in a situation where the carrier 18 is stored in the OHT cart 1.
With the addition of this configuration, the configuration disclosed in the second and fourth embodiments (the configuration having no load receiving table movable along the traveling direction of the OHT conveyance carriage 1 disclosed in the first and third embodiments and the opposite direction thereof). ), It is possible to replace the carrier 20a storing substrates that have been processed continuously in different processing apparatuses 2 and the carrier 20b storing substrates that are scheduled to be processed without returning to the stocker.
JP-A-2005-22539

前記のように工程内環状軌道に沿って配置され、ＦＯＵＰ内の基板に対して洗浄、ＣＶＤほか多くの種類の中から特定される処理を施す各処理ステーションは、ＦＯＵＰ用搬入・搬出ポートを有している。
このＦＯＵＰ用搬入・搬出ポートには、対応処理ステーションにおける処理を予定している基板を収納したＦＯＵＰがＯＨＴ台車によって搬入される。
次いで、ＦＯＵＰ内に収納されている基板に一枚ずつ所定の処理を行い、全ての基板が所定の処理を完了し、ＦＯＵＰ内に戻されると、当該ＦＯＵＰはＯＨＴ台車によってストッカー乃至次の処理のために別の所定の処理ステーションに搬送される。 As described above, each processing station arranged along the in-process annular track and performing processing specified for cleaning, CVD, and many other types of substrates in the FOUP has a FOUP loading / unloading port. is doing.
A FOUP storing a substrate scheduled for processing at the corresponding processing station is carried into the FOUP loading / unloading port by the OHT cart.
Next, a predetermined process is performed one by one on the substrates stored in the FOUP, and when all the substrates have completed the predetermined processing and returned to the FOUP, the FOUP is loaded into the stocker or the next process by the OHT cart. For this purpose, it is transferred to another predetermined processing station.

ところで、処理ステーションのＦＯＵＰ用搬入・搬出ポートにおけるＯＨＴ台車によるＦＯＵＰの搬入・搬出操作において、当該処理ステーションにて処理を受けようとする基板を収納したＦＯＵＰを把持したＯＨＴ台車は、この把持しているＦＯＵＰと、当該処理ステーションにおけるＦＯＵＰ用搬入・搬出ポートに載置され、既に当該処理ステーションにおいて処理済みの基板を収納したＦＯＵＰとの交換は困難である。
ついては、一つの処理ステーションのＦＯＵＰ用搬入・搬出ポートにおいて、処理済の基板を収納するＦＯＵＰの搬出と、未処理の基板を収納するＦＯＵＰの搬入とは、夫々別個のＯＨＴ台車にて行う必要がある。 By the way, in the FOUP loading / unloading operation by the OHT cart at the FOUP loading / unloading port of the processing station, the OHT cart holding the FOUP containing the substrate to be processed at the processing station is gripped. It is difficult to exchange a FOUP that is placed on a FOUP loading / unloading port in the processing station and that contains a substrate already processed in the processing station.
Therefore, at the FOUP loading / unloading port of one processing station, it is necessary to carry out the unloading of the FOUP for storing the processed substrate and the loading of the FOUP for storing the unprocessed substrate by separate OHT carts. is there.

従って、一つの処理ステーションにて全ての基板が所定の処理を終え、これらの基板を収納し、処理ステーションのＦＯＵＰ用搬入・搬出ポート上に載置されたＦＯＵＰは、工程内環状軌道を走行中であって、ＦＯＵＰを把持していない空ＯＨＴ台車によって搬出される。
その後、当該処理ステーションにて処理を予定する基板を収納するＦＯＵＰが、工程内環状軌道を走行中の別のＯＨＴ台車によって当該処理ステーションのＦＯＵＰ用搬入・搬出ポートに搬入される。
この結果、処理ステーションのＦＯＵＰ用搬入・搬出ポートにおけるＦＯＵＰの搬入、搬出にかなりの時間のロスを招き、ＦＯＵＰに収納される基板の処理効率を低下させる傾向があった。 Therefore, all the substrates are processed in a single processing station, the substrates are stored, and the FOUP placed on the FOUP loading / unloading port of the processing station is running on the in-process annular track. And it is carried out by the empty OHT cart which is not holding FOUP.
Thereafter, the FOUP storing the substrate to be processed at the processing station is carried into the FOUP loading / unloading port of the processing station by another OHT cart that is traveling on the in-process annular track.
As a result, FOUP loading / unloading at the FOUP loading / unloading port of the processing station has a considerable time loss and tends to reduce the processing efficiency of the substrates stored in the FOUP.

このような問題点を解決することを主眼とする技術として前記特許文献１がある。
この特許文献１に開示の技術は、所定の処理ステーションにおけるＦＯＵＰ用搬入・搬出ポートに載置され、内部に収納されている基板が全数当該処理ステーションにて処理済の基板であるＦＯＵＰの搬出と、当該ステーションにて処理を受けようとする基板を収納したＦＯＵＰの前記ＦＯＵＰ用搬入・搬出ポートへの搬入を同時に行うことができることを特徴としている。 Japanese Patent Application Laid-Open No. H10-228688 is a technique that mainly focuses on solving such problems.
The technique disclosed in Patent Document 1 is to carry out the FOUP carrying out all the substrates placed in the FOUP loading / unloading port in a predetermined processing station and accommodated in the processing station. The FOUP storing a substrate to be processed at the station can be simultaneously loaded into the FOUP loading / unloading port.

これを実現するために、ＯＨＴ台車は、特許文献１の図３、図６、図７、図８に示されるように、ＯＨＴ台車の進行方向に沿って２個のＦＯＵＰ把持用のクリッパ装置を備えた特殊仕様のＯＨＴ台車を使用している。
更に、一旦ストッカーに戻ることなく連続的に異なる処理を受ける処理ステーションに移行するためには、特許文献１の図３、図７に開示され、ＯＨＴ台車１の走行方向に移動自在の荷受テーブル４５を設けるか或いは図１０に示すようなＯＨＴ搬送台車に把持された状態にて把持状態のＦＯＵＰを移動させる構成を必要とする。 In order to realize this, the OHT cart has two clipper devices for gripping FOUP along the traveling direction of the OHT cart, as shown in FIGS. 3, 6, 7, and 8 of Patent Document 1. A specially-designed OHT cart is used.
Furthermore, in order to shift to a processing station that continuously receives different processes without returning to the stocker, a load receiving table 45 disclosed in FIGS. 3 and 7 of Patent Document 1 and movable in the traveling direction of the OHT cart 1 is disclosed. Or a configuration in which the gripped FOUP is moved while being gripped by the OHT transport carriage as shown in FIG.

前記のように、特許文献１に開示の技術は、所定の処理ステーションのＦＯＵＰ用搬入・搬出ポート上に載置され、所定の処理を終えた基板を収納したＦＯＵＰと、所定の処理を受けようとしている基板を収納したＦＯＵＰとの交換作業を唯一台のＯＨＴ台車にて行うことができる。
しかし、このためには、前記したように汎用性の高いＯＨＴ搬送台車は使用できず、ＯＨＴ搬送台車のコストが増し、併せてＦＯＵＰの移動に極めて複雑な機構を付加する必要がある。 As described above, the technique disclosed in Patent Document 1 is subjected to a FOUP placed on a FOUP loading / unloading port of a predetermined processing station and containing a substrate that has completed the predetermined processing, and a predetermined processing. The replacement work with the FOUP containing the substrate can be performed with only one OHT cart.
However, for this purpose, as described above, a highly versatile OHT conveyance carriage cannot be used, and the cost of the OHT conveyance carriage increases, and at the same time, it is necessary to add a very complicated mechanism to the movement of the FOUP.

