CN209513623U - Grating beam splitting formula while multiple spot laser induced breakdown spectroscopy measuring system - Google Patents
Grating beam splitting formula while multiple spot laser induced breakdown spectroscopy measuring system Download PDFInfo
- Publication number
- CN209513623U CN209513623U CN201920120046.5U CN201920120046U CN209513623U CN 209513623 U CN209513623 U CN 209513623U CN 201920120046 U CN201920120046 U CN 201920120046U CN 209513623 U CN209513623 U CN 209513623U
- Authority
- CN
- China
- Prior art keywords
- laser
- spherical lens
- sample
- induced breakdown
- breakdown spectroscopy
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Abstract
The utility model discloses a kind of grating beam splitting formula while multiple spot laser induced breakdown spectroscopy measuring systems, including high energy pulse laser emitter, diffraction grating, mesoporous reflecting mirror, first spherical lens, second spherical lens, fiber optic bundle, spectrometer and control device, diffraction grating, in the optical path for the laser that mesoporous reflecting mirror and the first spherical lens are successively set on high energy pulse laser transmitter projects, the first spherical lens is disposed in the luminous optical path of the plasma array that sample to be tested surface is formed, mesoporous reflecting mirror, second spherical lens, fiber optic bundle and spectrometer, control device is used to control the spatial position of time synchronization and sample to be tested between high energy pulse laser emitter and spectrometer.The utility model analyze simultaneously to array focal spot position plasma emission spectroscopy, realizes the laser induced breakdown spectroscopy measurement of single multiple spot, while the utility model is a kind of compact while multiple spot laser induced breakdown spectroscopy measuring system.
Description
Technical field
The utility model relates to spectral measurement field more particularly to a kind of grating beam splitting formula while multiple spot laser-induced breakdowns
Spectral measurement system.
Background technique
Laser induced breakdown spectroscopy is the detection that a kind of atom spectrum technology is used for element, is mainly based upon high energy arteries and veins
Laser ablation sample is rushed, the information such as the intensity of spectral line, position in the luminescent spectrum of laser plasma are obtained, analyzes member contained by sample
Ratio between element and each element ingredient, have it is easy, quickly, without sample pretreatment, simultaneous determination of multielement, complicated ring
The advantages that border original position real-time detection, environment measuring, Industry Control, bio-safety, in terms of have it is huge
Application prospect.
It is limited by laser energy and Optical System Design limitation, laser induced breakdown spectroscopy is swashed using single-point at present
The mode of hair, collimation laser are directly focused lens focus into the hot spot of a hundred um magnitudes, are once merely capable of obtaining
The sample composition in the region.In order to obtain sample entirety Elemental redistribution, need by the way of point by point scanning, accordingly researcher
Obtain the distribution diagram of element of flame, shell etc..However the mode gradually scanned takes a long time, and for detonation, tail gas row
Equal rapid developments process is put, the element distribution image that can not be obtained using point by point scanning, it is necessary to be the ingredient that synchronization obtains
Image could have the understanding being more clear to the physical process.
Therefore, develop laser induced breakdown spectroscopy new method of measuring, make full use of pulsed laser energy, realize the more of sample
Point element measurement simultaneously will be of great significance to the development and application of laser induced breakdown spectroscopy.
Utility model content
The technical problem to be solved by the utility model is in view of the problems of the existing technology, the utility model proposes
A kind of grating beam splitting formula multiple spot laser induced breakdown spectroscopy measuring system simultaneously, using the multiorder diffractive of special grating, in conjunction with
Collimation laser is focused into the identical array focal spot of equal multiple spacing, energy coincidence, focal spot size by lens.Array focal spot ablation
Sample surfaces form multiple plasma points, and use imaging spectrum system, to array focal spot position plasma emission spectroscopy
It carries out while analyzing, realize the laser induced breakdown spectroscopy measurement of single multiple spot.The utility model is using conllinear excitation simultaneously
Collection mode is a kind of compact multiple spot laser induced breakdown spectroscopy measuring system simultaneously.
