JP2002093676A - Remote diagnostic system and remote diagnostic method of semiconductor production system - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide remote diagnostic system and diagnostic method in which both requirements of keeping secrecy of information at the time of remote diagnosis of a facility and prevention of increase in economical loss are harmonized. SOLUTION: A diagnostic unit provided by a third party through a communication network is connected with a semiconductor production system and a diagnostic terminal in order to diagnose the semiconductor production system. In such a remote diagnostic system for semiconductor production system, the diagnostic unit comprises at least one diagnostic program performing diagnostic processing of the semiconductor production system, and a control section for starting the diagnostic program through access of a specific user granted with an access right. The terminal transmits requested data to the diagnostic unit at the time of diagnosis and receives results of diagnosis therefrom.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a remote diagnosis system and method for equipment, and more particularly to a remote diagnosis system suitable for a case where a person who manufactures the equipment and a user of the equipment are different, such as a semiconductor manufacturing apparatus. The present invention relates to a diagnostic device and a diagnostic method. Here, the facility refers to not only a production facility such as a semiconductor manufacturing apparatus, but also a facility in which various devices or components such as a large medical system are combined.

[0002]

2. Description of the Related Art Recently, a device having a remote diagnosis function using the Internet or the like has been proposed. This remote diagnostic function is for transferring various data set at a terminal station to a remote diagnostic apparatus installed at a center station of a service company, for example, as described in JP-A-10-40200. The center station starts remote diagnosis based on the data received from the terminal station, and returns new data in which a setting error of the terminal device has been corrected to the user side.

Further, the system disclosed in Japanese Patent Application Laid-Open No. 10-40200 enables operations such as initial setting, failure diagnosis, and data update of a device connected to a terminal on a computer network or a device incorporating the terminal. As a technique, it is a method of performing a failure diagnosis of a device connected to the Internet or a device incorporating the terminal, wherein the device transmits status data to the terminal, and the terminal transfers the received status data to a server on the Internet. Then, the server is configured to diagnose the device based on the received status data and transmit a diagnosis result to the terminal.

[0004] In such a remote diagnostic system, if there is no protection against access from outside, there is a possibility that the airtight secret matter of the provider of the remote diagnostic function or the user may be inadvertently leaked. Can be

In order to provide a remote diagnosis system for a communication device capable of effectively protecting a remote diagnosis, Japanese Patent Application Laid-Open No. 9-149188 discloses a remote diagnosis system having a center station and a terminal station. In addition to creating data based on the ID number set in the above, and providing a data creation means for sending the created data to the terminal station, the ID number is set in the terminal station, and the set ID number is There is disclosed an apparatus provided with an ID number setting means for sending to a center station, a data analysis means for analyzing received data, and a diagnosis control means for judging whether or not remote diagnosis is possible.

[0006] Further, there is also known a system in which a connection device is laid on a LAN line, an IP (Internet Protocol) address is assigned to each device, and a system including an information processing device and a diagnostic device is constructed on a network. ing. In this case, since the information processing device and the maintenance diagnosis device are connected in parallel to the LAN line, it is possible to access the information processing device from a device other than the maintenance diagnosis device, and the security measures for the user are incomplete. As a solution, Japanese Patent Application Laid-Open
No. 149188 discloses a remote maintenance diagnosis method.
A maintenance diagnostic device connected to the information processing device and monitoring the operation status of the system includes an autonomous (autonomous) network function such as a network connection function and a monitoring / analysis function, and connects the information processing device to a network. There is disclosed an apparatus which is performed via a maintenance diagnosis device, thereby improving security and reducing costs at the time of laying a system.

[0007]

With the sophistication and sophistication of technology, large-scale equipment such as a semiconductor manufacturing line in which various semiconductor manufacturing apparatuses are combined in accordance with a process for manufacturing a semiconductor is provided by one company. It is becoming difficult to manufacture and manage all of them. Therefore, in order to improve the diagnostic accuracy of such large equipment and to take prompt measures,
It is necessary to collect various information from a plurality of companies, such as a company involved in manufacturing the equipment, a user and a company involved in maintenance.

[0008] On the other hand, providing such information has many restrictions since it may cause leakage of corporate secrets.
However, as recently as production and management facilities have been consolidated and become larger, for example, when a semiconductor manufacturing line breaks down and production is hindered, if the cause investigation is delayed, The economic loss due to is also enormous.

Also, in order to avoid the failure of equipment such as production and management to hinder production, the possibility of equipment failure can be predicted to some extent in advance, and if measures can be taken in advance, it will be a great economic problem. Avoids any financial loss.

[0010] On the other hand, it takes time to collect and create data that is a standard for diagnosis of a semiconductor manufacturing apparatus. For example, the life of a pressure gauge (or the determination of when calibration is required) is not uniquely determined, but varies depending on the use situation and environment. Therefore, it may be difficult for a semiconductor manufacturing equipment manufacturer to provide a diagnosis program that can quickly and accurately perform equipment diagnosis from the beginning. In some cases, an improved diagnostic program can be provided.

It is an object of the present invention to provide a remote diagnostic system and a diagnostic method that balance requirements of keeping information confidential and preventing economic loss from increasing at the time of remote diagnosis of equipment.

Another object of the present invention is to provide an environment in which a diagnostic program with improved functions and quality can be provided to a user even after equipment is delivered to the user.

Another object of the present invention is to provide a remote diagnostic system and a diagnostic method capable of predicting the possibility of equipment failure to some extent in advance and taking measures early to avoid large economic losses. It is in.

[0014]

A feature of the present invention is that a user connects a semiconductor manufacturing apparatus to a diagnostic apparatus provided by a third party via a communication network, and performs a diagnosis on the semiconductor manufacturing apparatus. A remote diagnosis system for a semiconductor manufacturing apparatus, wherein the diagnosis apparatus performs at least one diagnosis program for performing a diagnosis process on the semiconductor manufacturing apparatus and an access from a terminal of a specific user who has been granted access authority. A control unit for activating a program, wherein the terminal transmits data requested by the diagnostic device to the diagnostic device at the time of diagnosis, and receives a diagnostic result from the diagnostic device.

[0015] Another feature of the present invention is a method of diagnosing equipment under the control of a first company by a second company connected to the equipment via a communication network and not under the control of the first company. In a remote diagnosis system for equipment that performs diagnosis using an apparatus, the diagnosis apparatus includes at least one diagnosis program that performs a diagnosis process on the equipment, and the diagnosis is performed by an access from a terminal of a specific user who has been granted access authority. And a control unit for starting the program.
The terminal transmits data requested by the diagnostic device to the diagnostic device at the time of diagnosis, and receives a diagnostic result from the diagnostic device.

According to the present invention, it is possible to provide a remote diagnosis system that balances requirements of keeping information confidential and preventing an increase in economical loss at the time of remote diagnosis of equipment.

Another feature of the present invention is that a semiconductor manufacturing apparatus is connected to a diagnostic apparatus provided by a third party via a communication network, and a remote control of the semiconductor manufacturing apparatus for performing a diagnosis on the semiconductor manufacturing apparatus. A diagnostic system, wherein the diagnostic apparatus includes: a plurality of diagnostic programs for performing a diagnostic process of the semiconductor manufacturing apparatus; a control unit configured to start the diagnostic program by an access of a specific user having an access right; And a guide unit for disclosing information on the program.

According to the present invention, it is possible to provide an environment in which a diagnostic program with improved functions and quality can be provided to a user even after the equipment is delivered to the user.