そこで、本発明の目的は、１台にて１個のＦＯＵＰの昇降・搬送を担う汎用のＯＨＴ台車を用いて、工程内環状軌道に沿って配置され、ＦＯＵＰ内に収納される基板に必要な処理を行う処理ステーションのＦＯＵＰ用搬入・搬出ポートに載置され、当該処理ステーションにて処理済の基板を収納したＦＯＵＰと、当該ＯＨＴ台車に把持され、当該処理ステーションにて処理を受けようとする基板を収納したＦＯＵＰとを交換可能ならしめる方法並びにその方法を実施するための装置を提供することである。 Therefore, an object of the present invention is necessary for a substrate that is arranged along an in-process annular track using a general-purpose OHT cart that is responsible for raising and lowering and transporting one FOUP by one unit, and is stored in the FOUP. A FOUP that is placed on a FOUP loading / unloading port of a processing station that performs processing, stores a substrate processed in the processing station, and is gripped by the OHT cart, and tries to receive processing in the processing station. It is an object of the present invention to provide a method for making it possible to exchange a FOUP containing a substrate and an apparatus for carrying out the method.

課題を解決するための手段及び効果Means and effects for solving the problems

前記課題を解決するため、請求項１に記載のＯＨＴ搬送台車における物品の授受方法は、次の第一〜第四工程によって実現する。
第一工程：ＯＨＴ搬送台車の把持部に把持されている所定の処理ステーションへの搬入用物品を降下させ、上下方向に並ぶ懸垂式一時保管棚の一方の棚に載置する
第二工程：ＯＨＴ搬送台車の把持部において、前記所定の処理ステーションの物品搬入・搬出ポートに載置されている搬出用物品を把持、上昇させ、前記懸垂式一時保管棚の他方に載置する
第三工程：前記懸垂式一時保管棚の一方の棚に載置されている搬入用物品を、ＯＨＴ搬送台車の把持部にて把持、降下させ、前記所定の処理ステーションの物品搬入・搬出ポートに載置する
第四工程：前記懸垂式一時保管棚の他方の棚に載置されている搬出用物品をＯＨＴ搬送台車の把持部にて把持、上昇させる。 In order to solve the above-described problem, the method for delivering an article in the OHT transport cart according to claim 1 is realized by the following first to fourth steps.
1st process: The goods for carrying in to the predetermined | prescribed processing station currently hold | gripped by the holding part of an OHT conveyance trolley are dropped, and it mounts on one shelf of the suspension-type temporary storage shelf arranged in an up-down direction: OHT In the gripping part of the transport carriage, the third step of gripping and lifting the unloading article placed on the article loading / unloading port of the predetermined processing station and placing it on the other of the suspended temporary storage shelves: A fourth article in which a carry-in article placed on one shelf of a suspended temporary storage shelf is grasped and lowered by a grasping portion of an OHT conveyance carriage and placed on an article carry-in / out port of the predetermined processing station. Step: The carrying-out article placed on the other shelf of the suspension-type temporary storage shelf is gripped and raised by the grip portion of the OHT transport carriage.

この請求項１に係る発明によれば、工程内環状軌道に沿って所定の方向に走行制御を受けるＯＨＴ台車に把持され、所定の処理ステーションにおける処理を受けようとしている物品と、前記所定の処理ステーションにおける物品搬出・搬入ポート上に載置され、所定の処理ステーションにおける処理を既に完了した物品との交換を、懸垂式一時保管棚機能を併用させることで前記ＯＨＴ台車一台だけの昇降制御のみによって実施できる。
従って、所定の処理ステーションにおける物品搬入・搬出ポートへの物品搬入用ＯＨＴ台車と、当該物品搬入・搬出ポートからの物品搬出用ＯＨＴ台車と、を共通にすることができ、かつ、ＯＨＴ台車は一台にて一個の物品を把持し、昇降・搬送する汎用のものでよく、特別仕様のＯＨＴ台車を製作する必要がなく、かつ、処理ステーションにおける物品搬入・搬出ポート上への未処理物品の搬入及び処理済の物品搬出を効率よく行うことができる。 According to the first aspect of the present invention, an article that is gripped by an OHT carriage that is subjected to traveling control in a predetermined direction along the in-process annular track and is about to receive a process at a predetermined processing station, and the predetermined process Only lifting / lowering control of only one OHT cart by using the suspension type temporary storage shelf function for exchanging with an article that has been placed on an article carry-out / in port at a station and has already completed processing at a predetermined processing station. Can be implemented.
Accordingly, the OHT carriage for carrying articles to the article carrying-in / out port at a predetermined processing station and the OHT carriage for carrying out articles from the article carrying-in / out port can be made common, and the OHT carriage is one. It can be a general-purpose one that holds a single article on the platform, moves up and down, and transports it. There is no need to manufacture a special OHT cart, and unprocessed articles are loaded onto the article loading / unloading port at the processing station. In addition, the processed goods can be carried out efficiently.

請求項２に記載のＯＨＴ搬送台車における物品の授受方法は、請求項１に記載のＯＨＴ搬送台車における物品の授受方法において、物品が半導体基板を挿脱自在に収納するＦＯＵＰであり、処理ステーションがＯＨＴ搬送台車の環状軌道に沿う適所に配置され、前記ＦＯＵＰ内に収納されている半導体基板の処理設備であることを特徴とする。
この請求項２に係る発明によれば、引用先の請求項１に係る発明の効果は元より、所定の処理ステーションにおけるＦＯＵＰ用搬入・搬出ポート上に載置され、当該処理ステーションにて処理済の基板を収納したＦＯＵＰが搬出されると、遅滞なくその後、当該処理ステーションにて処理を受けようとする基板を収納したＦＯＵＰが前記ＦＯＵＰ用搬入・搬出ポート上に載置される。
従って、ＦＯＵＰ内に収納されている基板に対して種々の処理（薄膜形成、フォトリソグラフィー、洗浄、エッチング、検査等）を効率よく行うことができる。 The method for exchanging articles in the OHT conveyance cart according to claim 2 is the FOUP in which the articles accommodate the semiconductor substrate in a removable manner in the method for exchanging articles in the OHT conveyance cart according to claim 1, and the processing station The semiconductor substrate processing equipment is disposed at a proper position along the annular track of the OHT transport carriage and is accommodated in the FOUP.
According to the invention according to claim 2, the effect of the invention according to claim 1 cited above is originally placed on the loading / unloading port for FOUP in a predetermined processing station and processed at the processing station. When the FOUP storing the substrate is unloaded, the FOUP storing the substrate to be processed at the processing station is placed on the FOUP loading / unloading port without delay.
Accordingly, various processes (thin film formation, photolithography, cleaning, etching, inspection, etc.) can be efficiently performed on the substrate stored in the FOUP.

