JP2001049179A - Film-forming composition, formation of film and low- density film - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a film-forming composition capable of imparting a low density film excellent in dielectric constant characteristics and water absorbency characteristics and useful as an interlayer insulating film in semiconductor elements, etc., being an uniform coating film and excellent in CMP resistance, and also excellent in storage stability. SOLUTION: This film-forming composition comprises (A) silane compounds composed of at least one kind selected from the group consisting of R2R3Si(OR1)2, R2Si(OR1)3, and Si(OR1)4, and R2s(R1O)3-sSiRSi(OR1)3-tR2t (wherein R1 to R3 are each a monovalent organic group; R is a divalent organic group; s and t are each an integer of 0-1) or its hydrolyzate and/or condensation product, (B) a polyether represented by the general formula PEOn-R' (wherein PEO is a polyethylene oxide unit; R' is a 5-30C monovalent organic group; n is an integer of 5-50) and (C) at least one kind selected from the group consisting of an alcohol-based solvent, a ketone-based solvent, an amide-based solvent and an ester-based solvent.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a film-forming composition, and more particularly, to a material for an interlayer insulating film in a semiconductor device or the like, which has excellent dielectric constant and water absorption properties, and
The present invention relates to a film-forming composition having good P resistance, capable of forming a coating film having excellent coating uniformity, and having excellent storage stability.

[0002]

2. Description of the Related Art Conventionally, a silica (SiO ₂ ) film formed by a vacuum process such as a CVD method has been frequently used as an interlayer insulating film in a semiconductor device or the like. And in recent years,
In order to form a more uniform interlayer insulating film, S
A coating type insulating film called a OG (Spin on Glass) film, which is mainly composed of a hydrolysis product of tetraalkoxylan, has been used. Also, with the high integration of semiconductor elements and the like, an interlayer insulating film having a low dielectric constant and mainly containing polyorganosiloxane called organic SOG has been developed. However, with higher integration and multilayering of semiconductor devices and the like, better electrical insulation between conductors is required, and therefore, an interlayer insulating film material having a lower dielectric constant and excellent crack resistance is required. It has become.

[0003] Japanese Patent Application Laid-Open No. 6-181201 discloses a coating composition for forming an insulating film having a lower dielectric constant as an interlayer insulating film material. The coating type composition has a low water absorption and is intended to provide an insulating film of a semiconductor device having excellent crack resistance.
Titanium, zirconium, niobium and tantalum; an organometallic compound containing at least one element selected from the group consisting of polycondensation of an organosilicon compound having at least one alkoxy group in the molecule; This is a coating composition for forming an insulating film, which is mainly composed of an oligomer. However, the dielectric constant of the conventional inorganic interlayer insulating film material is 3.0 or more, which is insufficient for high integration.

[0004]

The present invention relates to a film-forming composition for solving the above-mentioned problems, and more particularly, to a coating film having excellent film thickness uniformity as an interlayer insulating film in a semiconductor device or the like. It is an object of the present invention to provide a film-forming composition which is capable of forming a film, has excellent dielectric constant characteristics and water absorption characteristics, has good CMP resistance, and has excellent storage stability.

[0005]

According to the present invention, there are provided (A) (A-
1) A compound represented by the following general formula (1) (hereinafter also referred to as “compound (1)”), (A-2) a compound represented by the following general formula (2) (hereinafter also referred to as “compound (2)”) And (A-3) at least one selected from the group of compounds represented by the following general formula (3) (hereinafter also referred to as “compound (3)”), and (A-4) a compound represented by the following general formula ( A compound represented by the formula (4) (hereinafter also referred to as “compound (4)”), a hydrolyzate thereof and / or a condensate thereof (hereinafter referred to as “component (A-1) component”, "(A-2)
Component, component (A-3), and component (A-4).) (R ^{1 to} R ³ may be the same or different, each represents a monovalent organic group, R represents a divalent organic group, and s and t are integers of 0 to 1.) (B) General formula A polyether represented by PEOn-R '(where PEO is a polyethylene oxide unit, R' is a monovalent organic group having 5 to 30 carbon atoms, and n is an integer of 5 to 50); The present invention relates to a film-forming composition containing at least one solvent selected from the group consisting of a system solvent, a ketone solvent, an amide solvent and an ester solvent. Here, when each component in the component (A) is converted into a complete hydrolyzed condensate, the component (A-4) becomes (A-1)
Component, (A-2) component, (A-3) component and (A-
4) 5 to 50% by weight based on the total amount of components, and [weight of component (A-1)] <[weight of component (A-2)], [weight of component (A-3)] < [Weight of component (A-2)]. When an alcohol-based solvent and / or a ketone-based solvent is used as the solvent (C), the resulting composition has excellent storage stability. next,
The present invention relates to a method for forming a film, comprising applying the composition for film formation to a substrate and heating the substrate. Here, as a method for forming the film, the film-forming composition is applied to a substrate, heated at a temperature lower than the decomposition temperature of the component (B) to partially cure the component (A), It is preferable to cure by heating at a temperature equal to or higher than the decomposition temperature of the component (B), or to apply the composition for forming a film to a substrate, and to heat and cure at a temperature equal to or higher than the decomposition temperature of the component (B). Next, the present invention relates to a low-density film obtained by the above method for forming a film.

[0006]

BEST MODE FOR CARRYING OUT THE INVENTION According to the present invention, a component (A) [compounds (1) to (4), a hydrolyzate thereof and / or a condensate thereof] is used as a base polymer for forming a film. A specific polyether (B) is used as a material to be formed, and a solvent (C) is used as a solvent for the components (A) and (B). Thus, the composition of the present invention containing the components (A) to (C) has excellent storage stability, and the composition is applied to a substrate such as a silicon wafer by dipping or spin coating. When the (B) removal of the polyether and the (C) solvent and the thermal polycondensation of the (A) component are performed by heating, the (A) component forms a glassy or macromolecular film, and the (B) ) Micropores are formed by decomposition and removal of the polyether. The resulting film has excellent coating uniformity, is a porous low-density film, has excellent CMP resistance, has a low dielectric constant, and has excellent electrical characteristics stability due to low water absorption. Can be formed.

Here, the above-mentioned hydrolyzate in the component (A) refers to the compounds (1) to (4) constituting the component (A).
It is not necessary that all of the R ¹ O— groups contained in (4) are hydrolyzed. For example, only one is hydrolyzed, two or more are hydrolyzed, or
A mixture of these may be used. The condensate of the component (A) is a compound (1) constituting the component (A).
The silanol groups of the hydrolyzates of (4) to (4) condense to form Si-
In the present invention, all of the silanol groups need not be condensed, but a mixture of those having a small amount of silanol groups condensed, those having different degrees of condensation, etc. Is a concept that also includes.

Hereinafter, (A) to (C) used in the present invention.
The components and the like will be described, and then the method for preparing the composition of the present invention will be described in detail.

Component (A) As the component (A), a component (A-4) composed of a compound (4) having 4 to 6 R ¹ O— groups is used as an essential component, and -1), (A-2) and / or (A-3) are used in combination. In the present invention, the use of the component (A-4) particularly improves the CMP resistance.
In the above general formulas (1) to (4), R ^{1 to} R ³ may be the same or different and each represents a monovalent organic group. Examples of the monovalent organic group include an alkyl group, an aryl group, an allyl group, and a glycidyl group. Here, examples of the alkyl group include a methyl group, an ethyl group, a propyl group, and a butyl group, and preferably have 1 to 5 carbon atoms.
It may be branched, and a hydrogen atom may be substituted with a fluorine atom or the like. In the general formulas (1) to (4), examples of the aryl group include a phenyl group, a naphthyl group, a methylphenyl group, an ethylphenyl group, a chlorophenyl group, a bromophenyl group, and a fluorophenyl group.

