JP2000124284A - Transfer apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a transfer apparatus which includes inter-step and in-step transfer devices of a ceiling-running type, and which can realize smooth and safe transfer and the transfer of objects and can reduce the installation cost. SOLUTION: An inter-step transfer device 1 for running a transfer carriage 12 along a rail 11 for inter-step ceiling run, as well as an in-step transfer device for running a transfer carriage having a lift 25 for vertically moving an object W mounted thereon along a rail for in-step ceiling run connecting a plurality of bays are arranged intersected at a step made in the both rails, and a stocker is located at a position near the intersection to enable common use by the inter-step and in-step apparatuses.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

TECHNICAL FIELD The present invention relates to a transfer device,
In particular, the present invention relates to a transport device in which an inter-process transport device and an in-process transport device are of a ceiling traveling type so that transport and delivery of a transported product can be performed smoothly and safely.

[0002]

2. Description of the Related Art Conventionally, in a semiconductor manufacturing plant or the like, a transfer apparatus which moves a transfer carriage along a rail for traveling in order to transfer a transfer object such as a cassette containing wafers in accordance with a manufacturing process is widely used. ing.

[0003] In order to efficiently convey a conveyed product, a device that uses a combination of an inter-process conveyance device and an in-process conveyance device has been put into practical use.
In the case of this transfer device, usually, as shown in FIGS.
The inter-process transfer device 1 is connected to the transfer trolley 12 by the overhead traveling rail 1.
1, while the in-process transfer device 2 'is configured as a floor traveling type in which the transport carriage 22' travels along the floor traveling rail 21 '. Was like that.

A stocker 3 is installed in each bay B (referred to as a unit block necessary for performing one unit of work process). Transfer machine 5 for transferring the transferred object W between
And a transfer machine 6 for transferring the article W between the transport carriage 22 ′ of the in-process transport apparatus 2 ′ and the article W in the stocker 3.
And a stacker crane 7 provided with a transfer machine 8 for performing transfer of the transfer between the inter-process transfer device 1 and the in-process transfer device 2, and manufacturing of manufacturing equipment between the processes or in the process. It had a buffer function to absorb differences in capabilities.

[0005]

By the way, the above-mentioned conventional transfer device is a floor-traveling type in which the in-process transfer device 2 'is made to move a transfer carriage 22' along a floor-traveling rail 21 '. Because of the configuration, the transport carriage 22 ′
Since the vehicle travels in the work space in the bay B, there is a problem in terms of safety measures. In addition, since the stocker 3 needs to be installed in each bay B, there is a problem that the equipment cost increases.

The present invention has been made in consideration of the above-mentioned problems of the conventional transfer apparatus, and the inter-step transfer apparatus and the in-step transfer apparatus are of a ceiling traveling type, so that the transfer and transfer of the transferred object can be performed smoothly and safely. It is another object of the present invention to provide a transfer device capable of reducing equipment cost.

[0007]

In order to attain the above object, the present invention provides a transport apparatus for transporting a transport vehicle along a rail for overhead travel between processes, and a transported object mounted thereon. And a transport device in which a lifter for raising and lowering the elevator is arranged to travel along an in-process ceiling travel rail connecting a plurality of bays, and a step is provided on both ceiling travel rails so as to intersect. And a stocker is arranged near the intersection, and the stocker is shared by the inter-process transfer device and the in-process transfer device.

In this transfer apparatus, both the inter-step transfer apparatus and the in-step transfer apparatus are configured to be of a ceiling traveling type, and a lifter for raising and lowering a loaded article is provided on a transfer cart of the in-step transfer apparatus. Therefore, the transport vehicle does not travel in the work space in the bay. This also gives
The factory building can be effectively used, and the stocker can be shared by the inter-process transfer device and the in-process transfer device, particularly by a plurality of bays.

In this case, an in-process ceiling traveling rail can be provided so as to connect two opposite bays with a passage therebetween.

[0010] Thus, the transport trolley of the in-process transfer device can be made to travel along the in-process ceiling travel rail by utilizing the space above each bay, and the factory building can be more effectively used.