Another feature of the present invention is that the diagnostic program includes a periodic diagnostic program for performing a periodic diagnostic process on the semiconductor manufacturing apparatus, and an abnormal mode for performing a temporary diagnostic process when the semiconductor manufacturing apparatus has an abnormality. A diagnostic program;
Another object of the present invention is to include a failure diagnosis program for performing a diagnosis process when a failure location of the semiconductor manufacturing apparatus is known to some extent.

According to the present invention, by using a periodic diagnosis program, a remote diagnosis that can predict the possibility of equipment failure to some extent in advance and take measures early to avoid a large economic loss. Systems and diagnostic methods can be provided.

[0021]

Embodiments of the present invention will be described below in detail. FIG. 1 is a block diagram showing a configuration of a remote diagnosis system in which the present invention is applied to diagnosis of a semiconductor manufacturing apparatus. This system includes a plurality of users (company B to N
Company) accesses a diagnostic program (diagnostic apparatus) 70 provided by a third party company A from a terminal, that is, a semiconductor manufacturing apparatus control server 20 of each user, via a communication network, for example, the Internet 50, and each user himself / herself Manufacturing apparatus 10 (10 BA to 10 BN,-,-, 1
0NA to 10NN).

It should be noted that here, the company A is in charge of the semiconductor device 10
Contracts with the manufacturer of the semiconductor device 10 or the company A for maintenance of the semiconductor device 10 (maintenance contract).
A service company or its affiliates. The user who performs the diagnosis may be not only a direct user of the semiconductor manufacturing apparatus, but also a service company that contracts with this user to undertake maintenance (maintenance contract).

The user of the semiconductor device 10 performs remote diagnosis of the semiconductor manufacturing apparatus 10 partly or wholly according to a diagnosis program (diagnosis apparatus) provided by the company A, periodically and when a diagnosis is required. .

In this remote diagnosis system, the semiconductor manufacturing apparatus 10 (10BA to 10BN,-,-, 10NA) of a user (company B to company N) to be diagnosed or updated.
To 10NN) are connected to the semiconductor manufacturing equipment control server 20 (20B to 20N) of each user. The terminal for performing the diagnosis, that is, the server 20 is connected to the intranet 30 (30B to 30N) of each user and further connected to the Internet server 40 (40B).
-40N) and the firewall system 42 (42
B to 42N) to the Internet 50. The Internet 50 is connected to a company network including a firewall system 62 of Company A and an Internet server 60 (and an intranet). A diagnostic device 70 having a diagnostic program for semiconductor manufacturing equipment is connected to this in-house network.
The diagnostic device 70 is provided with a storage device, that is, a data recording device 72 that records data relating to diagnosis of the semiconductor manufacturing device of each user.

A general telephone line, a dedicated communication line, a communication line using an optical cable, or the like is used as a network connecting the semiconductor manufacturing device, each server, the Internet, and the diagnostic device. In addition, the user (B ~
It goes without saying that, for communication between N) and the device maker A, an IP address, a specific ID number ゛, etc. are assigned to each device in advance. In addition, a connection password for accessing specific confidential information during a diagnosis process or the like is appropriately given between the parties.

Each of the servers 20 and 40 is constituted by a computer, and an operation unit such as a keyboard and a mouse and a display are connected as input / output means. The server 20 has browsing software (WWW browser) for accessing the Internet 50 and connecting to the server 60 of the company A. Each of the semiconductor manufacturing apparatuses 10 (10BA to 10NN) also includes a personal computer, and an operation unit such as a keyboard and a mouse as an input / output unit and a display are connected.

Each of the computers such as the servers 20 and 40 has an interface for connecting to an external device, and communication of data and commands between the microcomputer in each computer and the external device is performed by: This is done through this interface. further,
A communication interface is provided, and modulates and transmits data and commands created by the microcomputer, and receives and demodulates data and commands transmitted via a telephone line or the like.

In FIG. 1, a terminal for performing a diagnosis is provided in the server 20, and as a communication network for each user, all the semiconductor manufacturing apparatuses 10 are connected to the diagnostic apparatus via the semiconductor manufacturing apparatus control server 20 for each user. 70, but the server 20 is omitted, and a terminal for performing a diagnosis is provided for each semiconductor manufacturing apparatus 10.
Alternatively, the configuration may be such that the terminal is operated to access the diagnostic device 70 by operating the terminal.

When the user's semiconductor manufacturing apparatus 10 is in one of the following states, for example, the diagnostic apparatus 70 diagnoses the semiconductor manufacturing apparatus 10 by the user's own judgment or when the user receives the advice of the company A. Used to do. (1) When performing periodic failure diagnosis, (2) When a phenomenon that seems to be abnormal occurs, (3) When an obvious failure occurs, diagnosis by the semiconductor manufacturing apparatus 70 based on access from each user. The result is stored in the data recording device 72 of the diagnostic device 70 of the company A, and the semiconductor manufacturing device 10
Is analyzed and analyzed as information on the change over time. This information is used for the next diagnosis. However, items belonging to the confidential information of the user, such as the specific film type of the semiconductor product, can be erased without saving in the data recording device 72 of Company A at the discretion of each user.

It should be noted that whether or not to make a diagnosis is determined by the user, and that the diagnosis apparatus 70 of Company A can be accessed from each of the semiconductor manufacturing apparatuses 10A to 10N. In this case, the diagnostic device 70 is connected to the diagnostic device 70 via the Internet 50 through the server 20 of each company. A program for this is installed in the microcomputers of the semiconductor manufacturing apparatuses 10A to 10N.

FIG. 2 is a diagram showing a configuration example of the diagnostic device 70 and the data recording device 72 in the system of FIG.
The diagnostic device 70 is configured by, for example, a personal computer, and an input / output unit 71 is connected to an operation unit such as a keyboard and a mouse, and a display.

The access management program 73B and the external connection interface 73A are interfaces for connecting the company A network 73 to the outside.
A password is required to access Company A's network. In addition, a security system is provided for each device connected to the company A company network.

It is not clear whether the words underlined below relate to an interface in company A's internal network or to a connection outside company A's outside. However, according to the flow of text, it seems that the diagnostic device has an interface for external connection. I think that the meaning is a little different because I access the outside through the company A's server.

The company A network 73 has an external connection interface 7 for connecting to an external device.
3A, an access management program 73B, and a communication interface 73C are connected. The diagnostic device 70 is connected to the network 73.

Further, the microcomputer 74 inside the diagnostic device 70 has a CPU 75 and a storage means 76. The data of each apparatus (including the normal state) is stored in the data recording apparatus of Company A, and is used for analyzing the diagnosis results, for example, comparing the data with the normal state to determine the presence or absence of an abnormality. The access management program 73B confirms the access authority using a password or the like when each user accesses the diagnostic apparatus 70, and when an authorized authorized user accesses, the user uses a predetermined program or data. To be able to

Also, by accessing the Internet 50,
It has browsing software (WWW browser) 77 for connecting to the server 40 and a guide unit 78 for displaying the latest version of the diagnostic program and information of each diagnostic software.
Each user can freely view these displays and information.