Specific examples of the compound represented by the general formula (1) include dimethyldimethoxysilane, dimethyldiethoxysilane, dimethyl-di-n-propoxysilane, dimethyl-di-iso-propoxysilane, dimethyl-di-
n-butoxysilane, dimethyl-di-sec-butoxysilane, dimethyl-di-tert-butoxysilane, dimethyldiphenoxysilane, diethyldimethoxysilane, diethyldiethoxysilane, diethyl-di-n-propoxysilane, diethyl-di- iso-propoxysilane, diethyl-di-n-butoxysilane, diethyl-
Di-sec-butoxysilane, diethyl-di-tert
-Butoxysilane, diethyldiphenoxysilane, di-
n-propyldimethoxysilane, di-n-propyldiethoxysilane, di-n-propyl-di-n-propoxysilane, di-n-propyl-di-iso-propoxysilane, di-n-propyl-di-n -Butoxysilane, di-n-propyl-di-sec-butoxysilane, di-n
-Propyl-di-tert-butoxysilane, di-n-
Propyl-di-phenoxysilane, di-iso-propyldimethoxysilane, di-iso-propyldiethoxysilane, di-iso-propyl-di-n-propoxysilane, di-iso-propyl-di-iso-propoxysilane, Di-iso-propyl-di-n-butoxysilane, di-iso-propyl-di-sec-butoxysilane, di-iso-propyl-di-tert-butoxysilane, di-iso-propyl-di-phenoxysilane,
Di-n-butyldimethoxysilane, di-n-butyldiethoxysilane, di-n-butyl-di-n-propoxysilane, di-n-butyl-di-iso-propoxysilane, di-n-butyl-di -N-butoxysilane, di-n
-Butyl-di-sec-butoxysilane, di-n-butyl-di-tert-butoxysilane, di-n-butyl-
Di-phenoxysilane, di-sec-butyldimethoxysilane, di-sec-butyldiethoxysilane, di-s
ec-butyl-di-n-propoxysilane, di-sec
-Butyl-di-iso-propoxysilane, di-sec
-Butyl-di-n-butoxysilane, di-sec-butyl-di-sec-butoxysilane, di-sec-butyl-di-tert-butoxysilane, di-sec-butyl-di-phenoxysilane, di-tert -Butyldimethoxysilane, di-tert-butyldiethoxysilane,
Di-tert-butyl-di-n-propoxysilane, di-tert-butyl-di-iso-propoxysilane,
Di-tert-butyl-di-n-butoxysilane, di-
tert-butyl-di-sec-butoxysilane, di-
tert-butyl-di-tert-butoxysilane, di-tert-butyl-di-phenoxysilane, diphenyldimethoxysilane, diphenyl-di-ethoxysilane, diphenyl-di-n-propoxysilane, diphenyl-di-iso-propoxysilane , Diphenyl-di-
n-butoxysilane, diphenyl-di-sec-butoxysilane, diphenyl-di-tert-butoxysilane, diphenyldiphenoxysilane, and the like.

Specific examples of the compound represented by the general formula (2) include methyltrimethoxysilane, methyltriethoxysilane, methyltri-n-propoxysilane,
Methyltri-iso-propoxysilane, methyltri-
n-butoxysilane, methyltri-sec-butoxysilane, methyltri-tert-butoxysilane, methyltriphenoxysilane, ethyltrimethoxysilane, ethyltriethoxysilane, ethyltri-n-propoxysilane, ethyltri-iso-propoxysilane, ethyltri- n-butoxysilane, ethyltri-sec-butoxysilane, ethyltri-tert-butoxysilane, ethyltriphenoxysilane, n-propyltrimethoxysilane, n-propyltriethoxysilane, n-
Propyltri-n-propoxysilane, n-propyltri-iso-propoxysilane, n-propyltri-n
-Butoxysilane, n-propyltri-sec-butoxysilane, n-propyltri-tert-butoxysilane, n-propyltriphenoxysilane, i-propyltrimethoxysilane, i-propyltriethoxysilane, i-propyltri- n-propoxysilane, i-propyltri-iso-propoxysilane, i-propyltri-n-butoxysilane, i-propyltri-sec
-Butoxysilane, i-propyltri-tert-butoxysilane, i-propyltriphenoxysilane, n-
Butyltrimethoxysilane, n-butyltriethoxysilane, n-butyltri-n-propoxysilane, n-butyltri-iso-propoxysilane, n-butyltri-n-butoxysilane, n-butyltri-sec-butoxysilane, n-butyl Butyltri-tert-butoxysilane, n-butyltriphenoxysilane, sec-butyltrimethoxysilane, sec-butyl-triethoxysilane, sec-butyl-tri-n-propoxysilane,
sec-butyl-tri-iso-propoxysilane, s
ec-butyl-tri-n-butoxysilane, sec-butyl-tri-sec-butoxysilane, sec-butyl-tri-tert-butoxysilane, sec-butyl-
Triphenoxysilane, t-butyltrimethoxysilane, t-butyltriethoxysilane, t-butyltri-
n-propoxysilane, t-butyltri-iso-propoxysilane, t-butyltri-n-butoxysilane,
t-butyltri-sec-butoxysilane, t-butyltri-tert-butoxysilane, t-butyltriphenoxysilane, phenyltrimethoxysilane, phenyltriethoxysilane, phenyltri-n-propoxysilane, phenyltri-iso-propoxysilane , Phenyltri-n-butoxysilane, phenyltri-sec
-Butoxysilane, phenyltri-tert-butoxysilane, phenyltriphenoxysilane, and the like, vinyltrimethoxysilane, vinyltriethoxysilane,
γ-aminopropyltrimethoxysilane, γ-aminopropyltriethoxysilane, γ-glycidoxypropyltrimethoxysilane, γ-glycidoxypropyltriethoxysilane, γ-trifluoropropyltrimethoxysilane, γ-trifluoropropyl And triethoxysilane.

Further, specific examples of the compound represented by the general formula (3) include tetramethoxysilane, tetraethoxysilane, tetra-n-propoxysilane, tetra-i
so-propoxysilane, tetra-n-butoxysilane,
Tetra-sec-butoxysilane, tetra-tert-
Butoxysilane, tetraphenoxysilane, and the like.

Of the compounds (1) to (3), preferably, tetramethoxysilane, tetraethoxysilane, tetra-n-propoxysilane, tetra-iso-propoxysilane, methyltrimethoxysilane, methyltriethoxysilane, methyltriethoxysilane -N-propoxysilane, methyltri-iso-propoxysilane, phenyltrimethoxysilane, phenyltriethoxysilane, dimethyldimethoxysilane, dimethyldiethoxysilane, diphenyldimethoxysilane, diphenyldiethoxysilane, and particularly preferably tetramethoxysilane , Tetraethoxysilane, methyltrimethoxysilane, methyltriethoxysilane, dimethyldimethoxysilane, and dimethyldiethoxysilane. These compounds (1) to
(3) may be used alone or in combination of two or more.

On the other hand, in the general formula (4), R is
It shows a divalent organic group, and s and t show the integer of 0-1. Here, in the general formula (4), examples of the divalent organic group include an alkylene group and an arylene group. Here, the alkylene group includes a methylene group, an ethylene group, and the like, and preferably has 1 to 1 carbon atoms.
2, and a hydrogen atom may be substituted with a fluorine atom or the like. In the general formula (4), examples of the arylene group include a phenylene group and a naphthalene group.