[0011]

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a perspective view of a transfer device according to an embodiment of the present invention. 1 to 3 show an embodiment of the transport device of the present invention. This transfer device is used in combination with an inter-process transfer device 1 and an in-process transfer device 2 to transfer a transfer object W such as a cassette containing wafers in a semiconductor manufacturing factory or the like.

The inter-process transfer device 1 includes a rail 11 for inter-process ceiling running arranged on a ceiling in a closed loop so as to connect manufacturing facilities arranged according to a manufacturing process, and a rail 11 for inter-process ceiling running. 1 to be suspended along
It is composed of one or a plurality of transport vehicles 12. The transport vehicle 12 receives power from a power supply line 13 disposed along the rail 11 for inter-process ceiling travel in a non-contact manner.
In addition to driving the motor 14 disposed in the transport carriage 12, the transported article 12 is loaded with the article W to be transported.

The inter-process overhead traveling rail 11 of the inter-process transporting apparatus 1 intersects with a step, more specifically, intersects below the inter-process overhead traveling rail 11,
The in-process ceiling traveling rail 21 of the in-process transfer device 2 is suspended from the ceiling. The in-process conveying device 2 is provided with an in-process ceiling traveling rail 21 so as to connect two bays B facing each other across a passage P in a closed loop shape, and is suspended along the in-process ceiling traveling rail 21. And one or a plurality of transport carriages 22 that are driven and run. The transfer carriage 22 is provided with the in-process ceiling traveling rail 2.
1 and is supplied with power in a non-contact manner from a power supply line 23 arranged along 1 and driven by a motor 24 arranged on the transport vehicle 22 to travel, and the transported object W is loaded and transported in the transport vehicle 22. To do. By the way, the transport carriage 22 is provided with a lifter 25 that raises and lowers the loaded transported article W, and holds the transported article W at the lower end of the lifter 25 from above, and holds the transported article W as necessary. The chuck mechanism 26 capable of turning in the state of being set is provided. In addition, the transport carriage 22 is provided with a shutter 27 that opens and closes to protect the transported object W mounted on the transport carriage 22 from dust.

An inter-process overhead traveling rail 11 of the inter-process transport device 1 and an in-process overhead traveling rail 2 of the in-process transport device 2
The stocker 3 is arranged at a position near the intersection of No. 1. In the stocker 3, a plurality of vertically stacked and horizontally arranged plurality of rows of article storage shelves are provided so that a plurality of articles W can be placed and stored, and the transport cart 11 of the inter-process transport apparatus 1 is provided. The transfer machine 5 is configured to transfer the transfer object W between the transfer machine 5 and the transfer machine 5 capable of turning while holding the transfer object W, and the transfer apparatus 5 disposed on both sides of the transfer machine 5 is mounted. Between the turntables 4 and 4 that can be turned with the transfer carriage 22 and the transfer carriage 22 of the in-process transfer device 2 in a state where the lifter 25 is contracted.
And a transfer machine 6 capable of turning while holding the conveyed object W, and transferring the conveyed object W in the stocker 3 and turning while holding the conveyed object W. And a stacker crane 7 having a transfer machine 8 that can be used.

Next, the operation of the transfer device will be described. Based on instructions from a computer (not shown),
The transport trolley 12 of the inter-process transport device 1 receives the transported object W at a transported object W supply station (not shown), travels on the inter-process ceiling travel rail 11, and corresponds to the designated bay B. It stops at the position of the stocker 3.

When the transport carriage 12 stops at the position of the stocker 3, the transport object W mounted on the transport carriage 12 is held by extending the arm of the transfer machine 5 and slightly lifting it, and then contracts the arm. Then, it is taken out of the carrier 12, turned 90 degrees to the right or left, and placed on the turntable 4 disposed on the right or left of the transfer machine 5. Then, the turntable 4 is turned by 90 degrees and stopped. In this state,
The transported object W placed on the turntable 4 is held by extending the arm of the transfer machine 8 of the stacker crane 7 and slightly lifting it up, and then contracting the arm to take it out of the turntable 4 and necessary. In response to this, the stacker crane 7 is moved, and the transfer machine 8 is lowered and turned 180 degrees, so that the transported goods W are placed and stored on the transported goods storage shelf of the stocker 3.