Storage means 76 (and data recording device 72)
Include various diagnostic programs 81 to 11 for remote diagnosis.
3 and a related database are stored. The control program 80 activates the diagnostic device 81 when an authorized user accesses it, and performs a diagnostic process according to the user's request. 81A is a backup device of the diagnostic device. Reference numeral 82 denotes a storage device of diagnostic software for a user in which a program usable by a user is stored, 83 denotes a control program of a device to be diagnosed, that is, a semiconductor manufacturing device, and 84 denotes a device for automatically saving a diagnosis result. Reference numeral 85 denotes a diagnostic database, and reference numeral 86 denotes a device for accessing a service section in order to obtain parts stock information and the like. Reference numeral 87 denotes an apparatus for accessing a service company for instructions on maintenance nonce.

Reference numeral 90 denotes a periodic diagnostic processing device (program) for performing periodic diagnostic processing of the semiconductor manufacturing apparatus; 91, a data analyzing device thereof; 92, a primary data storage device for diagnostic results; and 93, a database for the data analyzing device. It is.

Reference numeral 100 denotes an abnormality mode diagnosis processing device (program) for performing a diagnosis process temporarily when there is an abnormality in the semiconductor manufacturing apparatus; 101, a data analysis device; 102, a primary storage device for diagnosis results; It is a database for devices.

Reference numeral 110 denotes a diagnostic processing device (program) for performing a diagnostic process temporarily when a faulty part of the semiconductor manufacturing apparatus is known to some extent.
Reference numeral 12 denotes a primary storage device for the diagnosis results, and reference numeral 113 denotes a database for a data analysis device.

As the diagnostic processing device (program), in addition to the above three types of programs, for example, individual software is prepared for each model of the semiconductor manufacturing device, or a specific device constituting the semiconductor manufacturing device, for example, Wafer transfer devices, those that diagnose specific parts such as only vacuum processing chambers, those that target the entire production line including a large number of semiconductor manufacturing equipment, those that focus on the processing steps in the process, etc. You only have to prepare according to your needs.

A diagnostic primary data storage area for each contracted user is provided in the diagnostic device 70. Access to this part is not allowed from Company A. That is, it is assumed that only the user to be diagnosed can access the primary storage devices 92, 102, and 112 of the diagnostic results, and that the company A cannot access the primary storage devices based on a confidentiality contract or the like. Since the diagnostic device 70 is software of company A, it is possible to cancel the access prohibition condition, but this is a confidentiality contract. However, the diagnosis result regarding the normal or abnormal state of the device is automatically saved. Items belonging to the user's confidential information, such as product film types and specific recipes, can be deleted without being stored in the company A data recording device at the discretion of each user. Note that the data stored in the primary storage device is automatically deleted when the diagnostic processing is completed according to an instruction from the user. However, if the user determines that it is necessary to save the details of the diagnosis result, the diagnosis result can be saved in a storage device (not shown) attached to the user's device at the user's discretion before the end of the diagnosis.

Company B, a user, provides software and data that can be browsed and used in the diagnostic device 70, that is, the latest version of the diagnostic program displayed on the guide unit 78, information on each diagnostic software, Diagnostic software stored in the diagnostic software storage device 82, diagnosis 1 for each user
Using the data in the next data storage area, the diagnostic processing can be freely performed on the device of the company B. It should be noted that access to information in areas other than the above in the diagnostic device 70 includes confidential information of company A and other users, so that access by company B is prohibited. Therefore, although the diagnostic software can be used freely, it is not possible to change the diagnostic software or access the program of the software itself, and such actions are prohibited by contract or the like.

As described above, a record when the diagnosis is performed on the device of the company B can be stored in the database of the maintenance nonce information of the diagnosis device 70 of the company A (primary storage device dedicated to the company B). This record can also include production information belonging to company B's confidential matter. In other words, of the data used for the diagnosis by the company B, the confidential data and the data determined by the company B can be deleted from the diagnosis result information of the company A by the judgment of the company B, but the detailed result of the diagnosis is It can be stored in the storage device of the diagnostic device 70 of Company A as a database of company devices. Company B manages this information.

According to the present invention, it is possible to harmonize both requirements of keeping information confidential at the time of remote diagnosis of equipment and preventing an increase in economic loss.

When Company A is composed of both a service company and a device maker, the same data is stored and managed in both data recording devices, so that maintenance and troubleshooting can be promptly performed. In addition, the service company undertakes maintenance and diagnostic work, arranges parts and carries out other necessary items. Conversely, the device maker receives it and instructs the service company on the content of the measure.

Company A's diagnostic program 70 (80-11
3) is upgraded as necessary, and is provided to the user by means 78 for displaying the latest version of the diagnostic program, information on each diagnostic software, or information on a newly provided diagnostic program. Diagnosis is possible. This is based on the new information obtained by the company A or the service company through the diagnosis, inspection, maintenance, etc. of the semiconductor manufacturing equipment of each user, in order to return the result of improving the diagnostic program 70 and improving the function to the user. Is what you do.

For example, the diagnosis result of each user who uses the diagnosis program 70 of Company A is stored in the data recording device of Company A, and is analyzed and analyzed as information on the change over time of the device. This information is used for the next diagnosis.
For example, the life of a pressure gauge (or the determination of when calibration is required) is not uniquely determined, but varies depending on the use situation and environment. When this information is analyzed and analyzed as information of the results used under various circumstances under each user without being limited to a specific user, a highly accurate diagnosis can be made by comparing with the diagnostic information. It becomes possible.

There is also a version upgrade of the diagnostic program 76 accompanying the improvement of the semiconductor manufacturing apparatus itself and the functional enhancement.

If the diagnostic program 76 is attached to each company's equipment individually, it is difficult to provide a detailed version upgrade service to each company. Becomes possible.

When the present system is applied and a diagnostic device is attached to each device, the upgrade information is provided from the diagnostic device of Company A, and each user can download the latest diagnostic program via the Internet from the company's own semiconductor manufacturing device. And install it on the server.

According to the present invention, it is possible to provide an environment in which a diagnostic program with improved functions and quality can be provided to a user even after the equipment is delivered to the user.

The diagnostic device 70 is connected to the computer 12 in the section corresponding to the diagnosis of the company A via the network of the company A.
0 is connected. This computer 120 has a CP
U121, buffer memory, control database 12
2. It has output means including an input means and a display unit,
The operator responds to inquiries and responses from the user at the time of diagnosis by the diagnostic device 70, and instructs the service section or service company based on the diagnosis result,
This is the section to contact.

Also, in the diagnosis correspondence section, the state of the apparatus, for example, the change over time of the pressure gauge is analyzed by utilizing information which does not belong to the user in the diagnosis result of each user stored in the data recording apparatus. ,To analyze. This information is subjected to program improvement and database update processing so as to be used for the next diagnosis. By analyzing and analyzing a large amount of information used under a plurality of users and under various circumstances, it is possible to provide a diagnostic program updated to a highly accurate version in a shorter time.

The section for company A diagnosis is based on the assumption that the diagnosis itself such as data acquisition and analysis is performed completely automatically. However, a specialist may also make a diagnosis at the request of the user. In particular, it is effective in abnormality diagnosis and failure diagnosis. At that time, the expert accesses the diagnostic device through the network within the company A, thereby improving the diagnostic accuracy and enabling quick response and determination. Conventional diagnostic devices have generally been based on the assumption of fully automatic and unmanned operation. However, by using the entrained operation, the diagnostic processing capability is further improved. FIG. 3 shows the diagnostic database 8.
5 shows a detailed configuration example. Reference numeral 850 denotes a customer device management system, reference numeral 851 denotes a diagnosis result database, and reference numeral 855 denotes a device information database. The diagnosis result database 851
It records a diagnosis result, a failure history, a part replacement history, and the like, and stores data separately for each of the users B, C,-, and N. The device information database 855 includes:
It records the type of each semiconductor manufacturing equipment, product specifications, performance inspection results, information on used parts, etc.
-And N are stored separately.