Specific examples of the compound represented by the general formula (4) include bis (trimethoxysilyl) methane, bis (triethoxysilyl) methane, bis (tri-n-propoxysilyl) methane, bis (tri- Bis (trialkoxysilyl) methanes such as i-propoxysilyl) methane, bis (tri-n-butoxysilyl) methane, bis (tri-sec-butoxysilyl) methane and bis (tri-t-butoxysilyl) methane;

1,2-bis (trimethoxysilyl) ethane, 1,2-bis (triethoxysilyl) ethane,
2-bis (tri-n-propoxysilyl) ethane, 1,
2-bis (tri-i-propoxysilyl) ethane, 1,
2-bis (tri-n-butoxysilyl) ethane, 1,2
-Bis (tri-sec-butoxysilyl) ethane, 1,
1,2-bis (trialkoxysilyl) ethanes such as 2-bis (tri-t-butoxysilyl) ethane;

1- (dimethoxymethylsilyl) -1-
(Trimethoxysilyl) methane, 1- (diethoxymethylsilyl) -1- (triethoxysilyl) methane, 1-
(Di-n-propoxymethylsilyl) -1- (tri-n
-Propoxysilyl) methane, 1- (di-i-propoxymethylsilyl) -1- (tri-i-propoxysilyl) methane, 1- (di-n-butoxymethylsilyl)-
1- (tri-n-butoxysilyl) methane, 1- (di-
sec-butoxymethylsilyl) -1- (tri-sec
1- (dialkoxymethylsilyl) -1- (trialkoxysilyl) methanes such as -butoxysilyl) methane and 1- (di-tert-butoxymethylsilyl) -1- (tri-tert-butoxysilyl) methane;

1- (dimethoxymethylsilyl) -2-
(Trimethoxysilyl) ethane, 1- (diethoxymethylsilyl) -2- (triethoxysilyl) ethane, 1-
(Di-n-propoxymethylsilyl) -2- (tri-n
-Propoxysilyl) ethane, 1- (di-i-propoxymethylsilyl) -2- (tri-i-propoxysilyl) ethane, 1- (di-n-butoxymethylsilyl)-
2- (tri-n-butoxysilyl) ethane, 1- (di-
sec-butoxymethylsilyl) -2- (tri-sec
1- (dialkoxymethylsilyl) -2- (trialkoxysilyl) ethanes such as -butoxysilyl) ethane and 1- (di-tert-butoxymethylsilyl) -2- (tri-tert-butoxysilyl) ethane;

Bis (dimethoxymethylsilyl) methane,
Bis (diethoxymethylsilyl) methane, bis (di-n
-Propoxymethylsilyl) methane, bis (di-i-propoxymethylsilyl) methane, bis (di-n-butoxymethylsilyl) methane, bis (di-sec-butoxymethylsilyl) methane, bis (di-t-butoxy) Bis (dialkoxymethylsilyl) methanes such as methylsilyl) methane; 1,2-bis (dimethoxymethylsilyl) ethane, 1,2-bis (diethoxymethylsilyl)
Ethane, 1,2-bis (di-n-propoxymethylsilyl) ethane, 1,2-bis (di-i-propoxymethylsilyl) ethane, 1,2-bis (di-n-butoxymethylsilyl) ethane, 1,2-bis (dialkoxymethylsilyl) ethanes such as 1,2-bis (di-sec-butoxymethylsilyl) ethane and 1,2-bis (di-t-butoxymethylsilyl) ethane;

1,2-bis (trimethoxysilyl) benzene, 1,2-bis (triethoxysilyl) benzene,
1,2-bis (tri-n-propoxysilyl) benzene, 1,2-bis (tri-i-propoxysilyl) benzene, 1,2-bis (tri-n-butoxysilyl) benzene, 1,2-bis (Tri-sec-butoxysilyl)
Benzene, 1,2-bis (tri-t-butoxysilyl) benzene, 1,3-bis (trimethoxysilyl) benzene, 1,3-bis (triethoxysilyl) benzene,
1,3-bis (tri-n-propoxysilyl) benzene, 1,3-bis (tri-i-propoxysilyl) benzene, 1,3-bis (tri-n-butoxysilyl) benzene, 1,3-bis (Tri-sec-butoxysilyl)
Benzene, 1,3-bis (tri-t-butoxysilyl)
Benzene, 1,4-bis (trimethoxysilyl) benzene, 1,4-bis (triethoxysilyl) benzene,
1,4-bis (tri-n-propoxysilyl) benzene, 1,4-bis (tri-i-propoxysilyl) benzene, 1,4-bis (tri-n-butoxysilyl) benzene, 1,4-bis (Tri-sec-butoxysilyl)
Benzene, 1,4-bis (tri-t-butoxysilyl)
Bis (trialkoxysilyl) benzenes such as benzene; and the like. These compounds (4)
May be used alone or in combination of two or more.

In the above compound (4), bis (trialkoxysilyl) methane such as bis (trimethoxysilyl) methane and bis (triethoxysilyl) methane;
1,2-bis (trialkoxysilyl) ethane such as -bis (trimethoxysilyl) ethane and 1,2-bis (triethoxysilyl) ethane; 1- (dimethoxymethylsilyl) -1- (trimethoxysilyl) methane , 1-
1- (dialkoxymethylsilyl)-such as (diethoxymethylsilyl) -1- (triethoxysilyl) methane
1- (dialkoxysilyl) methane; 1- (dialkoxy) such as 1- (dimethoxymethylsilyl) -2- (trimethoxysilyl) ethane and 1- (diethoxymethylsilyl) -2- (triethoxysilyl) ethane Methylsilyl) -2- (trialkoxysilyl) ethane; bis (dialkoxymethylsilyl) methane such as bis (dimethoxymethylsilyl) methane and bis (diethoxymethylsilyl) methane; 1,2-bis (dimethoxymethylsilyl) Ethane, 1,2-bis (diethoxymethylsilyl)
1,2-bis (dialkoxymethylsilyl) ethane such as ethane; 1,2-bis (trimethoxysilyl) benzene, 1,2-bis (triethoxysilyl) benzene,
1,3-bis (trimethoxysilyl) benzene, 1,3
Bis (trialkoxysilyl) benzene such as -bis (triethoxysilyl) benzene, 1,4-bis (trimethoxysilyl) benzene, 1,4-bis (triethoxysilyl) benzene; Bis (trialkoxysilyl) methane such as silyl) methane and bis (triethoxysilyl) methane; 1,2-
1,2-bis (trialkoxysilyl) ethane such as bis (trimethoxysilyl) ethane and 1,2-bis (triethoxysilyl) ethane is preferred.

Compounds (1) to (C) constituting component (A)
When hydrolyzing and condensing (4), it is preferable to use 0.25 to 3 mol of water, and 0.3 to 2.5 mol of water per 1 mol of the group represented by R ¹ O—. It is particularly preferred to add. If the amount of water to be added is in the range of 0.25 to 3 mol, there is no possibility that the uniformity of the coating film is reduced,
In addition, there is little risk of polymer precipitation and gelation during the hydrolysis and condensation reactions.

Compound (1) to Component (A)
When hydrolyzing or condensing (4), a catalyst may be used. Examples of the catalyst used at this time include a metal chelate compound, an organic acid, an inorganic acid, an organic base, and an inorganic base.

Examples of the metal chelate compound include triethoxy mono (acetylacetonate) titanium, tri-n-propoxy mono (acetylacetonate) titanium, tri-i-propoxy mono (acetylacetonate) titanium, -N-butoxy mono (acetylacetonate) titanium, tri-sec-butoxy mono (acetylacetonate) titanium, tri-t-butoxy mono (acetylacetonate) titanium, diethoxy.
Bis (acetylacetonato) titanium, di-n-propoxybis (acetylacetonato) titanium, di-i-
Propoxy bis (acetylacetonate) titanium, di-n-butoxybis (acetylacetonate) titanium, di-sec-butoxybis (acetylacetonato) titanium, di-t-butoxybis (acetylacetonate) Titanium, monoethoxy-tris (acetylacetonato) titanium, mono-n-propoxy-tris (acetylacetonato) titanium, mono-i-propoxy.
Tris (acetylacetonate) titanium, mono-n-butoxytris (acetylacetonate) titanium, mono-sec-butoxytris (acetylacetonate)
Titanium, mono-t-butoxy tris (acetylacetonate) titanium, tetrakis (acetylacetonate)
Titanium, triethoxy mono (ethyl acetoacetate) titanium, tri-n-propoxy mono (ethyl acetoacetate) titanium, tri-i-propoxy mono (ethyl acetoacetate) titanium, tri-n-butoxy mono (ethyl acetoacetate) Acetate) titanium, tri-s
ec-butoxy mono (ethyl acetoacetate) titanium, tri-t-butoxy mono (ethyl acetoacetate) titanium, diethoxy bis (ethyl acetoacetate) titanium, di-n-propoxy bis (ethyl acetoacetate) titanium, Di-i-propoxy bis (ethyl acetoacetate) titanium, di-n-butoxy bis (ethyl acetoacetate) titanium, di-sec-butoxy bis (ethyl acetoacetate) titanium, di-t
-Butoxy bis (ethyl acetoacetate) titanium,
Monoethoxy tris (ethyl acetoacetate) titanium, mono-n-propoxy tris (ethyl acetoacetate) titanium, mono-i-propoxy tris (ethyl acetoacetate) titanium, mono-n-butoxy tris (ethyl acetoacetate) ) Titanium, mono-sec
-Butoxy-tris (ethylacetoacetate) titanium, mono-t-butoxytris (ethylacetoacetate) titanium, tetrakis (ethylacetoacetate)
Titanium chelate compounds such as titanium, mono (acetylacetonate) tris (ethylacetoacetate) titanium, bis (acetylacetonate) bis (ethylacetoacetate) titanium, tris (acetylacetonate) mono (ethylacetoacetate) titanium;