請求項３に記載のＯＨＴ搬送台車における物品の授受装置は、ＯＨＴ搬送台車の走行路に沿う所定の個所に設置される処理ステーションの物品搬入・搬出ポートに載置される搬出用物品と、この搬出用物品に対向する上方に位置し、ＯＨＴ搬送台車の物品把持部に把持されている搬入用物品との交換を行うための一対の一時保管棚を有し、この一対の一時保管棚は、上下方向に配置され、各保管棚にはスライド板が設けられ、一方の保管棚のスライド板は搬入用物品の保管・取出しを行う場合においてのみ、他方の保管棚のスライド板は搬出用物品の保管・取出しを行う場合においてのみ、ＯＨＴ搬送台車の物品把持部に対し物品の授受を行うために進退し、それ以外の場合にはＯＨＴ搬送台車の昇降動作を許容するように駆動制御されることを特徴とする。
この請求項３に係る発明は、請求項１に係る発明を実施するための装置に係り、発明の効果としては、前記請求項１に係る発明の効果と均等であり、その説明の重複を避ける。 The article transfer device in the OHT conveyance carriage according to claim 3 is an article for unloading placed on an article loading / unloading port of a processing station installed at a predetermined location along a traveling path of the OHT conveyance carriage, It has a pair of temporary storage shelves for exchanging with the articles for loading, which are located above the articles for unloading and are gripped by the article gripping part of the OHT transport carriage. Each storage shelf is provided with a slide plate. The slide plate of one storage shelf is used only when storing / removing articles for loading. Only in the case of storage / removal, the OHT transport cart moves forward and backward to transfer the product to and from the product gripping part. In other cases, the OHT transport cart is driven and controlled to allow the lifting / lowering operation. The features.
The invention according to claim 3 relates to an apparatus for carrying out the invention according to claim 1, and the effect of the invention is equivalent to the effect of the invention according to claim 1, and duplication of the description is avoided. .

請求項４に記載のＯＨＴ搬送台車における物品の授受装置は、請求項３に記載のＯＨＴ搬送台車における物品の授受装置において、物品が半導体基板を挿脱自在に収納するＦＯＵＰであり、処理ステーションがＯＨＴ搬送台車の環状軌道に沿う適所に配置され、前記ＦＯＵＰ内に収納されている半導体基板の処理設備であることを特徴とする。
この請求項４に係る発明によれば、引用先の請求項３に係る発明の効果は元より、請求項２と均等な効果を奏する。 The article transfer device in the OHT transport carriage according to claim 4 is the article transfer apparatus in the OHT transport cart according to claim 3, wherein the article is a FOUP in which a semiconductor substrate is detachably inserted. The semiconductor substrate processing equipment is disposed at a proper position along the annular track of the OHT transport carriage and is accommodated in the FOUP.
According to the invention of claim 4, the effect of the invention according to claim 3 of the cited destination is the same as that of claim 2.

以下、本発明の好適な実施の形態について図面を参照しつつ説明する。
先ず、図面の概要を述べると、図１は本発明の適用システムを示す平面図、図２は本発明を実施するための要部構成図、図３は本発明に係る懸垂式棚の棚板の概念を示す構成図、図４は本発明の方法を説明するための懸垂式棚におけるＦＯＵＰの載置状況を示す模式図である。 Hereinafter, preferred embodiments of the present invention will be described with reference to the drawings.
First, the outline of the drawings will be described. FIG. 1 is a plan view showing an application system of the present invention, FIG. 2 is a main part configuration diagram for carrying out the present invention, and FIG. 3 is a shelf board of a suspended shelf according to the present invention. FIG. 4 is a schematic diagram showing a FOUP placement situation on a suspended shelf for explaining the method of the present invention.

次に、本発明を適用するシステム全体の構成について図１を参照して説明する。
図１において、１はベイで、連続した複数領域に併設され、各ベイ１には後述のＯＨＴ台車を走行案内する工程内環状軌道２が敷設され、各工程内環状軌道２は分岐軌道３を介して工程間環状軌道４によって連係を保ち、ＯＨＴ搬送台車は所定の方向に規制されて走行できるように構成されている。 Next, the configuration of the entire system to which the present invention is applied will be described with reference to FIG.
In FIG. 1, reference numeral 1 denotes a bay, which is provided in a plurality of continuous areas. In each bay 1, an in-process annular track 2 that guides traveling of an OHT carriage, which will be described later, is laid. Thus, the OHT transport carriage is configured to be able to travel while being regulated in a predetermined direction.

５は処理ステーションで、工程内環状軌道２に沿って配置され、薄膜形成、フォトリソグラフィー、洗浄、エッチング、検査等の何れかの処理を、ＦＯＵＰに収納されたウエハ等の半導体基板に施すために、各ベイ１の敷設された工程内環状軌道２に沿って、可能の限り処理の順番に適合させるように配置され、夫々ＦＯＵＰ用搬入・搬出ポート５ａを備えている。このＦＯＵＰ用搬入・搬出ポート５ａは、ＯＨＴ台車によって所定の処理を予定している基板を収納したＦＯＵＰを搬入し、所定の処理を完了した基板を収納したＦＯＵＰの搬出を担う。 Reference numeral 5 denotes a processing station arranged along the in-process annular track 2 for performing any processing such as thin film formation, photolithography, cleaning, etching, and inspection on a semiconductor substrate such as a wafer stored in the FOUP. Each of the bays 1 is arranged so as to be adapted to the processing order as much as possible along the in-process annular track 2 laid, and each has a FOUP loading / unloading port 5a. This FOUP carry-in / carry-out port 5a carries in a FOUP containing a substrate scheduled for a predetermined process by the OHT carriage, and carries out a FOUP containing a substrate that has completed the predetermined process.

６はストッカーで、工程内環状軌道２における適所に配置され、全ての処理を完了済みの基板を収納したＦＯＵＰの保管、或いは、所定の処理を予定している基板を収納したＦＯＵＰの待機にてＦＯＵＰの保管を行い、ＦＯＵＰ用搬入ポート６ａ、搬出ポート６ｂを備えている。
７はＯＨＴ台車で、前記工程内環状軌道２、分岐軌道３及び工程間環状軌道４を所定の方向への駆動機能と、把持状態のＦＯＵＰの昇降・把持機能を有している。８はシステムコントローラでＯＨＴ搬送台車７の走行ルートの指示や衝突防防止制御などＯＨＴ搬送台車の走行制御を司る。 6 is a stocker, which is arranged at an appropriate position in the in-process circular track 2 and is stored in a FOUP containing a substrate for which all processing has been completed or in a standby for a FOUP containing a substrate scheduled for a predetermined processing. The FOUP is stored and includes a FOUP carry-in port 6a and a carry-out port 6b.
Reference numeral 7 denotes an OHT carriage, which has a function of driving the in-process annular track 2, the branch track 3, and the inter-process annular track 4 in a predetermined direction, and a lifting / holding function of the FOUP in the gripping state. Reference numeral 8 denotes a system controller that controls the travel control of the OHT transport cart such as an instruction of a travel route of the OHT transport cart 7 and collision prevention control.