FIG. 4 is a diagram showing a configuration example of the semiconductor manufacturing equipment control server 20 provided with a terminal for performing a diagnosis. Here, the server 20B of the company B will be described as an example of the user. The semiconductor manufacturing apparatus control server 20 is configured by, for example, a microcomputer having a CPU and a buffer memory, and an input / output unit 21 is connected to an operation unit such as a keyboard and a mouse, and a display. Further, an external connection interface 22 for connecting to an external device and a communication interface 23 are provided. Further, the storage means provided in the internal microcomputer 24 stores browsing software (WWW browser) 25 for accessing the Internet 50 via the server 40 and connecting to the server 60. The password for connecting to the diagnostic device 70 is
It is determined in advance by a contract between companies A and B. Further, a control program 26 necessary for controlling the semiconductor manufacturing apparatus 10 (10A to 10N) to manufacture a semiconductor is stored. Further, a control program or a recipe for performing a diagnosis in accordance with an instruction from Company A is stored. This program is stored in the server 20 in advance.
May be installed from the server of Company A as needed. The control program 26 also includes a diagnosis device operation program (recipe) 27.

Further, there are provided a control database 28 including various information, a database 29 recording common items for diagnosis, diagnosis results and maintenance nonce information, a database of security-related information, and the like. The device operation record (log data) required for diagnosis is a database 2 that records common items for diagnosis and maintenance nonce information.
9 is stored.

As described above, the function of a terminal for making a diagnosis may be provided not in the server 20 but in each of the semiconductor manufacturing apparatuses 10 or a higher-level server.

Next, the semiconductor manufacturing apparatus 1 to be diagnosed is
FIG. 5 shows a control configuration example of 0 (10A to 10N). In this embodiment, it is assumed that there are four semiconductor manufacturing apparatuses (however, only three are shown in the figure). Reference numeral 212 denotes a central control unit that controls the entire semiconductor manufacturing apparatus (or manufacturing line), and is, for example, a CPU. Reference numeral 213 denotes a display unit for displaying the operation state, the setting contents of the operation conditions, and the start / instruction to start the operation, and is, for example, a CRT. Reference numeral 214 denotes an input unit, which is, for example, a key port for setting operation conditions, inputting an operation start instruction, inputting process processing conditions, and inputting operations for maintenance and maintenance nonce. 202-1-20
Reference numeral 2-4 denotes a processing apparatus for performing wafer processing. The processing apparatus may be any processing apparatus that performs wafer processing, such as etching, post-processing, film formation, sputtering, CVD, and water treatment.

Reference numeral 215 denotes an apparatus control unit which determines an operation information signal state indicating that the operation of the process processors 202-1 to 202-4 is enabled / disabled, and determines the state of the process processors 202-1 to 202-4 during automatic operation. Even if any one of the units 202-4 becomes inoperable, the processing procedure is stored in which the process is not used and the operation is continued using another process. For example, a ROM. A processing order information storage unit 216 stores a processing order of wafers in the vacuum processing apparatus, and is, for example, a RAM. The processing order of this wafer is
Before the operation is started, data input by the operator using the display means 213 and the input means 214 is stored.
Reference numeral 217 denotes an operation information signal storage unit, for example, a RAM that stores an operation information signal indicating that the operation of the process processors 202-1 to 202-4 is valid / invalid.

Reference numerals 201-1 to 201-4 denote operation information signal generating means, and the processing devices 202-1 to 202-
4 generates an operation information signal indicating that the operation is valid / invalid. In this embodiment, the operation information signal generating means is provided in the process processing apparatus, but may be provided anywhere. As a means for generating the driving information signal, any of the following can be used. 1) A signal for shutting off the power supply of the processing device 2) An operation switching signal (for example, a changeover switch) for setting validity / invalidity of use of the processing device 3) An operation control signal indicating validity / invalidity of use of the processing device Next, FIG. 6 shows the process information of the process processing device 202-1 of FIG.
The example of the vacuum processing apparatus employ | adopted as -202-4 is shown. In FIG. 6, reference numeral 201 denotes a transfer processing apparatus for transferring a wafer, which processes wafers in a load lock chamber in accordance with a wafer transfer schedule.
-4. Further, the wafer that has been processed by the processing apparatus is transferred to the next processing apparatus, and the wafer that has been completely processed is transferred to the unload lock chamber. Reference numeral 203 denotes a load lock chamber,
6 is a chamber for loading a wafer into the transfer processing apparatus, 204 is an unload lock chamber and is a chamber for transferring a wafer from the vacuum processing chamber to the atmospheric transfer apparatus 206, and 205 is installed in the transfer processing apparatus to transfer the wafer. Vacuum robot to perform, 206
Reference numeral 207 denotes an atmosphere transfer device for transferring a cassette containing wafers, and 207 denotes a cassette containing wafers to be processed, which is a cassette containing product wafers or a cassette containing cleaning wafers. The atmospheric transfer device 206 unloads the wafer in the cassette on the atmospheric transfer device from the cassette, loads the wafer into the load lock chamber 203, and returns the wafer in the unload lock chamber 204 to the original cassette.

The vacuum processing apparatus to be diagnosed according to the present invention is not limited to the apparatus shown in FIG. 6, but may be another type of apparatus, for example, the apparatus shown in FIG. Such a device may be used.

FIG. 7 shows an excerpt of lot management data as an example of primary data used for diagnosis of a semiconductor manufacturing apparatus.
The lot history data is, for example, a record in which the processing status is recorded after the semiconductor manufacturing equipment of Company B processes the product. Usually, the monitor amount corresponding to the recipe item is recorded. For example, if the gas flow rate is 100 ml
This is information that the flow rate monitor was 101 ml / min against the / min setting. The term “recipe” refers to record information describing target conditions of a product.

The lot history data shown in FIG.
123, cassette number 2 and start time 2000/9
/ 10, 10:15:36. In addition, lot name, process name, operator name, recipe No. , The process processing ratio, the number of input sheets, and the like. Also,
No. of the wafer processed in the etching chamber 1 And step No. , Gas flow rate, plasma source power, processing pressure,
Data such as the opening degree of the pressure regulating valve is shown. Although the data in FIG. 7 is data for cassette No. 2 of lot No. 123, similar lot history data is monitored and accumulated for another cassette or lot. In addition,
The items in FIG. 7 are merely examples, and it goes without saying that items other than those shown are monitored as needed.

Next, the processing flow in the case where the user diagnoses the semiconductor manufacturing apparatus by using the diagnosis apparatus of the apparatus maker will be described with reference to FIG. The diagnosis includes a regular diagnosis mode performed as a periodic diagnosis, and an irregular diagnosis performed when an error occurs, that is, a device abnormality mode and a device failure mode.

First, the periodic diagnosis mode will be described with reference to FIG. In the periodic diagnosis mode, a periodic diagnosis process of the semiconductor manufacturing apparatus is performed by the periodic diagnosis processing device 90 stored in the diagnostic device 70.

For the periodic diagnosis, the user (B-
N) accesses the server of the device manufacturer A and requests a diagnostic device, so that the program in the periodic diagnostic mode is started (900 to 904). Users do not have direct access to the diagnostic system program itself. When the periodic diagnostic mode is activated, the diagnostic device requests the user for primary diagnostic data (906). User sends request data via server and Internet
(908, 910), and the data is transferred to the diagnostic device 7.
0 is stored in the periodic diagnosis database 93. The answer data includes production log data as shown in FIG.