Triethoxy mono (acetylacetonato) zirconium, tri-n-propoxy mono (acetylacetonato) zirconium, tri-i-propoxy mono (acetylacetonato) zirconium, tri-n-butoxy mono (acetyl) (Acetonato) zirconium, tri-sec-butoxy mono (acetylacetonato) zirconium, tri-t-butoxy mono (acetylacetonato) zirconium, diethoxy.
Bis (acetylacetonate) zirconium, di-n-
Propoxy bis (acetylacetonate) zirconium, di-i-propoxy bis (acetylacetonate) zirconium, di-n-butoxybis (acetylacetonate) zirconium, di-sec-butoxy.
Bis (acetylacetonate) zirconium, di-t-
Butoxy bis (acetylacetonate) zirconium, monoethoxy tris (acetylacetonate) zirconium, mono-n-propoxy tris (acetylacetonato) zirconium, mono-i-propoxy.
Tris (acetylacetonate) zirconium, mono-
n-butoxy tris (acetylacetonate) zirconium, mono-sec-butoxy tris (acetylacetonate) zirconium, mono-t-butoxy tris (acetylacetonate) zirconium, tetrakis (acetylacetonate) zirconium, triethoxy. Mono (ethyl acetoacetate) zirconium, tri-n-propoxy mono (ethyl acetoacetate) zirconium, tri-i-propoxy mono (ethyl acetoacetate) zirconium, tri-n-butoxy mono (ethyl acetoacetate) zirconium, Tri-s
ec-butoxy mono (ethyl acetoacetate) zirconium, tri-t-butoxy mono (ethyl acetoacetate) zirconium, diethoxy bis (ethyl acetoacetate) zirconium, di-n-propoxy.
Bis (ethylacetoacetate) zirconium, di-i
-Propoxy bis (ethyl acetoacetate) zirconium, di-n-butoxy bis (ethyl acetoacetate) zirconium, di-sec-butoxy bis (ethyl acetoacetate) zirconium, di-t-butoxy bis (ethyl acetoacetate) ) Zirconium, monoethoxy tris (ethyl acetoacetate) zirconium, mono-n-propoxy tris (ethyl acetoacetate) zirconium, mono-i-propoxy tris (ethyl acetoacetate) zirconium, mono-
n-butoxy tris (ethyl acetoacetate) zirconium, mono-sec-butoxy tris (ethyl acetoacetate) zirconium, mono-t-butoxy.
Tris (ethylacetoacetate) zirconium, tetrakis (ethylacetoacetate) zirconium, mono (acetylacetonate) tris (ethylacetoacetate) zirconium, bis (acetylacetonate) bis (ethylacetoacetate) zirconium, tris (acetylacetonate) Zirconium chelate compounds such as mono (ethylacetoacetate) zirconium;

Aluminum chelate compounds such as aluminum tris (acetylacetonate) and aluminum tris (ethylacetoacetate);

Examples of the organic acid include acetic acid, propionic acid, butanoic acid, pentanoic acid, hexanoic acid, heptanoic acid, octanoic acid, nonanoic acid, decanoic acid, oxalic acid, maleic acid, methylmalonic acid, adipic acid and sebacin Acid, gallic acid, butyric acid, melitic acid, arachidonic acid, shikimic acid,
2-ethylhexanoic acid, oleic acid, stearic acid, linoleic acid, linoleic acid, salicylic acid, benzoic acid, p-
Aminobenzoic acid, p-toluenesulfonic acid, benzenesulfonic acid, monochloroacetic acid, dichloroacetic acid, trichloroacetic acid, trifluoroacetic acid, formic acid, malonic acid, sulfonic acid, phthalic acid, fumaric acid, citric acid, tartaric acid, and the like. it can. Examples of the inorganic acid include hydrochloric acid, nitric acid, sulfuric acid, hydrofluoric acid, phosphoric acid and the like.

Examples of the organic base include pyridine, pyrrole, piperazine, pyrrolidine, piperidine, picoline, trimethylamine, triethylamine, monoethanolamine, diethanolamine, dimethylmonoethanolamine, monomethyldiethanolamine, triethanolamine, diazabicyclooctane, Examples thereof include diazabicyclononane, diazabicycloundecene, and tetramethylammonium hydroxide. Examples of the inorganic base include ammonia, sodium hydroxide, potassium hydroxide, barium hydroxide, calcium hydroxide and the like.

Among these catalysts, metal chelate compounds,
Organic acids and inorganic acids are preferred, and more preferred are organic acids. As the organic acid, acetic acid, oxalic acid, maleic acid, and malonic acid are particularly preferable. As a catalyst,
The use of an organic acid is preferred because the polymer is unlikely to precipitate or gel during the hydrolysis and condensation reactions. These catalysts may be used alone or in combination of two or more.

The amount of the catalyst used is determined by the amount of the compound (1)
With respect to 1 mol of the total amount of the group represented by R ¹ O— in (4),
Usually, 0.00001-0.05 mol, preferably 0.1 mol.
00001 to 0.01 mol.

When the component (A) is a condensate of the compounds (1) to (4), the molecular weight thereof is generally 500 to 300,000 as a weight average molecular weight in terms of polystyrene.
Preferably, it is about 500 to 200,000, more preferably about 1,000 to 100,000.

When each component in the component (A) is converted into a complete hydrolyzed condensate, the component (A-4) becomes (A-
Component 1), component (A-2), component (A-3) and component (A)
-4) It is 5 to 50% by weight, preferably 5 to 45% by weight, more preferably 10 to 45% by weight, based on the total amount of the components, and [weight of component (A-1)] <[(A- 2) Weight of Component], [Weight of Component (A-3)] <[(A-2)
Component weight]. If the amount of the component (A-4) is less than 5% by weight, the mechanical strength of the resulting coating film is reduced, and the CMP resistance is poor. The electrical characteristics of the In addition, if [weight of component (A-1)] <[weight of component (A-2)], [weight of component (A-3)] <[weight of component (A-2)] are not satisfied, The mechanical strength of the resulting coating film is poor. In the present invention, the complete hydrolysis condensate is
Compounds (1) to (4) are those in which 100% of the SiOR ¹ groups are hydrolyzed to form SiOH groups, and are completely condensed to form siloxane structures.

(B) Polyether The (B) polyether is a polyoxyethylene-based polymer represented by the following general formula (5). PEOn-R '(5) (where PEO is a polyethylene oxide unit, R'
Represents a monovalent organic group having 5 to 30 carbon atoms, and n represents an integer of 5 to 50. )

The more detailed structure of the polyether (B) is represented by the following general formula (6). ^{_{R 4 - (CH 2 CH 2}} O) n-R 5 (6) : wherein, R ⁴ represents a hydroxyl group, a carboxyl group, an alkoxy group, a trialkoxysilyl group, a (trialkoxysilyl) alkyl group, in this case , The alkoxy group has 5 or less carbon atoms, R ⁵ represents a monovalent organic group having 5 to 30 carbon atoms, and n represents an integer of 5 to 50. ]

In the above general formula (6), R ⁴ represents a hydroxyl group, a carboxyl group methoxy group, an ethoxy group, a propoxy group, a trimethoxysiloxy group, a triethoxysiloxy group, a tripropoxysiloxy group, a trimethoxysilylmethoxy group. , A triethoxysilylmethoxy group, a 2-trimethoxysilylethoxy group, a 2-triethoxysilylethoxy group, a 3-trimethoxysilylpropoxy group, and a 3-triethoxysilylpropoxy group. A methoxy group can be mentioned, and a hydroxyl group is particularly preferable. In the general formula (6), R ⁵ which is a monovalent organic group is an alkyl group,
Examples include an alkylphenyl group and an alkoxycarbonyl group. Here, examples of the alkyl group include an alkyl group having 5 to 30 carbon atoms, and preferably a straight-chain alkyl group. Examples of the alkylphenyl group include a phenyl group having an alkyl group having 1 to 24 carbon atoms, and preferably an alkyl group having a linear alkyl group at the para position. The alkoxycarbonyl group includes 5 to 30 carbon atoms.
And preferably a straight-chain alkoxycarbonyl group.