さて、本願発明の要部構成を示す図２、図３を参照して実施の形態の具体例を説明する。図２において、９ａ、９ｂはＦＯＵＰで、ＦＯＵＰ９ａは処理ステーション５のＦＯＵＰ用搬入・搬出ポート５ａ上に載置されている。
そして、このＦＯＵＰ９ａの内部に収納されている当該処理ステーション５における所定の処理がなされていない基板は、図示しないロボット作用によって一枚ずつ処理され、全ての基板が所定の処理が終了し、次に予定しているの所定の処理を行う別の処理ステーション５或いはストッカー６（図１参照）への搬送に対する待機状態にある。 Now, a specific example of the embodiment will be described with reference to FIG. 2 and FIG. 3 showing the main configuration of the present invention. In FIG. 2, 9 a and 9 b are FOUPs, and the FOUP 9 a is placed on the FOUP loading / unloading port 5 a of the processing station 5.
Then, the substrates that are stored in the FOUP 9a and not subjected to the predetermined processing in the processing station 5 are processed one by one by a robot action (not shown), and the predetermined processing is completed for all the substrates. The apparatus is in a standby state for conveyance to another processing station 5 or a stocker 6 (see FIG. 1) that performs a predetermined process.

前記ＯＨＴ台車７は、工程内環状軌道２、分岐軌道３、工程間環状軌道４の何れか（図２の状態は工程内環状軌道2を表示）と係合する駆動・走行機構７ａ、台車位置調整機構７ｂ、昇降機構７ｃ、昇降ベルト７ｄ、グリップ機構７ｅ及びフィンガ機構７ｆから構成される。
なお、前記駆動・走行機構７ａは、特許文献１に具体的に示されるように、非接触給電による電力を受け、リニアモータの原理で推進力を得、システムコントローラ８（図１を参照）による走行制御によって走行方向が規制される。 The OHT carriage 7 includes a driving / running mechanism 7a that engages with any of the in-process annular raceway 2, the branching raceway 3, and the inter-process annular raceway 4 (the state in FIG. 2 indicates the in-process annular raceway 2). The adjustment mechanism 7b, the lifting mechanism 7c, the lifting belt 7d, the grip mechanism 7e, and the finger mechanism 7f are included.
The drive / running mechanism 7a receives electric power by non-contact power feeding and obtains a propulsive force based on the principle of a linear motor, as specifically shown in Patent Document 1, and is based on a system controller 8 (see FIG. 1). The traveling direction is regulated by the traveling control.

前記ＦＯＵＰ９ｂには、所定の処理ステーション５にて処理を受ける予定の基板が収納されている。そして、このＦＯＵＰ９ｂは、処理ステーション５のＦＯＵＰ用搬入・搬出ポート５ａに対応する位置にある。この際、ＦＯＵＰ９ｂはＯＨＴ搬送台車７のフィンガ機構７ｆにて当該ＦＯＵＰ９ｂのフランジ部が把持されることによりＯＨＴ台車に保持されている。 In the FOUP 9b, a substrate scheduled to be processed at a predetermined processing station 5 is stored. The FOUP 9b is at a position corresponding to the FOUP loading / unloading port 5a of the processing station 5. At this time, the FOUP 9b is held on the OHT carriage by gripping the flange portion of the FOUP 9b by the finger mechanism 7f of the OHT transport carriage 7.

１０は懸垂式棚装置（以下、ＯＨＢという）で、天井から下方に延びる柱状体１０ａに対して上下２段の棚部材
１０ｂ、１０ｃが設置されている。そして、この棚部材１０ｂは固定板１０ｂｘ及びスライド板１０ｂｙからなり、棚部材１０ｃは固定板１０ｃｘ及びスライド板１０ｃｙから構成される。
前記棚部材１０ｂ、１０ｃは同一構成であり、棚部材１０ｂを例に詳細な構成について図４を参照して説明する。図４において、１０ｄはキネマティックピンで、スライド板１０ｂｙの平面上にＦＯＵＰ９ａ、９ｂが正規に載置された際のみ、当該ＦＯＵＰ９ａ、９ｂの底面に形成されている孔に嵌合する。このキネマティックピン１０ｄとＦＯＵＰ底面に形成された孔の正規の嵌合状態はスライド板１０ｂｙの表面に配置されているセンサ１０ｅにおいて検知する。 Reference numeral 10 denotes a suspended shelf device (hereinafter referred to as OHB), which is provided with two upper and lower shelf members 10b and 10c with respect to a columnar body 10a extending downward from the ceiling. The shelf member 10b includes a fixed plate 10bx and a slide plate 10by, and the shelf member 10c includes a fixed plate 10cx and a slide plate 10cy.
The shelf members 10b and 10c have the same configuration, and the detailed configuration of the shelf member 10b will be described with reference to FIG. In FIG. 4, 10d is a kinematic pin that fits into a hole formed on the bottom surface of the FOUP 9a, 9b only when the FOUP 9a, 9b is properly placed on the plane of the slide plate 10by. The normal fitting state of the hole formed in the bottom surface of the kinematic pin 10d and the FOUP is detected by a sensor 10e disposed on the surface of the slide plate 10by.

１０ｆはギアで、固定板１０ｂｘ側の適所に設置され、図示しない減速機付モータにて回転速度及び回転方向がＯＨＢコントローラ２０（図１を参照）によって制御される。
１０ｇはリニアギアで、スライド板１０ｂｙの底面部において当該スライド板１０ｂｙの進退方向であって、前記ギア１０ｆと噛合う位置に設けられている。
なお、固定板１０ｂｘに対するスライド板１０ｂｙの案内機構の詳細は省略するが、適宜の周知手段において設けられる。 10f is a gear which is installed at an appropriate position on the fixed plate 10bx side, and the rotation speed and the rotation direction are controlled by an OHB controller 20 (see FIG. 1) by a motor with a reduction gear (not shown).
Reference numeral 10g denotes a linear gear, which is provided on the bottom surface of the slide plate 10by in the advancing / retreating direction of the slide plate 10by and in a position where it engages with the gear 10f.
Although details of the guide mechanism of the slide plate 10by with respect to the fixed plate 10bx are omitted, they are provided by appropriate known means.

上記構成において、図１の全体構成における一つのベイ１に敷設された工程内環状軌道３に沿って走行するＯＨＴ台車７が、把持しているＦＯＵＰ９ｂに収納され、基板の処理を予定している処理ステーション５に到達し、図２に示すように、既に処理ステーション５のＦＯＵＰ用搬入・搬出ポート５ａに当該処理ステーション５において処理を完了した基板を収納したＦＯＵＰ９ａが載置されている場合について、前記ＦＯＵＰ９ａとＦＯＵＰ９ｂとの配置交換動作を図４をも参照して説明する。 In the above configuration, the OHT carriage 7 that travels along the in-process annular track 3 laid in one bay 1 in the overall configuration of FIG. 1 is accommodated in the gripping FOUP 9b, and the substrate processing is scheduled. When the processing station 5 is reached and the FOUP 9a containing the substrate processed in the processing station 5 is already placed in the FOUP loading / unloading port 5a of the processing station 5, as shown in FIG. The arrangement exchange operation between the FOUP 9a and the FOUP 9b will be described with reference to FIG.