A kind of grating beam splitting formula provided by the utility model multiple spot laser induced breakdown spectroscopy measuring system, including height simultaneously
Energy impulse laser emitter, diffraction grating, mesoporous reflecting mirror, the first spherical lens, the second spherical lens, fiber optic bundle, spectrometer
And control device, diffraction grating, mesoporous reflecting mirror and the first spherical lens are successively set on high energy pulse laser transmitter projects
Laser optical path on, sample to be tested is placed on the focal position of the first spherical lens, diffraction grating be used for laser beam splitter be
Multiple laser beamlets, all laser beamlets focus on sample to be tested surface by the first spherical lens through after mesoporous reflecting mirror, to
Sample surface forms plasma array；
It is saturating that the first spherical lens, mesoporous reflecting mirror, the second spherical surface are disposed in the luminous optical path of plasma array
Mirror, fiber optic bundle and spectrometer, the first spherical lens shine for collecting plasma array；Mesoporous reflecting mirror is used for plasma
Volume array shines and is folded to fiber optic bundle direction；Second spherical lens is used for plasma array luminescence imaging to fiber optic bundle surface；
Fiber optic bundle is used to shine plasma array as being transferred to entrance spectrometer slit；Spectrometer is sent out for plasma array
Light carries out spectrum analysis, obtains the luminous intensity of the luminous middle different wave length of plasma array；
Control device is connect with high energy pulse laser emitter and spectrometer, for control high energy pulse laser emitter and
The spatial position of time synchronization and sample to be tested between spectrometer.
Further, the laser of high energy pulse laser transmitter projects is nanosecond laser, picosecond laser or femtosecond laser.
Further, the energy coincidence of every Shu Jiguang beamlet of diffraction grating beam splitting, angle is equal between adjacent beams.
Further, the focal spot being focused by the first spherical lens is that equal spacing, energy coincidence and focal spot size are identical
Array focal spot.
Further, the plasma array that sample to be tested surface is formed is multiple, the interval phase of multiple plasma arrays
Deng, and arrange on one wire.
Further, sample to be tested is solid, liquid, gas, aerosol, dust or flame.
Compared with prior art, the utility model can multiple spot simultaneously measure sample elemental composition, do not need more laser
The equipment such as device, spectrometer, are also not required to scanning mode, and diagnosis efficiency is higher.It is not interfered with each other between adjacent sensing point when measurement,
Multiple spot laser induced breakdown spectroscopy measurement effect is consistent with multiple single-point laser induced breakdown spectroscopy measurement effect is carried out simultaneously, and
Different spaces point element ingredient is measured in synchronization, is conducive to accurate understanding sample physical state comprehensively.The utility model is adopted
It with conllinear laser excitation and collects, keeps spectroscopic system more compact, be not required to strictly focus, to sample morphology, position no requirement (NR), energy
It is easy to use, flexible enough to real-time measurements such as solid, liquid, gas, aerosols.Disposable measurement sample size, interval can roots
Optical design is carried out according to different measurement demands, suitable for application of the laser induced breakdown spectroscopy different fields of measurement.
Detailed description of the invention
The utility model will illustrate by example and with reference to the appended drawing, in which:
Fig. 1 is the laser induced breakdown spectroscopy measuring system structural schematic diagram of the utility model embodiment；
Fig. 2 is the spectrogram that the spectral measurement of the utility model embodiment obtains.
Specific embodiment
With reference to the accompanying drawing, the utility model is described in detail.
In order to make the purpose of the utility model, technical solutions and advantages more clearly understood, below in conjunction with attached drawing and implementation
Example, the present invention will be further described in detail.It should be appreciated that specific embodiment described herein is only used to explain
The utility model is not used to limit the utility model.