The periodic diagnosis processing device 90 performs an analysis of the periodic diagnosis based on the request data. This includes comparison with a reference value (normal value) based on past data (912, 914). For example, the pressure fluctuation can be found by comparing the processing pressure Pa of the vacuum processing chamber with a reference value (normal value) based on past data. FIG. 9 is a graph showing the processing pressure Pa and the opening degree of the pressure regulating valve shown in FIG. 7 by organizing lot history data for a large number of processing wafers. Is within a predetermined range, for example, ± 5%, the device is diagnosed as normal.

The data shown in FIG. 9 is analyzed and analyzed as information on the change over time of the semiconductor manufacturing apparatus. This information is used for the next diagnosis. For example, the life of a pressure gauge (or the determination of when calibration is required) is not uniquely determined, but varies depending on the use situation and environment. When this information is analyzed and analyzed as information of the results used under various circumstances under each user without being limited to a specific user, a highly accurate diagnosis can be made by comparing with the diagnostic information. It becomes possible.

FIG. 10 shows the relationship between the opening of the pressure regulating valve and the processing pressure Pa under normal conditions. Many data are distributed around the processing pressure of 2 Pa, and in this case, the opening degree of the pressure regulating valve is distributed at 51 to 56%. However, if you look closely, the processing pressure is distributed around 1.95 Pa, and the pressure control valve opening is 52 to 53%. If 2 Pa is a set value and ± 5% is an allowable range, 1.9 to 2.1 Pa is allowable.
Data that is considered normal, but may show some signs of anomalies. Even if it is assumed that the cause of the analysis data exceeds the allowable value, it is difficult to make an accurate determination only with the data as shown in FIG. For example, when a deposition film is formed on the inner wall of the apparatus and becomes gradually thicker, the number of gas molecules released from the deposition film increases in accordance with the thickness, and in addition to the gas flow rate supplied as an etching gas, The pressure is controlled including the gas from the inner wall of the apparatus. Since the two gases have different compositions, the pressures resulting from the dissociation and decomposition by the plasma are all different from those of the etching gas. Therefore, even if the function of the constant pressure control is normal, there may be a mode in which the pressure indication value does not change and the pressure regulating valve opening degree changes.
In addition, even if the opening of the pressure regulating valve is the same, if the pressure changes, if the measured pressure itself changes, if the temperature of the gas being measured changes, or if the pressure gauge is abnormal. Or the temperature of the part where the pressure gauge is installed fluctuates, or it may be electromagnetic noise from the plasma. Alternatively, the pressure regulating valve may indicate an abnormality. As another possibility, the pressure regulating valve changes the conductance of gas molecules by adjusting the opening of the valve and controls the effective pumping speed of the vacuum pump, but the conductance of gas molecules is reduced. Depends on the mass and temperature of the Therefore, if the composition of the plasma changes, the conductance also changes. There is a possibility of change due to this. Therefore, it is not possible to know the true cause of the pressure change or the change of the pressure regulating valve by simply examining the phenomenon that the pressure is changing, and it is not possible to take appropriate measures. In order to judge this accurately, it is necessary to change the characteristics of the plasma, correlate with other data, compare with past data, and analyze. For this analysis, comparison with previously analyzed data is effective, and it is also effective to make use of various statistical analysis means. Furthermore, the relationship between the flow rate and pressure using an inert gas such as argon without generating plasma, the relationship between the opening of the pressure control valve, the temperature of the processing chamber wall, and the temperature of the pressure gauge, etc., was measured again, and the It is also effective to determine the presence or absence of an abnormality. In this case, it is necessary to operate the apparatus specially to acquire data. However, it corresponds to the steps of the diagnostic operation and the data acquisition 934 from the additional data request 926 shown in FIG.

The item in FIG. 7 includes the just-etch time. This time is used for the etching end point determination device (installed in the processing chambers 202-1 to 202-4 in FIG. 6, but not shown).
Is the etching time measured by When the etching time gradually changes in response to the processing time (plasma discharge time) after the apparatus is opened to the atmosphere and cleaned, the fluctuation of the etching time is periodically diagnosed to periodically clean the apparatus. It is also possible to judge. Further, it is possible to determine the timing of the plasma cleaning, perform the plasma cleaning, and return the inside of the apparatus to the initial state. Since plasma cleaning is not performed frequently but based on the results of periodic diagnosis, the time that hinders the operation of the apparatus can be minimized, and as a result, the operation rate of the apparatus can be improved and stable operation can be achieved. Become. Furthermore, when a sudden change is indicated, it is assumed that some abnormality has occurred, so diagnosis is performed in an abnormality diagnosis mode described later. Furthermore, by analyzing the correlation between the variation of the etching time and the side wall temperature of the apparatus and other parameters, if the causal relationship between various parameters becomes clear, the active time control of those parameters enables the variation of the etching time. Can be made to be a device control system with a constant value. This may not be a diagnostic system,
By applying and developing the diagnostic system of the present invention, the performance of the device can be stabilized. Regarding the plasma, it is determined whether the input power of the source power and the reflection data and the tuning shown in FIG. 7 are normal or not by a change in the position of the stub tuner (STB1, STB2, STB3) or a change in the wafer bias voltage Vpp. Can be determined from In addition, a device equipped with a dedicated plasma monitor or the like allows more accurate changes to be grasped.

The diagnostic result is sent to the user as a periodic diagnostic result (916, 918), and the diagnostic analysis data and the result are stored in the user's storage device (920). The diagnosis result is stored in the storage device 85 of the device manufacturer A as customer device management data (922), and is communicated to the service section (or the service company A2) as necessary (924).

The user can delete the diagnostic data (such as the user's production information used for the analysis). Alternatively, data reading can be protected. The device maker A has a system that cannot read customer device management data without the permission of the user. The diagnosis cannot be deleted. The data recording device of company A remains as customer device management data, that is, service information for (company B to company N). This data can be used for parts life (maintenance time), inventory management, etc. The part belonging to the user's confidential information includes, for example, the lot name (a simple symbol does not matter, but a product name may be used), a process name, etc., and the number of processed wafers (products). Related to production information.). Although not shown in FIG. 7, items such as a film type, a film thickness, a product name, and the like are also included. Furthermore, etching recipes (gas names, flow rates, pressures,
Specific data such as time. ). Furthermore, although it cannot be said that the data can be obtained by monitoring the apparatus, if data relating to the etching result is centrally managed, such data is included in confidential information. For example, there are correlations regarding the quality of semiconductor products including processes of other semiconductor manufacturing apparatuses, etching shapes, data relating to electrical characteristics of semiconductor products, status of defects (yield), and the like. Judging whether the device is normal or not and whether the data variation is within the allowable range is extremely difficult for the user, considering that ultimately the product should be determined based on whether the product is normal or not. This is important data. Conversely, it is data directly related to production information and also information that should be kept confidential. Therefore, if the user decides to use such information as confidential data, only the permissible value of the data obtained from the device will be disclosed to the device manufacturer A, but the reason and grounds for determining the range of the permissible value (yield, etc.)
There is no need to disclose until. The data stored in the device maker A is, for example, FIGS. 9 and 10 obtained by totaling and analyzing lot history data as shown in FIG. These data are stored and managed under the name of the user device (serial No.) and the date or an appropriately determined name. If the film type and the etching recipe are necessary for data management, they may be managed by appropriately defined names instead of specific names.