動作１：ＯＨＢ１０の棚部材１０ｂのスライド板１０ｂｙが図２点線の位置まで延びる。
動作２：ＯＨＴ台車７の昇降ベルト７ｄが繰出され、ＦＯＵＰ９ｂが前記棚部材１０ｂ上のスライド板１０ｂｙに載置される。
動作３：図３に示されるキネマティックピン１０ｄがＦＯＵＰ９ｂの底面と適正に係合することがセンサ１０ｅによって確認され、ＯＨＴ台車７のフィンガ機構７ｆがＦＯＵＰ９ｂのフランジとの係合を解き、フィンガ機構７ｆが若干の上昇するように昇降ベルト７ｄを巻取る。
動作４：前記スライド板１０ｂｙが図３に示されるギア１０ｆの駆動によって前記スライド板１０ｂｙを固定板１０ｂｘと重なる方向にスライドさせる。このときのＯＨＢ１０は図４（Ａ）の状態となる。 Operation 1: The slide plate 10by of the shelf member 10b of the OHB 10 extends to the position of the dotted line in FIG.
Operation 2: The elevating belt 7d of the OHT carriage 7 is fed out, and the FOUP 9b is placed on the slide plate 10by on the shelf member 10b.
Operation 3: The sensor 10e confirms that the kinematic pin 10d shown in FIG. 3 is properly engaged with the bottom surface of the FOUP 9b, the finger mechanism 7f of the OHT carriage 7 disengages from the flange of the FOUP 9b, and the finger mechanism The elevating belt 7d is wound so that 7f slightly rises.
Action 4: The slide plate 10by slides the slide plate 10by in a direction overlapping the fixed plate 10bx by driving the gear 10f shown in FIG. The OHB 10 at this time is in the state shown in FIG.

動作５：ＯＨＴ台車７の昇降ベルト７ｄが繰出され、フィンガ機構７ｆが降下し、処理ステーション５のＦＯＵＰ用搬入・搬出ポート５ａ上に載置されているＦＯＵＰ９ａのフランジ部に至り、フィンガ機構７ｆによってＦＯＵＰ９ａが把持される。
動作６：昇降ベルトが巻取られＦＯＵＰ９ａは、少なくともＦＯＵＰ９ａの底面位置が棚部材１０ｃのスライド板１０ｃｙの平面位置より上位になるまで上昇する。
動作７：この状態でＯＨＢ１０の棚部材１０ｃのスライド板１０ｃｙが点線の位置まで延びる。 Action 5: The elevating belt 7d of the OHT carriage 7 is fed out, the finger mechanism 7f is lowered, reaches the flange portion of the FOUP 9a placed on the FOUP loading / unloading port 5a of the processing station 5, and is moved by the finger mechanism 7f. The FOUP 9a is gripped.
Action 6: The lifting belt is wound and the FOUP 9a is raised until at least the bottom surface position of the FOUP 9a is higher than the planar position of the slide plate 10cy of the shelf member 10c.
Operation 7: In this state, the slide plate 10cy of the shelf member 10c of the OHB 10 extends to the dotted line position.

動作８：図３に示されるキネマティックピン１０ｄがＦＯＵＰ９ａの底面と適正に係合することがセンサ１０ｅによって確認されると、ＯＨＴ台車７のフィンガ機構７ｆがＦＯＵＰ９ａのフランジとの係合を解き、フィンガ機構７ｆが若干の上昇するように昇降ベルト７ｄを巻取る。
動作９：前記スライド板１０ｂｙが図３に示されるギア１０ｆの駆動によって前記スライド板１０ｂｙを固定板１０ａｘと重なる方向にスライドさせる。このときの懸垂型棚装置１０は図４（Ｂ）の状態となる。 Action 8: When the sensor 10e confirms that the kinematic pin 10d shown in FIG. 3 is properly engaged with the bottom surface of the FOUP 9a, the finger mechanism 7f of the OHT carriage 7 disengages from the flange of the FOUP 9a. The elevating belt 7d is wound so that the finger mechanism 7f is slightly raised.
Action 9: The slide plate 10by slides the slide plate 10by in the direction overlapping the fixed plate 10ax by driving the gear 10f shown in FIG. At this time, the suspended shelf apparatus 10 is in the state shown in FIG.

動作１０：昇降ベルト７ｄを巻取り、フィンガ機構７ｆを最上位まで上昇させる。
動作１１：ＯＨＢ１０の棚部材１０ｂのスライド板１０ｂｙがＦＯＵＰ９ｂを載置した状態で点線の位置まで延ばす。
動作１２：ＯＨＴ搬送台車７の昇降ベルト７ｄが繰出され、フィンガ機構７ｆが降下し、スライド板１０ｂｙ上載置されているＦＯＵＰ９ａのフランジ部に至り、フィンガ機構７ｆによってＦＯＵＰ９ａが把持される。 Action 10: Winding up / down belt 7d and raising finger mechanism 7f to the highest position.
Operation 11: The slide plate 10by of the shelf member 10b of the OHB 10 extends to the position of the dotted line with the FOUP 9b placed thereon.
Operation 12: The elevating belt 7d of the OHT transport carriage 7 is extended, the finger mechanism 7f is lowered, reaches the flange portion of the FOUP 9a placed on the slide plate 10by, and the FOUP 9a is gripped by the finger mechanism 7f.

動作１３：昇降ベルト７ｄを若干巻取り、ＦＯＵＰ９ａを上方に向けて寸動させ、ＦＯＵＰ９ａとキネマティックピン１０ｄとの係合を解く。
動作１４：前記スライド板１０ｂｙが図３に示されるギア１０ｆの駆動によって前記スライド板１０ｂｙを固定板１０ｂｘと重なる方向にスライドさせる。
動作１５：昇降ベルト７ｄを繰出し、ＦＯＵＰ９ａを降下し、当該ＦＯＵＰ９ａを処理ステーション５のＦＯＵＰ用搬入・搬出ポート５ａ上に載置する。このときのＯＨＢ１０は図４（Ｃ）の状態となる。 Action 13: The lifting belt 7d is slightly wound, the FOUP 9a is moved upward and the engagement between the FOUP 9a and the kinematic pin 10d is released.
Action 14: The slide plate 10by slides the slide plate 10by in the direction overlapping the fixed plate 10bx by driving the gear 10f shown in FIG.
Action 15: The lifting belt 7d is fed, the FOUP 9a is lowered, and the FOUP 9a is placed on the FOUP loading / unloading port 5a of the processing station 5. At this time, the OHB 10 is in the state shown in FIG.

動作１６：ＦＯＵＰ９ａのフランジと、フィンガ機構７ｆとの係合を解き、ＯＨＴ搬送台車７を少なくともフィンガ機構７ａの最下部の位置が、スライド板１０ｃｙ上に載置されているＦＯＵＰ９ａのフランジ最上部位置より上位となるまで上昇させる。
動作１７：ＯＨＢ１０の棚部材１０ｃのスライド板１０ｃｙがＦＯＵＰ９ａを載置した状態で点線の位置まで延ばす。
動作１８：フィンガ機構７ｆが降下し、スライド板１０ｃｙ上に載置されているＦＯＵＰ９ａのフランジ部を把持し再度上昇する。
動作１９：前記スライド板１０ｃｙが図３に示されるギア１０ｆの駆動によって前記スライド板１０ｃｙを固定板１０ｃｘと重なる方向にスライドさせる。このときのＯＨＢ１０は図４（Ｄ）の状態となる。 Operation 16: The flange of the FOUP 9a is disengaged from the finger mechanism 7f, and at least the lowest position of the finger mechanism 7a is positioned at the lowest position of the flange mechanism of the FOUP 9a where the OHT transport carriage 7 is placed on the slide plate 10cy. Raise until higher.
Operation 17: The slide plate 10cy of the shelf member 10c of the OHB 10 extends to the position of the dotted line in a state where the FOUP 9a is placed.
Action 18: The finger mechanism 7f descends, grips the flange portion of the FOUP 9a placed on the slide plate 10cy, and rises again.
Action 19: The slide plate 10cy slides the slide plate 10cy so as to overlap the fixed plate 10cx by driving the gear 10f shown in FIG. At this time, the OHB 10 is in the state shown in FIG.