Specific examples of the polyether (B) represented by the general formula (6) include polyethylene glycol monopentyl ether, polyethylene glycol monohexyl ether, polyethylene glycol monopeptyl ether, polyethylene glycol monooctyl ether, and polyethylene glycol monooctyl ether. Nonyl ether, polyethylene glycol monodecanyl ether, polyethylene glycol monoundecanyl ether, polyethylene glycol monododecanyl ether, polyethylene glycol monotridecanyl ether, polyethylene glycol monotetradecanyl ether, polyethylene glycol monopentadecanyl ether, polyethylene glycol monopentadecanyl ether, polyethylene glycol mono Hexadecanyl ether, polyethylene glycol monoheptadecane Ter, polyethylene glycol monooctadecanyl ether, polyethylene glycol monononadecanyl ether, polyethylene glycol monoicosanyl ether, polyethylene glycol monohenicosanyl ether, polyethylene glycol monodocosanyl ether, polyethylene glycol monotricosanyl ether, polyethylene glycol monotricosanyl ether, polyethylene glycol monotetra Cosanil ether, polyethylene glycol monopentacosanyl ether, polyethylene glycol monohexacosanyl ether, polyethylene glycol monoheptacosanyl ether, polyethylene glycol monooctacosanyl ether, polyethylene glycol monononacosanyl ether, polyethylene glycol monotriacontanyl ether Such as polyethylene glyco Alkyl ethers and their methyl ethers, ethyl ether, propyl ether, trimethoxysilyl ether, triethoxysilyl ether, tripropoxysilyl ether, trimethoxysilyl methyl ether, triethoxysilyl methyl ether, 2-trimethoxysilyl ethyl ether, 2-triethoxysilyl ethyl ether, 3
Polyethylene glycol alkyl ether derivatives such as -trimethoxysilylpropyl ether, 3-triethoxysilylpropyl ether;

Polyethylene glycol mono-p-methylphenyl ether, polyethylene glycol mono-p-
Ethyl phenyl ether, polyethylene glycol mono-p-propyl phenyl ether, polyethylene glycol mono-p-butyl phenyl ether, polyethylene glycol mono-p-pentyl phenyl ether, polyethylene glycol mono-p-hexyl phenyl ether, polyethylene glycol mono-p- Peptyl phenyl ether, polyethylene glycol mono-p-octyl phenyl ether, polyethylene glycol mono-p
-Nonylphenyl ether, polyethylene glycol mono-p-decanylphenyl ether, polyethylene glycol mono-p-undecanylphenyl ether, polyethylene glycol mono-p-dodecanylphenyl ether, polyethylene glycol mono-p-tridecanylphenyl ether , Polyethylene glycol mono-p-
Tetradecanyl phenyl ether, polyethylene glycol mono-p-pentadecanyl phenyl ether, polyethylene glycol mono-p-hexadecanyl phenyl ether, polyethylene glycol mono-p-heptadecanyl phenyl ether, polyethylene glycol mono-p-octadeca Nyl phenyl ether, polyethylene glycol mono-p-nonadecanyl phenyl ether,
Polyethylene glycol mono-p-icosanyl phenyl ether, polyethylene glycol mono-p-henicosanyl phenyl ether, polyethylene glycol mono-
Polyethylene glycol-p-alkylphenyl ethers such as p-docosanyl phenyl ether, polyethylene glycol mono-p-tricosanyl phenyl ether, polyethylene glycol mono-p-tetracosanyl phenyl ether and methyl ether, ethyl ether, propyl thereof Ether, trimethoxysilyl ether, triethoxysilyl ether, tripropoxysilyl ether, trimethoxysilylmethyl ether, triethoxysilylmethyl ether, 2-trimethoxysilylethyl ether, 2-triethoxysilylethylether, 3-trimethoxysilyl Propyl ether, 3-
Polyethylene glycol-p-alkylphenyl ether derivatives such as triethoxysilylpropyl ether;

Polyethylene glycol monopentanoate, polyethylene glycol monohexanoate, polyethylene glycol monoheptanoate,
Polyethylene glycol monooctanoate, polyethylene glycol monononanoate, polyethylene glycol monodecanoate, polyethylene glycol monoundecanoate, polyethylene glycol monododecanoate, polyethylene glycol monotridecanoate, polyethylene glycol monotetradecanoate, Polyethylene glycol monopentadecanoate, polyethylene glycol monohexadecanoate, polyethylene glycol monoheptadecanoate, polyethylene glycol monooctadecanoate, polyethylene glycol monononadecanoate, polyethylene glycol monoicosanoate, polyethylene glycol monohexanoate Sanate ester Polyethylene glycol monodocosanoate, polyethylene glycol monotricosanoate, polyethylene glycol monotetracosanoate, polyethylene glycol monopentacosanoate, polyethylene glycol monohexacosanoate, polyethylene glycol monoheptacosanoate, polyethylene glycol Polyethylene glycol alkyl esters such as monooctacosanoate, polyethylene glycol monononaconate, and polyethylene glycol monotriacontanate, and methyl ether and ethyl ether thereof,
Propyl ether, trimethoxysilyl ether, triethoxysilyl ether, tripropoxysilyl ether, trimethoxysilylmethyl ether, triethoxysilylmethyl ether, 2-trimethoxysilylethyl ether, 2-triethoxysilylethylether, 3
And polyethylene glycol alkyl ester derivatives such as -trimethoxysilylpropyl ether and 3-triethoxysilylpropyl ether.

In the present invention, when the above-mentioned (B) polyether is used, the density of the obtained coating film becomes low and the dielectric constant becomes low, and the thickness uniformity of the coating film becomes extremely good. It is preferable as an interlayer insulating film material.
(B) The polyether-equivalent weight average molecular weight of the polyether is usually 300 to 3,000, preferably 300 to 3,000.
2,500.

The amount of the polyether (B) to be used is generally 1 to 80 parts by weight, preferably 5 to 65 parts by weight, per 100 parts by weight of the component (A) (in terms of a completely hydrolyzed condensate). If the amount is less than 1 part by weight, the effect of lowering the dielectric constant is small,
On the other hand, when the amount exceeds 80 parts by weight, the mechanical strength decreases.

(C) Solvent The film-forming composition of the present invention comprises the component (A) and the polyether (B), which are prepared by converting the component (A) from the group of an alcohol solvent, a ketone solvent, an amide solvent and an ester solvent. It is dissolved or dispersed in at least one selected solvent.