As shown in Figure 1, multiple spot laser induced breakdown spectroscopy measuring system includes high energy pulse laser to grating beam splitting formula simultaneously
Transmitter 1, diffraction grating 2, mesoporous reflecting mirror 3, the first spherical lens 4, the second spherical lens 6, fiber optic bundle 7, spectrometer 8, with
And control device (being not drawn into figure), diffraction grating 2, mesoporous reflecting mirror 3 and the first spherical lens 4 are successively set on high energy pulse
In the optical path for the laser that laser emitter 1 emits, in the luminous optical path of the plasma array that 5 surface of sample to be tested is formed successively
It is provided with the first spherical lens 4, mesoporous reflecting mirror 3, the second spherical lens 6, fiber optic bundle 7, spectrometer 8.Preferably, high energy pulse
The laser that laser emitter 1 emits can be nanosecond laser, picosecond laser or femtosecond laser.
In the present embodiment, the laser that high energy pulse laser emitter 1 emits is multiple by uniform beam splitting by diffraction grating 2
Laser beamlet, the energy coincidence of every Shu Jiguang, angle is equal between adjacent beams, after all laser beamlets penetrate mesoporous reflecting mirror 3
5 surface of sample to be tested is focused on by the first spherical lens 4,5 surface of sample to be tested forms that multiple intervals are equal, are arranged in one
Plasma array on line, in a specific embodiment, sample to be tested surface are formed with 5 evenly distributed laser ablations
Hole, the distance between consecutive points are 2.7mm, and the first spherical lens 4 collects plasma array and shines, and by mesoporous reflecting mirror 3
It is folded to 7 direction of fiber optic bundle, the second spherical lens 6 is by plasma array luminescence imaging to 7 surface of fiber optic bundle.
Plasma array shine be imaged onto 7 surface of fiber optic bundle after, fiber optic bundle 7 by plasma array shine as transmission
To entrance spectrometer slit；8 plasma array light-emitting of spectrometer carry out spectrum analysis, obtain plasma array shine in
The luminous intensity of different wave length.
Control device is connect with high energy pulse laser emitter and spectrometer, for control high energy pulse laser emitter and
The spatial position of time synchronization and sample to be tested between spectrometer.
Sample to be tested can be solid, liquid, gas, aerosol, dust or flame etc..
The measurement process of Tthe utility model system is similar with traditional laser induced breakdown spectroscopy, firstly, control device is defeated
Signal is controlled out, by the spatial position of software control sample to be tested 5, guarantees that sample to be tested is in the coke of the first spherical lens 4
Point position；High energy pulse laser emitter 1 exports a laser pulse, laser pulse after receiving the TTL signal of control device
By diffraction grating 2 by by uniform beam splitting be multiple laser beamlets, then by the first spherical lens 4 be focused into it is arranged in parallel,
Away from equal, energy coincidence, the identical array focal spot of focal spot size；Near focal point sample to be tested 5 by array focal spot ablation, shape
At plasma array, the first spherical lens 4 collects plasma array and shines, and is folded to fiber optic bundle side by mesoporous reflecting mirror 3
To plasma array luminescence imaging to 7 surface of fiber optic bundle, plasma array are shone and are imaged by the second spherical lens 6
Behind 7 surface of fiber optic bundle, fiber optic bundle 7 shines plasma array as being transferred to entrance spectrometer slit, and spectrometer 8 is to plasma
Volume array, which shines, carries out spectrum analysis, obtains the luminous intensity of the luminous middle different wave length of plasma array.
With conventional laser induced breakdown spectroscopy system except that: conventional laser induced breakdown spectroscopy system is once only capable of
Measure the spectrum of a point, and survey while multiple spot may be implemented in such a way that diffraction grating light splitting focuses in the utility model
Amount.The utility model uses image-carrying fiber bundle, and luminescence of plasma picture can be transferred on spectrometer, realize sample element
The spatial discrimination of measurement is realized by extracting each pixel luminous intensity of ICCD and corresponding with luminescence of plasma position
To the spatial discrimination of sample element diagnosis.