前記各動作１〜１９は、ＯＨＢコントローラ２０からの信号にて順次連続的に行われるため処理ステーション５のＦＯＵＰ用搬入・搬出ポート５ａ上に載置され、内部に当該処理ステーション５にて所定の処理を完了した基板を収納したＦＯＵＰ９ａと、これから処理ステーション５にて処理を受けようとしている基板を収納したＦＯＵＰ９ｂとの交換は効率よく迅速になされる。 The operations 1 to 19 are sequentially performed in response to a signal from the OHB controller 20 and are therefore placed on the FOUP loading / unloading port 5a of the processing station 5, and the processing station 5 internally stores a predetermined value. The replacement of the FOUP 9a storing the substrate that has been processed with the FOUP 9b storing the substrate that is about to be processed at the processing station 5 is performed quickly and efficiently.

以上、本発明の好ましい実施形態について述べたが、本発明はこれらに限定されず様々な実施形態があり得る、例えば、図２においてＯＨＢ１０は工程内環状軌道２と直角方向で天井から懸垂する柱状体１０ａにより天井から懸垂される構成になっているが、ＯＨＢ１０を工程内環状軌道２と平行で且つ柱状体１０ａの上方支持部を工程内環状軌道とし、ＯＨＢ１０を工程内環状軌道２の直下に設ける構成としても何ら問題はない。クリーンルームのスペース活用面からは場合によりこの工程内環状軌道直下に懸垂棚装置を設ける方が有利な場合もある。
また、ＯＨＢコントローラ２０は図１では複数のＯＨＢを１つのＯＨＢコントローラで制御しているが、個々のＯＨＢに個別に配置し、各ＯＨＢ毎に独立して制御を行っても良い。 The preferred embodiments of the present invention have been described above. However, the present invention is not limited to these embodiments, and various embodiments can be provided. For example, in FIG. 2, the OHB 10 is a column that is suspended from the ceiling in a direction perpendicular to the in-process annular track 2. The body 10a is suspended from the ceiling. The OHB 10 is parallel to the in-process annular track 2, the upper support portion of the columnar body 10a is an in-process annular track, and the OHB 10 is directly below the in-process annular track 2. There is no problem even if it is provided. In some cases, it is advantageous to provide a suspension shelf device directly under the annular track in the process from the viewpoint of space utilization in the clean room.
Further, in FIG. 1, the OHB controller 20 controls a plurality of OHBs by one OHB controller. However, the OHB controller 20 may be individually arranged in each OHB and controlled independently for each OHB.

本発明の適用システムを示す平面図である。It is a top view which shows the application system of this invention. 本発明を実施するための要部構成図である。It is a principal part block diagram for implementing this invention. 本発明に係る懸垂式棚の棚板の概念を示す構成図である。It is a block diagram which shows the concept of the shelf board of the suspension type shelf which concerns on this invention. 本発明の方法を説明するための懸垂式棚におけるＦＯＵＰの載置状況を示す模式図である。It is a schematic diagram which shows the mounting condition of FOUP in the suspension-type shelf for demonstrating the method of this invention.

符号の説明Explanation of symbols

２・・・・・・・・・・・・・・・・・・工程内環状軌道
５・・・・・・・・・・・・・・・・・・処理ステーション
５ａ・・・・・・・・・・・・・・・・・ＦＯＵＰ用搬入・搬出ポート
７・・・・・・・・・・・・・・・・・・ＯＨＴ台車
７ｄ・・・・・・・・・・・・・・・・・昇降ベルト
７ｆ・・・・・・・・・・・・・・・・・フィンガ機構
９ａ、９ｂ・・・・・・・・・・・・・・ＦＯＵＰ
１０・・・・・・・・・・・・・・・・・懸垂式棚装置
１０ｂ、１０ｃ・・・・・・・・・・・・棚部材
１０ｂｘ、１０ｃｘ・・・・・・・・・・固定板
１０ｂｙ、１０ｃｙ・・・・・・・・・・スライド板
２０・・・・・・・・・・・・・・・・・ＯＨＢコントローラ



2 ... In-process annular track 5 ... Processing station 5a ... ············· FOUP loading / unloading port 7 ····················· OHT cart 7d .... Lifting belt 7f ..... Finger mechanism 9a, 9b ..... FOUP
10 ... Suspended shelf device 10b, 10c ... Shelf member 10bx, 10cx ... .. Fixed plate 10by, 10cy ... Slide plate 20 ... OHB controller



Claims (4)

次の第一〜第四工程からなる懸垂式昇降搬送台車における物品の授受方法。
第一工程：懸垂式昇降搬送台車の把持部に把持されている所定のステーションへの搬入用物品を降下させ、上下方向に並ぶ懸垂式一時保管棚の一方の棚に載置する
第二工程：懸垂式昇降搬送台車の把持部において、前記所定のステーションの物品搬入・搬出ポートに載置されている搬出用物品を把持、上昇させ、前記懸垂式一時保管棚の他方に載置する
第三工程：前記懸垂式一時保管棚の一方の棚に載置されている搬入用物品を、懸垂式昇降搬送台車の把持部にて把持、降下させ、前記所定のステーションの物品搬入・搬出ポートに載置する
第四工程：前記懸垂式一時保管棚の他方の棚に載置されている搬出用物品を懸垂式昇降搬送台車の把持部にて把持、上昇させる。 A method for delivering an article in a suspended lift carriage comprising the following first to fourth steps.
1st process: The 2nd process of dropping the goods for carrying in to the predetermined | prescribed station currently hold | gripped by the holding part of a suspension type raising / lowering conveyance trolley, and placing in one shelf of the suspension type temporary storage shelf arranged in an up-down direction: A third step of gripping and lifting an article to be carried placed on the article loading / unloading port of the predetermined station and placing it on the other side of the suspension-type temporary storage shelf in the gripping part of the suspension type lifting / lowering carriage : The carrying-in article placed on one of the suspension-type temporary storage shelves is held and lowered by the holding part of the suspension-type lifting / lowering carriage, and placed on the article loading / unloading port of the predetermined station. The fourth step is to hold and lift the carry-out article placed on the other shelf of the suspension-type temporary storage shelf by the grip portion of the suspension-type lifting / lowering carriage. 物品が半導体基板を挿脱自在に収納するＦＯＵＰであり、ステーションが懸垂式昇降搬送台車の環状軌道に沿う適所に配置され、前記ＦＯＵＰ内に収納されている半導体基板の表面処理設備である請求項１に記載の懸垂式昇降搬送台車における物品の授受方法。 An article is a FOUP that removably accommodates a semiconductor substrate, and a station is a surface treatment facility for a semiconductor substrate that is disposed in a proper position along an annular track of a suspended lift carriage and accommodated in the FOUP. 2. A method for transferring an article in the suspended lift carriage according to 1. 懸垂式昇降搬送台車の走行路に沿う所定の個所に設置されるステーションの物品搬入・搬出ポートに載置される搬出用物品と、この搬出用物品に対向する上方に位置し、懸垂式昇降搬送台車の物品把持部に把持されている搬入用物品との交換を行うための一対の一時保管棚を有し、
該一対の一時保管棚は、上下方向に配置され、各保管棚にはスライド板が設けられ、一方の保管棚のスライド板は搬入用物品の保管・取出しを行う場合においてのみ、他方の保管棚のスライド板は搬出用物品を保管、取出しを行う場合においてのみ、懸垂式昇降搬送台車の物品把持部に対し物品の授受を行うために進退し、それ以外の場合には懸垂式昇降搬送台車の昇降動作を許容するように駆動制御されることを特徴とする懸垂式昇降搬送台車における物品の授受装置。 An article to be carried placed on an article loading / unloading port of a station installed at a predetermined location along the traveling path of the suspension type lifting and lowering carriage, and a lifting type lifting and lowering conveyance located above the article for delivery. Having a pair of temporary storage shelves for exchanging with the carry-in article gripped by the article gripping part of the carriage,
The pair of temporary storage shelves are arranged in the vertical direction, each storage shelf is provided with a slide plate, and the slide plate of one storage shelf is the other storage shelf only when storing / removing articles to be carried in. The slide plate moves forward and backward in order to send and receive articles to and from the article gripping part of the suspended lift carriage only when storing and taking out the articles to be carried out. An article transfer device in a suspended lift carriage that is controlled so as to allow the lift operation. 物品が半導体基板を挿脱自在に収納するＦＯＵＰであり、ステーションが懸垂式昇降搬送台車の環状軌道に沿う適所に配置され、前記ＦＯＵＰ内に収納されている半導体基板の処理設備である請求項３に記載の懸垂式昇降搬送台車における物品の授受装置。