If the data for the diagnostic analysis is insufficient, the diagnostic device requests the user for additional data (926). In order to obtain data for diagnosis,
When the device needs to be operated, the user is inquired about whether to perform the operation for diagnosis (928 to 928).
30). This is, for example, a method of answering some questions prepared in advance (inquiry as to whether there is no problem in safety and whether there is no problem in driving).

Then, the recipe of the apparatus operation for acquiring the diagnostic data is displayed on the user side, and the user activates the semiconductor manufacturing apparatus to be diagnosed (930). If the semiconductor manufacturing apparatus cannot be started, the reason is clarified (932), and the reason is recorded in the customer equipment management database 851 (922), and the service section (or the service company A2) is notified as necessary (922). 92
4). In other words, when the device cannot be operated, a reply is given as to why the device cannot be operated. For example, a list of reasons appears,
Check it. Company A can arrange for a failed part based on the diagnosis result. For example, replacement of consumables may be sufficient. If a repair or a failed part is required, contact the service representative of Company B to arrange.

The semiconductor manufacturing apparatus is operated according to the recipe,
If the diagnostic data has been obtained, the result is sent to the diagnostic device as additional data (934). In the first diagnosis, the periodic diagnosis mode is started in this embodiment, and the data is stored in the periodic diagnosis database 851 of the diagnostic device. The diagnostic device performs an analysis based on the additional data (936, 938). This includes comparison with past data (normal values). The diagnosis result (940) is sent to the user as a periodic diagnosis result and displayed (94).
2) The diagnostic analysis data and the result are stored in the storage device on the user side (944). The diagnosis result is stored in the storage device of the device manufacturer A as customer device management data, and is communicated to a service section (or a service company A2) as necessary.

Next, the diagnosis device inquires of the user whether or not to end the diagnosis based on the diagnosis result (946).

On the user side, the diagnosis cannot be completed (satisfactory results cannot be obtained only by the results of the periodic diagnosis).
Either erasing the analysis data and ending the diagnosis (diagnosis could be diagnosed only by periodic diagnosis) or ending the diagnosis without erasing the analysis data (soldering that the diagnostic data did not contain confidential matters) A determination is made (948). When ending the diagnosis by erasing the analysis data, the diagnostic device erases the analysis data, obtains the user's consent (confirms the erasure of the analysis data), and ends the periodic diagnosis (950 to 956). ).

The connection with the diagnostic device is free of charge. Alternatively, there is a case where a fee is charged based on a periodic diagnosis, a failure diagnosis, or the like, but details are determined by a maintenance contract or the like. Dispatch of service personnel and procurement of parts when an abnormality is found and dealt with are necessary, but the cost burden related to them may be determined in advance by a maintenance contract or the like.

At the time of periodic diagnosis, comparison analysis with past data can be performed, so that not only normal and abnormal judgments can be made, but the latest data does not hinder the operation of the apparatus, but the limit of the normal value, in other words, the boundary area It is determined that it is in the vicinity and is a slight abnormality, and it is desirable to take some measure in advance, and the user can be notified. As a result, it is possible to predict in advance the possibility of equipment failure to some extent, and to take measures early to avoid a large economic loss.

In the embodiment of the present invention, the diagnostic apparatus is connected to the server of company A. However, the diagnostic apparatus may be installed on the control server of company B so that the semiconductor manufacturing apparatuses in company B can be viewed collectively. . Alternatively, it may be installed in advance in each semiconductor manufacturing apparatus. In this case, the programs are separately installed by the diagnostic function. However, if the user wants to use the latest version of the diagnostic program that is newer than the pre-installed one, it is necessary to access and download the company A server.
For existing data used for data analysis, comprehensive analysis including data from other companies' devices is desirable.
When a diagnostic device is installed and used in a semiconductor manufacturing device of a company, it becomes difficult to use comprehensive data selected from devices of other companies. In particular, in the case of diagnosing while contacting the expert of Company A, it is more efficient and the analysis accuracy is higher if the diagnostic device is provided by Company A. Therefore, it is desirable to provide a system for transmitting necessary data to Company A for diagnosis.

As apparent from the above description, the main functions of the remote diagnostic system according to the embodiment of the present invention are as follows.
It is as follows.

(1) Users (company B to company N) can freely access. (2) A contract for a password for connection to this system can be made in advance. (3) The user cannot access the diagnostic system program, but can delete the diagnostic data (such as the user's production information used for analysis). Alternatively, data reading can be protected. (The system cannot be read without the permission of the user.) (4) The diagnostic results cannot be deleted. The information is left as service information for the company A (company B to company N) in the data recording device of company A. This data can be used for parts life (maintenance time), inventory management, etc. (5) Diagnosis is semi-automatic, and since necessary data is requested from the diagnostic device to the user terminal, the system responds to the request. (6) Response data includes production log data. (7) If it is necessary to operate the device to obtain data for diagnosis, there is an inquiry as to whether the operation for diagnosis may be performed. Answer it (Is it safe?
In addition, inquire whether there is no problem in driving). (8) If the device cannot be operated, answer why it cannot be operated. (A list of reasons will be displayed and checked.) (9) After seeing (or even before) the diagnosis result, you can contact the service personnel of A company or the parts supplier. Call request, repair request, regular maintenance request, urgent call etc. (10) A failed part can be arranged according to the diagnosis result. (Simply replace consumables. Repairs and failed parts will be arranged after contacting the service personnel of Company B.) (11) Connection to the diagnostic equipment is free. Alternatively, it is charged for periodic diagnosis and failure diagnosis. (12) The diagnostic device is connected to the company A server. Alternatively, it is installed on the control server of the company B, and the devices in the company B are collectively viewed. Alternatively, pre-installed on each device. (Divided according to the diagnostic function.) Next, FIG.
Now, the device abnormality mode processed by the abnormality mode diagnosis processing device 100 will be described. When the apparatus is abnormal, the user (B to N) accesses the server of the apparatus manufacturer A and requests the diagnostic apparatus, and the program in the apparatus abnormality mode is started (1000 to 1004). When the device abnormality diagnosis mode is activated, the diagnostic device requests primary diagnostic data from the user (1006). Note that the diagnosis primary data also includes information such as a device abnormality history message. The user transfers the requested data to the device maker A via the server and the Internet (1008 to 10).
10), the data is stored in the periodic diagnostic database of the diagnostic device. The diagnostic device performs a periodic diagnosis analysis based on the request data (1012 to 1014). The diagnosis result is sent to the user as a periodic diagnosis result (101).
6, 1018), and the diagnostic analysis data and the result are stored in the storage device on the user side (1020). The diagnosis result is stored in the storage device 85 of the device manufacturer A as customer device management data (1022), and is communicated to the service section (or the service company A2) as necessary (1024). In addition, since the diagnosis is performed because an abnormality is recognized, it may be difficult to make an accurate determination only with a normal periodic diagnosis.

If the data for diagnosis is insufficient, the diagnostic device requests the user for diagnostic data (1026). In order to acquire diagnostic data, a device operation recipe for acquiring diagnostic data is presented (1028), and an inquiry is made to the user as to whether the device can be started (1030).

If the semiconductor manufacturing equipment cannot be started,
The reason is clarified (1032, 1034), and the service person is contacted (1036), and if necessary, the service section (or service company A2) is contacted (1028). Further, the following inquiry and instruction are performed (1040). For example, if the vacuum pump cannot be started, the device cannot be started.If the vacuum pump is of a water-cooled type, if the cooling water is flowing, the flow rate is appropriate, and the water temperature is acceptable. Inquiry about whether it is within the range, what other interlocks are, etc., and analyze and judge,
Make instructions.