Here, as the alcohol solvent, methanol, ethanol, n-propanol, i-propanol, n-butanol, i-butanol, sec-butanol, t-butanol, n-pentanol, i-pentanol, 2-methylbutanol, sec-pentanol, t-pentanol, 3-methoxybutanol, n-
Hexanol, 2-methylpentanol, sec-hexanol, 2-ethylbutanol, sec-heptanol, heptanol-3, n-octanol, 2-ethylhexanol, sec-octanol, n-nonyl alcohol, 2,6-dimethylheptanol -4, n-decanol, sec-undecyl alcohol, trimethylnonyl alcohol, sec-tetradecyl alcohol, s
ec-heptadecyl alcohol, phenol, cyclohexanol, methylcyclohexanol, 3,3,5-
Trimethylcyclohexanol, benzyl alcohol,
Monoalcohol solvents such as diacetone alcohol;

Ethylene glycol, 1,2-propylene glycol, 1,3-butylene glycol, pentanediol-2,4,2-methylpentanediol-2,
4, hexanediol-2,5, heptanediol-
Polyhydric alcohol solvents such as 2,4,2-ethylhexanediol-1,3, diethylene glycol, dipropylene glycol, triethylene glycol, and tripropylene glycol; ethylene glycol monomethyl ether, ethylene glycol monoethyl ether, ethylene glycol monopropyl Ether, ethylene glycol monobutyl ether, ethylene glycol monohexyl ether, ethylene glycol monophenyl ether,
Ethylene glycol mono-2-ethyl butyl ether,
Diethylene glycol monomethyl ether, diethylene glycol monoethyl ether, diethylene glycol monopropyl ether, diethylene glycol monobutyl ether, diethylene glycol monohexyl ether, propylene glycol monomethyl ether, propylene glycol monoethyl ether, propylene glycol monopropyl ether, propylene glycol monobutyl ether, dipropylene glycol monomethyl ether , Dipropylene glycol monoethyl ether,
Polyhydric alcohol partial ether solvents such as dipropylene glycol monopropyl ether; and the like. One or two of these alcohol solvents are used.
More than one species may be used simultaneously.

Of these alcohol solvents, n-propanol, i-propanol, n-butanol and i-propanol
Butanol, sec-butanol, t-butanol, n
-Pentanol, i-pentanol, 2-methylbutanol, sec-pentanol, t-pentanol, 3-
Preferred are methoxybutanol, n-hexanol, 2-methylpentanol, sec-hexanol, 2-ethylbutanol, propylene glycol monomethyl ether, propylene glycol monoethyl ether, propylene glycol monopropyl ether, propylene glycol monobutyl ether, and the like.

As ketone solvents, acetone, methyl ethyl ketone, methyl-n-propyl ketone, methyl-
n-butyl ketone, diethyl ketone, methyl-i-butyl ketone, methyl-n-pentyl ketone, ethyl-n-
Butyl ketone, methyl-n-hexyl ketone, di-i-
Butyl ketone, trimethylnonanone, cyclohexanone, 2-hexanone, methylcyclohexanone, 2,4
-In addition to pentanedione, acetonylacetone, acetophenone, fenchone, etc., acetylacetone, 2,
4-hexanedione, 2,4-heptanedione, 3,5
-Heptanedione, 2,4-octanedione, 3,5-
Octanedione, 2,4-nonanedione, 3,5-nonanedione, 5-methyl-2,4-hexanedione, 2,
2,6,6-tetramethyl-3,5-heptanedione,
Β-diketones such as 1,1,1,5,5,5-hexafluoro-2,4-heptanedione and the like can be mentioned.
These ketone solvents may be used alone or in combination of two or more.

As amide solvents, formamide, N
-Methylformamide, N, N-dimethylformamide, N-ethylformamide, N, N-diethylformamide, acetamide, N-methylacetamide,
N-dimethylacetamide, N-ethylacetamide,
N, N-diethylacetamide, N-methylpropionamide, N-methylpyrrolidone, N-formylmorpholine, N-formylpiperidine, N-formylpyrrolidine, N-acetylmorpholine, N-acetylpiperidine, N-acetylpyrrolidine and the like. Can be One or two or more of these amide solvents may be used simultaneously.

Examples of the ester solvent include diethyl carbonate, ethylene carbonate, propylene carbonate, diethyl carbonate, methyl acetate, ethyl acetate, γ-butyrolactone, γ
-Valerolactone, n-propyl acetate, i-propyl acetate, n-butyl acetate, i-butyl acetate, sec-butyl acetate, n-pentyl acetate, sec-pentyl acetate, 3-methoxybutyl acetate, methylpentyl acetate, acetic acid 2-ethylbutyl, 2-ethylhexyl acetate, benzyl acetate,
Cyclohexyl acetate, methyl cyclohexyl acetate, n-nonyl acetate, methyl acetoacetate, ethyl acetoacetate, ethylene glycol monomethyl ether acetate, ethylene glycol monoethyl ether, diethylene glycol monomethyl ether acetate, diethylene glycol monoethyl acetate, diethylene glycol mono-acetate
n-butyl ether, propylene glycol monomethyl ether acetate, propylene glycol monoethyl ether acetate, propylene glycol monopropyl ether acetate, propylene glycol monobutyl ether acetate, dipropylene glycol monomethyl ether acetate, dipropylene glycol monoethyl ether acetate, glycol diacetate, acetic acid Methoxy triglycol, ethyl propionate, n-butyl propionate, i-amyl propionate, diethyl oxalate, di-n-butyl oxalate, methyl lactate, ethyl lactate, n-butyl lactate, n-amyl lactate, malonic acid Examples thereof include diethyl, dimethyl phthalate, and diethyl phthalate. These ester solvents include 1
Species or two or more species may be used simultaneously. The above-mentioned solvent (C) can be used alone or in combination of two or more.

The use of an alcohol solvent and / or a ketone solvent as the solvent (C) is preferred in that a composition having good coatability and excellent storage stability can be obtained.

The film-forming composition of the present invention comprises the above (C)
Compound (1) containing a solvent but constituting component (A)
When hydrolyzing and / or condensing (4), the same solvent can be used.

Specifically, water or water diluted in the solvent (C) is added intermittently or continuously to a solvent in which the compounds (1) to (4) constituting the component (A) are dissolved. I do. At this time, the catalyst may be added to the solvent in advance, or may be dissolved or dispersed in water at the time of adding water. The reaction temperature at this time is usually 0 to 1
00 ° C, preferably 15 to 90 ° C.

Other Additives Components such as colloidal silica, colloidal alumina and a surfactant may be further added to the film-forming composition obtained in the present invention. The colloidal silica is, for example, a dispersion in which high-purity silicic anhydride is dispersed in the hydrophilic organic solvent, and usually has an average particle size of 5 to 30 mμ, preferably 10 to 20 mμ, and a solid content of 10 to 10 μm. It is about 40% by weight. As such colloidal silica,
Examples thereof include methanol silica sol and isopropanol silica sol manufactured by Nissan Chemical Industries, Ltd .; Examples of the colloidal alumina include alumina sol 5 manufactured by Nissan Chemical Industries, Ltd.
20, 100 and 200; alumina clear sol, alumina sol 10, manufactured by Kawaken Fine Chemical Co., Ltd.
132 and the like. Examples of the surfactant include an anionic surfactant, a cationic surfactant, an amphoteric surfactant, and the like, and further, a silicone surfactant, a fluorine-containing surfactant, and the like.

Method for Preparing Film-Forming Composition In preparing the film-forming composition of the present invention, for example, compound (1) constituting component (A) in a solvent (C)
After mixing (4) and adding water continuously or intermittently to hydrolyze and condense to prepare the component (A),
The polyether (B) may be added to this, and there is no particular limitation.

Specific examples of the method for preparing the composition of the present invention include the following methods. A predetermined amount of water is added to a mixture of the compounds (1) to (4) constituting the component (A) and the solvent (C) to carry out a hydrolysis / condensation reaction, and then the component (B) is mixed. how to. After a predetermined amount of water is continuously or intermittently added to a mixture of the compounds (1) to (4) and the component (C) constituting the component (A), hydrolysis and condensation reactions are performed. (B) A method of mixing the components. Compounds (1) to (4) constituting component (A), (B)
A method in which a predetermined amount of water is added to a mixture composed of the component and the component (C) to perform a hydrolysis / condensation reaction. Compounds (1) to (4) constituting component (A), (B)
A method in which a predetermined amount of water is continuously or intermittently added to a mixture composed of the component and the component (C) to perform a hydrolysis and condensation reaction.

The total solid content of the composition of the present invention thus obtained is preferably 2 to 30% by weight.
It is appropriately adjusted according to the purpose of use. When the total solid content of the composition is 2 to 30% by weight, the thickness of the coating film is in an appropriate range, and the storage stability is more excellent. The adjustment of the total solid content concentration is performed by concentration or dilution with the solvent (C), if necessary. Further, the composition of the present invention is excellent in storage stability. For example, when the change in the coating film thickness before and after being left at 40 ° C. for one month in a closed glass container is measured, the rate of change is within 10%. .