In a specific embodiment, sample to be tested is copper, carries out spectrum to sample to be tested using above-mentioned measuring system
Analysis, the spectrogram of acquisition are as shown in Figure 2.Analysis the result shows that, while which can be realized different spatial element survey
Amount, and in spectrogram different location it is spectrally resolved obvious, do not interfere with each other, ensure that the laser of different spatial lures
Measurement while leading breakdown spectral, and different spatial resolutions, different detections can be realized by optimization design light path system
The measurement of points.
The above is only the preferred embodiment of the utility model only, is not intended to limit the utility model, all at this
Made any modifications, equivalent replacements, and improvements etc., should be included in the utility model within the spirit and principle of utility model
Protection scope within.
Claims (6)
1. a kind of grating beam splitting formula while multiple spot laser induced breakdown spectroscopy measuring system, which is characterized in that including high energy pulse
Laser emitter, diffraction grating, mesoporous reflecting mirror, the first spherical lens, the second spherical lens, fiber optic bundle, spectrometer and control
Device, diffraction grating, mesoporous reflecting mirror and the first spherical lens are successively set on the laser of high energy pulse laser transmitter projects
Optical path on, sample to be tested is placed on the focal position of the first spherical lens, and diffraction grating is used to be multiple to swash laser beam splitter
Photon beam, all laser beamlets focus on sample to be tested surface, sample to be tested by the first spherical lens through after mesoporous reflecting mirror
Surface forms plasma array；
The first spherical lens, mesoporous reflecting mirror, the second spherical lens, light are disposed in the luminous optical path of plasma array
Fine beam and spectrometer, the first spherical lens shine for collecting plasma array；Mesoporous reflecting mirror is used for plasma battle array
Column shine and are folded to fiber optic bundle direction；Second spherical lens is used for plasma array luminescence imaging to fiber optic bundle surface；Optical fiber
Beam is used to shine plasma array as being transferred to entrance spectrometer slit；Spectrometer for plasma array light-emitting into
Row spectrum analysis obtains the luminous intensity of the luminous middle different wave length of plasma array；
Control device is connect with high energy pulse laser emitter and spectrometer, for controlling high energy pulse laser emitter and spectrum
The spatial position of time synchronization and sample to be tested between instrument.
2. a kind of grating beam splitting formula according to claim 1 while multiple spot laser induced breakdown spectroscopy measuring system, special
Sign is that the laser of high energy pulse laser transmitter projects is nanosecond laser, picosecond laser or femtosecond laser.
3. a kind of grating beam splitting formula according to claim 1 while multiple spot laser induced breakdown spectroscopy measuring system, special
Sign is, the energy coincidence of every Shu Jiguang beamlet of diffraction grating beam splitting, and angle is equal between adjacent beams.
4. a kind of grating beam splitting formula according to claim 1 while multiple spot laser induced breakdown spectroscopy measuring system, special
Sign is that the focal spot being focused by the first spherical lens is that equal spacing, energy coincidence and the identical array of focal spot size are burnt
Spot.
5. a kind of grating beam splitting formula according to claim 1 while multiple spot laser induced breakdown spectroscopy measuring system, special
Sign is, the plasma array that sample to be tested surface is formed be it is multiple, the interval of multiple plasma arrays is equal, and arranges
On one wire.