On the other hand, if necessary, the transport cart 12 of the inter-process transport apparatus 1 stopped at the position of the stocker 3 corresponding to the designated bay B is placed on the other turntable 4. The transported object W is held while the arm of the transfer machine 5 is extended and slightly lifted, then the arm is contracted and taken out from the turntable 4 and turned 90 degrees to the right or left to rotate the transport vehicle 12. To be mounted on. Then, the transport vehicle 12 travels on the inter-process ceiling traveling rail 11, stops at the position of the stocker 3 corresponding to the designated bay B, and performs the same transfer operation thereafter.

On the other hand, the transfer carriage 22 of the in-process transfer device 2
Similarly, based on an instruction from a computer (not shown), in order to supply the transported product W to the manufacturing equipment in the bay B, the stocker 3 receives the transported product W, and the ceiling traveling rail 21 in the process. And stops at the position of the manufacturing facility in the designated bay B. In this case, the transport carriage 22 receiving the supply of the transported object W in the stocker 3
Stops at the position of the stocker 3 in a state where the lifter 25 is contracted, and transfers necessary articles W placed and stored on the article storage shelf of the stocker 3 by the transfer machine 8 of the stacker crane 7. The transfer object W is supplied to the transfer device 6
The arm of the lifter 25 is extended and sent out into the transport trolley 22, and is held from above by the chuck mechanism 26 of the lifter 25.
The arm is contracted and mounted on the transport carriage 22. Further, the transport trolley 22 stopped at the position of the manufacturing facility in the bay B lowers the transported article W by extending the lifter 25, and transfers the transported article W to the manufacturing facility by releasing the chuck mechanism 26. At the same time, if necessary, the transported product W on the manufacturing equipment is received, and the transported product W
Is placed and stored on the transported goods storage shelf of the stocker 3.

In this embodiment, an example is shown in which one transport object W is mounted on each of the transport vehicles 12, 22 of the inter-process transport device 1 and the in-process transport device 2.
In order to improve the transport capacity, two or two
It is also possible to configure so that more than one conveyed articles W can be loaded. In this case, the stockers 3 are provided with the corresponding number of transfer machines 5 and 9.

[0020]

According to the overhead traveling type transfer device of the present invention,
Both the inter-process transfer device and the in-process transfer device are configured as a ceiling traveling type, and a lifter that raises and lowers the loaded goods is arranged on the transfer truck of the in-process transfer device, so that the work in the bay can be performed. It is not necessary to travel in the space, and the transport and delivery of the transported product can be performed safely and smoothly. In addition, this makes it possible to effectively use the factory building and share the stocker with the inter-process transfer device and the intra-process transfer device, particularly with a plurality of bays, so that the equipment cost can be reduced. .

Further, by providing the in-process ceiling traveling rail so as to connect the two bays facing each other with the passage therebetween, the transport carriage of the in-process transport device can be used by utilizing the space above each bay. The vehicle can travel along the traveling rail, and the factory building can be used more effectively.

[Brief description of the drawings]

FIG. 1 is a plan view showing one embodiment of a transport device of the present invention.

FIG. 2 is a front view of the same.

FIG. 3 is a side view of the same.

FIG. 4 is a plan view showing a conventional transport device.

FIG. 5 is a front view of the same.

FIG. 6 is a side view of the same.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Inter-process conveyance device 11 Inter-process ceiling traveling rail 12 Conveyor truck 2 In-process conveyance device 21 In-process ceiling traveling rail 22 Conveyor truck 25 Lifter 26 Chuck mechanism 3 Stocker 4 Turntable 5 Transfer machine 6 Transfer machine 7 Stacker Crane 8 Transfer machine B Bay P Passage W Conveyance

Claims (2)

[Claims] 1. A process for connecting a plurality of bays to a plurality of bays, wherein an inter-process transfer device configured to move a transfer vehicle along an inter-process ceiling travel rail and a transfer vehicle provided with a lifter for lifting and lowering a mounted load. An in-process transfer device adapted to travel along the ceiling traveling rails, and arranged so as to intersect by providing a step on both ceiling traveling rails, and disposing a stocker at a position near the intersection, and disposing the stocker A transfer device characterized in that it is shared by an inter-process transfer device and an in-process transfer device. 2. The transfer device according to claim 1, wherein the in-process ceiling traveling rail is provided so as to connect two bays facing each other with the passage therebetween.