The article is a FOUP that removably accommodates a semiconductor substrate, and the station is a processing facility for a semiconductor substrate that is disposed at an appropriate position along an annular track of a suspended lift carriage and accommodated in the FOUP. The article transfer device in the suspended lift carriage as described in 1.



JP2005285718A 2005-09-30 2005-09-30 Article giving/receiving method and apparatus in suspended ascending/descending carrier truck Pending JP2007096140A (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2005285718A JP2007096140A (en) 2005-09-30 2005-09-30 Article giving/receiving method and apparatus in suspended ascending/descending carrier truck
KR1020087007731A KR20080072817A (en) 2005-09-30 2006-09-29 Method and apparatus for transferring and receiving article by overhead hoist transport carrier
CNA2006800364586A CN101278384A (en) 2005-09-30 2006-09-29 Method and apparatus for transferring and receiving article on overhead hoist transport carrier
TW095136217A TW200737392A (en) 2005-09-30 2006-09-29 Method and apparatus for transferring and receiving article by overhead hoist transport carrier
PCT/JP2006/319512 WO2007037397A1 (en) 2005-09-30 2006-09-29 Method and apparatus for transferring and receiving article by overhead hoist transport carrier

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005285718A JP2007096140A (en) 2005-09-30 2005-09-30 Article giving/receiving method and apparatus in suspended ascending/descending carrier truck

Publications (1)

Publication Number Publication Date
JP2007096140A true JP2007096140A (en) 2007-04-12

Family

ID=37899817

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005285718A Pending JP2007096140A (en) 2005-09-30 2005-09-30 Article giving/receiving method and apparatus in suspended ascending/descending carrier truck

Country Status (5)

Country Link
JP (1) JP2007096140A (en)
KR (1) KR20080072817A (en)
CN (1) CN101278384A (en)
TW (1) TW200737392A (en)
WO (1) WO2007037397A1 (en)

Cited By (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009059775A (en) * 2007-08-30 2009-03-19 Tokyo Electron Ltd Container changing system and container changing method
JP2009154983A (en) * 2007-12-25 2009-07-16 Asyst Technologies Japan Inc Cabinet, and stocking/delivering method
JP2009173396A (en) * 2008-01-24 2009-08-06 Asyst Technologies Japan Inc Storage, and depositing and delivering method
JP2010016387A (en) * 2008-07-07 2010-01-21 Semes Co Ltd Substrate conveyance equipment and method for conveying substrate
JP2010050458A (en) * 2008-08-20 2010-03-04 Semes Co Ltd Substrate processing apparatus and substrate transfer method
JP2010212648A (en) * 2009-02-10 2010-09-24 Muratec Automation Co Ltd Transfer apparatus
CN101920834A (en) * 2009-06-15 2010-12-22 村田机械株式会社 Automated warehouse
KR101019212B1 (en) 2008-08-21 2011-03-04 세메스 주식회사 Method and equipment for treating substrate
WO2015046062A1 (en) * 2013-09-30 2015-04-02 株式会社日立国際電気 Substrate processing device, manufacturing method for semiconductor device, and recording medium
US9073691B2 (en) 2011-08-11 2015-07-07 Daifuku Co., Ltd. Article transport facility
JP2016064904A (en) * 2014-09-25 2016-04-28 村田機械株式会社 Temporary storage device and temporary storage method
JP2016064903A (en) * 2014-09-25 2016-04-28 村田機械株式会社 Temporary storage device and temporary storage method
WO2017037785A1 (en) * 2015-08-28 2017-03-09 株式会社日立国際電気 Substrate processing apparatus and semiconductor device manufacturing method
WO2017043234A1 (en) * 2015-09-09 2017-03-16 村田機械株式会社 Transport system and transport method
CN107210257A (en) * 2015-02-07 2017-09-26 科磊股份有限公司 The system and method buffered for high yield in product
JP2019106433A (en) * 2017-12-12 2019-06-27 株式会社ダイフク Transfer facility and transfer method
JP2020066499A (en) * 2018-10-23 2020-04-30 村田機械株式会社 Conveying system
JP2022126900A (en) * 2021-02-19 2022-08-31 株式会社ダイフク Transport facility

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5266680B2 (en) * 2007-07-23 2013-08-21 村田機械株式会社 Conveying device, conveying system, and extension mechanism
JP5369419B2 (en) 2007-10-18 2013-12-18 村田機械株式会社 Storage system with storage, storage set and storage
JP5347652B2 (en) * 2009-03-30 2013-11-20 株式会社Ｉｈｉ Substrate lifting / lowering transfer apparatus and substrate processing / transfer system
CN103201198B (en) * 2010-11-04 2015-03-11 村田机械株式会社 Conveying system and conveying method
JP6149805B2 (en) * 2014-06-05 2017-06-21 株式会社ダイフク Transport device
KR102207870B1 (en) * 2014-12-02 2021-01-26 세메스 주식회사 Unit for supporting a gripping part and apparatus for transferring a carrier having the unit
KR102453197B1 (en) * 2015-10-30 2022-10-12 삼성전자주식회사 Apparatus for loading substrate storage container
KR102020234B1 (en) * 2017-09-08 2019-09-11 세메스 주식회사 Raceway unit and OHT having the raceway unit
CN108001459B (en) * 2017-12-08 2023-09-08 杭州久智自动化技术有限公司 Rail car access structure
CN109110497B (en) 2018-08-31 2021-06-11 惠科股份有限公司 Conveying system and conveying method for display panel
JP7213056B2 (en) * 2018-10-18 2023-01-26 東京エレクトロン株式会社 SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
JP7095750B2 (en) * 2018-11-06 2022-07-05 村田機械株式会社 Ceiling hanging shelves
DE102019133074A1 (en) * 2019-12-04 2021-06-10 L.O.A. Srl Storage system
US11912512B2 (en) * 2021-05-13 2024-02-27 HighRes Biosolutions, Inc. Overhead labware transport system
CN114906571B (en) * 2022-05-25 2024-03-19 广汽本田汽车有限公司 Engine conveying monitoring method and conveying line