In order to form a film using the composition of the present invention, first, the composition of the present invention is applied to a substrate to form a coating film. Here, examples of the substrate on which the composition of the present invention can be applied include a semiconductor, glass, ceramics, and metal. In addition, examples of the coating method include spin coating, dipping, and a roller blade. The compositions of the present invention, in particular a silicon wafer, SiO ₂
It is applied on a wafer, a SiN wafer, or the like, and is suitable for forming an insulating film.

In this case, the film thickness may be about 0.05 to 1.5 μm in a single coating, and about 0.1 to 3 μm in a double coating. it can. The thickness of the coating film to be formed is usually 0.2 to 20 μm.
As a heating method at this time, a hot plate, an oven, a furnace, or the like can be used. As a heating atmosphere, the heating is performed under air, a nitrogen atmosphere, an argon atmosphere, a vacuum, a reduced pressure in which the oxygen concentration is controlled, or the like. Can be. As this heating method, the formed coating film,
The component (A) is partially cured by heating at a temperature lower than the decomposition temperature of the component (B), and then heated from a temperature not lower than the decomposition temperature of the component (B) to the final curing temperature to obtain a low-density cured product. And a method in which heating is performed at a temperature equal to or higher than the decomposition temperature of the above-mentioned component (B) and curing is performed to obtain a low-density cured product.

In order to control the curing speed of the component (A) and the decomposition speed of the component (B), if necessary,
Heating can be performed stepwise, or an atmosphere such as nitrogen, air, oxygen, or reduced pressure can be selected. Usually, the decomposition temperature of the component (B) is usually from 200 to 400 ° C, preferably from 200 to 400 ° C.
Since the temperature is 350 ° C., the film includes a step of being finally heated to this temperature or more. This step is preferably performed under reduced pressure or under an inert gas.

The low-density film of the present invention thus obtained has a film density of usually 0.35 to 1.2 g / cm ³ ,
Preferably it is 0.4-1.1 g / cm < ³ >, More preferably, it is 0.5-1.0 g / cm < ³ >. 0.35g / cm
^If it is less than ³ , the mechanical strength of the coating film decreases, while 1.2
If it exceeds g / cm ³ , a low dielectric constant cannot be obtained. The adjustment of the film density can be easily adjusted by the content of the component (B) in the film-forming composition of the present invention.

The low-density film of the present invention is characterized in that it has a low water absorption.
Atm, 100% RH, when left for 1 hour
From the IR spectrum observation of the coating film after standing, no water is adsorbed on the coating film. This water absorption can be achieved by adjusting the content of the component (A-4) in the film-forming composition of the present invention to the range described in the present invention.

Further, the dielectric constant of the low-density film of the present invention is:
It has a low dielectric constant, usually 2.6 to 1.2, preferably 2.5 to 1.2, and more preferably 2.4 to 1.2. This dielectric constant can be adjusted by the content of the component (B) in the coating film forming composition of the present invention.

The low-density film of the present invention is characterized in that the film thickness uniformity is extremely good. For example, the composition for forming a film is coated on an 8-inch silicon wafer by using a spin coater, and then in air at 80 ° C. for 5 minutes, and then at 200 ° C. under nitrogen.
At 340 ° C. under a vacuum for 36 minutes.
The coating is heated in the order of 0 ° C. and 380 ° C. for 30 minutes each, and further heated at 425 ° C. for 1 hour under vacuum to form a coating film.
The thickness of the obtained film is measured by an optical film thickness meter (Rudolph).
Spectra La, manufactured by Technologies
When 50 points are measured in the coating film surface using (ser200), 3σ (σ: standard deviation) is less than 2%, the film thickness uniformity is very good, and it is preferable as a material for an interlayer insulating film between fine wirings. This extremely good film thickness uniformity can be achieved by using the component (B) in the present invention.

The low-density film of the present invention has excellent insulating properties, and is excellent in uniformity of coating film, dielectric constant, crack resistance of coating film, surface hardness of coating film, CMP resistance and the like.
System LSI, DRAM, SDRAM, RDRAM,
It is useful for applications such as interlayer insulating films for semiconductor devices such as D-RDRAMs, protective films such as surface coat films for semiconductor devices, interlayer insulating films for multilayer wiring boards, protective films for liquid crystal display devices, and insulating films.

[0063]

EXAMPLES Hereinafter, the present invention will be described more specifically with reference to examples. However, the following description generally shows an embodiment of the present invention, and the present invention is not limited by the description without any particular reason. Parts and% in Examples and Comparative Examples indicate parts by weight and% by weight, respectively, unless otherwise specified.

Example 1 Preparation of Component (A);
6 g (completely hydrolyzed condensate conversion: 120.0 g), 1,
214.5 g of 2-bis (triethoxysilyl) ethane
1.0 g of maleic acid (total of catalyst / R ¹ O groups) was added to a mixed solution of 559.3 g of propylene glycol monopropyl ether and 239.7 g of methyl-n-pentyl ketone. Number of moles = 0.00
( ¹ mol ratio) dissolved in 162.0 g of water (total mole number of H ₂ O / R ¹ O = 1.0 mol ratio) was added dropwise over 1 hour at room temperature. After dropping of the mixture is completed, the temperature is further increased to 60 ° C.
After reacting for 2 hours, the total amount of the solution was reduced to 1,000 under reduced pressure.
g to obtain a polysiloxane sol having a solid content of 20%. Preparation of composition; 100 g of polysiloxane sol obtained above
(Solid content: 20 g), polyethylene glycol monoundecanoate (oxyethylene repeating number = 10)
8.6 g was added, and the obtained mixture was applied on an 8-inch silicon wafer by a spin coating method.
For 5 minutes, and then at 200 ° C. for 5 minutes under nitrogen, and then further heat in vacuum at 340 ° C., 360 ° C., and 380 ° C. for 30 minutes each, and further under vacuum at 425 ° C.
For 1 hour to form a colorless and transparent film. Further, the obtained compositions and films were evaluated as described below. Table 1 shows the results.

Evaluation of Film Forming Composition Storage Stability 80 ml of the film-forming composition of the present invention is filled with a volume of 100 m.
1 and sealed in a glass screw-necked bottle, and left for 1 month in a 40 ° C. autoclave. 25 samples before and after standing
The film was coated under a spin coating condition of 00 rpm and 31 seconds and baked by the method described in Example 1 above, and the film thickness was measured using an optical film thickness meter (Rudolph Technologies, S
Spectra Laser 200) to calculate the rate of change {[(thickness of sample after standing−thickness of sample before leaving) / thickness of sample before leaving] × 100}, and based on the following criteria: evaluated. ：: film thickness change rate <10% ×: film thickness change rate ≧ 10%

2. Film thickness uniformity The film forming composition was applied on an 8-inch silicon wafer using a spin coater under conditions of a rotation speed of 2,500 rpm and 31 seconds. Thereafter, the film thickness when fired by the method described in Example 1 above was measured using an optical film thickness meter (Rudolph).
Spectra La, manufactured by Technologies
(Ser200) was used to measure 50 points in the coating film surface. 3σ (σ: standard deviation) of the obtained film thickness was calculated and evaluated according to the following criteria. ：: 3σ of coating film is less than 2% ×: 3σ of coating film is 2% or more

3. Dielectric constant An aluminum electrode pattern was formed on the obtained film by a vapor deposition method to prepare a sample for dielectric constant measurement. The sample was sampled at a frequency of 100 kHz using an HP16451B electrode and HP4284A precision LCR meter manufactured by Yokogawa-Hewlett-Packard Co., Ltd.
The dielectric constant of the coating film was measured by the V method. Table 1 shows the results.

4. Film density The density was calculated from the volume obtained from the film thickness and the film area, and the weight of the film. 5. Elastic Modulus The obtained film was measured by a continuous stiffness measurement method using a nano indenter XP (manufactured by Nano Instruments).