The semiconductor manufacturing apparatus is operated according to the recipe,
If the diagnostic data can be obtained (1042), the result is sent to the diagnostic device as additional data (104).
4). The data is stored in a periodic diagnostic database of the diagnostic device. The diagnostic device performs an analysis based on the diagnostic data (1046). This includes comparison with past data (normal values). The diagnosis result (1048) is sent to the user together with the countermeasure content and displayed (105).
0), the diagnostic analysis data and the result are stored in the storage device on the user side (1052). The diagnosis results are stored as customer device management data in the storage device of the device manufacturer A, and are communicated to the service section (or service company A2) as needed (1022, 102).
4).

The user selects the countermeasure content based on the diagnosis result (1054), and if necessary, contacts the service person (1056, 1038), and makes the next inquiry and instruction (1058). These communications are performed via the Internet, but if you want to contact the service representative directly, it is also possible to connect to the service representative or make a telephone call via the Internet. Finally, an inquiry is made to the user before the end of the diagnosis as to whether analysis data can be deleted (1060). The user determines whether the diagnosis cannot be completed, the analysis data is erased to terminate the diagnosis, and the analysis is terminated without erasing the analysis data (1062). When ending the diagnosis after erasing the analysis data, the diagnostic device erases the analysis data, obtains the user's consent (confirms the erasure of the analysis data), and ends the diagnosis (1064-1).
068).

Next, referring to FIG. 12, when the fault location of the semiconductor manufacturing apparatus is known to some extent, the fault diagnosis processor 110
The following describes the failure diagnosis mode that is processed by the. If the device is out of order, the user (B to N)
By accessing the server of the company and requesting the diagnostic device, the program in the failure diagnosis mode is started (1100).
１1104). When the failure diagnosis mode is activated, the diagnosis device inquires the user of the failure location (110).
6). The user selects a failure location from the failure location classification table, transfers the requested data to the device manufacturer A via the server and the Internet (1108 to 1110), and the data is stored in the periodic diagnosis database of the diagnostic device. The diagnostic device displays the countermeasure contents with reference to the data of the fault location and the past history (1116), and the user selects a countermeasure from the countermeasure classification table (1120). The diagnostic device contacts the service person (1122) and makes the next inquiry and instruction (1124). Based on this, the data of the failure content and the countermeasure content are sent to the service section (or service company A2) (1126). In response to this, the service section (or service company A2) performs necessary measures and implements a failure diagnosis mode (1128-
38). The user selects a countermeasure from the failure countermeasure classification table,
It is stored (1134, 36). The diagnostic device activates the failure diagnostic mode as required after receiving confirmation from the user (1140, 42). When ending the diagnosis, the diagnostic device deletes the analysis data, obtains the user's consent,
The failure diagnosis is terminated (1144-1148).

In the embodiment shown in FIG. 13, the diagnostic equipment of company A is installed in both the apparatus manufacturer A1 and the service company A2 (or a plurality of service companies) contracted with the apparatus manufacturer.

In the sales contract between each user and the device maker (or sales company (not shown)), it is determined whether the diagnostic contract is to be the device maker A1 or the service company A2. Subsequent connections are the same as in the above embodiment.

It is assumed that the servers of the companies A1 and A2 can freely exchange information on the diagnostic data in principle. Rather, the results of each analysis are stored as a common database.

The diagnostic program uses the same latest version. The analysis database is also the latest version.

The embodiment shown in FIG. 14 is an example in which a primary diagnostic data storage area is provided in a server or a semiconductor manufacturing apparatus of each user. Access to this part is not allowed from Company A. There is no need to worry about access from Company A. Users can freely use the data as it is stored. Except for the data that may be disclosed in the diagnosis results,
Transfer of confidential data to Company A must be prohibited. This is a confidentiality agreement. In this case, it is desirable to install the diagnostic software on the user side to perform the diagnosis, but it is possible to do so even if it is not. As a result, it is possible for each user to harmonize both requirements of keeping information confidential at the time of remote diagnosis and preventing an increase in economic loss.

As described above, the example in which the present invention is applied to the semiconductor manufacturing apparatus has been described, but the present invention is not limited to this. For example, a production facility such as a chemical plant or an automotive production line, where a different company than the user of the facility is involved in the production and the user has a unique trade secret regarding the use of the facility. Can be widely applied to diagnosis.

[0095]

According to the present invention, it is possible to provide a remote diagnosis system and a diagnosis method that balance requirements of keeping information confidential and preventing an increase in economic loss at the time of remote diagnosis of equipment. . Further, even after the equipment is delivered to the user, it is possible to provide an environment in which a diagnostic program with improved functions and quality can be provided to the user.

Further, it is possible to provide a remote diagnostic system and a diagnostic method capable of predicting the possibility of equipment failure to some extent in advance and taking a measure early to avoid a large economic loss.

[Brief description of the drawings]

FIG. 1 is a block diagram showing a configuration of a remote diagnosis system in which the present invention is applied to a semiconductor manufacturing apparatus.

FIG. 2 is a diagram illustrating a configuration example of a diagnostic device in the system of FIG. 1;

FIG. 3 is a diagram showing a configuration example of a diagnostic database in the diagnostic device of FIG. 2;

4 is a diagram illustrating a configuration example of a semiconductor manufacturing apparatus control server in the system of FIG. 1;

FIG. 5 is a diagram illustrating an example of a control configuration of a semiconductor manufacturing apparatus in the system of FIG. 1;

FIG. 6 is a diagram illustrating an example of a vacuum processing apparatus adopted as the process processing apparatus of FIG. 5;

FIG. 7 is a diagram showing an example of lot management data as primary diagnostic data of a semiconductor manufacturing apparatus.

FIG. 8 is a view for explaining a processing flow when diagnosing a semiconductor manufacturing apparatus in a periodic diagnosis mode.

FIG. 9 is a graph of data of the processing pressure Pa and the opening degree of the pressure regulating valve shown in FIG. 7;

FIG. 10 is a diagram showing the relationship between the opening of the pressure regulating valve and the processing pressure Pa in a normal state.

FIG. 11 is a diagram illustrating a processing flow when a diagnosis of a semiconductor manufacturing apparatus is performed in an abnormal mode.

FIG. 12 is a diagram illustrating a processing flow when a diagnosis of a semiconductor manufacturing apparatus is performed in a failure diagnosis mode.

FIG. 13 is a block diagram showing another embodiment of a remote diagnosis system in which the present invention is applied to a semiconductor manufacturing apparatus.

FIG. 14 is a block diagram showing another embodiment of a remote diagnosis system in which the present invention is applied to a semiconductor manufacturing apparatus.