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10250836A (en) * 1997-03-13 1998-09-22 Murata Mach Ltd Overhead traveling vehicle system
JP2001520803A (en) * 1997-04-14 2001-10-30 アシスト テクノロジーズ インコーポレイテッド In-bay buffer delivery stocker system of integrated production type
JP2005150129A (en) * 2003-11-11 2005-06-09 Asyst Shinko Inc Transfer apparatus and transfer system
JP2006054389A (en) * 2004-08-16 2006-02-23 Murata Mach Ltd Carrier system

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004307125A (en) * 2003-04-04 2004-11-04 Asyst Shinko Inc Storage shelf device

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10250836A (en) * 1997-03-13 1998-09-22 Murata Mach Ltd Overhead traveling vehicle system
JP2001520803A (en) * 1997-04-14 2001-10-30 アシスト テクノロジーズ インコーポレイテッド In-bay buffer delivery stocker system of integrated production type
JP2005150129A (en) * 2003-11-11 2005-06-09 Asyst Shinko Inc Transfer apparatus and transfer system
JP2006054389A (en) * 2004-08-16 2006-02-23 Murata Mach Ltd Carrier system

Cited By (31)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009059775A (en) * 2007-08-30 2009-03-19 Tokyo Electron Ltd Container changing system and container changing method
JP2009154983A (en) * 2007-12-25 2009-07-16 Asyst Technologies Japan Inc Cabinet, and stocking/delivering method
JP2009173396A (en) * 2008-01-24 2009-08-06 Asyst Technologies Japan Inc Storage, and depositing and delivering method
JP2010016387A (en) * 2008-07-07 2010-01-21 Semes Co Ltd Substrate conveyance equipment and method for conveying substrate
KR101015225B1 (en) 2008-07-07 2011-02-18 세메스 주식회사 Substrate processing apparatus and method for transferring substrate of the same
JP2010050458A (en) * 2008-08-20 2010-03-04 Semes Co Ltd Substrate processing apparatus and substrate transfer method
US8702365B2 (en) 2008-08-20 2014-04-22 Semes Co., Ltd. Substrate processing apparatus and method for transferring substrate for the apparatus
KR101019212B1 (en) 2008-08-21 2011-03-04 세메스 주식회사 Method and equipment for treating substrate
JP4720932B2 (en) * 2009-02-10 2011-07-13 ムラテックオートメーション株式会社 Transfer equipment
JP2010212648A (en) * 2009-02-10 2010-09-24 Muratec Automation Co Ltd Transfer apparatus
KR101463473B1 (en) 2009-02-10 2014-11-20 무라다기카이가부시끼가이샤 Transfer device
CN101920834A (en) * 2009-06-15 2010-12-22 村田机械株式会社 Automated warehouse
US8974167B2 (en) 2009-06-15 2015-03-10 Murata Machinery, Ltd. Automatic storage system
US9073691B2 (en) 2011-08-11 2015-07-07 Daifuku Co., Ltd. Article transport facility
WO2015046062A1 (en) * 2013-09-30 2015-04-02 株式会社日立国際電気 Substrate processing device, manufacturing method for semiconductor device, and recording medium
US9966289B2 (en) 2013-09-30 2018-05-08 Hitachi Kokusai Electric Inc. Substrate processing apparatus, method for manufacturing semiconductor device, and non-transitory computer-readable recording medium
TWI644850B (en) * 2014-09-25 2018-12-21 日商村田機械股份有限公司 Temporary storage device, handling system, and temporary storage method
JP2016064904A (en) * 2014-09-25 2016-04-28 村田機械株式会社 Temporary storage device and temporary storage method
JP2016064903A (en) * 2014-09-25 2016-04-28 村田機械株式会社 Temporary storage device and temporary storage method
CN107210257B (en) * 2015-02-07 2021-08-03 科磊股份有限公司 System and method for high throughput work-in-process buffering
CN107210257A (en) * 2015-02-07 2017-09-26 科磊股份有限公司 The system and method buffered for high yield in product
JP2018504786A (en) * 2015-02-07 2018-02-15 ケーエルエー−テンカー コーポレイション System and method for high-throughput work-in-process buffer
US10177020B2 (en) * 2015-02-07 2019-01-08 Kla-Tencor Corporation System and method for high throughput work-in-process buffer
US10529607B2 (en) 2015-08-28 2020-01-07 Kokusai Electric Corporation Substrate processing apparatus and method of manufacturing semiconductor device
JPWO2017037785A1 (en) * 2015-08-28 2018-04-12 株式会社日立国際電気 Substrate processing apparatus and semiconductor device manufacturing method
WO2017037785A1 (en) * 2015-08-28 2017-03-09 株式会社日立国際電気 Substrate processing apparatus and semiconductor device manufacturing method
WO2017043234A1 (en) * 2015-09-09 2017-03-16 村田機械株式会社 Transport system and transport method
JP2019106433A (en) * 2017-12-12 2019-06-27 株式会社ダイフク Transfer facility and transfer method
JP2020066499A (en) * 2018-10-23 2020-04-30 村田機械株式会社 Conveying system
JP2022126900A (en) * 2021-02-19 2022-08-31 株式会社ダイフク Transport facility
JP7327425B2 (en) 2021-02-19 2023-08-16 株式会社ダイフク Conveyor equipment

Also Published As

Publication number Publication date
CN101278384A (en) 2008-10-01
TW200737392A (en) 2007-10-01
WO2007037397A1 (en) 2007-04-05
KR20080072817A (en) 2008-08-07

Similar Documents

Publication Publication Date Title
JP2007096140A (en) Article giving/receiving method and apparatus in suspended ascending/descending carrier truck
JP4636379B2 (en) Method and apparatus for receiving and receiving articles in a suspended lift carriage
TW583129B (en) Method and device for transporting substrate
JP5145686B2 (en) Transport system
EP3476772B1 (en) Conveyance system
JP4470576B2 (en) Transport system
JP7211439B2 (en) Conveyor system
TW201935600A (en) Material pick-and-place device and method thereof
JP2008019017A (en) Article storage device
EP1845552B1 (en) Transportation system and transportation method
JP2005243729A (en) Conveyer system
WO2013150841A1 (en) Conveyance system
JP4127138B2 (en) Transport system
JP2010126301A (en) Conveying system and control method for the same
JP4265312B2 (en) Suspension type transport cart, control method therefor, and transport system
KR20210106549A (en) storage system
JP2008024417A (en) Temporary storage shelf device
JP2006290542A (en) Conveying system and conveyance control method
JP2005136294A (en) Transfer apparatus
JP2000124284A (en) Transfer apparatus
JP2011051748A (en) Loader-unloader and loading-unloading method between carrier and device
JP2009035414A (en) Inter-process conveying system between different stories
JP2024034913A (en) Goods conveyance equipment
KR20230096788A (en) Stocker and article transport facility
JP2006188305A (en) Tray conveying system

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20080411

A711 Notification of change in applicant

Free format text: JAPANESE INTERMEDIATE CODE: A711

Effective date: 20091023

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20100114

RD07 Notification of extinguishment of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7427

Effective date: 20100215

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20110114

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20110701