6. Water absorption at 127 ° C, 2.5atm, 100% R
H, was left for 1 hour in the environment, and the IR spectrum of the coating film after the standing was observed. Compared with the IR spectrum of the coating film before standing, the presence or absence of absorption due to H2O near 3,500 cm ^-1 was observed, and the water absorption was evaluated according to the following criteria. ○: No absorption ×: Absorption

7. CMP resistance The obtained film was polished under the following conditions. Slurry: silica-hydrogen peroxide polishing pressure: 300 g / cm ² polishing time: 60 seconds The evaluation was performed according to the following criteria. ：: No change Δ: Partially peeled or scratched. X: All are peeled.

Example 2 Preparation of component (A): 50.7 g of tetramethoxysilane
(In terms of completely hydrolyzed condensate: 20.0 g), 162.4 g of methyltrimethoxysilane (in terms of completely hydrolyzed condensate: 80.0 g), and 32.4 g of dimethyldimethoxysilane
g (in terms of complete hydrolysis condensate: 20.0 g), 1,2-
To a mixed solution of 230.5 g of bis (triethoxysilyl) methane (80.0 g in terms of complete hydrolysis condensate) and 798.9 g of propylene glycol monomethyl ether, 0.9 g of oxalic acid (total mole of catalyst / R ¹ O group) Number = 0.00
(1 mol ratio) in 171.3 g of water (total mole number of H ₂ O / R ¹ O = 1.0 mol ratio) was added dropwise at room temperature over 1 hour. After dropping of the mixture is completed, the temperature is further increased to 60 ° C.
After reacting for 2 hours, the total amount of the solution was reduced to 1,000 under reduced pressure.
g to obtain a polysiloxane sol having a solid content of 20%. Preparation of composition; 100 g of polysiloxane sol obtained above
(Solid content: 20 g), polyethylene glycol monoundecanoate (oxyethylene repeating number = 10)
10.8 g was added, and the resulting mixture was applied on an 8-inch silicon wafer by a spin coating method.
After heating at 200 ° C. for 5 minutes and then under nitrogen at 200 ° C. for 5 minutes, further heating under vacuum at 340 ° C., 360 ° C. and 380 ° C. for 30 minutes each, and further under vacuum at 425 ° C.
For 1 hour to form a colorless and transparent film. Evaluation of the obtained composition and film was performed in the same manner as in Example 1.
Table 1 shows the results.

Example 3 Preparation of Component (A); Tetramethoxysilane 101.3
g (complete hydrolyzed condensate: 40.0 g), methyltrimethoxysilane 203.0 g (complete hydrolyzed condensate: 100.0 g), 1,2-bis (triethoxysilyl) ethane 160.9 g (complete) Hydrolysis condensate conversion: 6
0.0g), 783.2 g of propylene glycol monopropyl ether, di-i-propoxybis (ethylacetoacetate) titanium (catalyst / total mole number of R ¹ O =
177.5 g of water was added to the mixed solution (0.004 mol ratio).
(Total mole number of H ₂ O / R ¹ O groups = 1.0 mol ratio)
The mixture was added dropwise over 1 hour while heating at 0 ° C. After the addition of the mixture was completed, the mixture was further reacted at 60 ° C. for 2 hours, and then 100.0 g of acetylacetone was added. Thereafter, the mixture was concentrated under reduced pressure until the total solution amount reached 1,000 g, and the polysiloxane having a solid content of 20% was obtained. A sol was obtained. Preparation of composition; 100 g of polysiloxane sol obtained above
(Solid content: 20 g), polyethylene glycol monoundecanoate (oxyethylene repeating number = 10)
8.6 g was added, and the obtained mixture was applied on an 8-inch silicon wafer by a spin coating method.
For 5 minutes, and then at 200 ° C. for 5 minutes under nitrogen, and then further heat in vacuum at 340 ° C., 360 ° C., and 380 ° C. for 30 minutes each, and further under vacuum at 425 ° C.
For 1 hour to form a colorless and transparent film. Evaluation of the obtained composition and film was performed in the same manner as in Example 1.
Table 1 shows the results.

Comparative Example 1 A composition was prepared in the same manner as in Example 1 except that polyethylene glycol monoundecanoate (oxyethylene repeating number = 10) was not used, and the composition was applied to a substrate and heated. Thus, a film was formed. Evaluation of the obtained composition and film was performed in the same manner as in Example 1.
Table 1 shows the results.

Comparative Example 2 In Example 1, 559.3 g of propylene glycol monopropyl ether and methyl-n-pentyl ketone 2
Without using 39.7 g, instead of tetrahydrofuran 7
A composition was prepared in the same manner as in Example 1 except that 99.0 g was used, applied to a substrate, and heated to form a film. Evaluation of the obtained composition and film was performed in the same manner as in Example 1. Table 1 shows the results.

Comparative Example 3 In Example 1, polyethylene glycol monoundecanoate (oxyethylene repeating number = 10)
A composition was prepared in the same manner as in Example 1, except that 8.6 g was not used and a polymethyl methacrylate resin (molecular weight: 20,000) was used instead, and the composition was applied to a substrate and heated to form a film. . Evaluation of the obtained composition and film was performed in the same manner as in Example 1. Table 1 shows the results.

[0076]

[Table 1]

[0077]

According to the present invention, there is provided a film-forming composition having excellent storage stability, a uniform film obtained, low density, low dielectric constant, low water absorption, and excellent CMP resistance. can do.

 ──────────────────────────────────────────────────続 き Continued on the front page (72) Inventor Eiji Hayashi 2--11-24 Tsukiji, Chuo-ku, Tokyo Inside JSR Co., Ltd. Inside (72) Inventor Kinji Yamada 2--11-24 Tsukiji, Chuo-ku, Tokyo Inside JSR Co., Ltd. (72) Inventor Kohei Goto 2-11-24 Tsukiji, Chuo-ku, Tokyo JSR Co., Ltd. Term (reference) 4J038 DF022 DL021 DL031 JC32 KA06 NA21 PA19 PB09 5F058 AA04 AA10 AC03 AF04 AG01 AH01 AH02 BA07 BA20 BC05 BF46 BH01 BJ01 BJ02

Claims (7)

[Claims] (A) (A-1) a compound represented by the following general formula (1), (A-2) a compound represented by the following general formula (2), and (A-3) a compound represented by the following general formula A silane compound containing at least one selected from the group of compounds represented by (3) and (A-4) a compound represented by the following general formula (4), a hydrolyzate thereof, and / or The condensate, (R ^{1 to} R ³ may be the same or different, each represents a monovalent organic group, R represents a divalent organic group, and s and t are integers of 0 to 1.) (B) General formula A polyether represented by PEOn-R '(where PEO is a polyethylene oxide unit, R' is a monovalent organic group having 5 to 30 carbon atoms, and n is an integer of 5 to 50); A composition for forming a film, comprising at least one solvent selected from the group consisting of a system solvent, a ketone solvent, an amide solvent and an ester solvent. 2. In the component (A), when each component is converted into a completely hydrolyzed condensate, the component (A-4) is the component (A-1), the component (A-2), and the component (A-3). ) Component and (A-4)
5 to 50% by weight based on the total amount of the components, and [(A
-1) Weight of Component] <[Weight of Component (A-2)],
2. The film-forming composition according to claim 1, wherein [weight of component (A-3)] <[weight of component (A-2)]. 3. The film-forming composition according to claim 1, wherein the solvent (C) is an alcohol solvent and / or a ketone solvent. 4. A method for forming a film, comprising applying the composition for film formation according to claim 1 to a substrate and heating the substrate. 5. The composition for forming a film according to claim 1, which is applied to a substrate and heated at a temperature lower than the decomposition temperature of the component (B) to partially cure the component (A). 5. The method according to claim 4, wherein the film is cured by heating at a temperature equal to or higher than the decomposition temperature of the component (B). 6. The film-forming composition according to claim 4, wherein the film-forming composition according to any one of claims 1 to 3 is applied to a substrate, and is heated and cured at a temperature equal to or higher than the decomposition temperature of the component (B). Forming method. 7. A low-density film obtained by the method for forming a film according to any one of claims 4 to 6.