6. a kind of grating beam splitting formula according to claim 1 while multiple spot laser induced breakdown spectroscopy measuring system, special
Sign is that sample to be tested is solid, liquid, gas, aerosol, dust or flame.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920120046.5U CN209513623U (en) | 2019-01-24 | 2019-01-24 | Grating beam splitting formula while multiple spot laser induced breakdown spectroscopy measuring system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920120046.5U CN209513623U (en) | 2019-01-24 | 2019-01-24 | Grating beam splitting formula while multiple spot laser induced breakdown spectroscopy measuring system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209513623U true CN209513623U (en) | 2019-10-18 |
Family
ID=68202258
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201920120046.5U Expired - Fee Related CN209513623U (en) | 2019-01-24 | 2019-01-24 | Grating beam splitting formula while multiple spot laser induced breakdown spectroscopy measuring system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209513623U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109521000A (en) * | 2019-01-24 | 2019-03-26 | 中国工程物理研究院流体物理研究所 | Grating beam splitting formula while multiple spot laser induced breakdown spectroscopy measuring system and method |
-
2019
- 2019-01-24 CN CN201920120046.5U patent/CN209513623U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109521000A (en) * | 2019-01-24 | 2019-03-26 | 中国工程物理研究院流体物理研究所 | Grating beam splitting formula while multiple spot laser induced breakdown spectroscopy measuring system and method |
| CN109521000B (en) * | 2019-01-24 | 2023-08-08 | 中国工程物理研究院流体物理研究所 | Grating beam-splitting type simultaneous multi-point laser-induced breakdown spectroscopy measurement system and method |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US7330268B2 (en) | Spectral imaging apparatus and methodology | |
| CN111812831B (en) | High resolution scanning microscopy with discrimination between at least two wavelength ranges | |
| CN103743718B (en) | The burnt microscopic Raman of copolymerization and Laser-induced Breakdown Spectroscopy coupling laser spectral analysis instrument | |
| CN104677885B (en) | High-space resolution laser differential confocal spectrum mass spectrum micro imaging method and device | |
| CN105241849A (en) | Spectral pupil laser differential confocal LIBS, Raman spectrum-mass spectrum microscopic imaging method and Raman spectrum-mass spectrum microscopic imaging device | |
| KR20230157532A (en) | Multi-modal fluorescence imaging flow cytometry system | |
| CN105067569A (en) | Spectrophotometric pupil laser confocal LIBS (laser-induced breakdown spectroscopy), Raman spectrum and mass spectrum imaging method and device | |
| CN104698068B (en) | High-spatial resolution laser biaxial differential confocal spectrum-mass spectrometry microimaging method and device | |
| CN105241850A (en) | Biaxial laser differential confocal LIBS, Raman spectrum-mass spectrum microscopic imaging method and Raman spectrum-mass spectrum microscopic imaging device | |
| CN104697967B (en) | High-space resolution laser twin shaft confocal spectroscopic mass spectrum micro imaging method and device | |
| CN109521000A (en) | Grating beam splitting formula while multiple spot laser induced breakdown spectroscopy measuring system and method | |
| CN104677864A (en) | High-spatial-resolution laser spectral-pupil confocal spectrum-mass spectrum microscopic imaging method and device | |
| CN209513623U (en) | Grating beam splitting formula while multiple spot laser induced breakdown spectroscopy measuring system | |
| CN105067570A (en) | Dual-axis laser differential confocal LIBS (laser-induced breakdown spectroscopy), RS (Raman spectroscopy) and MS (mass spectrometry) imaging method and device | |
| US10663393B2 (en) | Spectrum inspecting apparatus | |
| CN109030463B (en) | Laser-induced breakdown spectroscopy system for single multi-point simultaneous measurement and measurement method | |
| CN108152268A (en) | LIBS spectrum investigating systems based on streak tube | |
| JP2000111398A (en) | Measuring apparatus for self-luminescence from flame | |
| CN109187502A (en) | Postposition is divided pupil confocal laser LIBS spectrum micro imaging method and device | |
| CN109187501A (en) | Postposition is divided pupil laser differential confocal LIBS spectrum micro imaging method and device | |
| CN105758842B (en) | A kind of filtering system of laser induced breakdown spectroscopy analyzer | |
| CN104990908A (en) | Laser biax confocal induced breakdown-Raman spectrum imaging detection method and device | |
| CN209014472U (en) | The laser induced breakdown spectroscopy system that single multiple spot measures simultaneously | |
| CN104698070B (en) | High-space resolution confocal laser mass spectrum micro imaging method and device | |
| CN207703722U (en) | A kind of LIBS spectrum investigating systems based on streak tube |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20191018 Termination date: 20210124 |