[Explanation of symbols]

10 (10A to 10N): semiconductor manufacturing apparatus, 20: semiconductor manufacturing apparatus control server, 25: browsing software (WWW browser), 26: control program, 27: diagnostic apparatus operation program (recipe), 28: control Database 29, a database recording common items for diagnosis, diagnosis results and maintenance nonce information, 30 intranet in the company, 40 Internet server, 50 Internet, 60 Internet server, 70 diagnostic device, 72 data recording device 73A: external connection interface; 73B: access management program; 73C communication interface; 78: guide unit;
0: Control program, 82: User diagnostic software storage device, 83: Semiconductor manufacturing device control program, 8
5 ... diagnostic database, 90 ... periodic diagnostic processing device, 9
DESCRIPTION OF SYMBOLS 1 ... Primary data storage device of a diagnostic result, 92 ... Primary data storage device of a diagnostic result, 93 ... Database for a data analysis device, 100 ... Abnormal mode diagnosis processing device, 102 ... Primary storage device of a diagnostic result, 110 ... Failure diagnosis Processing equipment, 2
12 central control means, 213 display means, 202-1 to 202-1
202-4: Process processing, 850: Customer device management system, 851: Diagnosis result database, 855: Device information database

 ────────────────────────────────────────────────── ─── Continuing on the front page (72) Inventor Hideyuki Yamamoto 794, Higashi-Toyoi, Katsumatsu-shi, Yamaguchi Prefecture F-term in Kasado Plant, Hitachi, Ltd.

Claims (15)

[Claims] 1. A remote diagnosis system for a semiconductor manufacturing apparatus, wherein a user connects the semiconductor manufacturing apparatus to a diagnostic apparatus provided by a third party via a communication network, and diagnoses the semiconductor manufacturing apparatus. The diagnostic apparatus includes at least one diagnostic program that performs a diagnostic process on the semiconductor manufacturing apparatus, and a control unit that activates the diagnostic program by an access from a terminal of a specific user to which access authority is assigned. A remote diagnostic system for a semiconductor manufacturing apparatus, wherein the terminal transmits data requested by the diagnostic device to the diagnostic device at the time of diagnosis, and receives a diagnostic result from the diagnostic device. 2. A remote diagnostic system for a semiconductor manufacturing apparatus for connecting a semiconductor manufacturing apparatus to a diagnostic apparatus provided by a third party via a communication network and performing a diagnosis on the semiconductor manufacturing apparatus, The diagnostic apparatus discloses a plurality of diagnostic programs for performing a diagnostic process of the semiconductor manufacturing apparatus, a control unit that activates the diagnostic program by an access of a specific user who has been granted access right, and information on the diagnostic program. A remote diagnosis system for a semiconductor manufacturing apparatus, comprising: a guide unit. 3. A remote diagnostic system for a semiconductor manufacturing apparatus, wherein the semiconductor manufacturing apparatus is connected to a diagnostic apparatus provided by a third party via a communication network and diagnoses the semiconductor manufacturing apparatus. At least one diagnostic program for performing a diagnostic process of the semiconductor manufacturing apparatus, a control unit that activates the diagnostic program by an access of a specific user who has been granted access authority, and a diagnostic result associated with the execution of the diagnostic program. A remote diagnostic system for a semiconductor manufacturing apparatus, comprising: a user-specific primary data storage device for storing primary data; and a guide unit for disclosing information on a diagnostic program. 4. The diagnostic program according to claim 1, wherein the diagnostic program includes a periodic diagnostic program for performing a periodic diagnostic process on the semiconductor manufacturing apparatus, and a temporary diagnostic process when the semiconductor manufacturing apparatus has an abnormality. A remote diagnosis system for a semiconductor manufacturing apparatus, comprising: an abnormality mode diagnosis program for performing a diagnosis process; and a failure diagnosis program for performing a diagnosis process when a fault location of the semiconductor manufacturing apparatus is known to some extent. 5. The semiconductor device according to claim 1, wherein the third party is a manufacturer of the semiconductor manufacturing apparatus, a company authorized to install the diagnostic apparatus by the manufacturer, or an affiliated company thereof. Diagnostic system for semiconductor manufacturing equipment. 6. The diagnostic device according to claim 3, wherein the diagnostic device is connected to the server of the third party, and the user cannot access a program of the diagnostic device, but diagnostic data unique to a user of the diagnostic device. A remote diagnosis system for a semiconductor manufacturing apparatus, wherein the remote diagnosis system is capable of managing the data. 7. The semiconductor manufacturing apparatus according to claim 1, wherein a recipe for operating the semiconductor manufacturing apparatus for acquiring diagnostic data is transmitted from the diagnostic apparatus to a user, and based on data obtained according to the recipe. A remote diagnosis system for a semiconductor manufacturing apparatus, wherein diagnosis is performed. 8. The remote diagnosis system for a semiconductor manufacturing apparatus according to claim 1, wherein the third party saves the result of the diagnosis as service information for the user. 9. A remote diagnosis of a semiconductor manufacturing apparatus for connecting a semiconductor manufacturing apparatus and a terminal for performing a diagnosis to a diagnosis apparatus provided by a third party via a communication network and performing a diagnosis on the semiconductor manufacturing apparatus. A diagnostic program of the diagnostic apparatus is started by an access of a specific user who has been granted access right, data required for diagnosis is requested from the diagnostic program to the user, and a response to the user is made in response to the request. A method for remote diagnosis of a semiconductor manufacturing apparatus, wherein a diagnosis is performed by obtaining the information. 10. The diagnostic apparatus according to claim 9, wherein when the diagnostic apparatus determines that it is necessary to operate the semiconductor manufacturing apparatus in order to obtain data for the diagnosis, the diagnostic apparatus may perform the operation for the diagnosis. A remote diagnosis method for a semiconductor manufacturing apparatus, wherein the diagnosis is performed based on data obtained by driving. 11. The diagnostic program according to claim 9 or 10, wherein the diagnostic program includes a periodic diagnostic program for performing a periodic diagnostic process of the semiconductor manufacturing apparatus. A remote diagnosis method for a semiconductor manufacturing apparatus, comprising analyzing a state of the apparatus. 12. Diagnosis of equipment under the control of a first company using a diagnostic device of a second company that is connected to said equipment via a communication network and is not under the control of said first company. In the remote diagnostic system for equipment to be performed, the diagnostic device includes at least one diagnostic program that performs diagnostic processing of the equipment, and a control unit that starts the diagnostic program by access from a terminal of a specific user to whom access authority has been granted. Wherein the terminal transmits data requested by the diagnostic device at the time of diagnosis to the diagnostic device, and receives a diagnosis result from the diagnostic device. 13. Diagnosis of equipment under the control of a first company using a diagnostic device of a second company which is connected to said equipment via a communication network and which is not under the control of said first company. In the remote diagnostic system for equipment to be performed, the diagnostic device includes: a plurality of diagnostic programs for performing diagnostic processing of the equipment; a control unit that starts the diagnostic program by an access of a specific user who has been granted access authority; A remote diagnosis system for equipment, comprising: a guide unit that discloses information on a program. 14. Diagnosis of equipment under the control of a first company using a diagnostic device of a second company that is connected to said equipment via a communication network and is not under the control of said first company. In the remote diagnostic system for equipment to be performed, the diagnostic device includes at least one diagnostic program that performs diagnostic processing of the equipment, a control unit that activates the diagnostic program by an access of a specific user to which access authority is assigned, and A remote diagnosis system for equipment, comprising: a user-specific primary data storage device that stores primary data of a diagnosis result accompanying execution of a diagnosis program; and a guide unit that discloses information on the diagnosis program. 15. Diagnosis of equipment under control of a first company using a diagnostic device of a second company that is connected to said equipment via a communication network and is not under control of said first company. In the remote diagnostic method to be performed, a diagnostic program of the diagnostic apparatus is started by an access of a specific user who has been granted access right, data required for diagnosis is requested from the diagnostic program to the user side, and the user A remote diagnosis method for equipment, wherein a diagnosis is obtained by receiving an answer.